Auxiliary device for recombining polishing head

Abstract

The utility model provides an auxiliary device for recombining a polishing head. The downward concave area is arranged on the table top of the drainage table so that dripping liquid can be collected. The area where the basic assembly of the target polishing head is located and the area where the retaining ring and the gas film are located are clamped through a first clamping piece and a second clamping piece correspondingly; the bolt holes are formed in the first clamping piece and the second clamping piece, the sliding grooves are formed in the pipe wall of the sleeve in the circumferential direction, and the first clamping piece and the second clamping piece are fixed to the sleeve through bolts. When a plug pin is inserted into the plug pin holes of the first clamping piece and the second clamping piece from the sliding grooves at the same time, the first clamping piece and the second clamping piece can rotate around the axial direction of the sleeve at the same time. Therefore, the front face and the back face of the polishing head can be conveniently turned over, fixing screws on the polishing head can be conveniently locked or loosened, new and old consumables can be conveniently mounted and dismounted, and the device is of great significance in improving device maintenance efficiency and reducing device damage.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to an auxiliary device for reassembling a polishing head. Background Technology

[0002] The polishing head is one of the core components of the polishing unit for polishing wafers. Inside the polishing chamber, the polishing head carries a 300mm wafer and rotates it on the polishing disk to perform loading and polishing. The polishing head uses an air bladder to pick up the wafer and place it on the polishing disk. After polishing, it picks up and transfers the wafer to the load cup. A retaining ring on the outside of the air bladder prevents the wafer from slipping out from under the polishing head during rotation. Therefore, the periodic replacement of the air bladder and retaining ring is one of the routine maintenance items for chemical mechanical polishing equipment.

[0003] When replacing the air film, retaining ring, and remodeling polishing head, it is necessary to repeatedly flip the polishing head to tighten / loosen the fixing screws and install / remove new and old consumables. Currently, the polishing heads of mainstream chemical mechanical polishing equipment are relatively large and heavy, which often causes considerable inconvenience and is prone to mechanical damage when flipping the polishing head and replacing consumables.

[0004] Providing an auxiliary device for reassembling polishing heads, which can facilitate the replacement of the air film, retaining ring, and reassembling of the polishing head, is of great significance for improving equipment maintenance efficiency and reducing equipment damage. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to provide an auxiliary device for reassembling a polishing head, which can easily flip the front and back of the polishing head to tighten / loosen the fixing screws and install and remove new and old consumables.

[0006] To address the aforementioned problems, this utility model provides an auxiliary device for reassembling a polishing head, including a drainage platform. The top of the drainage platform is a table surface, and the table surface includes a recessed area. At least two support assemblies are fixed to the periphery of the recessed area. Each support assembly includes a support frame and a sleeve. The sleeve is fixed to the table surface by the support frame, and the axial direction of the sleeve is parallel to the table surface. A sliding groove is provided along the circumferential direction on one side of the sleeve wall. Clamping assemblies are arranged correspondingly to the support assemblies. The clamping assemblies are used to clamp the target polishing head. Each clamping assembly includes a first clamping member and a second clamping member. The first clamping member is used for... The first clamping member is located in the area where the base component of the target polishing head is located. The second clamping member is used to clamp the retaining ring and the area where the air film of the target polishing head is located. The first clamping member and the second clamping member each include at least two pin holes. The first clamping member and the second clamping member pass through the interior of the sleeve. The first clamping member and the second clamping member penetrate the sleeve along the axial direction of the sleeve and can slide along the axial direction of the sleeve. When the pin is simultaneously inserted from the sliding groove into the pin holes of the first clamping member and the second clamping member, the first clamping member and the second clamping member can simultaneously rotate around the axial direction of the sleeve to flip the target polishing head.

[0007] In some embodiments, when the pin is pulled out of the pin hole of the first clamping member, the first clamping member is slidable along the axial direction of the sleeve; and / or when the pin is pulled out of the pin hole of the second clamping member, the second clamping member is slidable along the axial direction of the sleeve.

[0008] In some embodiments, a first shallow groove is provided on the side of the first clamping member facing the second clamping member, and a second shallow groove is provided on the side of the second clamping member facing the first clamping member. When the first clamping member and the second clamping member pass through the interior of the sleeve at the same time, the first shallow groove and the second shallow groove are arranged opposite to each other to form a sliding space, and a ball is provided in the sliding space.

[0009] In some embodiments, the pin includes a pin head and a pin body, wherein the pin head is spherical and the diameter of the pin head is greater than the maximum width of the sliding groove.

[0010] In some embodiments, the length of the pin body is less than the diameter of the sleeve.

[0011] In some embodiments, a second pin is inserted from the sliding groove into the pin hole of the first clamping member and the pin hole of the second clamping member to fix the relative positions of the first clamping member, the second clamping member and the sleeve. Sliding the pin in the sliding groove allows the first clamping member and the second clamping member to rotate simultaneously about the axial direction of the sleeve.

[0012] In some embodiments, the first clamping member includes a first transmission rod and a first end, and the second clamping member includes a second transmission rod and a second end, wherein the contact surface between the first end and the target polishing head and the contact surface between the second end and the target polishing head are both arc-shaped.

[0013] In some embodiments, the first end includes a first support portion and a first side support portion, and the second end includes a second support portion and a second side support portion. The first support portion and the second support portion are used to clamp the target polishing head, and the first side support portion and the second side support portion are used to hold the side of the target polishing head.

[0014] In some embodiments, the tabletop further includes at least one retractable baffle for fixing the position of the target polishing head. When the target polishing head is in an inverted, flipped state, the retractable baffle extends and abuts against the top of the target polishing head to fix the target polishing head in the flipped state.

[0015] In some embodiments, the recessed region is hemispherical in shape, and the bottom of the recessed region includes a drain outlet, through which liquid dripping into the recessed region is collected inside the drainage platform.

[0016] The above technical solution provides an auxiliary device for reassembling a polishing head. A recessed area is provided on the surface of the drainage platform to collect dripping liquid; a first clamping member and a second clamping member respectively clamp the area containing the base components of the target polishing head and the area containing the retaining ring and air film; pin holes are provided on the first and second clamping members, and a sliding groove is provided along the circumferential direction on the sleeve wall. Pins are used to fix the first and second clamping members to the sleeve. When the pins are simultaneously inserted from the sliding groove into the pin holes of the first and second clamping members, the first and second clamping members can rotate simultaneously around the axial direction of the sleeve, thereby facilitating the flipping of the polishing head's front and back sides, tightening or loosening the fixing screws, and installing or removing new and old consumables. This is of great significance for improving equipment maintenance efficiency and reducing equipment damage.

[0017] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the present invention. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a front view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention;

[0020] Figure 2 This is a side view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention;

[0021] Figure 3 This is a top view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention;

[0022] Figure 4 This is a side view schematic diagram of the auxiliary device for reassembling the polishing head when disassembling the retaining ring and the fixing screw of the air film of the target polishing head according to an embodiment of the present invention;

[0023] Figure 5 This is a side view schematic diagram of the auxiliary device for reassembling the polishing head when clamping the target polishing head according to an embodiment of the present invention;

[0024] Figure 6 This is a side view schematic diagram of an auxiliary device for reconstructing the polishing head when the target polishing head is rotated 180 degrees, according to an embodiment of the present invention;

[0025] Figure 7 This is a side view schematic diagram of the auxiliary device for reconstructing the polishing head when replacing the retaining ring and air film of the target polishing head according to an embodiment of the present invention.

[0026] Explanation of reference numerals in the attached figures

[0027] 101. Area where basic components are located

[0028] 102 Maintain the area where the ring and air film are located.

[0029] 11 Drainage Platform

[0030] 111 Concave area

[0031] 112 Drain outlet

[0032] 12 bracket assembly

[0033] 121 Support frame

[0034] 122 Sleeve

[0035] 1221 Sliding groove

[0036] 13 Clamping components

[0037] 131 First clamping component

[0038] 1311 First Supporting Department

[0039] 1312 First side support

[0040] 132 Second clamping component

[0041] 1321 Second Support Section

[0042] 1322 Second side support

[0043] 14 Retractable baffle

[0044] 15 ball bearings

[0045] 16. Pins Detailed Implementation

[0046] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0047] Please refer to this as well. Figures 1 to 7 ,in, Figure 1 This is a front view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention; Figure 2 This is a side view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention; Figure 3 This is a top view schematic diagram of an auxiliary device for a reconstituted polishing head provided in an embodiment of the present invention; Figure 4 This is a side view schematic diagram of the auxiliary device for reassembling the polishing head when disassembling the retaining ring and the fixing screw of the air film of the target polishing head according to an embodiment of the present invention; Figure 5 This is a side view schematic diagram of the auxiliary device for reassembling the polishing head when clamping the target polishing head according to an embodiment of the present invention; Figure 6This is a side view schematic diagram of an auxiliary device for reconstructing the polishing head when the target polishing head is rotated 180 degrees, according to an embodiment of the present invention; Figure 7 This is a side view schematic diagram of the auxiliary device for reconstructing the polishing head when replacing the retaining ring and air film of the target polishing head according to an embodiment of the present invention.

[0048] like Figure 1 As shown, the auxiliary device for the reconstituted polishing head includes a drainage platform 11, a support assembly 12, and a clamping assembly 13.

[0049] like Figure 3 As shown, the top of the drainage platform 11 is a platform, and the platform includes a recessed area 111. The bottom of the recessed area 111 includes a drain outlet 112, through which liquid dripping into the recessed area 111 is collected inside the drainage platform 11. The drainage platform 11 has a space for storing liquid inside. In this embodiment, the recessed area 111 is hemispherical in shape, and the drain outlet 112 is located at the lowest point of the recessed area 111. In some embodiments, the recessed area 111 is conical funnel-shaped; in another embodiment, the recessed area 111 is square funnel-shaped.

[0050] Also refer to Figures 1-3 At least two of the bracket assemblies 12 are fixed to the periphery of the recessed area 111. Each bracket assembly 12 includes a support frame 121 and a sleeve 122. The sleeve 122 is fixed to the platform by the support frame 121. The axial direction of the sleeve 122 is parallel to the platform. A sliding groove 1221 is provided on one side of the sleeve 122 along the circumferential direction.

[0051] In this embodiment, there are two support assemblies 12. The recessed region 111 is hemispherical in shape, and the two support assemblies 12 are symmetrically distributed on the outer circumference of the recessed region 111. The support frame 121 is a column, and the outer wall of the sleeve 122 is fixed to the top of the support frame 121. The two sleeves 122 are arranged opposite to each other, and the axial directions of the two sleeves 122 are parallel to the platform.

[0052] In some embodiments, the support frame 121 is a bracket composed of multiple connecting rods.

[0053] In some embodiments, the number of the support assemblies 12 is four, and the four support assemblies 12 are fixed to the table surface and are evenly distributed along the outer circumference of the recessed region 111.

[0054] The clamping component 13 is configured in a one-to-one correspondence with the support component 12, and is used to clamp the target polishing head.

[0055] Continue to refer to Figures 1-4 The clamping assembly 13 includes a first clamping member 131 and a second clamping member 132. The first clamping member 131 is used to clamp the base component area 101 of the target polishing head, and the second clamping member 132 is used to clamp the retaining ring and the air film area 102 of the target polishing head. The first clamping member 131 and the second clamping member 132 each include at least two pin holes. The first clamping member 131 and the second clamping member 132 pass through the sleeve 122 along the axial direction of the sleeve 122 and can slide along the axial direction of the sleeve. When the pin is simultaneously inserted from the sliding groove 1221 into the pin hole of the first clamping member 131 and the pin hole of the second clamping member 132, the first clamping member 131 and the second clamping member 132 can simultaneously rotate around the axial direction of the sleeve 122 to flip the target polishing head.

[0056] In this embodiment, the target polishing head includes a region 101 containing the base component and a region 102 containing the retaining ring and the air film. Region 101 contains the base component of the target polishing head, and region 102 contains the retaining ring and the air film. The retaining ring and the air film of the target polishing head need to be replaced periodically; however, the retaining ring and the air film, along with the fixing screws that secure the retaining ring and the air film, are located on different surfaces within the regions containing the retaining ring and the air film.

[0057] When the first clamping member 131 and the second clamping member 132 penetrate the sleeve 122, a first shallow groove is provided on the side of the first clamping member 131 facing the second clamping member 132, and a second shallow groove is provided on the side of the second clamping member 132 facing the first clamping member 131. The first shallow groove and the second shallow groove are arranged opposite each other to form a sliding space, in which a ball bearing 15 is disposed. The ball bearing 15 is made of metal, and its diameter is larger than the pin holes on the first clamping member 131 and the second clamping member 132. The ball bearing 15 makes the sliding of the first clamping member 131 and the second clamping member 132 along the axial direction of the sleeve 122 smoother.

[0058] As mentioned above, a sliding groove 1221 is provided on one side of the sleeve 122 along the circumferential direction of the tube wall. (Reference) Figure 1 , Figure 2When the pin 16 is inserted from the sliding groove 1221 into the pin hole of the first clamping member 131, the first clamping member 131 is fixed to the sleeve 122 along the axial direction of the sleeve 122, and / or when the pin 16 is inserted from the sliding groove 1221 into the pin hole of the second clamping member 132, the second clamping member 132 is fixed to the sleeve 122 along the axial direction of the sleeve 122; when the pin 16 is simultaneously inserted from the sliding groove 1221 into the pin holes of both the first clamping member 131 and the second clamping member 132, the first clamping member 131 and the second clamping member 132 can simultaneously rotate around the axial direction of the sleeve 122.

[0059] The pin 16 is inserted from the sliding groove 1221 into the pin hole of the first clamping member 131 and the pin hole of the second clamping member 132 to fix the relative positions of the first clamping member 131, the second clamping member 132, and the sleeve 122. Accordingly, sliding the pin 16 within the sliding groove 1221 allows the first clamping member 131 and the second clamping member 132 to rotate simultaneously about the axial direction of the sleeve 122.

[0060] When the pin is pulled out of the pin hole of the first clamping member 131, the first clamping member 131 is able to slide along the axial direction of the sleeve 122; and / or when the pin is pulled out of the pin hole of the second clamping member 132, the second clamping member 132 is able to slide along the axial direction of the sleeve 122.

[0061] In this embodiment, the first clamping member 131 and the second clamping member 132 each include two pin holes. When the pin 16 is inserted from the sliding groove 1221 into different pin holes of the first clamping member 131 and the second clamping member 132 to fix the first clamping member 131 and the second clamping member 132 to the sleeve 122, the positions of the first clamping member 131 and the second clamping member 132 relative to the sleeve 122 change along the axial direction of the sleeve 122. The pin 16 can be inserted into different pin holes as needed.

[0062] Specifically, when the pin is inserted from the sliding groove 1221 into the first specific pin hole of each of the first clamping members 131, the first clamping member 131 can clamp the base component area 101 of the target polishing head. When the pin is inserted from the sliding groove 1221 into at least one of the other pin holes of each of the first clamping members 131, the base component area 101 of the target polishing head can be released. Correspondingly, when the pin is inserted from the sliding groove 1221 into the second specific pin hole of each of the second clamping members 132, the second clamping member 132 can clamp the retaining ring and air film area 102 of the target polishing head. When the pin is inserted from the sliding groove 1221 into at least one of the other pin holes of each of the first clamping members 131, the retaining ring and air film area 102 of the target polishing head can be released.

[0063] The pin 16 includes a pin head and a pin body. The pin head is spherical, and its diameter is greater than the maximum width of the sliding groove 1221. The length of the pin body is less than the diameter of the sleeve 122.

[0064] In this embodiment, the length of the sliding groove 1221 is half the circumference of the sleeve 122. When the pin 16 slides in the sliding groove 1221 to the other end of the sliding groove 1221, the clamping assembly 13 and the target polishing head both rotate 180 degrees, and the target polishing head is inverted.

[0065] In this embodiment, the first clamping member 131 includes a first transmission rod and a first end, and the second clamping member 132 includes a second transmission rod and a second end.

[0066] The first transmission rod is used to pass the first clamping member 131 through the sleeve 122, and to rotate the first clamping member 131 inside the sleeve 122 about the axial direction of the sleeve 122 or to slide the first clamping member 131 along the axial direction of the sleeve 122; the second transmission rod is used to pass the second clamping member 132 through the sleeve 122, and to rotate the second clamping member 132 inside the sleeve 122 about the axial direction of the sleeve 122 or to slide the second clamping member 132 along the axial direction of the sleeve 122.

[0067] The first end is used to contact and clamp the area where the base component of the target polishing head is located; the second end is used to contact and clamp the area where the retaining ring and air film of the target polishing head are located.

[0068] The first and second transmission rods are made of the same material, but different from the materials of the first and second ends.

[0069] like Figure 3 As shown, the contact surfaces of the first end and the target polishing head, and the contact surfaces of the second end and the target polishing head, are both arc-shaped, which can better fit the surface of the target polishing head.

[0070] like Figure 2 As shown, in this embodiment, the first end includes a first support portion 1311 and a first side support portion 1312, and the second end includes a second support portion 1321 and a second side support portion 1322. The first support portion 1311 and the second support portion 1321 are used to clamp the target polishing head, and the first side support portion 1312 and the second side support portion 1322 are used to hold the side of the target polishing head. Specifically, the first support portion 1311 is used to clamp the area where the base component is located, the second support portion 1321 is used to clamp the area where the retaining ring and the air film are located, the first side support portion 1312 is used to hold the side of the area where the base component is located, and the second side support portion 1322 is used to hold the side of the area where the retaining ring and the air film are located.

[0071] In this embodiment, the table surface further includes at least one retractable baffle 14, which is used to fix the position of the target polishing head. When the target polishing head is inverted, the retractable baffle 14 extends and abuts against the top of the target polishing head to fix the target polishing head in the inverted state. The retractable baffle 14 is fixed to the table surface and can move along a fixed track on the table surface. The retracted position of the retractable baffle 14 is as follows: Figure 3 As shown.

[0072] The auxiliary device for the reconstructed polishing head is mainly used to replace the retaining ring and the air film of the target polishing head. Accordingly, the process of reconstructing the target polishing head using the auxiliary device for the reconstructed polishing head includes the following steps: (1) removing the fixing screws of the retaining ring and the air film of the target polishing head; (2) clamping the target polishing head; (3) flipping the target polishing head 180 degrees; (4) replacing the retaining ring and the air film of the target polishing head; (5) clamping the target polishing head in the flipped state; (6) flipping the target polishing head back to its original position; (7) tightening the fixing screws of the retaining ring and the air film of the target polishing head.

[0073] The state of the auxiliary device for the reconstituted polishing head in the above steps is described in detail below.

[0074] In step (1), refer to Figure 4The target polishing head includes a base component area 101 and a retaining ring and air film area 102. The second clamping member 132 moves along the axial direction of the sleeve 122 toward the target polishing head until it reaches the clamping position of the retaining ring and air film area 102. The first clamping member 131 moves along the axial direction of the sleeve 122 to the loosened position of the base component area 101. The pin 16 is inserted from the sliding groove 1221 into the pin holes corresponding to the positions of the first clamping member 131 and the second clamping member 132, causing the first clamping member 131 to release the base component area 101, and the second clamping member 132 to clamp the retaining ring and air film area 102.

[0075] At this point, a wrench can be used to remove the retaining ring and the fixing screws of the air film.

[0076] In step (2), refer to Figure 5 First, pull out the pin 16, maintain the second clamping member 132 in the clamped position of the retaining ring and air film area 102, move the first clamping member 131 along the axial direction of the sleeve 122 toward the target polishing head until it moves to the clamped position of the base component area 101, insert the pin 16 from the sliding groove 1221 into the pin hole corresponding to the position of the first clamping member 131 and the second clamping member 132, so that the first clamping member 131 clamps the base component area 101 and the second clamping member 132 clamps the retaining ring and air film area 102.

[0077] In step (3), refer to Figure 6 The retractable baffle 14 extends out and is used to press against the top of the target polishing head to fix the target polishing head in the flipped state.

[0078] In step (4), refer to Figure 7 First, pull out the pin 16, and move the second clamping member 132 away from the target polishing head along the axial direction of the sleeve 122 until the loosened position of the retaining ring and the air film in the region 102 is fully exposed. Insert the pin 16 from the sliding groove 1221 into the pin holes corresponding to the positions of the first clamping member 131 and the second clamping member 132, so that the first clamping member 131 clamps the region 101 where the base component is located, and the second clamping member 132 releases the region 102 where the retaining ring and the air film are located. At this time, the old retaining ring and the air film can be removed and a new retaining ring and the air film can be installed.

[0079] In this step, to facilitate the insertion of the pin 16, it can still be inserted from top to bottom, as follows: Figure 7 As shown, at this time, the direction of the pin 16 relative to the target polishing head is... Figure 6 The opposite is true.

[0080] In step (5), the pin 16 is first pulled out, and the second clamping member 132 is moved along the axial direction of the sleeve 122 toward the target polishing head until it reaches the clamping position of the area 102 where the retaining ring and the air film are located. The pin 16 is then inserted from the sliding groove 1221 into the pin holes corresponding to the positions of the first clamping member 131 and the second clamping member 132, so that the first clamping member 131 clamps the area 101 where the base component is located, and the second clamping member 132 clamps the area 102 where the retaining ring and the air film are located. The auxiliary device for the reconstructed polishing head returns to its original state. Figure 6 As shown.

[0081] In step (6), after the target polishing head is flipped back to its original position, the auxiliary device for reassembling the polishing head returns to its original state. Figure 5 As shown. The pin 16 is inserted from the sliding groove 1221 into the pin holes corresponding to the positions of the first clamping member 131 and the second clamping member 132, so that the first clamping member 131 clamps the area 101 where the base component is located, and the second clamping member 132 clamps the area 102 where the retaining ring and the air film are located.

[0082] In step (7), the pin 16 is first pulled out, and the first clamping member 131 is moved away from the target polishing head along the axial direction of the sleeve 122 until the released position of the base component area 101 is fully exposed. The pin 16 is then inserted from the sliding groove 1221 into the pin holes corresponding to the positions of the first clamping member 131 and the second clamping member 132, so that the first clamping member 131 clamps the base component area 101 and the second clamping member 132 clamps the retaining ring and the air film area 102. The auxiliary device for the reconstructed polishing head returns to its original state. Figure 4 As shown.

[0083] At this point, the new retaining ring and the new air film fixing screws can be tightened with a wrench. The reassembly of the target polishing head is now complete.

[0084] In some embodiments, the clamping assembly 13 is rotated by a motor.

[0085] In some embodiments, the first clamping member 131 and the second clamping member 132 are respectively pushed and held by cylinders.

[0086] The above technical solution provides an auxiliary device for reassembling a polishing head. A recessed area is provided on the surface of the drainage platform to collect dripping liquid; a first clamping member and a second clamping member respectively clamp the area containing the base components of the target polishing head and the area containing the retaining ring and the air film; pin holes are provided on the first and second clamping members, and a sliding groove is provided along the circumferential direction on the sleeve wall. Pins are used to fix the first and second clamping members to the sleeve. When the pins are simultaneously inserted from the sliding grooves into the pin holes of the first and second clamping members, the first and second clamping members can simultaneously rotate around the axial direction of the sleeve. This allows for convenient flipping of the polishing head, tightening or loosening of the fixing screws, and installation and removal of new and old consumables. This is of great significance for improving equipment maintenance efficiency and reducing equipment damage.

[0087] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0088] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of protection of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. An auxiliary device for reconstructing a polishing head, characterized in that, include: A drainage platform, the top of which is a platform surface, the platform surface including a recessed area; At least two support assemblies are fixed to the periphery of the recessed area. Each support assembly includes a support frame and a sleeve. The sleeve is fixed to the platform by the support frame, and the axial direction of the sleeve is parallel to the platform. A sliding groove is provided on one side of the sleeve wall along the circumferential direction. Clamping assemblies are provided one-to-one with the support assemblies. The clamping assemblies are used to clamp the target polishing head. The clamping assemblies include a first clamping member and a second clamping member. The first clamping member is used to clamp the area where the base assembly of the target polishing head is located. The second clamping member is used to clamp the area where the retaining ring and the air film of the target polishing head are located. The first clamping member and the second clamping member each include at least two pin holes. The first clamping member and the second clamping member pass through the sleeve along the axial direction of the sleeve and can slide along the axial direction of the sleeve. When the pin is simultaneously inserted from the sliding groove into the pin hole of the first clamping member and the pin hole of the second clamping member, the first clamping member and the second clamping member can simultaneously rotate around the axial direction of the sleeve to flip the target polishing head.

2. The apparatus according to claim 1, characterized in that, When the pin is pulled out of the pin hole of the first clamping member, the first clamping member is able to slide along the axial direction of the sleeve; and / or when the pin is pulled out of the pin hole of the second clamping member, the second clamping member is able to slide along the axial direction of the sleeve.

3. The apparatus according to claim 1, characterized in that, The first clamping member has a first shallow groove on the side facing the second clamping member, and the second clamping member has a second shallow groove on the side facing the first clamping member. When the first clamping member and the second clamping member pass through the inside of the sleeve at the same time, the first shallow groove and the second shallow groove are arranged opposite each other to form a sliding space, and a ball is provided in the sliding space.

4. The apparatus according to claim 1, characterized in that, The pin includes a pin head and a pin body. The pin head is spherical in shape, and the diameter of the pin head is greater than the maximum width of the sliding groove.

5. The apparatus according to claim 4, characterized in that, The length of the pin is less than the diameter of the sleeve.

6. The apparatus according to claim 1, characterized in that, The pin is inserted from the sliding groove into the pin hole of the first clamping member and the pin hole of the second clamping member to fix the relative positions of the first clamping member, the second clamping member and the sleeve. Sliding the pin in the sliding groove allows the first clamping member and the second clamping member to rotate simultaneously about the axial direction of the sleeve.

7. The apparatus according to claim 1, characterized in that, The first clamping member includes a first transmission rod and a first end, and the second clamping member includes a second transmission rod and a second end. The contact surface between the first end and the target polishing head and the contact surface between the second end and the target polishing head are both arc-shaped.

8. The apparatus according to claim 7, characterized in that, The first end includes a first support portion and a first side support portion, and the second end includes a second support portion and a second side support portion. The first support portion and the second support portion are used to clamp the target polishing head, and the first side support portion and the second side support portion are used to hold the side of the target polishing head.

9. The apparatus according to claim 1, characterized in that, The table also includes at least one retractable baffle, which is used to fix the position of the target polishing head. When the target polishing head is in an inverted flipped state, the retractable baffle extends and abuts against the top of the target polishing head to fix the target polishing head in the flipped state.

10. The apparatus according to claim 1, characterized in that, The recessed area is hemispherical in shape, and the bottom of the recessed area includes a drain outlet. Liquid dripping into the recessed area is collected inside the drainage platform through the drain outlet.

Images