Cleaning assembly for bearing table of wafer thinning machine

Abstract

The utility model discloses a cleaning assembly for a bearing platform of a wafer thinning machine, which belongs to the field of wafer thinning and comprises a support, an oilstone polishing assembly and a cleaning brush assembly, the oilstone polishing assembly comprises a first motor, an inner turntable, a supporting piece and an oilstone sheet, and the cleaning brush assembly comprises a second motor, a transmission mechanism and an outer turntable; the first motor and the second motor are both mounted on the bracket; the inner turntable comprises a first chassis and a first rotating shaft; the outer turntable comprises a second chassis and an annular block, a center hole is formed in the second chassis, one end of the first rotating shaft is connected with the first chassis, the other end penetrates through the center hole to extend out and is connected with the first motor, and a brush is arranged on the lower surface of the annular block; the transmission mechanism comprises a second rotating shaft, a driving gear and a gear ring, one end of the second rotating shaft is connected with the first motor, the other end of the second rotating shaft is connected with the driving gear, and the driving gear is meshed with the gear ring, so that the use convenience of the cleaning assembly can be improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer thinning technical field, concretely relates to a kind of cleaning assembly for wafer thinning machine bearing table. BACKGROUND

[0002] Wafer thinning machine is a kind of equipment for grinding and polishing wafer.Usually, in wafer thinning process, wafer needs to be adsorbed on bearing table to ensure the stability of wafer during thinning process. Among them, wafer produces dust and particles after grinding and other operations, since dust and particles fall on bearing table, it will affect the flatness and smoothness of bearing table, thereby affecting the flatness and precision of wafer installation, and further affecting the effect of wafer grinding and polishing, so cleaning device is needed to clean bearing table.

[0003] The commonly used cleaning device currently includes first mechanical arm, second mechanical arm, cleaning brush and oil stone polishing assembly, cleaning brush is installed on first mechanical arm, and oil stone polishing assembly is installed on second mechanical arm. When cleaning, first mechanical arm drives cleaning brush to move to bearing table first, and then second mechanical arm drives oil stone polishing assembly to move to bearing table for oil stone polishing operation. Pure water is used to flush bearing table during polishing, and then cleaning brush is driven by first mechanical arm to move to bearing table for brushing after polishing. This structure can realize the cleaning of bearing table, and improve the flatness and smoothness of bearing table. However, cleaning brush and oil stone polishing assembly need to be operated at different times, which makes the cleaning device inconvenient to use. UTILITY MODEL CONTENTS

[0004] In order to solve the above problems existing in the prior art, the utility model provides a kind of cleaning assembly for wafer thinning machine bearing table. The technical problem to be solved by the utility model is realized by the following technical scheme:

[0005] Firstly, the utility model provides a kind of cleaning assembly for wafer thinning machine bearing table, including support, oil stone polishing assembly and cleaning brush assembly, oil stone polishing assembly includes first motor, inner turntable, support and oil stone sheet, cleaning brush assembly includes second motor, transmission mechanism and outer turntable;

[0006] First motor and second motor are both installed on support, inner turntable includes first bottom disc and first shaft, and first shaft is connected between bottom disc and first motor, one end of support is connected with the lower surface of first bottom disc, and the other end of support is connected with oil stone sheet;

[0007] The outer rotating disc comprises a second base plate and an annular block, the annular block is connected to the lower surface of the second base plate, the inner annular surface of the annular block and the lower surface of the second base plate jointly form a containing groove, the second base plate is provided with a central hole, the first base plate is located in the containing groove, one end of the first rotating shaft is connected to the first base plate, the other end of the first rotating shaft extends out through the central hole and is connected to the first motor, and the lower surface of the annular block is provided with a brush;

[0008] The transmission mechanism comprises a second rotating shaft, a driving gear and a gear ring, one end of the second rotating shaft is connected to the first motor, the other end of the second rotating shaft is connected to the driving gear, the gear ring is fixed to the upper surface of the second base plate and is coaxially arranged with the second base plate, and the driving gear and the gear ring are in meshing engagement.

[0009] In an embodiment of the present application, the support comprises a mounting plate, a first side plate, a second side plate and a positioning member, the first side plate and the second side plate are respectively connected to the two sides of the mounting plate.

[0010] The positioning member comprises an upper plate, a left side plate, a right side plate, a left lower plate and a right lower plate, the left side plate and the right side plate are respectively connected to the two sides of the upper plate, the left lower plate and the left side plate are connected at the end portions thereof, the right lower plate and the right side plate are connected at the end portions thereof, and the left lower plate and the right lower plate are fixed to the upper surface of the mounting plate.

[0011] The first motor and the second motor are both mounted on the upper surface of the upper plate, the upper plate is provided with a first through hole and a second through hole, the mounting plate is provided with a third through hole and a fourth through hole, the first through hole and the third through hole are coaxially arranged, the second through hole and the fourth through hole are coaxially arranged, the motor shaft of the first motor is simultaneously inserted into the first through hole and the third through hole, and the motor shaft of the second motor is simultaneously inserted into the second through hole and the fourth through hole.

[0012] In an embodiment of the present application, the support member comprises a top plate, a left elastic plate, a right elastic plate, a left bottom plate and a right bottom plate, the left elastic plate and the right elastic plate are respectively arranged on the two sides of the top plate.

[0013] One end of the left elastic plate is connected to the top plate, the other end of the left elastic plate is connected to the left bottom plate, one end of the right elastic plate is connected to the top plate, the other end of the right elastic plate is connected to the right bottom plate, and the left bottom plate and the right bottom plate are located on the same horizontal plane and are both parallel to the top plate.

[0014] In an embodiment of the present application, the left elastic plate and the right elastic plate are both W-shaped bent plates.

[0015] In an embodiment of the present application, the cleaning brush assembly further comprises a third rotating shaft and a balance gear, the mounting plate is provided with a fifth through hole, the third rotating shaft is inserted into the fifth through hole, the balance gear is connected to the third rotating shaft, and the balance gear is in meshing engagement with the gear ring.

[0016] The driving gear and the balance gear are symmetrically arranged on the two sides of the first rotating shaft.

[0017] In one embodiment of the utility model, first pivot and the driving gear are integral structure, third pivot and the balance gear are integral structure.

[0018] In one embodiment of the utility model, the oil stone polishing assembly further includes a first shaft sleeve, the first shaft sleeve is sleeved on the outer surface of the first pivot.

[0019] In one embodiment of the utility model, the cleaning brush assembly further includes a second shaft sleeve, the second shaft sleeve is sleeved on the outer surface of the second pivot.

[0020] In one embodiment of the utility model, the oil stone polishing assembly further includes a snap ring, the snap ring is sleeved on the outside of the first pivot, and the snap ring and the first bottom plate are located on the two sides of the second bottom plate respectively.

[0021] In one embodiment of the utility model, the lower surface of the annular block of the outer turntable is provided with a plurality of brush holes, and a plurality of bristles are arranged in each brush hole.

[0022] Compared with the prior art, the utility model has the beneficial effects of:

[0023] In the above scheme of the application, the cleaning assembly comprises a support, an oil stone polishing assembly and a cleaning brush assembly. The oil stone polishing assembly comprises a first motor, an inner rotating disc, a support member and an oil stone piece. The cleaning brush assembly comprises a second motor, a transmission mechanism and an outer rotating disc. The first motor and the second motor are both mounted on the support. The inner rotating disc comprises a first bottom disc and a first rotating shaft. The first rotating shaft is connected between the first motor and the bottom disc. One end of the support member is connected to the lower surface of the first bottom disc, and the other end of the support member is connected to the oil stone piece. The outer rotating disc comprises a second bottom disc and an annular block. The annular block is connected to the lower surface of the second bottom disc. The inner annular surface of the annular block and the lower surface of the second bottom disc jointly form a receiving groove. A central hole is arranged on the second bottom disc. The first bottom disc is located in the receiving groove. One end of the first rotating shaft is connected to the first bottom disc, and the other end of the first rotating shaft extends out of the central hole and is connected to the first motor. The lower surface of the annular block is provided with a brush. The transmission mechanism comprises a second rotating shaft, a driving gear and a gear ring. One end of the second rotating shaft is connected to the first motor, and the other end of the second rotating shaft is connected to the driving gear. The gear ring is fixed to the upper surface of the second bottom disc and is coaxially arranged with the second bottom disc. The driving gear and the gear ring are in meshing engagement. In this way, when the first motor rotates, the first rotating shaft rotates, the inner rotating disc rotates when the first rotating shaft rotates, and the oil stone piece rotates when the inner rotating disc rotates. The oil stone piece can polish the surface of the bearing table when it rotates, thereby improving the flatness and smoothness of the bearing table. When the second motor rotates, the second rotating shaft rotates, the driving gear rotates when the second rotating shaft rotates, the gear ring rotates when the driving gear rotates, and the rotating disc rotates, thereby driving the brush to brush the surface of the bearing table. When the above structure of the application is adopted, the oil stone polishing assembly and the cleaning brush assembly are jointly integrated on the support, so that the brushing of the cleaning brush assembly and the polishing of the oil stone polishing assembly can be performed simultaneously, thereby improving the convenience of using the cleaning assembly. Moreover, the first motor and the second motor are used to control the rotation of the brush and the oil stone piece respectively, so that the rotation directions of the brush and the oil stone piece can be opposite, thereby further improving the cleaning effect of the cleaning assembly.

[0024] The application will be further described in detail below with reference to the drawings and embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a three-dimensional schematic view of the cleaning assembly in the embodiment of the application Figure One ;

[0026] Figure 2 is a three-dimensional schematic view of the cleaning assembly in the embodiment of the application Figure Two ;

[0027] Figure 3 is a front view of the cleaning assembly in the embodiment of the application

[0028] Figure 4is a top view of the cleaning assembly in the embodiment of the utility model;

[0029] Figure 5 is a sectional view of the cleaning assembly in the embodiment of the utility model;

[0030] Figure 6 is a bottom view of the cleaning assembly in the embodiment of the utility model;

[0031] Figure 7 is an explosion view of the cleaning assembly in the embodiment of the utility model.

[0032] Reference signs: 1 - support, 11 - mounting plate, 12 - first side plate, 13 - second side plate, 14 - positioning piece, 2 - oil stone polishing assembly, 21 - first motor, 22 - inner rotating disc, 221 - first bottom disc, 222 - first rotating shaft, 23 - supporting piece, 24 - oil stone piece, 3 - cleaning brush assembly, 31 - second motor, 32 - transmission mechanism, 321 - second rotating shaft, 322 - driving gear, 323 - gear ring, 33 - outer rotating disc, 331 - second bottom disc, 332 - annular block, 34 - brush, 35 - balance gear, 36 - third rotating shaft, 4 - first shaft sleeve, 5 - second shaft sleeve, 6 - snap ring. DETAILED DESCRIPTION

[0033] The utility model will be described in further detail in combination with specific embodiments, but the implementation mode of the utility model is not limited to this.

[0034] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7The utility model embodiment provides a kind of for the cleaning assembly of wafer thinning machine bearing platform, including support 1, oilstone polishing component 2 and cleaning brush component 3, oilstone polishing component 2 includes first motor 21, inner turntable 22, support piece 23 and oilstone sheet 24, cleaning brush component 3 includes second motor 31, transmission mechanism 32 and outer turntable 33;First motor 21 and second motor 31 are all installed on support 1, inner turntable 22 includes first bottom disc 221 and first shaft 222, and first shaft 222 is connected between bottom disc and first motor 21, the lower surface of first bottom disc 221 is connected with the one end of support piece 23, and the other end of support piece 23 is connected with oilstone sheet 24;Outer turntable 33 includes second bottom disc 331 and annular block 332, annular block 332 is connected to the lower surface of second bottom disc 331, and the inner ring surface of annular block 332 and the lower surface of second bottom disc 331 are jointly enclosed to form accommodating groove, and central hole is provided on second bottom disc 331, first bottom disc 221 is located in accommodating groove, one end of first shaft 222 is connected with first bottom disc 221, and the other end is connected with first motor 21 and is connected with first motor 21, and the lower surface of annular block 332 is provided with brush 34;Transmission mechanism 32 includes second shaft 321, driving gear 322 and gear ring 323, one end of second shaft 321 is connected with first motor 21, the other end of second shaft 321 is connected with driving gear 322, gear ring 323 is fixed on the upper surface of second bottom disc 331 and is coaxially arranged with second bottom disc 331, and driving gear 322 and gear ring 323 are engaged.

[0035] In some embodiments of the application, as shown in Figure 5 The first bottom disc 221 and the first shaft 222 are an integral molding structure, the first shaft 222 is perpendicular to the upper surface of the first bottom disc 221, and the axis of the first shaft 222 and the central axis of the first bottom disc 221 are on the same straight line.

[0036] In some embodiments of the application, the motor shaft of the first motor 21 and the first shaft 222 are connected through a shaft coupling, and the motor shaft of the second motor 31 and the second shaft 321 are connected through a shaft coupling.

[0037] In some embodiments of the application, as shown in Figure 1 , Figure 3 , Figure 5 and Figure 6 The oilstone sheet 24 is an annular sheet body, and the lower surface of the annular sheet body is provided with a plurality of polishing protrusions.

[0038] In some embodiments of the application, as shown in Figure 5 The second bottom disc 331 and the annular block 332 are an integral molding structure.

[0039] In some embodiments of the application, as shown in Figure 7As shown, the gear ring 323 is arranged on the upper surface of the second base 331, the second rotating shaft 321 and the driving gear 322 are in an integrated structure, and the axis of the second rotating shaft 321 and the axis of the driving gear 322 are on the same line.

[0040] In some embodiments of the present application, as shown in Figure 7 As shown, the gear ring 323 has annular inner teeth, the driving gear 322 has outer teeth, and the outer teeth of the driving gear 322 and the inner teeth of the gear ring 323 are engaged.

[0041] In some embodiments of the present application, the cross-sectional area of the first base 221 is greater than the cross-sectional area of the central hole, and the first base 221 can carry the second base 331 to ensure that the outer rotating disc 33 can be normally installed and moved. Wherein, the first base 221 and the second base 331 can rotate in the same direction, or can rotate in opposite directions.

[0042] When cleaning, the carrying table is in a rotating state, at this time, the oil stone sheet 24 can be driven to rotate by the first motor 21, and the rotating direction of the oil stone sheet 24 is opposite to the rotating direction of the carrying table, so as to improve the polishing effect of the oil stone sheet 24; at the same time, the outer rotating disc 33 can be driven to rotate by the second motor 31, and the rotating direction of the outer rotating disc 33 is the same as the rotating direction of the carrying table, so as to improve the brushing effect of the brush 34.

[0043] In the above scheme of the application, the cleaning assembly comprises a support 1, an oil stone polishing assembly 2 and a cleaning brush assembly 3. The oil stone polishing assembly 2 comprises a first motor 21, an inner rotating disc 22, a support 23 and an oil stone sheet 24. The cleaning brush assembly 3 comprises a second motor 31, a transmission mechanism 32 and an outer rotating disc 33. The first motor 21 and the second motor 31 are both mounted on the support 1. The inner rotating disc 22 comprises a first bottom disc 221 and a first rotating shaft 222. The first rotating shaft 222 connects the first motor 21 and the bottom disc. One end of the support 23 is connected to the lower surface of the first bottom disc 221, and the other end of the support 23 is connected to the oil stone sheet 24. The outer rotating disc 33 comprises a second bottom disc 331 and an annular block 332. The annular block 332 is connected to the lower surface of the second bottom disc 331. The inner annular surface of the annular block 332 and the lower surface of the second bottom disc 331 together form a receiving groove. The second bottom disc 331 is provided with a central hole. The first bottom disc 221 is located in the receiving groove. One end of the first rotating shaft 222 is connected to the first bottom disc 221, and the other end of the first rotating shaft 222 extends out of the central hole and is connected to the first motor 21. The lower surface of the annular block 332 is provided with a brush 34. The transmission mechanism 32 comprises a second rotating shaft 321, a driving gear 322 and a gear ring 323. One end of the second rotating shaft 321 is connected to the first motor 21, and the other end of the second rotating shaft 321 is connected to the driving gear 322. The gear ring 323 is fixed to the upper surface of the second bottom disc 331 and is coaxially arranged with the second bottom disc 331. The driving gear 322 and the gear ring 323 are in meshing engagement. In this way, when the first motor 21 rotates, the first rotating shaft 222 rotates, and the inner rotating disc 22 rotates when the first rotating shaft 222 rotates. The oil stone sheet 24 rotates when the inner rotating disc 22 rotates through the support 23. The oil stone sheet 24 can polish the surface of the bearing table when it rotates, thereby improving the flatness and smoothness of the bearing table. When the second motor 31 rotates, the second rotating shaft 321 rotates, and the driving gear 322 rotates when the second rotating shaft 321 rotates. The gear ring 323 rotates when the driving gear 322 rotates, thereby driving the rotating disc to rotate. The brush 34 can clean the surface of the bearing table when the rotating disc rotates. When the above structure of the application is adopted, the oil stone polishing assembly 2 and the cleaning brush assembly 3 are integrated on the support 1, so that the cleaning of the cleaning brush assembly and the polishing of the oil stone polishing assembly 2 can be performed simultaneously, thereby improving the convenience of using the cleaning assembly. Moreover, the first motor 21 and the second motor 31 are used to control the rotation of the brush 34 and the oil stone sheet 24 respectively, so that the rotation directions of the brush 34 and the oil stone sheet 24 can be opposite, thereby further improving the cleaning effect of the cleaning assembly.

[0044] In some embodiments of the application, as Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6As shown, the support frame 1 comprises a mounting plate 11, a first side plate 12, a second side plate 13 and a positioning member 14, the first side plate 12 and the second side plate 13 are respectively connected to the two sides of the mounting plate 11; the positioning member 14 comprises an upper plate, a left side plate, a right side plate, a left lower plate and a right lower plate, the left side plate and the right side plate are respectively connected to the two sides of the upper plate, the end of the left lower plate is connected to the left side plate, the end of the right lower plate is connected to the right side plate, and the left lower plate and the right lower plate are both fixed to the upper surface of the mounting plate 11; the first motor 21 and the second motor 31 are both installed on the upper surface of the upper plate, the upper plate is provided with a first through hole and a second through hole, the mounting plate 11 is provided with a third through hole and a fourth through hole, the first through hole and the third through hole are coaxially arranged, the second through hole and the fourth through hole are coaxially arranged, the motor shaft of the first motor 21 is simultaneously inserted into the first through hole and the third through hole, and the motor shaft of the second motor 31 is simultaneously inserted into the second through hole and the fourth through hole. By using this structure, the cleaning brush assembly 3 and the oil stone polishing assembly 2 can be supported by the mounting plate 11, the first side plate 12, the second side plate 13 and the positioning member 14, so that the stability of the cleaning brush assembly 3 and the oil stone polishing assembly 2 can be improved.

[0045] In some embodiments of the present application, the first side plate 12 and the second side plate 13 are both provided with an ear plate, the ear plate is provided with a mounting hole, and the ear plate can be connected to an external driving assembly. The external driving assembly can be a common mechanical arm, the ear plates of the first side plate 12 and the second side plate 13 are connected to the mechanical arm, and the cleaning assembly can be driven to move close to or away from the bearing table by the mechanical arm; the external driving assembly can also be a linear driving assembly, such as a screw nut mechanism, and the cleaning assembly can be driven to move linearly to approach or move away from the bearing table by the screw nut mechanism.

[0046] In some embodiments of the present application, the cleaning assembly further comprises a lifting assembly and a transverse driving assembly, the lifting assembly can be a screw nut mechanism arranged in the vertical direction, the transverse driving assembly can be a screw nut mechanism arranged in the horizontal direction, the lifting assembly is installed on the transverse driving assembly, and the ear plates of the first side plate 12 and the second side plate 13 are connected to the lifting assembly. In this way, when the transverse driving assembly drives the lifting assembly to move transversely, the lifting assembly can drive the cleaning brush assembly 3 and the oil stone polishing assembly 2 to move transversely; the lifting assembly can drive the cleaning brush assembly 3 and the oil stone polishing assembly 2 to move up and down, so that the cleaning brush assembly 3 and the oil stone polishing assembly 2 can move close to the bearing table for cleaning and polishing, or move away from the bearing table for the next thinning operation. Moreover, the transverse driving assembly can also drive the cleaning brush assembly 3 and the oil stone polishing assembly 2 to repeatedly move in the horizontal direction, so that the cleaning brush assembly 3 and the oil stone polishing assembly 2 can repeatedly brush and polish the surface of the bearing table.

[0047] In some embodiments of the present application, the lower surface of the mounting plate 11 is further provided with an annular fence, the first motor 21 is installed on the upper surface of the upper plate of the positioning member 14, and the motor shaft of the first motor 21 extends into the annular fence through the first and third perforations in sequence; the second motor 31 is installed on the upper surface of the upper plate of the positioning member 14, and the motor shaft of the second motor 31 extends into the annular fence through the second and fourth perforations in sequence. In this way, the motor shafts of the first and second motors 21 and 31, the first rotating shaft 222 and the second rotating shaft 321 are shielded by the annular fence, which can improve the safety and aesthetics of the entire cleaning assembly.

[0048] In some embodiments of the present application, two first mounting holes are respectively arranged on the left lower plate and the right lower plate of the positioning member 14, and four second mounting holes are arranged on the mounting plate 11. The first mounting holes and the second mounting holes correspond to each other one by one, and the positioning member 14 can be fixed to the mounting plate 11 by means of bolts extending through the first and second mounting holes and locked with nuts.

[0049] In some embodiments of the present application, as shown in Figure 5 The support member 23 includes a top plate, a left elastic plate, a right elastic plate, a left bottom plate and a right bottom plate. The left and right elastic plates are arranged on both sides of the top plate. One end of the left elastic plate is connected to the top plate, and the other end of the left elastic plate is connected to the left bottom plate. One end of the right elastic plate is connected to the top plate, and the other end of the right elastic plate is connected to the right bottom plate. The left and right bottom plates are located on the same horizontal plane and are parallel to the top plate. This structure can support the oilstone 24 through the top plate, the left and right elastic plates, the left and right bottom plates, and improve the stability of the movement of the oilstone 24. The elastic effect of the left and right elastic plates can also improve the polishing effect of the oilstone 24.

[0050] In some embodiments of the present application, the distance between the oilstone 24 and the first bottom disc 221 is greater than the distance between the brush 34 and the first bottom disc 221, i.e. the oilstone 24 protrudes from the brush 34. Specifically, the distance between the oilstone 24 and the first bottom disc 221 is 3 mm greater than the distance between the brush 34 and the first bottom disc 221. In this way, during cleaning, the oilstone polishing assembly 2 can move towards one side of the first bottom disc 221 to contract the left and right elastic plates, so that the left and right elastic plates are contracted by at least 3 mm to ensure that the brush 34 can contact the surface of the bearing table for brushing.

[0051] In some embodiments of the present application, the left elastic plate and the right elastic plate are both W-shaped bent plates. The W-shaped bent plate comprises four inclined plates connected in sequence, and an acute angle exists between adjacent two inclined plates. When the oil stone piece 24 is pressed by the bearing table, the oil stone piece 24 can exert pressure on the W-shaped bent plate, so that the W-shaped bent plate is deformed and compressed, and the deformed W-shaped bent plate exerts an elastic force on the oil stone piece 24, so that the oil stone piece 24 is pressed against the surface of the bearing table, thereby improving the polishing effect of the oil stone piece 24.

[0052] In some embodiments of the present application, the left elastic plate and the right elastic plate are both W-shaped bent plates. The W-shaped bent plate comprises four inclined plates connected in sequence, and an acute angle exists between adjacent two inclined plates. When the oil stone piece 24 is pressed by the bearing table, the oil stone piece 24 can exert pressure on the W-shaped bent plate, so that the W-shaped bent plate is deformed and compressed, and the deformed W-shaped bent plate exerts an elastic force on the oil stone piece 24, so that the oil stone piece 24 is pressed against the surface of the bearing table, thereby improving the polishing effect of the oil stone piece 24.

[0053] In some embodiments of the present application, as shown in Figure 5 and Figure 7 The cleaning brush assembly 3 further comprises a third rotating shaft 36 and a balance gear 35. The installation plate 11 is provided with a fifth through hole, the third rotating shaft 36 is inserted into the fifth through hole, the balance gear 35 is connected with the third rotating shaft 36, and the balance gear 35 is engaged with the gear ring 323. The driving gear 322 and the balance gear 35 are symmetrically arranged on both sides of the first rotating shaft 222. By using this structure, the third rotating shaft 36 and the balance gear 35 can balance the force acting on the outer rotating disc 33, thereby improving the stability of the rotation of the outer rotating disc 33.

[0054] In some embodiments of the present application, a bearing can be arranged in the fifth through hole. The inner ring of the bearing is in interference fit with the third rotating shaft 36, and the outer ring of the bearing is in interference fit with the fifth through hole. In this way, the stability of the third rotating shaft 36 and the balance gear 35 can be improved.

[0055] In some embodiments of the present application, as shown in Figure 7 The first rotating shaft 222 and the driving gear 322 are in an integrated structure, and the third rotating shaft 36 and the balance gear 35 are in an integrated structure. By using this structure, the stability of the movement of the driving gear 322 and the balance gear 35 can be improved.

[0056] In some embodiments of the present application, the oil stone polishing assembly 2 further comprises a first shaft sleeve 4, and the first shaft sleeve 4 is sleeved on the outer surface of the first rotating shaft 222. By using this structure, the first shaft sleeve 4 can support the first rotating shaft 222, thereby improving the stability of the movement of the first rotating shaft 222.

[0057] In some embodiments of the present application, the cleaning brush assembly 3 further comprises a second shaft sleeve 5, and the second shaft sleeve 5 is sleeved on the outer surface of the second rotating shaft 321. By using the second shaft sleeve 5 to support the second rotating shaft 321, the stability of the movement of the second rotating shaft 321 can be improved.

[0058] In an embodiment of the utility model, oil stone polishing assembly 2 still includes snap ring 6, snap ring 6 is set to the outside of first pivot shaft 222, and snap ring 6 and first bottom disc 221 are located at the both sides of second bottom disc 331 respectively.Using this structure, second bottom disc 331 is clamped between first bottom disc 221 and snap ring 6, and the stability of second bottom disc 331 can be improved.

[0059] In an embodiment of the utility model, snap ring 6 is elastic ring, wherein, snap ring 6 includes ring body, is equipped with opening on ring body, and is equipped with locking block at the both ends of opening, and is equipped with through hole on locking block.When installing, first open the opening of ring body to make ring body can be set on first pivot shaft 222, and after snap ring 6 is installed on first pivot shaft 222, the mode that bolt passes through the through hole equipped with on two locking blocks and is locked with nut in proper order can be used to fasten snap ring 6 on first pivot shaft 222.

[0060] In an embodiment of the utility model, as shown in Figure 6 The lower surface of annular block 332 of outer rotating disc 33 is equipped with multiple brush holes, and multiple bristles are arranged in each brush hole. Among them, the bristles in multiple brush holes jointly form brush 34. Using this structure, through multiple bristles for brushing, the brushing effect of cleaning brush assembly can be improved.

[0061] In an embodiment of the utility model, multiple brush holes are sequentially arranged along the circumference of annular block 332, at this time, multiple brush holes are annular structure.

[0062] In some embodiments of the application, as shown in Figure 6 The lower surface of annular block 332 is equipped with multiple first brush holes and second brush holes sequentially arranged along the circumference of annular block 332, multiple first brush holes form first annular hole structure, and multiple second brush holes form second annular hole structure. Among them, the diameter of first annular hole structure is greater than the diameter of second annular hole structure.

[0063] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.

[0064] In addition, the terms "first", "second", "third" and "fourth" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implying a number of the indicated technical features. Therefore, the features defined with "first", "second", "third" and "fourth" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0065] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0066] The above is a further detailed description of the present application in combination with specific preferred embodiments, which cannot be considered as limiting the specific implementation of the present application to these descriptions. For ordinary skilled in the art, without departing from the concept of the present application, a number of simple deductions or substitutions can be made, which should be considered as belonging to the protection scope of the present application.

Claims

1. A cleaning assembly for a wafer thinning machine support table, the cleaning assembly comprising: a cleaning head having a plurality of cleaning elements; a cleaning fluid supply; and a controller configured to control the cleaning head and the cleaning fluid supply. The oil stone polishing assembly comprises a first motor, an inner rotating disc, a support and an oil stone sheet, and the cleaning brush assembly comprises a second motor, a transmission mechanism and an outer rotating disc; The first motor and the second motor are both mounted on the support, the inner rotating disc comprises a first bottom disc and a first rotating shaft, the first rotating shaft is connected between the bottom disc and the first motor, one end of the support is connected to the lower surface of the first bottom disc, and the other end of the support is connected to the oil stone sheet; The outer rotating disc comprises a second bottom disc and an annular block, the annular block is connected to the lower surface of the second bottom disc, the inner ring surface of the annular block and the lower surface of the second bottom disc jointly form a containing groove, a central hole is arranged on the second bottom disc, the first bottom disc is located in the containing groove, one end of the first rotating shaft is connected to the first bottom disc, the other end of the first rotating shaft extends out through the central hole and is connected to the first motor, and the lower surface of the annular block is provided with a brush; The transmission mechanism comprises a second rotating shaft, a driving gear and a gear ring, one end of the second rotating shaft is connected to the first motor, the other end of the second rotating shaft is connected to the driving gear, the gear ring is fixed to the upper surface of the second bottom disc and is coaxially arranged with the second bottom disc, and the driving gear and the gear ring are in meshing engagement.

2. The cleaning assembly for a wafer thinning machine carrier table of claim 1, wherein, The support comprises a mounting plate, a first side plate, a second side plate and a positioning member, the first side plate and the second side plate are respectively connected to the two sides of the mounting plate; The positioning member comprises an upper plate, a left side plate, a right side plate, a left lower plate and a right lower plate, the left side plate and the right side plate are respectively connected to the two sides of the upper plate, the left lower plate and the left side plate are connected at the end portions thereof, the right lower plate and the right side plate are connected at the end portions thereof, and the left lower plate and the right lower plate are both fixed to the upper surface of the mounting plate; The first motor and the second motor are both mounted on the upper surface of the upper plate, the upper plate is provided with a first through hole and a second through hole, the mounting plate is provided with a third through hole and a fourth through hole, the first through hole and the third through hole are coaxially arranged, the second through hole and the fourth through hole are coaxially arranged, the motor shaft of the first motor is simultaneously inserted into the first through hole and the third through hole, and the motor shaft of the second motor is simultaneously inserted into the second through hole and the fourth through hole.

3. The cleaning assembly for a wafer thinning machine carrier table of claim 2, wherein, The support comprises a top plate, a left elastic plate, a right elastic plate, a left bottom plate and a right bottom plate, the left elastic plate and the right elastic plate are respectively arranged on the two sides of the top plate; One end of the left elastic plate is connected to the top plate, the other end of the left elastic plate is connected to the left bottom plate, one end of the right elastic plate is connected to the top plate, the other end of the right elastic plate is connected to the right bottom plate, and the left bottom plate and the right bottom plate are located on the same horizontal plane and are both parallel to the top plate.

4. The cleaning assembly for a wafer thinning machine carrier table of claim 3, wherein, The left elastic plate and the right elastic plate are both W-shaped bent plates.

5. The cleaning assembly for a wafer thinning machine carrier table of claim 2, wherein, The cleaning brush assembly further comprises a third rotating shaft and a balance gear, the mounting plate is provided with a fifth through hole, the third rotating shaft is inserted into the fifth through hole, the balance gear is connected with the third rotating shaft, and the balance gear is engaged with the gear ring. The driving gear and the balance gear are symmetrically arranged on two sides of the first rotating shaft.

6. The cleaning assembly for a wafer thinning machine carrier table of claim 5, wherein, The first rotating shaft and the driving gear are in an integrated structure, and the third rotating shaft and the balance gear are in an integrated structure.

7. The cleaning assembly for a wafer thinning machine carrier table of claim 2, wherein, The oil stone polishing assembly further comprises a first shaft sleeve, and the first shaft sleeve is sleeved on the outer surface of the first rotating shaft.

8. The cleaning assembly for a wafer thinning machine carrier table of claim 2, wherein, The cleaning brush assembly further comprises a second shaft sleeve, and the second shaft sleeve is sleeved on the outer surface of the second rotating shaft.

9. The cleaning assembly for a wafer thinning machine carrier table of claim 2, wherein, The oil stone polishing assembly further comprises a clamping ring, the clamping ring is sleeved on the outside of the first rotating shaft, and the clamping ring and the first bottom plate are respectively located on two sides of the second bottom plate.

10. The cleaning assembly for a wafer thinning machine carrier table of claim 1, wherein, The lower surface of the annular block of the outer rotating disc is provided with a plurality of brush holes, and a plurality of bristles are arranged in each brush hole.

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