Coating target mechanism integrated with cooling structure

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a coating target mechanism integrated with a cooling structure, the coating target mechanism comprises: a fixed main body; a film coating target frame; the coating target assembly comprises a coating target, a first target head and a second target head; the cooling assembly is used for inputting and outputting cooling liquid, the cooling assembly is provided with a liquid inlet channel and a liquid outlet channel, the cooling assembly is arranged on the other side of the fixing main body and penetrates through the fixing main body to be connected with the coating target frame, and the liquid outlet channel and the liquid inlet channel are communicated with the coating target on the dismounting position. According to the coating target mechanism, the cooling component is integrated, so that the temperature can be effectively controlled, the quality and the performance of a film can be ensured, the service life of equipment can be prolonged, and the maintenance cost can be reduced.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of vacuum coating, and particularly relates to a coating target mechanism integrated with a cooling structure. BACKGROUND

[0002] The field of vacuum coating is an important branch of materials science, which involves the deposition of materials onto a substrate surface to form a thin film using physical or chemical methods in a vacuum environment. This technology is widely used in electronics, optics, decoration, automotive and aerospace industries. With the progress of science and technology and the development of industry, the demand for thin film materials is increasing, especially for thin film materials with specific properties such as high conductivity, high hardness, wear resistance, corrosion resistance and high temperature resistance. These demands have driven the continuous innovation and development of vacuum coating technology.

[0003] Coating targets are key materials in the vacuum coating process, and their quality and performance directly affect the quality and performance of the final thin film. In the vacuum coating process, the coating target is heated, evaporated or sputtered to release atoms or molecules from the target surface, which then condense on the substrate surface to form a thin film. This process requires the coating target to have good thermal stability, chemical stability and high purity to ensure the uniformity, adhesion and performance stability of the thin film. However, during long-term use of the coating target, the heat generated during the coating process cannot be effectively dissipated, causing the system temperature to continue to rise, affecting the evaporation or sputtering rate of the target material, and thus leading to uneven growth of the thin film, making it difficult to accurately control the thickness and composition. SUMMARY

[0004] To solve the above problems, the purpose of the present application is to provide a coating target mechanism integrated with a cooling structure, which integrates a cooling structure, effectively controls the temperature, ensures the quality and performance of the thin film, prolongs the service life of the equipment and reduces the maintenance cost.

[0005] To achieve the above purpose, the technical solution of the present application is as follows.

[0006] A coating target mechanism integrated with a cooling structure, characterized in that the coating target mechanism comprises:

[0007] a fixed body;

[0008] a coating target holder, the coating target holder is arranged on one side of the fixed body, and the coating target holder is provided with a first dismounting member and a second dismounting member at both ends, respectively, and a dismounting position is formed between the first dismounting member and the second dismounting member;

[0009] The film-coated target assembly comprises a film-coated target, a first target head and a second target head, both ends of the film-coated target are rotatably connected with the first target head and the second target head respectively, and the first target head and the second target head are arranged on the first dismounting part and the second dismounting part respectively, so that the film-coated target is installed in the dismounting position.

[0010] The cooling assembly for inputting and outputting the cooling liquid is provided with an inlet channel and an outlet channel, and is arranged on the other side of the fixed main body and penetrates through the fixed main body to be connected with the film-coated target frame, and the outlet channel and the inlet channel are connected with the film-coated target in the dismounting position.

[0011] In the present application, based on the arrangement of the cooling assembly, the cooling liquid can be input into the film-coated target through the inlet channel, and the cooling liquid with the increased temperature in the film-coated target can be output from the outlet channel, so that the temperature control of the film-coated target can be realized, and the following advantages can be achieved.

[0012] 1. The film-coating efficiency is improved: it is helpful to shorten the film-coating period; when the cooling assembly works effectively, the film-coated target can reach the suitable temperature for film-coating faster and keep stable; for example, in the magnetron sputtering film-coating, the rapid heat dissipation can allow the film-coated target to work continuously at a higher power, reduce the situation of reducing the power or suspending the film-coating due to overheating, thereby improving the film-coating amount per unit time and improving the overall film-coating efficiency.

[0013] 2. The performance of the film-coated material is optimized: the microstructure of the film-coated material is improved; the appropriate temperature condition has an important influence on the microstructure such as the crystallization and orientation of the film-coated material; through the precise temperature control of the cooling assembly, the film-coated material can form a more ideal microstructure; for example, after high-temperature film-coating, through the cooling assembly to control the cooling speed, the film-coated material can form a dense and uniform crystal structure, thereby improving the hardness, wear resistance and other performances of the film-coated layer.

[0014] 3. The stability of the mechanism is enhanced: the mechanism is prevented from being damaged due to overheating; some key parts in the film-coated target mechanism, such as the power supply and the control system, may fail in a high-temperature environment; the cooling assembly effectively dissipates heat from the film-coated target and the surrounding environment, which can reduce the overall temperature of the mechanism, reduce the risk of damage to the mechanism due to overheating, prolong the service life of the mechanism, reduce the maintenance cost and downtime of the mechanism, and improve the stability and reliability of the mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a structural schematic diagram of the embodiment of the present application.

[0016] Figure 2 is a sectional view of the embodiment of the present application.

[0017] Figure 3 is a sectional view of the cooling assembly, the film-coated target frame and the film-coated target assembly.

[0018] Figure 4 is a sectional view of the displacement driving assembly.

[0019] Figure 5 is a sectional view of the rotation driving assembly.

[0020] Reference signs:

[0021] 1. a fixed body;

[0022] 2. a coating target holder; 21, a first dismounting part; 211, an insertion hole; 212, an insertion port; 22, a second dismounting part; 221, a first connecting channel; 222, a second connecting channel; 223, a positioning groove; 224, a dismounting part; 225, a limiting plate; 226, a limiting groove; 23, a dismounting position; 24, a limiting part;

[0023] 3. a coating target assembly; 31, a coating target; 311, an upper end cover; 312, a lower end cover; 313, a water guide rod; 314, a yoke; 315, a target body; 316, a magnet; 317, an inner water channel; 318, an outer water channel; 319, a second gear; 32, a first target head; 321, an insertion part; 322, a fixed part; 33, a second target head; 331, a discharge inlet; 332, a discharge outlet; 333, a positioning convex ring;

[0024] 4. a displacement driving assembly; 41, a displacement driving part; 42, a displacement mounting base; 43, a push-pull rod; 44, a first insulating sleeve; 45, a first guide sleeve; 46, a first oil seal;

[0025] 5. a rotation driving assembly; 51, a rotation driving part; 511, a motor; 512, a fourth gear; 52, a rotation mounting base; 53, a first gear; 54, a rotation telescopic rod set; 541, a rotation rod; 542, a telescopic rod; 543, a telescopic cavity; 544, a third gear; 55, a second insulating sleeve; 56, a second guide sleeve; 57, a second oil seal; 58, a guide column; 581, a bearing; 582, a third oil seal;

[0026] 6. a cooling assembly; 61, a liquid inlet channel; 62, a liquid outlet channel;

[0027] 7. a baffle assembly; 71, a movable baffle; 72, a rotation baffle ring; 73, a limiting block; 74, a fixed baffle;

[0028] 8. a vacuum cavity. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0030] Referring to Figures 1-5 In the embodiment, a coating target mechanism integrated with a cooling structure is provided. It is worth noting that the embodiment provides a complete coating target mechanism, and the application only protects the improvement of a part of the coating target mechanism. The coating target mechanism comprises:

[0031] A fixed body 1, which is a part of a coating device shell;

[0032] A coating target holder 2 movably arranged on one side of the fixed body 1, i.e., the side of the fixed body 1 facing the vacuum cavity 8 used for coating. Correspondingly, the other side is the side facing the outside. The coating target holder 2 is vertically provided with a first dismounting part 21 and a second dismounting part 22 at two ends, respectively, and a dismounting position 23 is formed between the first dismounting part 21 and the second dismounting part 22;

[0033] A coating target assembly 3 comprising a coating target 31, a first target head 32, and a second target head 33. The coating target 31 is rotatably connected with the first target head 32 and the second target head 33 at two ends, respectively. The first target head 32 and the second target head 33 are detachably arranged on the first dismounting part 21 and the second dismounting part 22, respectively, so that the coating target 31 is detachably mounted in the dismounting position 23;

[0034] A displacement driving assembly 4 for driving the coating target holder 2 to move close to or away from the fixed body 1. The displacement driving assembly 4 is fixedly arranged on the other side of the fixed body 1 and movably passes through the fixed body 1 to be drivingly connected with the coating target holder 2. By driving the coating target holder 2 to move close to or away from the fixed body 1, the position of the coating target assembly 3 is controlled;

[0035] A rotation driving assembly 5 for driving the coating target 31 to rotate. The rotation driving assembly 5 is arranged on the other side of the fixed body 1 and movably passes through the fixed body 1 to be connected with the coating target holder 2 and drivingly connected with the coating target 31 in the dismounting position 23. The rotation driving assembly 5 can drive the coating target 31 to rotate in real time. When the displacement driving assembly 4 drives the coating target holder 2 to move, the rotation driving assembly 5 can continuously drive the coating target 31 to rotate while synchronously moving;

[0036] A cooling assembly 6 for inputting and outputting cooling liquid. The cooling assembly 6 is provided with an inlet channel 61 and an outlet channel 62. The cooling assembly 6 is arranged on the other side of the fixed body 1 and movably passes through the fixed body 1 to be connected with the coating target holder 2. The outlet channel 62 and the inlet channel 61 are connected with the coating target 31 in the dismounting position 23. The cooling liquid is discharged into the coating target 31 through the inlet channel 61, and the cooling liquid in the coating target 31 is discharged through the outlet channel 62, so as to adjust the temperature of the coating target 31 in real time;

[0037] The shutter assembly 7 is automatically opened when the coating target is coated, and the shutter assembly 7 is movably arranged at the first target head 32 and the second target head 33 respectively.

[0038] It is worth mentioning that when the displacement driving assembly 4 drives the coating target frame 2 to move close to or away from the fixed main body 1, the rotation driving assembly 5 and the cooling assembly 6 follow the coating target frame 2 to move at the fixed main body 1 correspondingly, so as to ensure that the cooling function, the rotation function and the displacement function of the coating target 31 can be realized simultaneously.

[0039] In the embodiment, the circulating cooling channel is arranged in the coating target 31, and the second target head 33 is further provided with a discharge inlet 331 and a discharge outlet 332 connected with the circulating cooling channel, and the liquid inlet channel 61 and the liquid outlet channel 62 are connected with the discharge inlet 331 and the discharge outlet 332 respectively.

[0040] In the embodiment, the second dismounting part 22 is provided with a first connecting channel 221 and a second connecting channel 222, the liquid inlet channel 61 is connected with the discharge inlet 331 through the first connecting channel 221, and the liquid outlet channel 62 is connected with the discharge outlet 332 through the second connecting channel 222; that is, the liquid inlet channel 61 and the liquid outlet channel 62 are indirectly connected with the circulating cooling channel through the first connecting channel 221 and the second connecting channel 222 of the second dismounting part 22, and when the coating target assembly 3 is installed, it only needs to be installed on the coating target frame 2, so that the liquid inlet channel 61 and the liquid outlet channel 62 are connected with the circulating cooling channel.

[0041] In the embodiment, the second dismounting part 22 is further provided with a plurality of positioning grooves 223 connected with the first connecting channel 221 and the second connecting channel 222 respectively, and the second target head 33 is further fixed with a plurality of positioning convex rings 333 arranged outside the discharge outlet 332 and the discharge inlet 331 respectively; when the coating target assembly 3 is installed on the coating target frame 2, the plurality of positioning convex rings 333 are inserted into the plurality of positioning grooves 223 respectively, so that the first connecting channel 221 and the second connecting channel 222 are connected with the liquid inlet channel 61 and the liquid outlet channel 62 respectively. It can be known that when the coating target assembly 3 is installed, the plurality of positioning convex rings 333 can be aligned with the positioning grooves 223 and then inserted, so that the alignment installation between the first connecting channel 221, the second connecting channel 222 and the liquid inlet channel 61, the liquid outlet channel 62 is completed, and the installation position of the coating target assembly 3 is ensured to be accurate and stable.

[0042] In the embodiment, the coating target 31 comprises an upper end cover 311, a lower end cover 312, a water guide rod 313, a yoke 314, a target body 315, and a magnet 316. The upper end cover 311 is rotatably arranged on the second target head 33, the lower end cover 312 is rotatably arranged on the first target head 32, the target body 315 is sleeved on the yoke 314, and the two ends of the target body 315 are fixed with the upper end cover 311 and the lower end cover 312 respectively. The magnet 316 is fixedly arranged on the yoke 314. One end of the water guide rod 313 penetrates through the upper end cover 311 and is connected with the yoke 314, and the other end of the water guide rod 313 extends into the second target head 33.

[0043] The circulating cooling channel comprises an inner water channel 317 and an outer water channel 318. One end of the inner water channel 317 is communicated with the discharge inlet 331, and the other end of the inner water channel 317 passes through the water guide rod 313 and the yoke 314 in sequence. One end of the outer water channel 318 is communicated with the discharge outlet 332, and the other end of the outer water channel 318 passes through the space between the upper end cover 311 and the water guide rod 313 and the space between the yoke 314 and the target body 315 in sequence. The other end of the outer water channel 318 and the other end of the inner water channel 317 are communicated at or near the lower end cover 312. After the external cooling liquid enters the liquid inlet channel 61, it enters the inner water channel 317 of the water guide rod 313 through the first connecting channel 221 and the discharge inlet 331, and then enters the inner water channel 317 of the yoke 314 from the inner water channel 317 of the water guide rod 313, and then enters the outer water channel 318 between the yoke 314 and the target body 315, and finally enters the outer water channel 318 between the yoke 314 and the target body 315, and then is discharged from the liquid outlet channel 62 through the discharge outlet 332 and the second connecting channel 222.

[0044] In the embodiment, the first dismounting part 21 is located below the second dismounting part 22. The first dismounting part 21 is provided with an insertion hole 211. The first target head 32 comprises an insertion part 321 and a fixed part 322. The insertion part 321 is fixedly arranged on the lower side of the fixed part 322. The insertion part 321 extends into the insertion hole 211, and the fixed part 322 abuts against the first dismounting part 21, so that the first dismounting part 21 bears the weight of the coating target 31 first. A first locking part for locking the fixed part 322 and the first dismounting part 21 is arranged between the fixed part 322 and the first dismounting part 21. The first locking part can be preferably a screw.

[0045] In the embodiment, the side edge of the insertion hole 211 penetrates through one end of the first dismounting part 21 away from the coating target frame 2 to form an insertion opening 212. The insertion opening 212 is matched with the insertion part 321. When the first target head 32 is installed on the first dismounting part 21, the insertion part 321 is pushed into the insertion hole 211 through the insertion opening 212, so as to reduce the installation difficulty of the coating target 31.

[0046] In the embodiment, the insertion hole 211, the insertion portion 321 and the fixing portion 322 are circular in design, and the diameter of the insertion portion 321 is smaller than that of the fixing portion 322.

[0047] In the embodiment, the second disassembling piece 22 comprises a disassembling portion 224 and two limiting plates 225, the two limiting plates 225 are respectively fixedly arranged on the left and right sides of the disassembling portion 224, a limiting groove 226 is formed between the second disassembling piece 22 and the two limiting plates 225, the second target head 33 is arranged in the limiting groove 226, the left and right sides of the second target head 33 are respectively attached to the two limiting plates 225, and the second target head 33 is detachably connected to the disassembling portion 224. The detachable connection can be realized by screws.

[0048] Specifically, the positioning groove 223 is arranged on one side of the disassembling portion 224 in the limiting groove 226.

[0049] In the embodiment, the displacement driving assembly 4 comprises a displacement driving piece 41, a displacement mounting seat 42 and a push-pull rod 43. The displacement driving piece 41 is fixedly arranged on the displacement mounting seat 42, one end of the push-pull rod 43 is movably arranged through the displacement mounting seat 42 and the fixed main body 1 to be fixed to the coating target holder 2, and the other end of the push-pull rod 43 is drivingly connected to the displacement driving piece 41. The displacement driving piece 41 drives the push-pull rod 43 to push and pull the coating target holder 2, so that the coating target holder 2 is away from the fixed main body 1 to be close to the workpiece to be coated in the vacuum cavity 8, or the coating target holder 2 is close to the fixed main body 2 to be away from the workpiece to be coated close to the vacuum cavity 8.

[0050] In the embodiment, the displacement driving piece 41 comprises an adjustable stroke cylinder, and the stroke thereof can be adjusted as needed. It is worth noting that the displacement driving piece 41 can also be replaced by other driving structures that can drive the push-pull rod 43.

[0051] In the embodiment, one side of the displacement mounting seat 42 is embedded in the fixed main body 1, and a first insulating sleeve 44 is arranged between the displacement mounting seat 42 and the fixed main body 1.

[0052] In the embodiment, a first guide sleeve 45 is arranged between the push-pull rod 43 and the displacement mounting seat 42.

[0053] In the embodiment, a first oil seal 46 is arranged between the push-pull rod 43 and the displacement mounting seat 42.

[0054] In the embodiment, the rotary driving assembly 5 comprises a rotary driving member 51, a rotary mounting base 52, a first gear 53, a rotary telescopic rod assembly 54 which can be telescopically extended while being driven to rotate by the rotary driving member 51, and a second gear 319 arranged on the coating target 31; the rotary mounting base 52 is fixedly arranged on the fixed main body 1, the rotary driving member 51 is fixedly arranged on the rotary mounting base 52, one end of the rotary telescopic rod assembly 54 is drivingly connected with the rotary driving member 51 so as to be driven to rotate by the rotary driving member 51, the other end of the rotary telescopic rod assembly 54 penetrates through the rotary mounting base 52 and the fixed main body 1 to extend into the dismounting position 23 of the coating target holder 2, the first gear 53 is sleeved on the other end of the rotary telescopic rod assembly 54, and the first gear 53 is engaged with the second gear 319; when the coating target holder 2 moves, the rotary telescopic rod assembly 54 will synchronously move with the coating target holder 2, at this time, the relative position of the first gear 53 on the dismounting position 23 is always unchanged, and the coating target holder 2 can continuously work.

[0055] In the embodiment, the first gear 53 and the second gear 319 are both bevel gears.

[0056] It is worth mentioning that when the coating target 31 is installed, the first target head 32 at the lower end of the coating target 31 is placed and installed on the first dismounting member 21 and is carried by the first dismounting member 21, at this time, the second gear 319 on the coating target 31 can be engaged with the first gear 53; the second target head 33 at the upper end of the coating target 31 is placed in the limiting groove 226 of the second dismounting member 22, and finally the first target head 32 and the second target head 33 are respectively locked on the first dismounting member 21 and the second dismounting member 22 by screws to complete the installation process.

[0057] In the embodiment, the rotary telescopic rod assembly 54 comprises a rotary rod 541 and a telescopic rod 542, the rotary driving member 51 is drivingly connected with the rotary rod 541 to drive it to rotate, the rotary rod 541 is internally provided with a telescopic cavity 543 which limits the telescopic rod 542 from rotating relative to the rotary rod 541, one end of the telescopic rod 542 is telescopically arranged in the telescopic cavity 543, the other end of the telescopic rod 542 penetrates through the rotary mounting base 52 and the fixed main body 1 to extend into the dismounting position 23 of the coating target holder 2, and the first gear 53 is sleeved on the other end of the telescopic rod 542. It can be known that when the rotary driving member 51 drives the rotary rod 541 to rotate, the rotary rod 541 will synchronously drive the telescopic rod 542 to rotate to drive the first gear 53 to rotate through the telescopic rod 542; at the same time, the telescopic rod 542 can also move under the driving of the coating target holder 2 to telescopically move relative to the rotary rod 541. Specifically, the telescopic cavity 543 and the telescopic rod 542 can be designed as flat positions or non-cylindrical column structures to realize the function that the telescopic rod 542 can telescopically extend in the telescopic cavity 543 but cannot rotate.

[0058] In the embodiment, the rotating driving member 51 comprises a motor 511 fixedly arranged on the rotating mounting base 52, the rotating rod 541 has a third gear 544 fixed outside, and the motor 511 has a fourth gear 512 fixed on an output shaft, and the fourth gear 512 is engaged with the third gear 544.

[0059] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0060] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0061] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0062] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0063] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0064] In the embodiment, the rotating mounting base 52 is embedded into the fixed body 1 at one side, and the rotating mounting base 52 is provided with a second insulation sleeve 55.

[0065] In the embodiment, the baffle assembly 7 comprises a movable baffle 71 and two rotating baffle rings 72, the movable baffle 71 is fixed at two ends with the two rotating baffle rings 72 respectively, and the rotating baffle rings 72 are rotatably connected with the coated target 31 respectively.

[0066] The rotating process of the rotating baffle ring 72 comprises a first position for shielding the coated target 31 and a second position for exposing the coated target 31; when the rotating baffle ring 72 rotates to the first position, the movable baffle 71 is synchronously rotated to shield the coated target 31; when the rotating baffle ring 72 rotates to the second position, the movable baffle 71 is synchronously rotated to expose the coated target 31.

[0067] The first dismounting part 21 or / and the second dismounting part 22 is provided with a limiting part 24 for limiting the rotation of the movable baffle 71 when the movable baffle 71 rotates to the first position in the first direction and rotates to the second position in the second direction. When the coating target 31 rotates, the movable baffle 71 and the rotating baffle ring 72 are driven to rotate synchronously based on the damping between the coating target 31 and the rotating baffle ring 72. When the movable baffle 71 rotates to the first position in the first direction and rotates to the second position in the second direction, the limiting part 24 limits the rotation of the baffle assembly 7 to stop the rotation. The " / " means "or", and the first direction and the second direction are opposite directions.

[0068] In the embodiment, the rotating baffle ring 72 is provided with a limiting block 73, and the limiting part 24 corresponds to the limiting block 73.

[0069] In the embodiment, the number of limiting blocks 73 is two, and the two limiting blocks 73 are respectively fixed on the two limiting plates 225 to correspond to the two limiting blocks 73 respectively.

[0070] In the embodiment, at least one limiting plate 225 is detachably provided with a fixed baffle 74 away from the limiting groove 226.

[0071] In the embodiment, the two limiting plates 225 are both detachably provided with a fixed baffle 74 away from the limiting groove 226, and the coating target 31 is located between the two fixed baffles 74.

[0072] It should be emphasized that in the present application, the displacement driving assembly 4, the rotating driving assembly 5, and the baffle assembly 7 can also work cooperatively:

[0073] Before work, the coating target holder 2 is close to the fixed main body 1 to be away from the coating workpiece in the vacuum cavity 8;

[0074] During work, the displacement driving assembly 4 drives the coating target holder 2 to drive the coating target assembly 3 to be close to the coating workpiece in the vacuum cavity 8; at the same time, the rotating driving assembly 5 works to drive the coating target 31 to rotate. When the coating target 31 rotates, the rotating baffle ring 72 will be driven to rotate synchronously under the action of damping, so as to drive the movable baffle 71 to rotate to the first position in the first direction through the rotating baffle ring 72, so that the coating target 31 is exposed. At this time, the coating target 31 can be coated. It should be noted that when the coating target 31 rotates to coat, the displacement driving assembly 4 can stop to keep a fixed position, or continue to work to change the position in real time.

[0075] After work, the displacement driving assembly 4 drives the coating target holder 2 to drive the coating target assembly 3 away from the coating workpiece in the vacuum cavity 8 through the coating target holder 2; at the same time, the rotary driving assembly 5 drives the coating target 31 to rotate reversely, and the coating target 31 rotates reversely and synchronously drives the rotary baffle ring 72 to rotate under the action of damping, so as to drive the movable baffle 71 to rotate to the second position in the second direction through the rotary baffle ring 72, and shield the coating target, at this time, the coating target 31 can avoid pollution.

[0076] The above are only preferred embodiments of the present application, and are not used to limit the present application, and any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A coated target mechanism integrated with a cooling structure, characterized by, The coating target mechanism comprises: a fixed body; a coating target frame arranged on one side of the fixed body, the coating target frame being provided with a first dismounting member and a second dismounting member at two ends thereof, and a dismounting position being formed between the first dismounting member and the second dismounting member; a coating target assembly comprising a coating target, a first target head and a second target head, the coating target being rotatably connected with the first target head and the second target head at two ends thereof, the first target head and the second target head being arranged on the first dismounting member and the second dismounting member respectively, so that the coating target is mounted in the dismounting position; a cooling assembly for inputting and outputting cooling liquid, the cooling assembly being provided with an inlet channel and an outlet channel, the cooling assembly being arranged on the other side of the fixed body and penetrating through the fixed body to be connected with the coating target frame, and the outlet channel and the inlet channel being connected with the coating target in the dismounting position.

2. The coated target assembly of claim 1, wherein the cooling structure is integrated into the target assembly. The coating target is provided with a circulating cooling channel, and the second target head is further provided with a discharge inlet and a discharge outlet connected with the circulating cooling channel, and the inlet channel and the outlet channel are connected with the discharge inlet and the discharge outlet respectively.

3. The coated target assembly of claim 2, wherein the cooling structure is integrated with the target body. The second dismounting member is provided with a first connecting channel and a second connecting channel, the inlet channel is connected with the discharge inlet through the first connecting channel, and the outlet channel is connected with the discharge outlet through the second connecting channel.

4. The coating target mechanism integrated with a cooling structure according to claim 3, the second dismounting member is further provided with a plurality of positioning grooves connected with the first connecting channel and the second connecting channel respectively, and the second target head is further provided with a plurality of positioning convex rings fixed thereon and arranged around the outside of the discharge outlet and the discharge inlet respectively, the plurality of positioning convex rings are inserted into the plurality of positioning grooves respectively, so that the first connecting channel and the second connecting channel are connected with the inlet channel and the outlet channel respectively.

5. The coated target assembly of claim 4, wherein the cooling structure is integrated with the target body. The coating target comprises an upper end cover, a lower end cover, a water guide rod, a yoke, a target body and a magnet, the upper end cover is rotatably arranged on the second target head, the lower end cover is rotatably arranged on the first target head, the target body is sleeved on the yoke, and the target body is fixed at two ends thereof with the upper end cover and the lower end cover respectively, the magnet is fixed on the yoke, one end of the water guide rod is connected with the yoke through the upper end cover, and the other end of the water guide rod extends into the second target head. The circulating cooling channel comprises an inner water channel and an outer water channel, one end of the first connecting channel is connected with the inner water channel, the other end of the inner water channel sequentially passes through the water guide rod and the yoke, one end of the outer water channel is connected with the second connecting channel, and the other end of the outer water channel sequentially passes through the space between the upper end cover and the water guide rod and the space between the yoke and the target body, and the other end of the outer water channel is connected with the other end of the inner water channel.

6. The coated target assembly of claim 1, wherein the cooling structure is integrated. The first target head and the second target head are detachably arranged on the first dismounting member and the second dismounting member respectively, so that the coating target is detachably mounted in the dismounting position.

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