Fireproof ventilation exhaust duct for semiconductor processing

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to a fireproof ventilation exhaust pipeline for semiconductor processing, which comprises a smoke outlet pipe, a smoke exhaust component, a filtering component, a collecting component and a mounting component, the smoke exhaust assembly comprises a fireproof pipe, a rotating shaft, blades and a fireproof plate, the fireproof pipe is fixedly connected with the smoke outlet pipe and located on the outer side of the smoke outlet pipe, the rotating shaft is rotationally connected with the fireproof pipe and penetrates through the fireproof pipe and the blades to be fixedly connected with the rotating shaft and located in the fireproof pipe, and the fireproof plate is fixedly connected with the fireproof pipe and located on the side, close to the smoke outlet pipe, of the fireproof pipe; and the filtering assembly, the collecting assembly and the mounting assembly are located on the side, away from the smoke outlet pipe, of the fireproof pipe correspondingly, and the problems that when the semiconductor processing equipment exhaust treatment device is used, fireproof treatment is inconvenient to conduct on the smoke exhaust pipe of the processing equipment, and the device is prone to being damaged are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to tail gas treatment technical field especially relates to a fire prevention ventilation exhaust pipeline of semiconductor processing. BACKGROUND

[0002] The reaction product will block the pipeline and affect the pumping speed due to the temperature during the exhaust process, and the existing waste gas contains a large amount of solid small particles, which will accumulate in the internal of the pipe valve when the waste gas passes through the pipe valve, and the pipe valve will be blocked for a long time, poor applicability, unable to meet the actual use required.

[0003] The existing announcement number CN218358024U discloses a kind of semiconductor processing equipment exhaust treatment device, belong to tail gas treatment technical field, solve the existing tail gas treatment of semiconductor processing equipment There is the problem of poor treatment effect, its technical key points are: gas guide pipe is arranged in exhaust pipe, and nitrogen is conveniently introduced into the gas guide pipe, heating mechanism is connected to the outer side of the gas guide pipe, filter plate is further arranged in the exhaust pipe, cleaning mechanism is arranged on the side of the filter plate, and collecting mechanism is arranged below the side of the filter plate, heating mechanism is convenient for heating treatment to the nitrogen introduced, and the nitrogen after heating enters the inside of the exhaust pipe, avoid the generation of tail exhaust gas to the pile of exhaust pipeline, power group drives cleaning group to clean and scrape the side of filter plate under the condition of gas transmission in exhaust pipe, sealing group realizes the sealing of discharge pipe, and collecting group realizes good collection and treatment of impurities in tail gas, with the advantages of good treatment effect.

[0004] However, the above-mentioned semiconductor processing equipment exhaust treatment device is not convenient for fireproof treatment of the exhaust pipe of the processing equipment during use, which is easy to cause damage to the device. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a kind of fire prevention ventilation exhaust pipeline of semiconductor processing, solve the problem that semiconductor processing equipment exhaust treatment device is not convenient for fireproof treatment of the exhaust pipe of the processing equipment during use, which is easy to cause damage to the device.

[0006] To achieve the above-mentioned purpose, the utility model provides a kind of fire prevention ventilation exhaust pipeline of semiconductor processing, including smoke outlet pipe, exhaust component, filter component, collecting component and installation component;The exhaust component includes fireproof pipe, shaft, blade and fireproof plate, the fireproof pipe is fixedly connected with the smoke outlet pipe, and is located at the outer side of the smoke outlet pipe, the shaft is rotatably connected with the fireproof pipe, and passes through the fireproof pipe, the blade is fixedly connected with the shaft, and is located in the inside of the fireproof pipe, the fireproof plate is fixedly connected with the fireproof pipe, and is located at the side of the fireproof pipe close to the smoke outlet pipe, the filter component, the collecting component and the installation component are located at the side of the fireproof pipe away from the smoke outlet pipe respectively.

[0007] The smoke exhaust assembly further comprises a smoke exhaust pipe and a connecting seat, the smoke exhaust pipe is fixedly connected with the fireproof pipe and located at the side of the fireproof pipe away from the smoke outlet pipe, and the connecting seat is fixedly connected with the smoke exhaust pipe and located at the side of the smoke exhaust pipe away from the fireproof pipe.

[0008] The filter assembly comprises filter frames, filter plates and pull rods, the number of the filter frames is two, the two filter frames are respectively slidably connected with the smoke exhaust pipe and respectively located at the smoke exhaust pipe, the number of the filter plates is two, the two filter plates are respectively fixedly connected with the filter frames and respectively located inside the filter frames, and the number of the pull rods is two, the two pull rods are respectively fixedly connected with the filter frames and respectively located at the top of the filter frames.

[0009] The collecting assembly comprises collecting boxes, fixing bolts and guide tables, the number of the collecting boxes is two, the two collecting boxes are respectively detachably connected with the smoke exhaust pipe and respectively located at the bottom of the collecting boxes, the number of the fixing bolts is multiple, the multiple fixing bolts are respectively threadedly connected with the smoke exhaust pipe and respectively pass through the collecting boxes, and the number of the guide tables is two, the two guide tables are respectively fixedly connected with the collecting boxes and respectively located at the top of the collecting boxes.

[0010] The mounting assembly comprises a mounting frame, mounting bolts and a fan, the mounting frame is detachably connected with the smoke exhaust pipe and located at the tail of the smoke exhaust pipe, the number of the mounting bolts is multiple, the multiple mounting bolts are respectively threadedly connected with the mounting frame and respectively pass through the connecting seat, and the fan is fixedly connected with the mounting frame and located at the middle of the mounting frame.

[0011] The utility model discloses a semiconductor processing's fire prevention ventilation exhaust pipeline, fire prevention pipe is Z type pipeline for protecting the smoke exhaust pipe, avoids the flame in the equipment and is discharged through the smoke pipe, the pivot provides support and rotation effect for the vane, the vane is used for providing the protection effect to the flame in the fire prevention pipe, avoids the flame and sprays through the fire prevention pipe, the fire prevention board is used for avoiding the flame and backwash to the equipment, leads to equipment damage, when using, the flue gas intermingled flame is discharged through the smoke pipe, enters the fire prevention pipe, passes the fire prevention board and the fire prevention pipe, and the vane is driven along the pivot rotation, and the flame in the fire prevention pipe is rotated along with the vane, and the flue gas is discharged along the fire prevention pipe to the smoke exhaust pipe, through the filter assembly, the flue gas in the smoke exhaust pipe is handled, and the impurities that the filter plate filters are collected through the collection assembly, and finally the flue gas after filtering is extracted from the smoke exhaust pipe through the fan, solve the semiconductor processing equipment exhaust treatment device when using, the smoke exhaust pipe of processing equipment is not convenient for fire prevention treatment, and the device is damaged easily. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced as follows.

[0013] Fig. 1 It is the whole structure schematic diagram of the semiconductor processing's fire prevention ventilation exhaust pipeline of the first embodiment of the utility model.

[0014] Fig. 2 It is the section structure schematic diagram of fire prevention pipe and smoke exhaust pipe of the first embodiment of the utility model.

[0015] Fig. 3 It is the structure schematic diagram of filter assembly and collection assembly of the first embodiment of the utility model.

[0016] In the drawing: 101-smoke pipe, 102-fire prevention pipe, 103-pivot, 104-vane, 105-fire prevention board, 106-smoke exhaust pipe, 107-connection seat, 108-filter frame, 109-filter plate, 110-pull rod, 111-collection box, 112-fixing bolt, 113-guide table, 114-mounting frame, 115-mounting bolt, 116-fan. DETAILED DESCRIPTION

[0017] The embodiments of the utility model will be described in detail below, the examples of the embodiments are shown in the drawings, the embodiments described below by referring to the drawings are exemplary, and are intended to explain the utility model, and can not be understood as the limitation of the utility model.

[0018] The first embodiment of the application is:

[0019] Please refer to Figs. 1 to 3 wherein, Fig. 1 is the overall structure schematic diagram of the fireproof ventilation exhaust pipeline for semiconductor processing of the first embodiment of the utility model, Fig. 2 is the cross-sectional structure schematic diagram of the fireproof pipe and the smoke exhaust pipe of the first embodiment of the utility model, Fig. 3 is the structure schematic diagram of the filtering assembly and the collecting assembly of the first embodiment of the utility model, the utility model provides a kind of fireproof ventilation exhaust pipeline for semiconductor processing, including smoke pipe 101, smoke exhaust assembly, filtering assembly, collecting assembly and installation assembly, the smoke exhaust assembly includes fireproof pipe 102, pivot 103, blade 104, fireproof plate 105, smoke exhaust pipe 106 and connecting seat 107, the filtering assembly includes filter frame 108, filter plate 109 and pull rod 110, the collecting assembly includes collecting box 111, fixed bolt 112 and guide table 113, the installation assembly includes installation frame 114, mounting bolt 115 and fan 116;The foregoing scheme has solved the problem that semiconductor processing equipment exhaust treatment device is not convenient for fireproof treatment to the smoke exhaust pipe of processing equipment when using, prone to cause device damage, it can be understood that the foregoing scheme can be used in the scene of device fireproofing, also can be used to solve the problem of filtering the flue gas exhausted when semiconductor processing.

[0020] For this specific embodiment, the fireproof pipe 102 is fixedly connected with the smoke outlet pipe 101 and located outside the smoke outlet pipe 101, the rotating shaft 103 is rotatably connected with the fireproof pipe 102 and penetrates through the fireproof pipe 102, the blade 104 is fixedly connected with the rotating shaft 103 and located inside the fireproof pipe 102, the fireproof plate 105 is fixedly connected with the fireproof pipe 102 and located on the side of the fireproof pipe 102 close to the smoke outlet pipe 101, the filtering assembly, the collecting assembly and the mounting assembly are respectively located on the side of the fireproof pipe 102 away from the smoke outlet pipe 101, the fireproof pipe 102 is a Z-shaped pipe for protecting the smoke exhaust pipe 106, avoiding the flame in the equipment from being discharged through the smoke outlet pipe 101, the rotating shaft 103 provides support and rotation for the blade 104, the blade 104 is used for providing protection for the flame in the fireproof pipe 102, avoiding the flame from being sprayed out of the fireproof pipe 102, the fireproof plate 105 is used for avoiding the flame from being back-flushed into the equipment, causing damage to the equipment, in use, the smoke mixed with flame is discharged through the smoke outlet pipe 101, enters the fireproof pipe 102, penetrates through the fireproof plate 105 and the fireproof pipe 102, the smoke drives the blade 104 to rotate along the rotating shaft 103, drives the flame in the fireproof pipe 102 to rotate with the blade 104, and the smoke is discharged along the fireproof pipe 102 into the smoke exhaust pipe 106, the smoke in the smoke exhaust pipe 106 is conveniently treated through the filtering assembly, the impurities filtered out by the filter plate 109 are collected through the collecting assembly, and finally the filtered smoke is sucked out of the smoke exhaust pipe 106 by the fan 116.

[0021] Among them, the smoke exhaust pipe 106 is fixedly connected with the fireproof pipe 102 and located on the side of the fireproof pipe 102 away from the smoke outlet pipe 101, the connecting seat 107 is fixedly connected with the smoke exhaust pipe 106 and located on the side of the smoke exhaust pipe 106 away from the fireproof pipe 102, the smoke exhaust pipe 106 is used for guiding the smoke, and the connecting seat 107 provides limiting and supporting action for the mounting assembly, facilitating the mounting frame 114 to be fixed outside the smoke exhaust pipe 106.

[0022] Secondly, the number of the filter frame 108 is two, two filter frames 108 are respectively connected with the smoke exhaust pipe 106 in a sliding mode and are respectively located in the smoke exhaust pipe 106, the number of the filter plate 109 is two, two filter plates 109 are respectively fixed with the filter frame 108 and are respectively located in the inside of the filter frame 108, the number of the pull rod 110 is two, two pull rods 110 are respectively fixed with the filter frame 108 and are respectively located at the top of the filter frame 108, the filter frame 108 provides support for the filter plate 109, the filter plate 109 is used for filtering the flue gas in the smoke exhaust pipe 106, so as to avoid that the harmful substances are discharged through the smoke exhaust pipe 106, and the filter frame 108 and the filter plate 109 are convenient to replace through the pull rod 110 when being used for a long time.

[0023] Thirdly, the number of the collection box 111 is two, two collection boxes 111 are respectively connected with the smoke exhaust pipe 106 in a detachable mode and are respectively located at the bottom of the collection box 111, the number of the fixed bolt 112 is multiple, multiple fixed bolts 112 are respectively connected with the smoke exhaust pipe 106 in a threaded mode and respectively pass through the collection box 111, the number of the guide table 113 is two, two guide tables 113 are respectively fixed with the collection box 111 and are respectively located at the top of the collection box 111, the collection box 111 is used for collecting the impurities filtered by the filter plate 109, the collection box 111 is convenient to fix through the fixed bolt 112, and the guide table 113 is used for guiding the impurities filtered by the filter plate 109, so as to facilitate the collection box 111 to collect the impurities filtered by the filter plate 109.

[0024] Finally, the mounting frame 114 is connected with the smoke exhaust pipe 106 in a detachable mode and is located at the tail of the smoke exhaust pipe 106, the number of the mounting bolt 115 is multiple, multiple mounting bolts 115 are respectively connected with the mounting frame 114 in a threaded mode and respectively pass through the connecting seat 107, the fan 116 is fixed with the mounting frame 114 and is located in the middle of the mounting frame 114, the mounting frame 114 provides support for the fan 116, the mounting frame 114 and the fan 116 are convenient to install and fix through the mounting bolt 115, and the fan 116 is convenient to exhaust the flue gas discharged from the smoke exhaust pipe 106 out of the smoke exhaust pipe 106.

[0025] The fireproof ventilation exhaust pipe for semiconductor processing of the embodiment is used for protecting the smoke exhaust pipe 106 from the flame in the equipment, the rotating shaft 103 supports and rotates the blade 104, the blade 104 protects the flame in the fireproof pipe 102 from being sprayed out of the fireproof pipe 102, the fireproof plate 105 prevents the flame from back flushing into the equipment and causing damage to the equipment, in use, the smoke with the flame is discharged from the smoke exhaust pipe 101 into the fireproof pipe 102, passes through the fireproof plate 105 and the fireproof pipe 102, the smoke drives the blade 104 to rotate along the rotating shaft 103, drives the flame in the fireproof pipe 102 to rotate along the blade 104, and the smoke is discharged along the fireproof pipe 102 into the smoke exhaust pipe 106, the smoke in the smoke exhaust pipe 106 is treated by the filter assembly, the impurities filtered by the filter plate 109 are collected by the collection assembly, and finally the filtered smoke is discharged from the smoke exhaust pipe 106 by the fan 116, thereby solving the problem that the semiconductor processing equipment exhaust treatment device is inconvenient to perform fireproof treatment on the smoke exhaust pipe of the processing equipment in use, and is prone to damage.

[0026] The above disclosure is only one or more preferred embodiments of the application, and cannot limit the scope of the application. Those skilled in the art can understand that all or part of the above-mentioned embodiments can be implemented, and equivalent changes made according to the claims of the application still belong to the scope covered by the application.

Claims

1. A fireproof ventilation and exhaust duct for semiconductor processing, comprising a smoke outlet duct, characterized in that, It also includes smoke extraction components, filter components, collection components, and installation components; The smoke exhaust assembly includes a fireproof pipe, a rotating shaft, blades, and a fireproof plate. The fireproof pipe is fixedly connected to the smoke exhaust pipe and is located outside the smoke exhaust pipe. The rotating shaft is rotatably connected to the fireproof pipe and passes through the fireproof pipe. The blades are fixedly connected to the rotating shaft and are located inside the fireproof pipe. The fireproof plate is fixedly connected to the fireproof pipe and is located on the side of the fireproof pipe closest to the smoke exhaust pipe. The filter assembly, the collection assembly, and the installation assembly are respectively located on the side of the fireproof pipe away from the smoke exhaust pipe.

2. The fireproof ventilation and exhaust duct for semiconductor processing as described in claim 1, characterized in that, The smoke exhaust assembly also includes a smoke exhaust pipe and a connecting seat. The smoke exhaust pipe is fixedly connected to the fireproof pipe and is located on the side of the fireproof pipe away from the smoke outlet pipe. The connecting seat is fixedly connected to the smoke exhaust pipe and is located on the side of the smoke exhaust pipe away from the fireproof pipe.

3. The fireproof ventilation and exhaust duct for semiconductor processing as described in claim 2, characterized in that, The filter assembly includes a filter frame, a filter plate, and a pull rod. There are two filter frames, each slidably connected to the exhaust pipe and located on the exhaust pipe. There are two filter plates, each fixedly connected to the filter frame and located inside the filter frame. There are two pull rods, each fixedly connected to the filter frame and located on top of the filter frame.

4. The fireproof ventilation and exhaust duct for semiconductor processing as described in claim 2, characterized in that, The collection assembly includes a collection box, fixing bolts, and guide rails. There are two collection boxes, which are detachably connected to the exhaust pipe and located at the bottom of the collection box. There are multiple fixing bolts, which are threadedly connected to the exhaust pipe and pass through the collection box. There are two guide rails, which are fixedly connected to the collection box and located at the top of the collection box.

5. The fireproof ventilation and exhaust duct for semiconductor processing as described in claim 2, characterized in that, The mounting assembly includes a mounting frame, mounting bolts, and a fan. The mounting frame is detachably connected to the exhaust pipe and is located at the tail end of the exhaust pipe. There are multiple mounting bolts, each of which is threadedly connected to the mounting frame and passes through the connecting seat. The fan is fixedly connected to the mounting frame and is located in the middle of the mounting frame.

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