Clamping jaw lifting device

Abstract

The utility model relates to the technical field of semiconductors, in particular to a clamping jaw lifting device which comprises a bottom frame, a lifting mechanism installed on the bottom frame, a clamping driving unit in driving connection with the lifting mechanism, a supporting disc in driving connection with the lifting mechanism, at least three clamping jaws connected to the supporting disc in a sliding mode and a placing table installed on the bottom frame. The clamping jaws extend in the radial direction of the supporting disc, and the clamping driving unit is in driving connection with the clamping jaws so that the clamping jaws can be close to or away from the circle center of the supporting disc. According to the utility model, the use requirements of the supporting disc at different heights are met, wafers with various diameters can be smoothly clamped, the wafer carrying device can be flexibly applied to complex working conditions, and the wafer carrying efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a gripper lifting device. Background Technology

[0002] Single wafer lifting devices are currently a relatively niche equipment requirement, used for customized customer needs. They solve the problem of wafer and process equipment transfer, and robotic arms are mostly used to meet the handling needs.

[0003] However, due to its inconvenience in handling wafers of various diameters, the robotic arm's operating conditions are limited, and it cannot be flexibly adapted to complex working conditions, thus affecting wafer handling efficiency. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a gripper lifting device that meets the usage requirements of the support plate at different heights, can smoothly grip wafers of various diameters, can be flexibly applied to complex working conditions, and improves wafer handling efficiency.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a gripper lifting device, including a base frame, a lifting mechanism mounted on the base frame, a gripping drive unit driven by the lifting mechanism, a support plate driven by the lifting mechanism, at least three grippers slidably connected to the support plate, and a placement platform mounted on the base frame. The grippers extend radially along the support plate, and the gripping drive unit is driven by the grippers so that the grippers approach or move away from the center of the support plate.

[0007] When it is necessary to clamp the wafer, the wafer is placed on the placement stage. The lifting mechanism drives the clamping drive unit and the support plate to approach the placement stage until the jaws move to the required height. The clamping drive unit drives the jaws to move synchronously towards the center of the support plate so that the jaws clamp one side of the wafer.

[0008] The lifting mechanism is driven by a bracket, which is connected to a support plate. The bracket has a receiving opening, and the clamping drive unit passes through the receiving opening. The support plate is connected to a mounting block, and the clamping drive unit is mounted on the mounting block. The output end of the lifting mechanism is equipped with an end positioning block, which abuts against one side of the bracket.

[0009] The support plate is equipped with at least three slide rails, and the gripper is slidably connected to the slide rails.

[0010] The support plate is equipped with a first photoelectric switch, and one of the grippers is connected to a first baffle plate, which triggers the first photoelectric switch.

[0011] When the clamping drive unit moves the gripper, it causes the first baffle plate to move at the first photoelectric switch, so that the first photoelectric switch can detect the displacement distance of the gripper in real time.

[0012] The support plate is equipped with a first protective cover, which has a gripping opening and an installation opening. The gripper passes through the gripping opening, the installation block is located inside the first protective cover, and the clamping drive unit passes through the installation opening. A second protective cover is installed at the top of the first protective cover, which communicates with the installation opening. The clamping drive unit is located inside the second protective cover, and the second protective cover is located inside the receiving opening.

[0013] The first protective cover includes at least two dust covers spliced ​​together end to end along the circumference of the support plate. The inner side of the dust cover forms an installation opening, and the clamping opening is located on the outer side of the dust cover. The support plate is provided with a positioning groove, and the bottom end of the dust cover is inserted into the positioning groove. The bottom end of the clamping opening penetrates through the dust cover.

[0014] The support plate is equipped with a support member, the outer side of which abuts against the inner wall of the dust cover, and the top of which abuts against the inner top wall of the dust cover. The support member is locked to the dust cover by a locking device.

[0015] The dust cover has a notch, and the notch between two adjacent dust covers forms a storage space. The end of the bracket near the support plate passes through the storage space.

[0016] The base frame is equipped with a second photoelectric switch, a third photoelectric switch and a fourth photoelectric switch arranged sequentially from top to bottom. The bracket is connected to a second shielding plate, which is provided with a shielding part. The lifting mechanism drives the bracket to move up and down so that the shielding part moves within the stroke range determined by the second photoelectric switch, the third photoelectric switch and the fourth photoelectric switch.

[0017] When the second shielding plate triggers the second photoelectric switch, the support plate moves to its initial position;

[0018] When the second shielding plate triggers the fourth photoelectric switch, the support plate moves to the end position.

[0019] The second, third, and fourth photoelectric switches are respectively provided with a first detection point, a second detection point, and a third detection point for detecting the moving position of the support plate. The distance between the first and second detection points is L1, the distance between the second and third detection points is L2, and the longitudinal length of the shielding part is M. L1, L2, and M satisfy L1 < L2 and L1 > M.

[0020] The gripper includes a connecting rod and a clamping block connected to the connecting rod. The clamping drive unit is driven to the connecting rod. The connecting rod is slidably connected to the support disk. The top end of the clamping block is vertically connected to the outer end of the connecting rod. The clamping block is provided with a clamping groove adapted to the edge of the wafer. The clamping groove is located below the support disk. The distance between the bottom end of the clamping groove and the bottom end of the clamping block is L3. The thickness of the placement stage is H. L3 and H satisfy L3 < H.

[0021] The beneficial effects of this utility model are:

[0022] It meets the usage requirements of support plates at different heights, can smoothly clamp wafers of various diameters, can be flexibly applied to complex working conditions, and improves wafer handling efficiency. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the gripper lifting device.

[0024] Figure 2 This is a three-dimensional structural diagram of a support plate, a clamping drive unit, and a bracket.

[0025] Figure 3 This is a schematic diagram of the structure of the first photoelectric switch and one of the grippers.

[0026] Figure 4 This is a three-dimensional structural diagram with a support plate, a first protective cover, and a second protective cover.

[0027] Figure 5 This is a schematic diagram of the explosion structure with a support plate and a first protective shield.

[0028] Figure 6 This is a three-dimensional view of a second photoelectric switch, a third photoelectric switch, a fourth photoelectric switch, and a second shielding plate.

[0029] Figure 7 This is a cross-sectional view of a second photoelectric switch, a third photoelectric switch, a fourth photoelectric switch, and a second shielding plate.

[0030] Figure 8 This is a front view of the structure, which includes a support plate, a placement platform, and grippers.

[0031] 1. Base frame;

[0032] 11. Second photoelectric switch; 12. Third photoelectric switch; 13. Fourth photoelectric switch;

[0033] 2. Lifting mechanism;

[0034] 3. Clamping drive unit;

[0035] 4. Support plate; 41. Slide rail;

[0036] 42. First protective cover; 4200. Dust cover; 4211. Notch;

[0037] 421. Clamping port; 422. Mounting port;

[0038] 43. Second protective shield;

[0039] 44. Positioning groove; 45. Supporting component;

[0040] 401. First photoelectric switch;

[0041] 5. Grippers; 501. Connecting rod; 502. Grip block; 5021. Grip groove;

[0042] 51. First shielding plate;

[0043] 6. Placement platform;

[0044] 7. Bracket; 71. Receiving opening; 72. Second baffle; 721. Baffle part; 8. Mounting block;

[0045] 9. End positioning block. Detailed Implementation

[0046] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0047] refer to Figures 1 to 8 As shown, this utility model provides a lifting device for grippers 5, including a base frame 1, a lifting mechanism 2 mounted on the base frame 1, a clamping drive unit 3 drivenly connected to the lifting mechanism 2, a support plate 4 drivenly connected to the lifting mechanism 2, three grippers 5 slidably connected to the support plate 4, and a placement platform 6 mounted on the base frame 1. The grippers 5 extend radially along the support plate 4, and the clamping drive unit 3 is drivenly connected to the grippers 5 so that the grippers 5 approach or move away from the center of the support plate 4.

[0048] refer to Figure 1 , 2As shown, in practical applications, the clamping drive unit 3 adopts a three-jaw hydraulic chuck, and the lifting mechanism 2 adopts a hydraulic cylinder or electric cylinder. When it is necessary to clamp the wafer, the wafer is placed on the placement stage 6. The lifting mechanism 2 drives the clamping drive unit 3 and the support plate 4 to approach the placement stage 6 until the jaw 5 moves to the required height. The clamping drive unit 3 drives the jaw 5 to move synchronously towards the center of the support plate 4 so that the jaw 5 clamps one side of the wafer, thereby successfully clamping the wafer. Specifically, the support plate 4 is equipped with a detection sensor for detecting whether there is a wafer on the placement stage 6, which facilitates effective wafer clamping. The three-jaw hydraulic chuck can drive the jaw 5 to stop at any position, and the lifting mechanism 2 can drive the support plate 4 to stop at any height, meeting the usage requirements of the support plate 4 at different heights. It can successfully clamp wafers of various diameters, is flexibly applicable to complex working conditions, and improves wafer handling efficiency.

[0049] refer to Figure 2 As shown, in this embodiment, the lifting mechanism 2 is driven by a bracket 7, which is connected to a support plate 4. The bracket 7 has a receiving opening 71, and the clamping drive unit 3 passes through the receiving opening 71. The support plate 4 is connected to a mounting block 8, and the clamping drive unit 3 is mounted on the mounting block 8. An end positioning block 9 is mounted on the output end of the lifting mechanism 2, and the end positioning block 9 abuts against one side of the bracket 7. In actual application, the lifting mechanism 2 drives the support plate 4 to move through the bracket 7, thereby driving the support plate 4 to move up and down. When the support plate 4 moves, it simultaneously drives the mounting block 8 and the clamping drive unit 3 to move, realizing that the lifting mechanism 2 drives the support plate 4 and the clamping drive unit 3 to move up and down synchronously. The end positioning block 9 positions one side of the bracket 7, which facilitates accurate positioning of the bracket 7 and improves installation accuracy.

[0050] refer to Figure 2 , 3 As shown, in this embodiment, the support disk 4 is equipped with three slide rails 41, and the gripper 5 is slidably connected to the slide rails 41; the support disk 4 is equipped with a first photoelectric switch 401, and one of the grippers 5 is connected to a first shielding plate 51, which triggers the first photoelectric switch 401; Reference Figure 3As shown, in practical applications, the first photoelectric switch 401 adopts a slot-type photoelectric switch. The slot-type photoelectric switch has two opposing transmitting and receiving ends. When the clamping drive unit 3 drives the gripper 5 to move, it drives the first blocking plate 51 to move at the first photoelectric switch 401. The first blocking plate 51 is always located between the transmitting and receiving ends. The optical axis emitted by the transmitting end is blocked, causing the light signal received by the receiver to weaken or disappear. After the receiver senses the change in the light signal, it will convert it into an electrical signal. The electrical signal is then amplified and transmitted to the control circuit. The control circuit processes and judges the received signal. Once an object blocks the optical axis, it will output a trigger signal. Through known optical parameters and geometric relationships, the trigger signal is converted into the moving distance of the gripper 5, so that the first photoelectric switch 401 can continuously acquire the moving distance of the gripper 5, so that the first photoelectric switch 401 can detect the displacement distance of the gripper 5 in real time.

[0051] refer to Figure 4 , 5 As shown, in this embodiment, the support plate 4 is equipped with a first protective cover 42, which has a gripping opening 421 and an installation opening 422. The gripper 5 passes through the gripping opening 421, the installation block 8 is located inside the first protective cover 42, and the clamping drive unit 3 passes through the installation opening 422. A second protective cover 43, which communicates internally with the installation opening 422, is installed at the top of the first protective cover 42. The clamping drive unit 3 is located inside the second protective cover 43, which passes through the receiving opening 71 to protect the top space of the support plate 4 and the clamping drive unit 3, preventing dust from entering the top of the support plate 4 and the clamping drive unit 3.

[0052] refer to Figure 5 As shown, in this embodiment, the first protective cover 42 includes two dust covers 4200 spliced ​​together end-to-end along the circumference of the support plate 4. The inner side of the dust cover 4200 forms an installation opening 422, and the clamping opening 421 is provided on the outer side of the dust cover 4200. The first protective cover 42 is formed by splicing two dust covers 4200. The entire first protective cover 42 can be installed or removed by installing or removing the dust covers 4200 one by one, which is convenient. The support plate 4 is provided with a positioning groove 44. The bottom end of the dust cover 4200 is inserted into the positioning groove 44 to facilitate positioning of the dust cover 4200 and improve the installation stability of the dust cover 4200. The bottom end of the clamping opening 421 penetrates through the dust cover 4200. It is not necessary to remove the clamp 5 when removing or installing the dust cover 4200, which is convenient.

[0053] refer to Figure 5As shown, in this embodiment, the support plate 4 is equipped with a support member 45. The outer side of the support member 45 abuts against the inner sidewall of the dust cover 4200, and the top of the support member 45 abuts against the inner top wall of the dust cover 4200. The support member 45 is locked to the dust cover 4200 using a locking device. In actual application, the support member 45 is locked to the dust cover 4200 using bolts, which is convenient for disassembly and assembly. The support member 45 limits the inner top wall and inner sidewall of the dust cover 4200, which facilitates accurate positioning of the dust cover 4200 and ensures the connection stability between the support member 45 and the dust cover 4200.

[0054] refer to Figure 4 , 5 As shown, in this embodiment, the dust cover 4200 is provided with a notch 4211. The notch 4211 between two adjacent dust covers 4200 forms a storage space. The end of the bracket 7 near the support plate 4 passes through the storage space, which facilitates the covering of the connection between the bracket 7 and the support plate 4, and improves the covering effect on the bottom of the bracket 7. When the dust cover 4200 is removed, it is not necessary to disassemble the bracket 7, which facilitates quick disassembly and assembly of the dust cover 4200.

[0055] refer to Figure 6 , 7 As shown, in this embodiment, the base frame 1 is equipped with a second photoelectric switch 11, a third photoelectric switch 12 and a fourth photoelectric switch 13 arranged sequentially from top to bottom. The bracket 7 is connected to a second shielding plate 72, which is provided with a shielding part 721. The lifting mechanism 2 drives the bracket 7 to move up and down, so that the shielding part 721 moves within the stroke range determined by the second photoelectric switch 11, the third photoelectric switch 12 and the fourth photoelectric switch 13.

[0056] In practical applications, the second photoelectric switch 11, the third photoelectric switch 12, and the fourth photoelectric switch 13 all adopt slot-type photoelectric switches. The principle of detecting the displacement distance of an object in real time through slot-type photoelectric switches has been fully described in the section on detecting the displacement distance of the gripper 5 by the first photoelectric switch 401, so it will not be repeated here. Therefore, the principle of detecting the moving distance of the blocking part 721 through the second photoelectric switch 11, the third photoelectric switch 12, and the fourth photoelectric switch 13 is clear. In practical applications, when the second blocking plate 72 triggers the second photoelectric switch 11, the support plate 4 moves to the initial position; when the second blocking plate 72 triggers the fourth photoelectric switch 13, the support plate 4 moves to the end position, which facilitates accurate detection and determination of the initial and end positions of the blocking part 721.

[0057] refer to Figure 6 , 7As shown, in this embodiment, the second photoelectric switch 11, the third photoelectric switch 12, and the fourth photoelectric switch 13 are respectively provided with a first detection point, a second detection point, and a third detection point for detecting the moving position of the support plate 4. The distance between the first detection point and the second detection point is L1, the distance between the second detection point and the third detection point is L2, and the longitudinal length of the blocking part 721 is M. L1, L2, and M satisfy L1 < L2 and L1 > M. In practical application, the lifting mechanism 2 drives the bracket 7 to move up and down, so that the blocking part 721 moves between the first detection point and the second detection point. Since L1 < L2 and L1 > M, it is convenient to focus on detecting the displacement distance of the blocking part 721 between the first detection point and the second detection point, thereby increasing the detection density of the blocking part 721. Furthermore, it can be concluded that M < L1 and M < L2, so that the blocking part 721 will not trigger two detection points at the same time, ensuring detection. Accuracy: When the blocking part 721 moves towards the first detection point after triggering the third detection point, it triggers the second detection point through its top end until the blocking part 721 leaves the second detection point. During this process, the travel range corresponding to the length M of the blocking part 721 can be triggered by the second detection point, which facilitates the detection and determination of the distance the blocking part 721 moves from the third detection point to the second detection point. This allows for real-time feedback of the moving distance of the blocking part 721, improving detection accuracy. When the blocking part 721 moves towards the third detection point after triggering the first detection point, it triggers the second detection point through its bottom end until the blocking part 721 leaves the second detection point. During this process, the travel range corresponding to the length M of the blocking part 721 can be triggered by the second detection point, which facilitates the detection and determination of the distance the blocking part 721 moves from the first detection point to the third detection point. This allows for real-time feedback of the moving distance of the blocking part 721, improving detection accuracy.

[0058] refer to Figure 1 , 8 As shown, in this embodiment, the gripper 5 includes a connecting rod 501 and a gripping block 502 connected to the connecting rod 501. The gripping drive unit 3 is drivenly connected to the connecting rod 501. The connecting rod 501 is slidably connected to the support disk 4. The top end of the gripping block 502 is vertically connected to the outer end of the connecting rod 501. The gripping block 502 is provided with a gripping groove 5021 adapted to the edge of the wafer. The gripping groove 5021 is located below the support disk 4, and the bottom of the gripping groove 5021... The distance between the end of the clamping block 502 and the bottom end of the clamping block 502 is L3, and the thickness of the placement stage 6 is H. L3 and H satisfy that L3 < H. When the wafer is placed on the placement stage 6, the clamping groove 5021 can smoothly clamp the wafer and prevent the clamping block 502 from colliding with the placement stage 6. The structure is compact. Since the clamping groove 5021 is located below the support disk 4, when the clamping claw 5 clamps the wafer, the wafer is located in the space below the support disk 4, which effectively utilizes the space below the support disk 4 and saves space.

[0059] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A gripper lifting device, characterized in that, The device includes a base frame (1), a lifting mechanism (2) mounted on the base frame (1), a clamping drive unit (3) drivenly connected to the lifting mechanism (2), a support plate (4) drivenly connected to the lifting mechanism (2), at least three grippers (5) slidably connected to the support plate (4), and a placement platform (6) mounted on the base frame (1). The grippers (5) extend radially along the support plate (4), and the clamping drive unit (3) is drivenly connected to the grippers (5) so that the grippers (5) move closer to or further away from the center of the support plate (4). When it is necessary to clamp the wafer, the wafer is placed on the placement stage (6). The lifting mechanism (2) drives the clamping drive unit (3) and the support plate (4) to approach the placement stage (6) until the clamp (5) moves to the required height. The clamping drive unit (3) drives the clamp (5) to move synchronously towards the center of the support plate (4) so ​​that the clamp (5) clamps one side of the wafer.

2. The gripper lifting device according to claim 1, characterized in that, The lifting mechanism (2) is driven by a bracket (7), which is connected to a support plate (4). The bracket (7) is provided with a receiving opening (71), and the clamping drive unit (3) passes through the receiving opening (71). The support plate (4) is connected to a mounting block (8), and the clamping drive unit (3) is mounted on the mounting block (8). The output end of the lifting mechanism (2) is equipped with an end positioning block (9), which abuts against one side of the bracket (7).

3. The gripper lifting device according to claim 1, characterized in that, The support plate (4) is equipped with at least three slide rails (41), and the gripper (5) is slidably connected to the slide rails (41); The support plate (4) is equipped with a first photoelectric switch (401), and one of the grippers (5) is connected to a first shield (51), which triggers the first photoelectric switch (401). When the clamping drive unit (3) moves the gripper (5), it causes the first baffle plate (51) to move at the first photoelectric switch (401), so that the first photoelectric switch (401) can detect the displacement distance of the gripper (5) in real time.

4. The gripper lifting device according to claim 2, characterized in that, The support plate (4) is equipped with a first protective cover (42), which has a gripping opening (421) and an installation opening (422). The gripper (5) passes through the gripping opening (421), the installation block (8) is located inside the first protective cover (42), and the clamping drive unit (3) passes through the installation opening (422). The top of the first protective cover (42) is equipped with a second protective cover (43) that communicates with the installation opening (422). The clamping drive unit (3) is located inside the second protective cover (43), and the second protective cover (43) passes through the receiving opening (71).

5. The gripper lifting device according to claim 4, characterized in that, The first protective cover (42) includes at least two dust covers (4200) spliced ​​end to end along the circumference of the support plate (4). The inner side of the dust cover (4200) forms an installation opening (422). The clamping opening (421) is provided on the outer side of the dust cover (4200). The support plate (4) is provided with a positioning groove (44). The bottom end of the dust cover (4200) is inserted into the positioning groove (44). The bottom end of the clamping opening (421) penetrates through the dust cover (4200).

6. The gripper lifting device according to claim 5, characterized in that, The support plate (4) is equipped with a support member (45). The outer side of the support member (45) abuts against the inner wall of the dust cover (4200), and the top of the support member (45) abuts against the inner top wall of the dust cover (4200). The support member (45) is locked to the dust cover (4200) by a locking member.

7. The gripper lifting device according to claim 5, characterized in that, The dust cover (4200) is provided with a notch (4211), and the notch (4211) between two adjacent dust covers (4200) forms a storage space. The end of the bracket (7) near the support plate (4) passes through the storage space.

8. The gripper lifting device according to claim 2, characterized in that, The base frame (1) is equipped with a second photoelectric switch (11), a third photoelectric switch (12) and a fourth photoelectric switch (13) arranged sequentially from top to bottom. The bracket (7) is connected to a second shielding plate (72). The second shielding plate (72) is provided with a shielding part (721). The lifting mechanism (2) drives the bracket (7) to move up and down so that the shielding part (721) moves within the stroke range determined by the second photoelectric switch (11), the third photoelectric switch (12) and the fourth photoelectric switch (13). When the second shield (72) triggers the second photoelectric switch (11), the support disk (4) moves to the initial position; When the second shield (72) triggers the fourth photoelectric switch (13), the support plate (4) moves to the end position.

9. The gripper lifting device according to claim 8, characterized in that, The second photoelectric switch (11), the third photoelectric switch (12) and the fourth photoelectric switch (13) are respectively provided with a first detection point, a second detection point and a third detection point for detecting the moving position of the support plate (4). The distance between the first detection point and the second detection point is L1, the distance between the second detection point and the third detection point is L2, and the longitudinal length of the shielding part (721) is M. L1, L2, and M satisfy L1 < L2 and L1 > M.

10. The gripper lifting device according to claim 1, characterized in that, The gripper (5) includes a connecting rod (501) and a clamping block (502) connected to the connecting rod (501). The clamping drive unit (3) is driven to connect to the connecting rod (501). The connecting rod (501) is slidably connected to the support plate (4). The top end of the clamping block (502) is vertically connected to the outer end of the connecting rod (501). The clamping block (502) is provided with a clamping groove (5021) adapted to the edge of the wafer. The clamping groove (5021) is located below the support plate (4). The distance between the bottom end of the clamping groove (5021) and the bottom end of the clamping block (502) is L3. The thickness of the placement stage (6) is H. L3 and H satisfy L3 < H.

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