Flexible probe preparation device

Abstract

The utility model discloses a flexible probe preparation device, belongs to localized electrochemical deposition, and aims to solve the problem that the tip of an existing transfer pipette for localized electrochemical deposition is easy to damage. The preparation device comprises a first supporting unit, a second driving unit, a third stretching unit and a control system. The first supporting unit comprises a first supporting base, a first vertical supporting piece and a first sliding rail, the first vertical supporting piece is arranged on the first supporting base in the vertical direction, the first sliding rail is arranged on the first vertical supporting piece in the vertical direction, and the first sliding block is arranged on the first sliding rail. Test results show that the flexible probe prepared by the device can meet the application requirements of probes in localized electrochemical deposition, has good toughness and is not easy to damage. The device is ingenious in conception, reasonable in design, convenient to use, low in manufacturing, using and maintaining cost and capable of meeting the requirements of industrial and large-scale production.

Description

Technical Field

[0001] This invention relates to the field of micro / nano manufacturing, particularly to the field of localized electrochemical deposition, specifically a flexible probe fabrication device for localized electrochemical deposition. More specifically, this application provides a flexible probe pulling device, which can fabricate probes suitable for use in localized electrochemical deposition. Background Technology

[0002] With the increasing demand for and in-depth exploration of micro- and nanostructures, technologies for manufacturing 3D micro- and nanostructures with controllable shape and quality, as well as for detecting the morphology of micro- and nano-scale objects, have become increasingly important. Electrochemical deposition technology is a special processing method that achieves atomic-level layer-by-layer stacking by controlling the electrochemical reaction conditions in micro-regions on the electrode surface, thereby preparing metal materials and manufacturing parts. This method has advantages such as wide applicability to materials, low operating temperature, flexible application forms, easy shape and property control, and high spatial resolution and accuracy, and it has particularly great development potential in the field of metal micro- and nano additive manufacturing.

[0003] Localized electrochemical deposition refers to a method of additive manufacturing of microstructures by limiting the scope of electrochemical deposition. Based on the continuous evolution of electrode probes, localized electrochemical deposition techniques mainly include droplet-constrained electrochemical deposition (MCED), microfluidic atomic force microscopy-constrained electrochemical deposition (FluidFM), and electrode-constrained localized electrochemical deposition (LECD).

[0004] Droplet-constrained electrochemical deposition (MCED) is primarily based on electrochemical deposition technology. It utilizes the electron-gaining oxidation reaction of metal cations to generate elemental metals, and it holds great potential in the field of microscale 3D printing metal additive manufacturing (AM). The specific operation of droplet-constrained electrochemical deposition is as follows: a stable micro-liquid current bridge is formed between the outlet of a pipette filled with a metal ion solution and the anode substrate. Metal is deposited on the substrate, and the desired metal shape is obtained by moving the pipette and depositing metal layer by layer.

[0005] Microfluidic atomic force microscopy-confined electrochemical deposition (FluidFM) utilizes the probe position detection principle of AFM to construct microchannels inside the probe and set an electrolyte pool at the tail end. The metal cations required for deposition are continuously delivered to the probe tip through microfluidics, and metal deposition is performed by moving the probe.

[0006] Electrode-constrained localized electrochemical deposition (LECD) uses a directional local electric field at the probe tip to induce an electrochemical reaction. An electrode wire inserted in the middle of the probe serves as the anode, and the metal substrate serves as the cathode. The distribution of the local electric field and the size of the deposit are mainly determined by the opening diameter of the probe tip.

[0007] The pipettes used in MCED, FluidFM, and LECD are currently all glass probes. These probes have tapered tips with inner diameters ranging from tens to hundreds of nanometers. Furthermore, existing technologies primarily utilize glass probes. For example, Chinese patent application CN201910304543.5 discloses the preparation and application of composite glass nanopores in biomolecular detection. It utilizes a glass drawing instrument to draw glass nanopores, and then modifies the glass nanopores with phospholipids containing single-walled carbon nanotubes through the capillary effect of the nanopores. Chinese patent application CN202411166573.1 discloses a system, method, and device for detecting targets in cells, including: a glass capillary pretreatment module: the nanoglass tubes used are drawn from borosilicate glass tubes of specification BF100-58-10 using a P-2000 capillary drawing instrument to create nanotubes with a size of approximately 200 nanometers.

[0008] However, the equipment currently used for pulling glass probes in localized electrochemical deposition is mainly purchased from abroad, making it extremely expensive. Furthermore, the tip of the glass probe is easily damaged if it touches any part of the surface during use, requiring replacement and restarting the experiment. Numerous existing studies have also mentioned that the tip of the glass probe is highly susceptible to damage during experiments, causing many inconveniences in the preparation of micro-metals. Therefore, improving the reliability and stability of pipettes has become a pressing problem to be solved.

[0009] Therefore, there is an urgent need for a new method and / or apparatus to solve the problem of easy damage to the pipette tips in existing localized electrochemical deposition. Utility Model Content

[0010] The purpose of this invention is to provide a flexible probe preparation device to achieve the preparation of flexible probes. Test results show that the flexible probes prepared using this device can meet the application requirements of probes in localized electrochemical deposition, and have good toughness and are not easily damaged. Furthermore, using this application eliminates the need for foreign equipment, enabling independent control of related equipment, which is of great significance for meeting the needs of related scientific research and production. This application is ingeniously conceived, rationally designed, easy to use, and has low manufacturing, use, and maintenance costs, meeting the needs of industrialization and large-scale production, and has good application prospects, making it worthy of large-scale promotion and application.

[0011] To achieve the above objectives, this application adopts the following technical solution:

[0012] A flexible probe preparation device includes a first support unit, a second driving unit, a third stretching unit, and a control system;

[0013] The first support unit includes a first support base, a first vertical support member, and a first slide rail. The first vertical support member is disposed on the first support base in a vertical direction and the first support base can provide support for the first vertical support member. The first slide rail is disposed on the first vertical support member in a vertical direction and the first vertical support member can provide support for the first slide rail. The first slider is disposed on the first slide rail and the first slider can slide relative to the first slide rail in a vertical direction.

[0014] The second drive unit includes a second motor, a second drive wheel, a second driven shaft, a second driven wheel, a second synchronous belt, and a second synchronous clamping mechanism. The second drive wheel is mounted on the drive shaft of the second motor, and the second motor can drive the second drive wheel to rotate. The second driven shaft is connected to a first vertical support member, and the first vertical support member can provide support for the second driven shaft. The second driven wheel is mounted on the second driven shaft, and the second driven wheel can rotate freely relative to the second driven shaft. The two ends of the second synchronous belt are respectively mounted on the second drive wheel and the second driven wheel, and the second synchronous belt is arranged in a vertical direction. The second synchronous clamping mechanism is connected to the second synchronous belt, and the second synchronous belt can drive the second synchronous clamping mechanism to move in a vertical direction.

[0015] The third stretching unit includes a probe holder for fixing the plastic pipette tip, a third resistance heating wire for heating the plastic pipette tip, and a clamping and pulling assembly. The probe holder has a fifth through hole, and the plastic pipette tip can be inserted into the fifth through hole. The plastic pipette tip is fixed by the cooperation between the large end of the plastic pipette tip and the fifth through hole. The resistance heating wire is located below the probe holder and can heat the plastic pipette tip.

[0016] The clamping pull-down assembly includes a fourth pull-down connecting block, a fourth clamping block, and a fourth clamping screw. The second synchronous clamping mechanism is connected to the first slider, and the first slider can guide and limit the second synchronous clamping mechanism. The fourth pull-down connecting block is connected to the first slider, and the second synchronous clamping mechanism can drive the fourth pull-down connecting block to move vertically through the first slider. The fourth pull-down connecting block is provided with a fourth groove one, and the fourth clamping block is provided with a fourth groove two that cooperates with the fourth groove one. The fourth clamping block is detachably connected to the fourth pull-down connecting block through the fourth clamping screw. The openings of the fourth groove one and the fourth groove two are arranged facing each other. The fourth groove one and the fourth groove two together form a fourth small end clamping groove for fixing the small end of the plastic pipette tip, and the clamping pull-down assembly can fix the small end of the plastic pipette tip through the fourth small end clamping groove.

[0017] The second motor and the resistance heating wire are electrically connected to the control system.

[0018] The second motor is a stepper motor.

[0019] The third resistance heating wire has a spiral structure.

[0020] The first support base is plate-shaped, and the first vertical support and the first slide rail are strip-shaped.

[0021] The second motor is mounted on the first support base, and the first support base can provide support for the second motor. The second driven shaft is vertically arranged relative to the first vertical support member.

[0022] The fifth through hole is in the shape of an inverted frustum.

[0023] The probe fixing component includes a fifth connector and a fifth probe upper end fixing part. The fifth probe upper end fixing part, the fifth connector, and the first vertical support are connected in sequence, and the first vertical support can provide support for the fifth probe upper end fixing part through the fifth connector. The fifth through hole is provided on the fifth probe upper end fixing part, and the plastic pipette tip can be inserted into the fifth through hole.

[0024] The upper fixing part of the fifth probe is set in the horizontal direction.

[0025] The third resistance heating wire is connected to the upper fixing part of the fifth probe, and the upper fixing part of the fifth probe can provide support for the third resistance heating wire.

[0026] The third resistance heating wire is in the shape of an inverted frustum.

[0027] The fourth small end clamping groove is in the shape of an inverted frustum.

[0028] It also includes the power supply connected to the control system.

[0029] The third stretching unit also includes a plastic pipette tip for performing stretching.

[0030] To address the aforementioned problems, this application provides a flexible probe preparation apparatus. The apparatus mainly includes a first support unit, a second drive unit, and a control system, thereby realizing the pulling operation of the flexible probe. It mainly involves two parts: a downward pulling part for the plastic pipette tip and a heating part. In one example, a plastic pipette tip is used as the body for manufacturing the flexible probe. The second motor is a stepper motor, and the control system drives the second synchronous belt by controlling the speed and forward / reverse rotation of the stepper motor. Then, through a second synchronous clamping mechanism connected to the second synchronous belt, the first slider moves synchronously in the vertical direction. The clamping and pulling assembly is connected to the first slider. Through the cooperation of the clamping and pulling assembly with the plastic pipette tip, the small end of the plastic pipette tip can be pulled. Simultaneously, the control system can control the resistance heating wire. When the plastic pipette tip is stretched, the resistance heating wire is heated, ultimately completing the pulling process. In this application, the resistance heating wire melts the plastic pipette tip, and by controlling the downward pulling speed, the flexible probe can be prepared. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the flexible probe preparation device in Example 1.

[0032] Figure 2 This is a partial schematic diagram of the heating section of the flexible probe preparation apparatus in Example 1.

[0033] Figure 3 This is a control flowchart of the flexible probe preparation device in Example 1.

[0034] The markings in the diagram are: 1. Second motor, 2. Second synchronous belt, 3. Second synchronous clamping mechanism, 4. First slider, 5. Plastic pipette tip, 6. Third resistance heating wire, 7. Clamping pull-down assembly, 8. First support base, 9. First slide rail, 10. First vertical support, 21. Fourth clamping screw, 22. Fourth clamping block, 23. Fifth connecting piece, 24. Fifth probe upper fixing part. Detailed Implementation

[0035] To more clearly illustrate the technical solutions of the embodiments in this specification, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this specification. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0036] It should be understood that the terms “system,” “device,” “unit,” and / or “module” used herein are one way to distinguish different components, elements, parts, sections, or assemblies at different levels. However, if other terms can achieve the same purpose, they may be replaced by other expressions.

[0037] Unless the context clearly indicates an exception, words such as "a," "an," "a kind," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0038] Flowcharts are used in this specification to illustrate the operations performed by the system according to embodiments of this specification. It should be understood that the preceding or following operations are not necessarily performed in exact order. Instead, the steps can be processed in reverse order or simultaneously. Furthermore, other operations can be added to these processes, or one or more steps can be removed from them.

[0039] The present invention will now be described in detail with reference to the accompanying drawings.

[0040] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0041] Example 1

[0042] To overcome the fragility of existing glass probes during use, this application proposes a fabrication device for flexible probes using plastic pipette tips made of plastic material. The device includes a first support unit, a second drive unit, a third stretching unit, and a control system. Based on existing plastic pipette tips, the device melts the plastic tip through heating and then stretches it vertically. By changing the rotation speed of a second motor, the stretching distance is controlled, enabling the rapid fabrication of flexible probes with openings of different sizes. Using this application, flexible probes with uniform dimensions can be fabricated under consistent fabrication parameters, significantly improving fabrication efficiency.

[0043] The first support unit includes a first support base, a first vertical support member, and a first slide rail. The first vertical support member is vertically mounted on the first support base, the first slide rail is vertically mounted on the first vertical support member, and a first slider is mounted on the first slide rail. In this application, the pulling of the flexible probe mainly includes pulling down the lower end of the plastic pipette tip and heating the plastic pipette tip. The second drive unit includes a second motor electrically connected to the control system, a second drive wheel, a second driven shaft, a second driven wheel, a second synchronous belt, and a second synchronous clamping mechanism. The second drive wheel is mounted on the drive shaft of the second motor, the second driven shaft is connected to the first vertical support member, the second driven wheel is mounted on the second driven shaft, the two ends of the second synchronous belt are respectively mounted on the second drive wheel and the second driven wheel, and the second synchronous clamping mechanism is connected to the second synchronous belt. In one example, the second motor is a stepper motor, mounted on the first support base; the first support base is rectangular, and the first vertical support member and the first slide rail are strip-shaped.

[0044] In this structure, the first support base serves as the main support for the fabrication device, providing support for the first vertical support member and the second motor. The stepper motor can be fixedly placed on the first support base. The first vertical support member provides support for the second driven shaft, which is perpendicular to the first vertical support member. The first vertical support member also provides support for the first slide rail, allowing the first slider to slide along the axial direction of the first slide rail. The second motor drives the second driving wheel to rotate, and the second driven wheel can rotate freely relative to the second driven shaft. The second synchronous belt is arranged vertically and drives the second synchronous clamping mechanism to move vertically.

[0045] The third stretching unit includes a probe holder for fixing the plastic pipette tip, a third resistance heating wire for heating the plastic pipette tip, and a clamping pull-down assembly. The probe holder has a fifth through hole, and the resistance heating wire is located below the probe holder. The clamping pull-down assembly includes a fourth pull-down connecting block, a fourth clamping block, and a fourth clamping screw. A second synchronous clamping mechanism is connected to a first slider; the fourth pull-down connecting block is connected to the first slider, and the second synchronous clamping mechanism can drive the fourth pull-down connecting block to move vertically via the first slider. The fourth pull-down connecting block has a fourth groove (first groove), and the fourth clamping block has a fourth groove (second groove) that mates with the fourth groove (first groove). The fourth clamping block is detachably connected to the fourth pull-down connecting block via the fourth clamping screw. The fourth groove (first groove) and the fourth groove (second groove) face each other, and together they form a fourth small-end clamping groove for fixing the small end of the plastic pipette tip. The resistance heating wire is electrically connected to the control system. In this structure, the plastic pipette tip can be inserted into the fifth through hole, and the large end of the plastic pipette tip is fixed by the cooperation between the large end of the plastic pipette tip and the fifth through hole; the resistance heating wire is used to heat the plastic pipette tip. The second synchronous clamping mechanism can drive the fourth pull-down connecting block to move vertically, and the clamping pull-down assembly fixes the small end of the plastic pipette tip through the fourth small end clamping groove. In this structure, the second motor can drive the second drive wheel to rotate, the second drive wheel drives the second synchronous belt to move, the second synchronous belt drives the second synchronous clamping mechanism to move up and down, the second synchronous clamping mechanism drives the first slider to move, and the first slider drives the clamping pull-down assembly to move synchronously; finally, the purpose of pulling the small end of the plastic pipette tip is achieved. The first slider can move smoothly up and down on the first slide rail; the fifth through hole is an inverted conical hole, which is used to place the plastic pipette tip and hold the plastic pipette tip in place above; the plastic pipette tip is the body for manufacturing the flexible probe, and the flexible probe is prepared by pulling the plastic pipette tip; this application uses electric heating to melt the plastic pipette tip, and the flexible probe is prepared by pulling down the melted plastic pipette tip.

[0046] Furthermore, the probe fixing component includes a fifth connector and a fifth probe upper end fixing part. The fifth probe upper end fixing part, the fifth connector, and the first vertical support are sequentially connected, and the first vertical support can provide support for the fifth probe upper end fixing part through the fifth connector. A fifth through hole is provided on the fifth probe upper end fixing part, and a plastic pipette tip can be inserted into the fifth through hole. In one example, the fifth through hole is in the shape of an inverted frustum, and the fifth probe upper end fixing part is arranged in a horizontal direction. The third resistance heating wire is connected to the fifth probe upper end fixing part, and the fifth probe upper end fixing part can provide support for the third resistance heating wire. The third resistance heating wire and the fourth small end clamping groove are both in the shape of inverted frustums. Furthermore, it also includes a power supply and a plastic pipette tip connected to the control system. In one example, the third resistance heating wire is made of nickel-chromium wire Cr20Ni80 with a wire diameter of 0.6 mm and a resistance of 3.85 ohms per meter. The heating and temperature of the third resistance heating wire are controlled by the control system.

[0047] The working process of this device is as follows:

[0048] (1) Pull down or reset upward

[0049] The control system controls the second motor to adjust its rotation direction and speed, thereby controlling the movement of the second synchronous clamping mechanism.

[0050] The second motor drives the second drive wheel to rotate, the second drive wheel drives the second synchronous belt to move in the vertical direction, and drives the second synchronous clamping mechanism connected to the second synchronous belt to move synchronously in the vertical direction.

[0051] (2) Heating deformation

[0052] The plastic pipette tip is inverted conical in shape. The fourth small end clamping groove fixes the small end of the plastic pipette tip, and the fifth through hole fixes the large end of the plastic pipette tip. The third resistance heating wire is sleeved on the outside of the plastic pipette tip for heating the plastic pipette tip. Based on the matching properties of the plastic pipette tip and the third resistance heating wire, it is beneficial to the plastic pipette tip to be heated evenly and to ensure the drawing effect.

[0053] The control system controls the third resistance heating wire to heat until the third resistance heating wire is drawn.

[0054] In this example, a plastic pipette tip is used as the body for manufacturing the flexible probe. A stepper motor is used as the second motor, and the control system drives the second synchronous belt by controlling the stepper motor's speed and reversal. Then, a second synchronous clamping mechanism connected to the second synchronous belt drives the first slider to move synchronously in the vertical direction. A clamping pull-down assembly is connected to the first slider; through the cooperation of the clamping pull-down assembly and the plastic pipette tip, the small end of the plastic pipette tip can be pulled. Simultaneously, the control system can control the resistance heating wire. When the plastic pipette tip is stretched, the resistance heating wire is heated, ultimately completing the stretching process. In this application, the resistance heating wire melts the plastic pipette tip, and by controlling the downward stretching speed, the flexible probe can be fabricated.

[0055] In this application, the control system can adopt both manual and automatic modes. In manual mode, the rotation of the second motor can be controlled via the motor control button; pressing the motor control button causes the second motor to rotate at a constant speed; releasing the motor control button stops the second motor. The heating wire control button controls whether the third resistance heating wire heats up; pressing the heating wire control button starts the third resistance heating wire to heat up; releasing the heating wire control button stops the third resistance heating wire from heating up.

[0056] When the control system switches to automatic mode, the opening size parameters of the flexible probe and the number of pulling steps are input sequentially. After automatic mode is activated, the third resistance heating wire heats for a certain period and then stops heating. Next, the second motor starts rotating at a constant speed. After the middle part of the plastic pipette tip is heated and melted, the second motor drives the clamping and pulling assembly to pull the small end of the plastic pipette tip downwards. The number of pauses during the pull is determined according to the set number of pulling steps, thus completing the flexible probe pulling process. In preliminary experiments, the heating time and pulling parameters were measured and input into the control system to enable automatic pulling.

[0057] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A flexible probe preparation apparatus, characterized by, The first support unit, the second driving unit, the third stretching unit and the control system are comprised. The first support unit comprises a first support base, a first vertical support, a first sliding rail and a first sliding block. The first vertical support is arranged on the first support base in the vertical direction and the first support base can support the first vertical support. The first sliding rail is arranged on the first vertical support in the vertical direction and the first vertical support can support the first sliding rail. The first sliding block is arranged on the first sliding rail and can slide along the first sliding rail in the vertical direction. The second driving unit comprises a second motor, a second driving wheel, a second driven shaft, a second driven wheel, a second synchronous belt and a second synchronous clamping mechanism. The second driving wheel is arranged on the driving shaft of the second motor and the second motor can drive the second driving wheel to rotate. The second driven shaft is connected with the first vertical support and the first vertical support can support the second driven shaft. The second driven wheel is arranged on the second driven shaft and can rotate freely relative to the second driven shaft. The two ends of the second synchronous belt are arranged on the second driving wheel and the second driven wheel respectively and the second synchronous belt is arranged in the vertical direction. The second synchronous clamping mechanism is connected with the second synchronous belt and the second synchronous belt can drive the second synchronous clamping mechanism to move in the vertical direction. The third stretching unit comprises a probe fixing piece for fixing the plastic pipette tip, a third resistance heating wire for heating the plastic pipette tip and a clamping and pulling down assembly. The fifth through hole is arranged on the probe fixing piece and the plastic pipette tip can be inserted into the fifth through hole. The plastic pipette tip is fixed by the cooperation between the large end of the plastic pipette tip and the fifth through hole. The resistance heating wire is arranged below the probe fixing piece and can heat the plastic pipette tip. The clamping and pulling down assembly comprises a fourth pulling down connecting block, a fourth clamping block and a fourth clamping screw. The second synchronous clamping mechanism is connected with the first sliding block and the first sliding block can guide and limit the second synchronous clamping mechanism. The fourth pulling down connecting block is connected with the first sliding block and the second synchronous clamping mechanism can drive the fourth pulling down connecting block to move in the vertical direction through the first sliding block. The fourth recess one is arranged on the fourth pulling down connecting block. The fourth recess two is arranged on the fourth clamping block and cooperates with the fourth recess one. The fourth clamping block is detachably connected with the fourth pulling down connecting block through the fourth clamping screw. The fourth recess one and the fourth recess two are arranged oppositely and together form a fourth small end clamping groove for fixing the small end of the plastic pipette tip. The clamping and pulling down assembly can fix the small end of the plastic pipette tip through the fourth small end clamping groove. The second motor and the resistance heating wire are electrically connected with the control system respectively.

2. The flexible probe preparation apparatus according to claim 1, wherein The second motor is a stepping motor.

3. The flexible probe preparation apparatus according to claim 1, wherein The first support base is in the form of a plate. The first vertical support and the first sliding rail are in the form of strips respectively.

4. The flexible probe preparation apparatus according to claim 1, wherein The second motor is arranged on the first support base and the first support base can support the second motor. The second driven shaft is arranged perpendicularly relative to the first vertical support.

5. The flexible probe card apparatus of claim 1, wherein The fifth through hole is in the form of an inverted circular truncated cone.

6. The flexible probe preparation apparatus according to any one of claims 1 to 5, wherein The probe fixing member comprises a fifth connecting piece and a fifth probe upper end fixing part, the fifth probe upper end fixing part and the fifth connecting piece are connected in sequence, the first vertical support piece can provide support for the fifth probe upper end fixing part through the fifth connecting piece, and the fifth through hole is arranged on the fifth probe upper end fixing part and the plastic pipette tip can be inserted into the fifth through hole.

7. The flexible probe preparation apparatus according to claim 6, wherein The fifth probe upper end fixing part is arranged along the horizontal direction.

8. The flexible probe preparation apparatus according to claim 6, wherein The third resistance heating wire is connected with the fifth probe upper end fixing part, and the fifth probe upper end fixing part can provide support for the third resistance heating wire.

9. The flexible probe card apparatus of claim 1, wherein, The third resistance heating wire is in the shape of an inverted circular truncated cone.

10. The flexible probe card apparatus of claim 1, wherein, The fourth small-end clamping groove is in the shape of an inverted circular truncated cone.

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