Dispersion exhaust mechanism of chemical vapor deposition furnace for battery core plate

Abstract

The utility model discloses a dispersed exhaust mechanism of a chemical vapor deposition furnace of a battery core plate. The dispersed exhaust mechanism comprises a cover plate arranged at an air inlet of a bottom plate of the chemical vapor deposition furnace. Through cooperation of the cover plate, the base, the sealing ring, the first layering ring, the second layering ring, the third layering ring, the fourth layering ring, the heating piece, the splitter plate, the circulation opening, the ventilation opening and the exhaust opening, gas can sequentially penetrate through a gap between the first layering ring and the second layering ring and a gap between the second layering ring and the third layering ring; at the moment, the gas is preheated through a heating piece and then is exhausted through an exhaust port of a fourth layered ring, so that the circulation path of the gas can be prolonged, the gas can be fully preheated, and then the atmosphere uniformity in the muffle cylinder can be uniformly improved for the preheated gas through cooperation of a flow dividing hole, an exhaust pipe, a flow guide cover and an air outlet hole; therefore, the uniformity and quality of the coating on the surface of the battery core plate are improved.

Description

Technical Field

[0001] This utility model relates to the technical field of decentralized exhaust mechanism for chemical vapor deposition furnaces, specifically a decentralized exhaust mechanism for a battery cell chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) is a material surface modification technology. It utilizes gas-phase reactions to impart special properties to the surface of materials without altering their composition or weakening their strength. Currently, materials prepared by CVD, such as pyrolytic carbon coatings (PyC), silicon carbide coatings (SiC), tantalum carbide coatings (TaC), and boron nitride coatings (BN), are frequently used in fields such as battery cells. The CVD furnace is one of the essential pieces of equipment for realizing the CVD process. It mainly consists of an inlet system, an exhaust system, a heater, and a muffle furnace. The muffle furnace is a crucial component for carrying the deposited CVD coating, playing a vital role in providing a closed environment, averaging temperature, guiding airflow, and stabilizing the atmosphere.

[0003] A search revealed Chinese patent application number 202420344692.0, which discloses a dispersed exhaust device for a chemical vapor deposition (CVD) furnace. This patent relates to the field of CVD furnace technology and specifically includes a cover plate fastened to the exhaust port of the CVD furnace base. The cover plate includes a conical guide section with a closed end at its upper end. The guide section has diffuser holes with an inclined axis. This dispersed exhaust device for a CVD furnace provides significantly improved atmosphere uniformity within the muffle furnace, thereby enhancing the coating uniformity on the deposited product surface, improving product quality, and extending service life.

[0004] While the aforementioned patent can significantly improve the atmosphere uniformity within the muffle furnace, thereby enhancing the coating uniformity on the deposited product surface and improving product quality and lifespan, in practical use, the inability of this patent to preheat the gas in the inlet pipe can, to some extent, affect the gas's performance. Preheating the gas in a chemical vapor deposition furnace is primarily for improving deposition efficiency and quality. Preheating the gas allows it to reach the required reaction temperature more quickly, accelerating the chemical reaction rate and increasing the deposition speed. Simultaneously, preheating helps reduce the temperature gradient within the reaction chamber, resulting in a more uniform temperature distribution and improved uniformity of the deposited film. This ensures that the reacting gas has sufficient chemical activity when introduced into the reaction chamber, facilitating a full chemical reaction and producing higher-quality deposits.

[0005] Therefore, a decentralized exhaust mechanism for a battery cell chemical vapor deposition furnace is needed to solve the aforementioned problems. Utility Model Content

[0006] To address the problems mentioned in the background art, the purpose of this utility model is to provide a decentralized exhaust mechanism for a chemical vapor deposition furnace for battery cells, which has the advantages of being able to preheat the gas in the inlet pipe, reducing the space occupied by the device used for preheating the gas, and ensuring the furnace loading capacity.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a dispersed exhaust mechanism for a chemical vapor deposition furnace for battery cells, comprising a cover plate disposed at the air inlet of the bottom plate of the chemical vapor deposition furnace, a base fixedly connected to the bottom of the cover plate, a sealing ring fixedly connected to the top of the base, and a first layered ring, a second layered ring, a third layered ring, and a fourth layered ring fixedly connected sequentially from the outside to the inside of the inner wall of the base, wherein the first layered ring, the second layered ring, the third layered ring, and the fourth layered ring all cooperate with the cover plate, and heating elements are symmetrically fixedly connected to the surfaces of the first layered ring, the second layered ring, the third layered ring, and the fourth layered ring. The fourth layer rings are fixedly connected to the same flow divider plate, and the flow divider plate is used in conjunction with the cover plate. The first layer ring has a flow port fixedly connected to the side near the cover plate. The second and third layer rings each have an air vent on the side near the cover plate, and the two air vents are staggered about the flow divider plate. The fourth layer ring has an exhaust port on the side near the cover plate. The top of the cover plate has several flow divider holes, and the several flow divider holes are evenly arranged in a ring. The top of the flow divider holes has a connecting groove, and the interior of the connecting groove is connected to an exhaust pipe. The output end of the exhaust pipe is connected to a guide cover. The top of the guide cover has several air outlet holes, and the several air outlet holes are evenly arranged in a ring.

[0008] As a preferred embodiment of this utility model, the top of the sealing ring is provided with a sealing groove, and the bottom of the cover plate is fixedly connected with a sealing gasket, and the sealing gasket is engaged with the sealing groove.

[0009] In a preferred embodiment of this invention, an exhaust ring is fixedly connected between the sealing ring and the first layered ring. The top of the exhaust ring is connected to several exhaust ports, which are evenly arranged. The input end of the exhaust ring passes through the base and is connected to an air inlet port.

[0010] As a preferred embodiment of this utility model, the number of vents, exhaust ports and air outlets is several, and the several vents, exhaust ports and air outlets are all arranged in a ring and uniformly. A connecting column is fixedly connected to the center of the base, and the connecting column is used in conjunction with the cover plate.

[0011] As a preferred embodiment of this invention, a conical block is fixedly connected to the inner wall of the top of the flow guide cover.

[0012] As a preferred embodiment of this invention, the surface of the sealing ring is fixedly connected to a connecting flange, and the connecting flange is fixedly connected to the cover plate by bolts.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0014] 1. This utility model, through the cooperation of a cover plate, base, sealing ring, first layer ring, second layer ring, third layer ring, fourth layer ring, heating element, flow divider, flow port, vent, and exhaust port, allows gas to sequentially pass through the gaps between the first and second layer rings, and between the second and third layer rings. The gas is then preheated by the heating element and discharged through the exhaust port of the fourth layer ring. This extends the gas flow path and ensures thorough preheating. Furthermore, the cooperation of the flow divider, exhaust pipe, guide cover, and vent improves the uniformity of the atmosphere within the muffle furnace, thereby enhancing the uniformity and quality of the coating on the battery cell surface.

[0015] 2. By setting up a sealing groove and a sealing gasket, this utility model can improve the sealing performance between the cover plate, the sealing ring and the base, thereby preventing gas from overflowing outward through the gap between the sealing ring and the cover plate. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a top perspective view of the base and sealing ring used in conjunction with this utility model.

[0018] Figure 3 This is a bottom-view perspective view of the cover plate and sealing ring used in conjunction with this utility model.

[0019] Figure 4 This is a partial cross-sectional perspective view of the structure of this utility model.

[0020] In the diagram: 1. Cover plate; 2. Base; 3. Sealing ring; 4. First layer ring; 5. Second layer ring; 6. Third layer ring; 7. Fourth layer ring; 8. Heating element; 9. Diverter plate; 10. Flow port; 11. Vent; 12. Exhaust port; 13. Diverter hole; 14. Exhaust pipe; 15. Guide cover; 16. Air outlet; 17. Sealing groove; 18. Sealing gasket; 19. Exhaust ring; 20. Exhaust port; 21. Inlet port; 22. Connecting column; 23. Conical block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figures 1 to 4 As shown, the present invention provides a dispersed exhaust mechanism for a chemical vapor deposition furnace for battery cells, including a cover plate 1 located at the air inlet of the bottom plate of the chemical vapor deposition furnace. A base 2 is fixedly connected to the bottom of the cover plate 1, and a sealing ring 3 is fixedly connected to the top of the base 2. A first layered ring 4, a second layered ring 5, a third layered ring 6, and a fourth layered ring 7 are sequentially fixedly connected from the outside to the inside of the inner wall of the base 2. All four layers cooperate with the cover plate 1. Heating elements 8 are symmetrically fixedly connected to the surfaces of the first layered ring 4, the second layered ring 5, the third layered ring 6, and the fourth layered ring 7. The first layered ring 4, the second layered ring 5, the third layered ring 6, and the fourth layered ring 7 are fixedly connected to each other. The first layer ring 4 is fixedly connected to the side of the cover plate 1 with a flow port 10. The second layer ring 5 and the third layer ring 6 are both provided with vents 11 on the side of the cover plate 1, and the two vents 11 are staggered about the split plate 9. The fourth layer ring 7 is provided with an exhaust port 12 on the side of the cover plate 1. The top of the cover plate 1 is provided with several split holes 13, and the several split holes 13 are evenly arranged in a ring. The top of the split holes 13 is provided with a connecting groove, and the interior of the connecting groove is connected to an exhaust pipe 14. The output end of the exhaust pipe 14 is connected to a guide cover 15. The top of the guide cover 15 is provided with several air outlets 16, and the several air outlets 16 are evenly arranged in a ring.

[0023] refer to Figure 4 The top of the sealing ring 3 is provided with a sealing groove 17, and the bottom of the cover plate 1 is fixedly connected with a sealing gasket 18, and the sealing gasket 18 is engaged with the sealing groove 17.

[0024] As a technical optimization of this utility model, the sealing groove 17 and sealing gasket 18 can improve the sealing performance between the cover plate 1, the sealing ring 3 and the base 2, thereby preventing gas from overflowing outward through the gap between the sealing ring 3 and the cover plate 1.

[0025] refer to Figure 2 and Figure 4An exhaust ring 19 is fixedly connected between the sealing ring 3 and the first layered ring 4. The top of the exhaust ring 19 is connected to several exhaust ports 20, and the several exhaust ports 20 are evenly arranged. The input end of the exhaust ring 19 passes through the base 2 and is connected to the air inlet port 21.

[0026] As a technical optimization of this utility model, the exhaust ring 19, exhaust port 20 and intake port 21 can provide the required gas to the exhaust mechanism, so that it can be evenly distributed between the sealing ring 3 and the first layered ring 4.

[0027] refer to Figure 3 and Figure 4 There are several vents 11, exhaust ports 12 and air outlets 16, and these vents 11, exhaust ports 12 and air outlets 16 are arranged in a ring evenly. A connecting column 22 is fixedly connected to the center of the base 2, and the connecting column 22 is used in conjunction with the cover plate 1.

[0028] As a technical optimization of this utility model, by setting up several vents 11, exhaust ports 12 and air outlets 16, the gas flow rate can be increased and the gas can be discharged quickly. By setting up the connecting column 22, the space inside the fourth layer ring 7 can be reduced, and the volume of gas stuck in the fourth layer ring 7 can be reduced.

[0029] refer to Figure 4 A conical block 23 is fixedly connected to the inner wall of the top of the flow guide cover 15.

[0030] As a technical optimization of this utility model, the cone-shaped block 23 can guide the preheated gas to make its discharge smoother.

[0031] refer to Figure 3 and Figure 4 A connecting flange is fixedly connected to the surface of the sealing ring 3, and the connecting flange is fixedly connected to the cover plate 1 by bolts.

[0032] As a technical optimization of this utility model, the cover plate 1 can be reinforced by setting the connecting flange, which can further improve the sealing performance between the cover plate 1 and the sealing ring 3.

[0033] The working principle and usage process of this utility model are as follows: When using this dispersed exhaust mechanism, firstly, an external muffle cylinder and a support frame carrying the battery core plate are set above the dispersed exhaust mechanism, so that the external muffle cylinder is sleeved on the support frame. Then, the air inlet port 21 is connected to the external material air inlet pipe. Then, the heating element 8 is activated to preheat the inside of the dispersed exhaust mechanism. Then, the corresponding gas is injected into the exhaust ring 19 through the external material air inlet pipe, so that it is discharged through the exhaust port 20. At this time, the gas passes through the flow port 10 on the first layered ring 4 in sequence, and enters the second layered ring 5 and the third layered ring. The gas flows through the gap between the third layer ring 6 and the fourth layer ring 7, then through the exhaust port 12 on the second layer ring 5 into the gap between the third layer ring 6 and the fourth layer ring 7, and then through the exhaust port 12 on the fourth layer ring 7 into the exhaust pipe 14 on the diversion hole 13. The gas flow process is preheated by the heating element 8, which can extend the gas flow path and fully preheat it. Then the preheated gas is discharged through the air outlet 16 on the guide cover 15, which can uniformly improve the atmosphere uniformity inside the muffle, thereby improving the coating uniformity and quality on the surface of the battery cell plate.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A decentralized exhaust mechanism for a chemical vapor deposition furnace for battery cells, comprising a cover plate (1) disposed at the air inlet of the bottom plate of the chemical vapor deposition furnace, characterized in that: The bottom of the cover plate (1) is fixedly connected to a base (2), and the top of the base (2) is fixedly connected to a sealing ring (3). The inner wall of the base (2) is fixedly connected from the outside to the inside with a first layered ring (4), a second layered ring (5), a third layered ring (6), and a fourth layered ring (7). The first layered ring (4), the second layered ring (5), the third layered ring (6), and the fourth layered ring (7) are all used in conjunction with the cover plate (1). The surfaces of the first layered ring (4), the second layered ring (5), the third layered ring (6), and the fourth layered ring (7) are symmetrically fixedly connected with heating elements (8). The first layered ring (4), the second layered ring (5), the third layered ring (6), and the fourth layered ring (7) are fixedly connected with the same diverter plate (9), and the diverter plate (9) is used in conjunction with the cover plate (1). A flow port (10) is fixedly connected to the side of the first layer ring (4) near the cover plate (1). The second layer ring (5) and the third layer ring (6) are both provided with vents (11) on the side of the cover plate (1), and the two vents (11) are staggered about the diverter plate (9). The fourth layer ring (7) is provided with an exhaust port (12) on the side of the cover plate (1). The top of the cover plate (1) is provided with several diverter holes (13), and the several diverter holes (13) are arranged in a ring evenly. The top of the diverter hole (13) is provided with a connecting groove. The interior of the connecting groove is connected to an exhaust pipe (14). The output end of the exhaust pipe (14) is connected to a guide cover (15). The top of the guide cover (15) is provided with several air outlets (16), and the several air outlets (16) are arranged in a ring evenly.

2. The dispersion exhaust mechanism of a battery cell chemical vapor deposition furnace according to claim 1, characterized in that: The top of the sealing ring (3) is provided with a sealing groove (17), and the bottom of the cover plate (1) is fixedly connected with a sealing gasket (18), and the sealing gasket (18) is engaged with the sealing groove (17).

3. The dispersed exhaust mechanism of a battery cell chemical vapor deposition furnace according to claim 1, characterized in that: An exhaust ring (19) is fixedly connected between the sealing ring (3) and the first layered ring (4). The top of the exhaust ring (19) is connected to several exhaust ports (20), and the several exhaust ports (20) are evenly arranged. The input end of the exhaust ring (19) passes through the base (2) and is connected to an air inlet port (21).

4. The dispersion exhaust mechanism of a battery cell chemical vapor deposition furnace according to claim 1, characterized in that: The number of the ventilation ports (11), exhaust ports (12) and air outlets (16) is several, and the several ventilation ports (11), exhaust ports (12) and air outlets (16) are all arranged in a ring evenly. A connecting column (22) is fixedly connected to the center of the base (2), and the connecting column (22) is used in conjunction with the cover plate (1).

5. The dispersion exhaust mechanism of a battery cell chemical vapor deposition furnace according to claim 1, characterized in that: A conical block (23) is fixedly connected to the inner wall of the top of the flow guide cover (15).

6. The dispersion exhaust mechanism of a battery cell chemical vapor deposition furnace according to claim 1, characterized in that: The sealing ring (3) is fixedly connected to a connecting flange, and the connecting flange is fixedly connected to the cover plate (1) by bolts.

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