Integrated target cylinder fixing nut

Abstract

The utility model discloses an integrated target cylinder fixing nut which is arranged at the two ends of a target cylinder and used for connecting a target material with the connecting end of a rotating cathode in a sealed mode. The sleeve comprises a sleeve part and an end plate part; the inner wall of the sleeve part is provided with a threaded groove which is connected in sequence and used for containing the spiral metal sealing ring, and the spiral metal sealing ring is screwed into the sealing groove in the outer wall of the target material along with rotation of the target cylinder fixing nut. The end plate part is annular and is arranged at one end of the sleeve part, and the end plate part is used for axial limiting in the rotating process of the target barrel fixing nut; the end plate part is provided with a plurality of locking holes, and the target cylinder fixing nut is fixed to the end of the target cylinder through bolts penetrating through the locking holes. By the adoption of the integrated target cylinder fixing nut, the spiral metal sealing ring can be screwed into the sealing groove in the outer wall of the target material only by arranging the nut at the sealing end of the target material in a sleeved mode and then continuously rotating the target cylinder fixing nut, so that the metal sealing ring can be attached to the target material more accurately, and higher fixing force and stability are provided.

Description

TECHNICAL FIELD

[0001] The utility model relates to target cylinder fixing technical field, especially in integral type target cylinder fixing nut. BACKGROUND

[0002] In the vacuum magnetron sputtering coating equipment, the target material is usually installed outside the magnetic bar assembly, and cooling water needs to be continuously supplied to the target material to cool the magnetic bar assembly, so the end of the target material needs to be sealed and connected with the connecting end of the rotating cathode.

[0003] In the traditional rotating cathode, the target material clamp is usually used for sealing and connection, but currently, the conventional clamp type clamp is usually used for sealing and connection. In the clamp type clamp, the metal sealing ring is the key to determine the sealing performance, and it needs to be accurately embedded in the sealing groove of the target material outer wall to realize sealing connection. However, in the actual installation process, when the upper clamp body and the lower clamp body are clamped, the metal sealing ring is in the visual blind area, so the installation worker needs to repeatedly align to make the metal sealing ring embedded in the sealing groove of the target material outer wall. SUMMARY

[0004] The utility model discloses a kind of integral type target cylinder fixing nuts, adopt integral type target cylinder fixing nut, and sealing is carried out by screw metal sealing ring into the sealing groove of target material outer wall.

[0005] To solve the above technical problems, the utility model provides an integral type target cylinder fixing nut, which is arranged at both ends of the target cylinder and seals and connects the connecting end of the target material and the rotating cathode;It comprises a sleeve part and an end plate part.

[0006] A thread groove is formed in the inner wall of the sleeve part for placing the screw metal sealing ring. With the rotation of the target cylinder fixing nut, the screw metal sealing ring is rotated into the sealing groove of the target material outer wall.

[0007] The end plate part is annular and arranged at one end of the sleeve part. During the rotation of the target cylinder fixing nut, the end plate part serves as axial limiting.

[0008] A plurality of locking holes are formed in the end plate part. The target cylinder fixing nut is fixed to the end of the target cylinder by bolts penetrating through the locking holes, so as to prevent the target cylinder from loosening during use. The purpose of fixing the target cylinder is to make the O-shaped sealing ring between the target cylinder and the connecting end of the rotating cathode reliable.

[0009] Preferably, the cross section of the screw metal sealing ring is circular, with one half embedded in the thread groove and the other half embedded in the sealing groove of the target material outer wall.

[0010] Preferably, the locking holes are four in number and uniformly distributed around the central axis of the end plate part.

[0011] Preferably, a plurality of positioning holes are further formed in the end plate portion for positioning the target cylinder fixing nut and the connecting component.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] The integrated target cylinder fixing nut is sleeved on the sealing end of the target material, and then the target cylinder fixing nut is continuously rotated to rotate the spiral metal sealing ring into the sealing groove of the target material, so that the metal sealing ring can be more accurately attached to the target material, higher fixing force and stability are provided, and compared with the clamping type hoop, the target cylinder fixing nut is an integrated structure, is more reliable, and is convenient to install. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a structure schematic view of the target cylinder of the integrated target cylinder fixing nut provided by the utility model;

[0015] Figure 2 is a structure schematic view of the integrated target cylinder fixing nut provided by the utility model;

[0016] Figure 3 is a front view of the integrated target cylinder fixing nut provided by the utility model;

[0017] Figure 4 is a sectional view of the integrated target cylinder fixing nut A-A provided by the utility model;

[0018] Figure 5 is an enlarged schematic view of B of the integrated target cylinder fixing nut provided by the utility model.

[0019] In the figure: 20, integrated target cylinder fixing nut; 30, target cylinder; 1, sleeve portion; 2, end plate portion; 3, threaded groove; 4, spiral metal sealing ring; 5, locking hole; 6, positioning hole. DETAILED DESCRIPTION

[0020] The utility model will be further explained in detail in combination with the drawings and specific embodiments. According to the following description and claims, the advantages and features of the utility model will be more apparent. It should be noted that the drawings are all very simplified and use non-precise proportions, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the utility model.

[0021] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0022] In the description of the utility model, it needs to be understood that the terms "mounting", "connection" and "connection" should be understood in a broad sense unless otherwise explicitly specified and limited, for example, it can be fixed connection, or detachable connection, or integrally connected, it can be mechanical connection, or electrical connection, it can be directly connected, or indirectly connected through an intermediate medium, or the communication between two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. Embodiment

[0023] The utility model provides a kind of integrated target cylinder fixing nut 20, please refer to Figure 1 It is sealedly connected to the connecting end of target material and rotating cathode.

[0024] Specifically, please refer to Figures 2-5 Integrated target cylinder fixing nut 20 specifically includes sleeve portion 1 and end plate portion 2;The inner wall of sleeve portion 1 is provided with thread groove 3 in sequence, for placing spiral metal sealing ring 4, with the rotation of target cylinder fixing nut 20, spiral metal sealing ring 4 is rotated into the sealing groove of target material outer wall;End plate portion 2 is annular, and is arranged at one end of sleeve portion 1, and end plate portion 2 is used as axial limit during the rotation of target cylinder fixing nut 20;Multiple locking holes 5 are formed in end plate portion 2, and target cylinder fixing nut 20 is fixed to the end portion of target cylinder 30 by bolt penetrating locking hole 5.

[0025] Further, the cross section of the spiral metal sealing ring is circular, half is embedded in the thread groove 3, and the other half is embedded in the sealing groove of the target material outer wall.

[0026] Further, the locking hole 5 is provided with four, and is uniformly distributed around the central axis of the end plate portion 2.

[0027] Further, multiple positioning holes 6 are also formed in end plate portion 2, for positioning target cylinder fixing nut 20 and connecting component.

[0028] The integrated target cylinder fixing nut only needs to be sleeved on the sealing end of the target material, and then continuously rotating the target cylinder fixing nut can rotate the spiral metal sealing ring into the sealing groove of the outer wall of the target material, so that the metal sealing ring can be more accurately attached to the target material, and higher fixing force and stability are provided; and compared with the pair of clamping type hoops, the target cylinder fixing nut of the utility model is an integrated structure, is more reliable, and is convenient to install.

[0029] The above description is only a description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way, and any change or modification made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. An integrated target cylinder fixing nut (20) is arranged at both ends of a target cylinder (30) to seal and connect the connecting end of a target material and a rotating cathode; characterized in that, It comprises a sleeve part (1) and an end plate part (2); A thread groove (3) is formed on the inner wall of the sleeve part (1) for placing a spiral metal sealing ring (4), which is screwed into the sealing groove of the target material outer wall with the rotation of the target cylinder fixing nut (20); The end plate part (2) is annular and arranged at one end of the sleeve part (1), which serves as axial limiting during the rotation of the target cylinder fixing nut (20); A plurality of locking holes (5) are formed on the end plate part (2) for fixing the target cylinder fixing nut (20) to the end of the target cylinder (30) through bolts penetrating the locking holes (5).

2. An integrated target cylinder retaining nut (20) as defined in claim 1, characterized in that The cross section of the spiral metal sealing ring is circular, one half of which is embedded in the thread groove (3) and the other half of which is embedded in the sealing groove of the target material outer wall.

3. An integrated target cylinder retaining nut (20) as defined in claim 1, characterized in that The locking holes (5) are four in number and evenly distributed around the central axis of the end plate part (2).

4. An integrated target cylinder retaining nut (20) as defined in claim 1, characterized in that A plurality of positioning holes (6) are further formed on the end plate part (2) for positioning the target cylinder fixing nut (20) and the connecting component.

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