XRD (X-Ray Diffraction) sample disc
By designing a fixing structure for the XRD sample tray, the problems of uneven thickness, easy wrinkling, and adhesive fixation of thin film samples during testing were solved, achieving high-precision testing and convenient sample recovery.
Patent Information
- Application Number
- CN202520171900.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-01-24
AI Technical Summary
Existing technologies often encounter problems when testing thin film samples, such as sample thickness exceeding that of the sample tray, easy wrinkling and difficulty in flattening of the test surface, and damage or contamination of the sample adhesive, which affect the test results or make it difficult to recover the sample.
An XRD sample tray was designed, including a sample tray base and a fixing component. The fixing component is used to restrict the assembly of the monocrystalline silicon wafer and the silicon wafer substrate. By combining springs and fixing bars, the height of the monocrystalline silicon wafer is limited, the sheet sample is pressed tightly, and it is made flush with the sample tray base, which improves the testing accuracy and facilitates the subsequent removal of the sample.
It effectively improves the accuracy of thin film sample testing, ensures that samples are flat and tightly pressed, reduces the risk of sample breakage and contamination, and simplifies the sample recovery process.
Smart Images
Figure CN223870570U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to sample testing technical field, concretely relates to a XRD sample disc. BACKGROUND
[0002] X-ray diffraction technology (XRD) is an important material analysis tool, can provide material phase, crystal structure etc.
[0003] At present, the sample disc configured by polycrystal X-ray diffractometer mainly has organic glass powder deep dish, single crystal silicon disc (zero background disc) and solid disc, wherein the groove depth of the organic glass powder deep dish is 1mm, is often used for preparing powder sample with large amount, the groove depth of the single crystal silicon disc is 0.3mm, is often used for preparing powder sample with small amount, the groove depth of the solid disc is 5mm, is often used for preparing block sample. SUMMARY
[0004] The utility model discloses a XRD sample disc.
[0005] The utility model discloses a XRD sample disc.
[0006] A XRD sample disc, comprising a sample disc base plate,
[0007] The inner groove of the sample disc base plate is fixed with a fixing piece on the upper surface, and the fixing piece is used to limit the combination of single crystal silicon wafer and silicon wafer substrate from protruding from the upper surface of the sample disc base plate.
[0008] As a further description of the above technical scheme, the bottom of the combination is connected with a spring, and the other end of the spring is connected with the bottom wall of the sample disc base plate.
[0009] As a further description of the above technical scheme, the fixing piece is a plurality of fixing strips, the fixing strips are connected with the upper surface of the sample disc base plate through bolts, and the fixing strips are arranged above the combination.
[0010] As a further description of the above technical solution, two fixing strips are provided, and the distance between the two fixing strips is 25.2mm.
[0011] As a further description of the above technical solution, the fixing strip is made of aluminum alloy.
[0012] As a further description of the above technical solution, the dimensions of the fixing strip are 32mm*3mm*1mm.
[0013] As a further description of the above technical solution, the silicon substrate is bonded to the monocrystalline silicon wafer as a whole.
[0014] As a further description of the above technical solution, the silicon wafer substrate is made of aluminum alloy.
[0015] As a further description of the above technical solution, the assembly can be any one of an ellipse, a square, or a circle.
[0016] As a further description of the above technical solution, the outer diameter of the sample tray base is 51mm, the inner diameter of the inner groove is 40mm, the height of the sample tray is 8.5mm, and the depth of the inner groove is 6.5mm.
[0017] The beneficial effects of this utility model are as follows:
[0018] This invention uses a fixing strip to limit the height of the monocrystalline silicon wafer and press the sheet sample tightly, making the sample test surface flush with the height of the sample tray base. This is more conducive to subsequent testing, can effectively improve test accuracy, and makes it easier to remove the sample after the fixing strip is removed.
[0019] To more clearly illustrate the structural features and functions of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description
[0020] Figure 1 This is a top view of the XRD sample tray provided by this utility model;
[0021] Figure 2 This is a side view of the XRD sample tray provided by this utility model;
[0022] Figure 3 This is a cross-sectional view of the XRD sample tray provided by this utility model;
[0023] Figure 4 This is a top view of the XRD sample disk in another embodiment provided by this utility model;
[0024] Figure 5 This is a top view of the XRD sample disk in another embodiment provided by this utility model.
[0025] Reference numerals: 1. Sample tray base; 2. Inner groove; 3. Assembly; 31. Monocrystalline silicon wafer; 32. Silicon wafer substrate; 4. Fixing strip; 5. Spring. Detailed Implementation
[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.
[0027] Example 1:
[0028] like Figures 1-3 As shown, an XRD sample tray includes a sample tray base 1;
[0029] The sample tray base 1 has an inner groove 2 inside, and a fixing member is fixed on the upper surface of the inner groove 2. The fixing member is used to restrict the assembly 3 of the single crystal silicon wafer 31 and the silicon wafer substrate 32 from protruding from the upper surface of the sample tray base 1.
[0030] A spring 5 is connected to the bottom of the assembly 3, and the other end of the spring 5 is connected to the bottom wall of the sample tray base 1. Optionally, the fixing element is a plurality of fixing strips 4. The fixing strips 4 are connected to the upper surface of the sample tray base 1 by bolts, and the fixing strips 4 are set above the assembly 3. The fixing strips 4 can limit the height of the single crystal silicon wafer 31 and press the sheet sample, so that the sample test surface is flush with the height of the sample tray base 1, which is more conducive to subsequent testing, can effectively improve the test accuracy, and makes it easier to remove the sample after the fixing strips 4 are removed.
[0031] Optionally, assembly 3 consists of a monocrystalline silicon wafer 31 and a silicon wafer substrate 32 bonded together. The silicon wafer substrate 32 is made of aluminum alloy. By setting the silicon wafer substrate 32, the stress strength of the monocrystalline silicon wafer 31 can be enhanced.
[0032] Optionally, the fixing strip 4 is made of aluminum alloy, which can effectively improve the strength of the fixing strip 4. In some other embodiments, other materials can be selected, depending on specific needs.
[0033] Specifically, the outer diameter of the sample tray base 1 is 51mm, the inner diameter of the inner groove 2 is 40mm, the height of the sample tray base 1 is 8.5mm, the depth of the inner groove 2 is 6.5mm, and the sample tray base 1 is made of aluminum alloy.
[0034] The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are elliptical wafers with a major axis of 31.2 mm, a minor axis of 25 mm, and a thickness of 1 mm. The silicon wafer substrate 32 is made of aluminum alloy. The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are bonded together.
[0035] The two ends of the spring 5 are connected to the silicon wafer substrate 32 and the sample tray base 1, respectively.
[0036] The fixing strip 4 is made of aluminum alloy and measures 32mm*3mm*1mm. The distance between the two fixing strips 4 is 25.2mm. The two ends of the fixing strip 4 are fixed to the sample tray base 1 with bolts.
[0037] Example 2:
[0038] refer to Figure 4 An XRD sample tray includes a single-crystal silicon wafer 31, a silicon wafer substrate 32, a spring 5, a fixing strip 4, and a sample tray base 1. The silicon wafer substrate 32 is bonded to the single-crystal silicon wafer 31. The spring 5 is installed below the silicon wafer substrate 32. The fixing strip 4 is connected to the sample tray base 1. The single-crystal silicon wafer 31 and the silicon wafer substrate 32 are located between the fixing strip 4 and the spring 5.
[0039] The outer diameter of the sample tray base 1 is 51mm, the inner diameter of the inner groove 2 is 40mm, the height of the sample tray base 1 is 8.5mm, the depth of the inner groove 2 is 6.5mm, and the sample tray base 1 is made of aluminum alloy.
[0040] The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are square sheets of 31.2mm*25mm*1mm. The silicon wafer substrate 32 is made of aluminum alloy. The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are bonded together.
[0041] The two ends of the spring 5 are connected to the silicon wafer substrate 32 and the sample tray base 1, respectively.
[0042] The fixing strip 4 is made of aluminum alloy and measures 32mm*3mm*1mm. The distance between the two fixing strips 4 is 25.2mm. The two ends of the fixing strip 4 are fixed to the sample tray base 1 with bolts.
[0043] Example 3:
[0044] refer to Figure 5 An XRD sample tray includes a single-crystal silicon wafer 31, a silicon wafer substrate 32, a spring 5, a fixing strip 4, and a sample tray base 1. The silicon wafer substrate 32 is bonded to the single-crystal silicon wafer 31. The spring 5 is installed below the silicon wafer substrate 32. The fixing strip 4 is connected to the sample tray base 1. The single-crystal silicon wafer 31 and the silicon wafer substrate 32 are located between the fixing strip 4 and the spring 5.
[0045] The outer diameter of the sample tray base 1 is 51mm, the inner diameter of the inner groove 2 is 40mm, the height of the sample tray base 1 is 8.5mm, the depth of the inner groove 2 is 6.5mm, and the sample tray base 1 is made of aluminum alloy.
[0046] The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are circular wafers with a diameter of 31.2 mm. The silicon wafer substrate 32 is made of aluminum alloy. The monocrystalline silicon wafer 31 and the silicon wafer substrate 32 are bonded together.
[0047] The two ends of the spring 5 are connected to the silicon wafer substrate 32 and the sample tray base 1, respectively.
[0048] The fixing strip 4 is made of aluminum alloy and measures 32mm*3mm*1mm. The distance between the two fixing strips 4 is 25.2mm. The two ends of the fixing strip 4 are fixed to the sample tray base 1 with bolts.
[0049] All standard parts used in this utility model can be purchased from the market, and non-standard parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.
[0050] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An XRD sample tray, characterized in that, Includes sample tray base; The sample tray base has an inner groove inside, and a fixing member is fixed on the upper surface of the inner groove. The fixing member is used to restrict the assembly of the single crystal silicon wafer and the silicon wafer substrate from protruding from the upper surface of the sample tray base.
2. The XRD sample tray according to claim 1, characterized in that, A spring is connected to the bottom of the assembly, and the other end of the spring is connected to the bottom wall of the sample tray base.
3. The XRD sample tray according to claim 1, characterized in that, The fixing component consists of multiple fixing strips, which are connected to the upper surface of the sample tray base by bolts, and the fixing strips are positioned above the assembly.
4. The XRD sample tray according to claim 3, characterized in that, The fixing strip is provided in two parts, and the distance between the two fixing strips is 25.2mm.
5. The XRD sample tray according to claim 3, characterized in that, The fixing strip is made of aluminum alloy.
6. The XRD sample tray according to claim 4, characterized in that, The dimensions of the fixing strip are 32mm*3mm*1mm.
7. The XRD sample tray according to claim 1, characterized in that, The silicon substrate is bonded to the monocrystalline silicon wafer as a single unit.
8. The XRD sample tray according to claim 4, characterized in that, The silicon wafer substrate is made of aluminum alloy.
9. The XRD sample tray according to claim 1, characterized in that, The assembly can be any one of an ellipse, a square, or a circle.
10. The XRD sample tray according to claim 1, characterized in that, The bottom of the sample tray The outer diameter of the base is 51 mm, the inner diameter of the inner groove is 40 mm, and the height of the sample tray is 8.5 mm. The depth of the inner groove is 6.5 mm.