Quick release type reactive ion etching nozzle

Abstract

The utility model relates to the technical field of reactive ion etching, in particular to a quick release type reactive ion etching nozzle, which comprises a base. The device comprises a base and further comprises external threads, a connecting pipe, a spherical groove, a ball seat, a connecting rod, a through hole and a fixing seat, a sleeve is installed on the left side surface of the base, the external threads are formed in the left position of the outer surface of the sleeve, the connecting pipe is arranged in the sleeve, and the spherical groove is formed in the left side surface of the connecting pipe; the spherical groove is arranged and can be used for being in quick butt joint with a ball seat connected with the nozzle body, the ball seat can be rotated according to actual requirements after the ball seat is inserted, so that the angle of the nozzle body is adjusted, then the fixed seat is arranged on the outer surfaces of the nozzle body and the sleeve in a sleeving mode, and the fixed seat is fixed through the external threads. Therefore, the nozzle body is fixed, and the purposes of being convenient to disassemble and assemble and capable of adjusting the angle are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to reaction ion etching technical field especially relates to a quick detachable reaction ion etching nozzle. BACKGROUND

[0002] Reaction ion etching technology is a kind of anisotropy very strong, high selectivity dry etching technology, it is in vacuum system using molecular gas plasma to carry out etching, using the ion-induced chemical reaction to realize anisotropic etching, that is, using ion energy to make the surface of the etching layer form the damage layer that is easy to etch and promote chemical reaction, and ion can also remove surface product to expose clean etching surface.

[0003] The existing reaction ion etching nozzle needs to be installed and positioned by multiple screws when being used, and the installation is relatively cumbersome, and the orientation of the nozzle is difficult to adjust due to the orientation limitation of screw holes, leading to the problems of inconvenient disassembly and adjustment.

[0004] Therefore, in view of the above-mentioned problems of the existing reaction ion etching nozzle, a quick detachable reaction ion etching nozzle can be designed, which can be quickly connected with the ball seat connected to the nozzle body through the setting of the spherical groove, and the angle of the nozzle body can be adjusted by rotating the ball seat after inserting it according to actual needs, and then the fixed seat is sleeved on the outer surface of the nozzle body and the sleeve, and the fixed seat is fixed by external threads, so as to fix the nozzle body, thereby achieving the purpose of convenient disassembly and angle adjustment. SUMMARY

[0005] In order to overcome the problems of the existing reaction ion etching nozzle, such as the need for multiple screws for installation and positioning when being used, the installation is relatively cumbersome, and the orientation of the nozzle is difficult to adjust due to the orientation limitation of screw holes, leading to the problems of inconvenient disassembly and adjustment.

[0006] The technical scheme of the utility model is as follows: a quick detachable reaction ion etching nozzle, comprising a base, an external thread, a connecting pipe, a spherical groove, a ball seat, a connecting rod, a through hole and a fixed seat, a sleeve is installed on the left surface of the base, an external thread is formed on the left side of the outer surface of the sleeve, a connecting pipe is arranged in the sleeve, a spherical groove is formed on the left surface of the connecting pipe, a ball seat is attached to the inner surface of the spherical groove, a connecting rod is arranged on the left surface of the ball seat, a nozzle body is connected to the left surface of the connecting rod, a through hole is formed on the right surface of the connecting pipe, the ball seat and the connecting rod, and a fixed seat is arranged on the outer surface of the sleeve, and the fixed seat is connected to the sleeve by the external thread.

[0007] Preferably, by setting the spherical groove, the ball seat connected with the nozzle body can be quickly docked, and after the ball seat is inserted, the ball seat can be rotated according to actual needs, so that the angle of the nozzle body is adjusted, and then the fixing seat is sleeved on the outer surface of the nozzle body and the sleeve, the fixing seat is fixed through the external thread, so that the nozzle body is fixed, so as to achieve the purpose of convenient disassembly and angle adjustment, so as to solve the problem that the existing reactive ion etching nozzle needs to be fixed by means of multiple bolts during use, and the angle is not convenient to adjust after positioning, which leads to difficult disassembly and inconvenient adjustment.

[0008] As preferred, the outer surface of the fixing seat is provided with a plurality of circumferentially distributed six blocks.

[0009] As preferred, the right surface of the base is provided with a clamping jaw, and a hinge bolt is inserted into the front side position of the upper surface of the clamping jaw.

[0010] As preferred, a sealing groove is formed in the middle position of the right surface of the base, and a connecting head is arranged on the right surface of the base corresponding to the position of the sealing groove.

[0011] As preferred, a sealing ring is embedded in the sealing groove, and the inner ring surface of the sealing ring is attached to the outer surface of the connecting head.

[0012] As preferred, a fixing screw hole is formed in the right surface of the base and the clamping jaw, and a fixing screw is threadedly connected to the inner surface of the fixing screw hole.

[0013] As preferred, a side hole is formed in the right surface of the clamping jaw, and a connecting seat is arranged in the side hole.

[0014] The beneficial effects of the present application are as follows:

[0015] 1. By setting the spherical groove, the ball seat connected with the nozzle body can be quickly docked, and after the ball seat is inserted, the ball seat can be rotated according to actual needs, so that the angle of the nozzle body is adjusted, and then the fixing seat is sleeved on the outer surface of the nozzle body and the sleeve, the fixing seat is fixed through the external thread, so that the nozzle body is fixed, so as to achieve the purpose of convenient disassembly and angle adjustment, so as to solve the problem that the existing reactive ion etching nozzle needs to be fixed by means of multiple bolts during use, and the angle is not convenient to adjust after positioning, which leads to difficult disassembly and inconvenient adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 The present application is a quick-release reactive ion etching nozzle three-dimensional structure schematic diagram.

[0017] Figure 2 The utility model discloses a quick detachable reaction ion etching nozzle explosion three -dimensional structure schematic diagram shows.

[0018] Figure 3 The utility model discloses a quick detachable reaction ion etching nozzle hinged bolt three -dimensional structure schematic diagram shows.

[0019] Figure 4 The utility model discloses a quick detachable reaction ion etching nozzle clamp jaw three -dimensional structure schematic diagram shows.

[0020] The utility model discloses a quick detachable reaction ion etching nozzle explosion three -dimensional structure schematic diagram shows. Specific implementation

[0021] The utility model further carries out the explanation with the drawings and the embodiment.

[0022] Please refer to Figures 1-4 The utility model provides a kind of quick detachable reaction ion etching nozzle, including base 1;Still including outer thread 3, connecting pipe 4, spherical groove 5, ball seat 6, connecting rod 7, through hole 8 and fixed seat 10, the left side surface of base 1 is equipped with sleeve 2, outer surface of sleeve 2 is left position and is equipped with outer thread 3, the inside of sleeve 2 is provided with connecting pipe 4, the left side surface of connecting pipe 4 is equipped with spherical groove 5, the inner surface of spherical groove 5 is attached and is provided with ball seat 6, the left side surface of ball seat 6 is provided with connecting rod 7, the left side surface of connecting rod 7 is connected with nozzle body 9, the right side surface of connecting pipe 4, ball seat 6 and connecting rod 7 is all equipped with through hole 8, the outer surface of sleeve 2 is provided with fixed seat 10, fixed seat 10 is connected with sleeve 2 by outer thread 3, by being equipped with spherical groove 5, it can be used for the quick docking of ball seat 6 connected with nozzle body 9, after inserting ball seat 6, it can be rotated according to actual demand ball seat 6, to adjust the angle of nozzle body 9, then fixed seat 10 is set on the outer surface of nozzle body 9 and sleeve 2, fixed seat 10 is fixed by outer thread 3, to fix nozzle body 9, to reach the purpose that it is convenient to disassemble and can be adjusted angle.

[0023] Please refer to Figures 2-4In the embodiment, the outer surface of the fixing base 10 is provided with six prongs 11 distributed circumferentially. The prongs 11 can provide a force point for the worker when rotating the fixing base 10, so that the fixing base 10 can be easily tightened or removed, improving the disassembly efficiency. The right surface of the base 1 is provided with a clamping jaw 12. The base 1 and the upper surface of the clamping jaw 12 are inserted with a hinge bolt 13. The base 1 and the clamping jaw 12 are rotatably connected through the hinge bolt 13. The clamping jaw 12 and the hinge bolt 13 can facilitate the worker to butt joint the device and the pipeline. The base 1 and the clamping jaw 12 are clamped on the outer surface of the pipeline. The right surface of the base 1 is provided with a sealing groove 14. The right surface of the base 1 is provided with a connecting head 15 corresponding to the position of the sealing groove 14. The connecting head 15 can be used for transmission after the device is installed on the outer surface of the pipeline. No external pipeline is needed, which is convenient to use.

[0024] Please refer to Figures 2-4 In the embodiment, the sealing groove 14 is embedded with a sealing ring 16. The inner surface of the sealing ring 16 is attached to the outer surface of the connecting head 15. The sealing ring 16 can improve the sealing effect between the pipeline output end and the connecting head 15, avoiding leakage. The right surface of the base 1 and the clamping jaw 12 is provided with a fixing screw hole 17. The inner surface of the fixing screw hole 17 is screwed with a fixing screw 18. The outer surface of the fixing screw 18 is screwed with a fixing nut 19. The base 1 and the clamping jaw 12 are locked by the fixing screw 18. The fixing screw 18 and the fixing nut 19 can position the base 1 and the clamping jaw 12, ensuring that they can be stably clamped on the outer surface of the pipeline. The right surface of the clamping jaw 12 is provided with a side hole 20. The inside of the side hole 20 is provided with a connecting seat 21. The side hole 20 and the connecting seat 21 can provide multiple streamline options for the worker, improving the applicability of the device.

[0025] When working, by setting the dial block 11, the staff can provide a force point when rotating the fixed seat 10, so that the fixed seat 10 can be easily tightened or removed, improve the disassembly efficiency, by setting the clamping jaw 12 and the hinge bolt 13, the staff can conveniently connect the whole device with the pipeline, the base 1 and the clamping jaw 12 are matched and clamped on the outer surface of the pipeline, by setting the connector 15, after the whole device is installed on the outer surface of the pipeline, it can be transmitted through the connector 15, without external pipeline, convenient to use, by setting the sealing ring 16, the sealing effect between the pipeline output end and the connector 15 can be improved, leakage is avoided, by setting the fixing screw 18 and the fixing nut 19, the base 1 and the clamping jaw 12 can be positioned, and it is ensured that they can be stably clamped on the outer surface of the pipeline, by setting the side hole 20 and the connecting seat 21, the staff can provide multiple streamline options, so as to improve the applicability of the device.

[0026] Through the above steps, by setting the spherical groove 5, the ball seat 6 connected with the nozzle body 9 can be quickly connected, after the ball seat 6 is inserted, the ball seat 6 can be rotated according to the actual demand, so as to adjust the angle of the nozzle body 9, and then the fixed seat 10 is sleeved on the outer surface of the nozzle body 9 and the sleeve 2, the fixed seat 10 is fixed by the external thread 3, so as to fix the nozzle body 9, so as to achieve the purpose of convenient disassembly and angle adjustment, so as to solve the problem that the existing reactive ion etching nozzle needs to be fixed by multiple bolts when in use, and the angle is not convenient to adjust after positioning, which leads to difficult disassembly and inconvenient adjustment.

Claims

1. A quick release reactive ion etching nozzle comprising a base (1); characterized in that: It also includes external threads (3), connecting pipe (4), spherical groove (5), ball seat (6), connecting rod (7), through hole (8) and fixed seat (10), the left surface of base (1) is installed with sleeve (2), the outer surface of sleeve (2) is left position and is provided with external threads (3), the inside of sleeve (2) is provided with connecting pipe (4), the left surface of connecting pipe (4) is provided with spherical groove (5), the inner surface of spherical groove (5) is provided with ball seat (6), the left surface of ball seat (6) is provided with connecting rod (7), the left surface of connecting rod (7) is connected with nozzle body (9), the right surface of connecting pipe (4), ball seat (6) and connecting rod (7) is provided with through hole (8), the outer surface of sleeve (2) is provided with fixed seat (10), fixed seat (10) is connected with sleeve (2) through external threads (3).

2. The quick release RIE nozzle of claim 1 wherein: The outer surface of fixed seat (10) is provided with block (11), and six blocks (11) are circumferentially distributed.

3. The quick release RIE nozzle of claim 1 wherein: The right surface of base (1) is provided with clamping jaw (12), the upper surface of base (1) and clamping jaw (12) is inserted with hinge bolt (13), and base (1) and clamping jaw (12) are rotatably connected through hinge bolt (13).

4. The quick release RIE nozzle of claim 1 wherein: The right surface of base (1) is provided with sealing groove (14), and the right surface of base (1) is provided with connecting head (15) corresponding to sealing groove (14).

5. The quick release RIE nozzle of claim 4 wherein: The inside of sealing groove (14) is embedded with sealing ring (16), and the inner ring surface of sealing ring (16) is attached to the outer surface of connecting head (15).

6. The quick release RIE nozzle of claim 3 wherein: The right surface of base (1) and clamping jaw (12) is provided with fixed screw hole (17) at the rear position, the inner surface of fixed screw hole (17) is screw connected with fixed screw (18), the outer surface of fixed screw (18) is screw connected with fixed nut (19) at the left position, and base (1) and clamping jaw (12) are locked through fixed screw (18).

7. The quick release RIE nozzle of claim 3 wherein: The right surface of clamping jaw (12) is provided with side hole (20), and the inside of side hole (20) is provided with connecting seat (21).

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