CVD (Chemical Vapor Deposition) coating equipment for double-sided

Abstract

The utility model relates to the technical field of industrial production, in particular to double-sided operation CVD (Chemical Vapor Deposition) coating equipment, which comprises a coating box and a CVD coating host arranged at the top of the coating box, and a workpiece fixing device for fixing a workpiece to be coated is arranged in the coating box. Through the arrangement of the coating box, the CVD coating main machine arranged at the top of the coating box and the workpiece fixing device used for fixing the workpiece to be coated in the coating box, the double-sided operation CVD coating equipment can realize efficient coating operation; the workpiece fixing device comprises a base and side seats arranged on the two sides of the base, an adjustable clamping seat is installed on each side seat, and workpieces of different sizes can be conveniently fixed through adjustment of a clamping adjusting air cylinder; conveying pipes are mounted at the bottoms of the two sides of the coating main machine, nozzles are mounted at the ends of the conveying pipes, and the two nozzles are symmetrically embedded in the centers of the two sides of the coating box, so that reaction gas or steam can be uniformly sprayed to the two sides of a workpiece, and the double-sided coating effect is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to industrial production technical field, concretely is CVD coating equipment of double -sided operation. BACKGROUND

[0002] With the rapid development of science and technology, CVD (chemical vapor deposition) coating technology has been widely used in material science, electronic industry, aerospace and other fields. As an advanced surface treatment technology, CVD coating can significantly improve the hardness, wear resistance, corrosion resistance and other properties of materials, and provides a strong guarantee for the performance improvement and life extension of products. Traditional CVD coating equipment often adopts single-sided coating mode, that is, only one surface can be coated at a time. This way not only takes a long time, but also reduces production efficiency, which cannot meet the needs of mass production. SUMMARY

[0003] The utility model aims at providing CVD coating equipment of double -sided operation to solve the problem of existing CVD coating equipment adopting single-sided coating in the above background technology.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] CVD coating equipment of double -sided operation, including coating box and the CVD coating host computer of installing at the top of coating box, install workpiece fixing device for fixing the workpiece to be coated in the coating box;

[0006] The coating box is built-in CVD coating chamber;

[0007] The workpiece fixing device includes a base and a side seat arranged on both sides of the base, each group of side seats is installed with an adjustable clamp seat, and each group of side seats is installed with a clamping adjusting cylinder away from the adjustable clamp seat.

[0008] The bottom of the coating host computer is installed with a conveying pipe for conveying reaction gas or vapor, the end of the conveying pipe is installed with a spray head, and two groups of spray heads are symmetrically embedded in the center of the two sides of the coating box.

[0009] As a preferred, one end of the coating box is an open structure, and the open end edge is connected with a box door through a hinge.

[0010] As a preferred, the two groups of side seats and the base are connected in a U shape.

[0011] As a preferred, the back of the adjustable clamp seat is installed with a guide rod, and the guide rod is inserted and matched with the side seat.

[0012] As a preferred, the side surface of the adjustable clamp seat in contact with the workpiece to be coated is provided with a non-slip pad.

[0013] Preferably, the thickness of the anti-skid pad is 2-5mm.

[0014] Preferably, the top of the CVD coating main machine is provided with a feeding port for adding raw materials.

[0015] Compared with the prior art, the utility model has the advantages of:

[0016] 1. In the double-sided operation CVD coating equipment, the CVD coating main machine is installed on the top of the coating box, and the workpiece fixing device is arranged in the coating box for fixing the workpiece to be coated, so that the double-sided operation CVD coating equipment can realize efficient coating operation; the workpiece fixing device comprises a base and side seats arranged on both sides of the base, each group of side seats is provided with an adjustable clamping seat, the workpiece of different sizes can be fixed conveniently by adjusting the clamping adjusting cylinder; meanwhile, the conveying pipes are installed on the bottom of both sides of the coating main machine, the end of the conveying pipe is provided with a spray head, and the two groups of spray heads are symmetrically embedded in the center of both sides of the coating box, so that the reaction gas or vapor can be uniformly sprayed to both sides of the workpiece, thereby realizing the double-sided coating effect.

[0017] 2. In the double-sided operation CVD coating equipment, the back of the adjustable clamping seat is provided with a guide rod, and the guide rod is inserted and matched with the side seat, so that the adjustable clamping seat can move stably along the guide rod, thereby realizing accurate clamping and positioning of the workpiece and improving the precision and reliability of the coating equipment.

[0018] 3. In the double-sided operation CVD coating equipment, the side surface of the adjustable clamping seat in contact with the workpiece to be coated is provided with an anti-skid pad, the thickness of the anti-skid pad is 2-5mm, the friction between the adjustable clamping seat and the workpiece is increased, the sliding or displacement of the workpiece during the coating process is effectively prevented, and the stability of the coating process and the quality of the workpiece are ensured. Meanwhile, the thickness of the anti-skid pad is controlled between 2-5mm, which not only ensures the anti-skid effect, but also avoids unnecessary pressure or damage to the workpiece caused by the over-thick anti-skid pad. BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings are used to provide further understanding of the utility model and constitute a part of the specification, and are used to make further detailed explanation together with the embodiments of the utility model, but do not constitute the limitation to the utility model.

[0020] Fig. 1 It is the structural schematic view of the utility model;

[0021] Fig. 2 It is the structural schematic view of the workpiece fixing device of the utility model;

[0022] Fig. 3 It is the sectional structural schematic view of the workpiece fixing device of the utility model;

[0023] 10, coating box; 11, CVD coating chamber; 12, box door;

[0024] 20, workpiece fixing device; 21, base; 22, side seat; 23, adjustable clamping seat; 24, clamping adjusting cylinder; 25, guide rod; 26, non-slip pad;

[0025] 30, CVD coating main machine; 31, feeding port; 32, conveying pipe; 33, spray head;

[0026] 40, workpiece to be coated. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the embodiments of the present application and the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0028] In the description of the present application, it should be understood that the terms "center", "vertical", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0029] The CVD coating equipment for double-sided operation, such as Figs. 1-3As shown, including the coating box 10 and installed on the top of the CVD coating main machine 30, the coating box 10 is provided with workpiece fixing device 20 for fixing the workpiece 40 to be plated; the coating box 10 is provided with CVD coating chamber 11; the workpiece fixing device 20 includes base 21 and side seat 22 arranged on both sides of the base 21, each group of side seats 22 is provided with adjustable clamping seat 23, and the side away from the adjustable clamping seat 23 of each group of side seats 22 is provided with clamping adjusting cylinder 24; the bottom of both sides of the coating main machine 30 is provided with conveying pipe 32 for conveying reaction gas or vapor, and the end of the conveying pipe 32 is provided with spray head 33, and the two groups of spray heads 33 are symmetrically embedded in the center of both sides of the coating box 10, so that the double-sided operation of the CVD coating equipment can realize efficient coating operation; the workpiece fixing device 20 includes base 21 and side seat 22 arranged on both sides of the base 21, each group of side seats 22 is provided with adjustable clamping seat 23, and the workpiece 40 of different sizes can be conveniently fixed through the adjustment of the clamping adjusting cylinder 24; at the same time, the bottom of both sides of the coating main machine 30 is provided with conveying pipe 32, and the end of the conveying pipe 32 is provided with spray head 33, and the two groups of spray heads 33 are symmetrically embedded in the center of both sides of the coating box 10, so that the reaction gas or vapor can be uniformly sprayed to both sides of the workpiece 40, thereby realizing the effect of double-sided coating.

[0030] Further, one end of the coating box 10 is of open structure, and the open end edge is connected with box door 12 through hinge, so that the coating box 10 can be conveniently opened and closed, thereby facilitating the workpiece to be put in and taken out, and improving the operation convenience and working efficiency of the coating equipment.

[0031] It is worth mentioning that the two groups of side seats 22 and the base 21 are connected in U shape, so that the side seat 22 can be stably fixed on the base 21, thereby enhancing the overall stability and carrying capacity of the workpiece fixing device 20, and ensuring the stability of the workpiece and the coating quality during the coating process.

[0032] Among them, the back of the adjustable clamping seat 23 is provided with guide rod 25, and the guide rod 25 is inserted and matched between the side seat 22, so that the adjustable clamping seat 23 can stably move along the guide rod 25, thereby realizing the accurate clamping and positioning of the workpiece 40, and improving the precision and reliability of the coating equipment.

[0033] Specifically, the adjustable clamping seat 23 is provided with an antiskid pad 26 on the side surface in contact with the workpiece 40 to be plated, the thickness of the antiskid pad 26 is 2-5 mm, the friction between the adjustable clamping seat 23 and the workpiece 40 is increased, the sliding or displacement of the workpiece 40 during the plating process is effectively prevented, and the stability of the plating process and the quality of the workpiece are ensured. At the same time, the thickness of the antiskid pad 26 is controlled between 2-5 mm, which not only ensures the antiskid effect, but also avoids unnecessary pressure or damage to the workpiece caused by the over-thick antiskid pad.

[0034] In addition, the top of the CVD plating host 30 is provided with a feeding port 31 for adding raw materials, so that the user can conveniently add the raw materials required for plating into the CVD plating host 30, thereby ensuring the continuity and stability of the plating process.

[0035] The working principle of the double-sided operation CVD plating equipment is as follows:

[0036] Firstly, the box door 12 of the plating box 10 is opened, and the workpiece 40 to be plated is placed on the workpiece fixing device 20; the workpiece fixing device 20 is composed of a base 21 and two side seats 22 on the sides, the adjustable clamping seat 23 is installed on the side seat 22, the adjustable clamping seat 23 tightly clamps the workpiece 40 by adjusting the clamping adjusting cylinder 24, and the stability of the workpiece 40 during the plating process is ensured; the guide rod 25 installed at the back of the adjustable clamping seat 23 is inserted and matched with the side seat 22, and the accuracy of clamping is ensured; at the same time, the side of the adjustable clamping seat 23 in contact with the workpiece 40 is provided with an antiskid pad 26 to prevent the workpiece from sliding;

[0037] Then, the box door 12 is closed, and the CVD plating host 30 is started; the plating host 30 delivers the reaction gas or vapor into the plating box 10 through the two side delivery pipes 32; the end of the delivery pipe 32 is provided with a spray head 33, and two groups of spray heads 33 are symmetrically embedded in the center of the two sides of the plating box 10, so that the reaction gas or vapor can be uniformly sprayed to the two sides of the workpiece 40, and double-sided plating is realized;

[0038] During the plating process, the user can add the raw materials required for plating at any time through the feeding port 31 at the top of the CVD plating host 30, so as to ensure the continuity and stability of the plating process;

[0039] After the plating is completed, the box door 12 is opened again, and the workpiece 40 after plating is taken out; thus, the whole double-sided operation CVD plating process is completed.

[0040] The basic principle, main features and advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only preferred examples of the present application and are not intended to limit the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A dual-side operation CVD coating apparatus, comprising a coating chamber (10) and a CVD coating main machine (30) installed on the top of the coating chamber (10), characterized in that: The film coating box (10) is internally provided with a workpiece fixing device (20) for fixing a workpiece (40) to be coated; The film coating box (10) is internally provided with a CVD film coating chamber (11); The workpiece fixing device (20) comprises a base (21) and side seats (22) arranged on both sides of the base (21), each group of the side seats (22) is provided with an adjustable clamping seat (23), and each group of the side seats (22) is provided with a clamping adjusting cylinder (24) away from the adjustable clamping seat (23). The bottom of the film coating main machine (30) is provided with a conveying pipe (32) for conveying reaction gas or vapor, and the end of the conveying pipe (32) is provided with a spray head (33), and two groups of the spray heads (33) are symmetrically arranged at the center of the two sides of the film coating box (10).

2. The dual-side operation CVD coating apparatus according to claim 1, wherein: One end of the film coating box (10) is an open structure, and the open end is provided with a box door (12) connected by a hinge.

3. The dual-side operation CVD coating apparatus according to claim 1, wherein: The two groups of side seats (22) and the base (21) are connected in a U-shaped manner.

4. The dual-side operation CVD coating apparatus according to claim 1, wherein: The back of the adjustable clamping seat (23) is provided with a guide rod (25), and the guide rod (25) is inserted and matched with the side seat (22).

5. The dual-side operation CVD coater according to claim 1, wherein: The side surface of the adjustable clamping seat (23) in contact with the workpiece (40) to be coated is provided with an anti-skid pad (26).

6. The dual-side operation CVD coating apparatus according to claim 5, wherein: The thickness of the anti-skid pad (26) is 2-5mm.

7. The dual-side operation CVD coater according to claim 1, wherein: The top of the CVD film coating main machine (30) is provided with a feeding port (31) for adding raw materials.

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