Ceramic suction cup assembling and disassembling mechanism

Abstract

The utility model relates to a ceramic suction cup loading and unloading mechanism which comprises a ceramic suction cup, a driving assembly and a plane error adjusting assembly. The ceramic suction cup is of a hollow structure, a plurality of vacuum suction holes are formed in the ceramic suction cup, the two sides of the ceramic suction cup are correspondingly provided with lock tongues which can be controlled to stretch out and draw back, guide chamfers are formed in the edge of the ceramic suction cup, and the lock tongues are matched with fixing clamping grooves of an annular rotary table on the rotary workbench so that the ceramic suction cup can be fixedly installed in the annular rotary table. The driving assembly is used for controllably driving the ceramic suction cup to reciprocate in the vertical direction. The plane error adjusting assembly is used for driving the ceramic suction cup to reciprocate in two directions perpendicular to each other in the horizontal plane. The ceramic suction cup is driven by the driving assembly to reciprocate below the annular rotary table of the rotary workbench, the telescopic lock tongues arranged on the two sides of the ceramic suction cup are matched with the fixing clamping grooves of the annular rotary table, rapid and automatic assembling and disassembling of the ceramic suction cup can be achieved, and the assembling and disassembling efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of chip packaging technology, specifically to a ceramic suction cup loading and unloading mechanism. Background Technology

[0002] In semiconductor packaging processes, rotary stages, by fixing wafer frames onto a ring-shaped turntable, adapt to various process requirements (such as chip transfer, cleaning, and testing). In the process of transferring chips from a wafer frame with a perforated blue film to a frame without a perforated blue film for testing, ceramic chucks are inserted into the ring-shaped turntable and fixed below the frame without the perforated blue film to provide vacuum adsorption and a stable support surface for the blue film, facilitating subsequent chip transfer with a rolling mechanism. In other processes (such as testing), the ceramic chucks need to be removed to avoid interference with the inspection camera. In traditional solutions, ceramic chucks are usually manually installed using bolts or clips. Frequent disassembly and reassembly increase downtime, and manual operation can easily cause mechanical collisions between the chucks and the ring-shaped turntable due to horizontal alignment deviations, resulting in chuck damage. Utility Model Content

[0003] The purpose of this invention is to provide a ceramic suction cup loading and unloading mechanism. This mechanism uses a drive assembly to move the ceramic suction cup reciprocally beneath a circular turntable on a rotating worktable. The retractable locking tongues on both sides of the ceramic suction cup engage with the fixed slots on the circular turntable, enabling rapid and automatic loading and unloading of the ceramic suction cup, thus improving loading and unloading efficiency. The guide chamfer on the edge of the ceramic suction cup, combined with a plane error adjustment assembly, allows the ceramic suction cup to move and adjust along the horizontal plane, compensating for horizontal alignment deviations between the ceramic suction cup and the circular turntable. This ensures precise insertion of the ceramic suction cup into the circular turntable and prevents mechanical collisions between the ceramic suction cup and the circular turntable, thus avoiding damage.

[0004] To achieve the above objectives, this utility model provides a ceramic suction cup loading and unloading mechanism, comprising:

[0005] A ceramic suction cup, wherein the ceramic suction cup has a hollow structure and several vacuum suction holes are provided on the ceramic suction cup, and controllable telescopic locking tongues are provided on both sides of the ceramic suction cup, and guide chamfers are provided on the edge of the ceramic suction cup. The locking tongues cooperate with the fixing slots of the annular turntable on the rotating worktable to install and fix the ceramic suction cup in the annular turntable.

[0006] A drive component for controllably driving the ceramic suction cup to reciprocate vertically;

[0007] The planar error adjustment component is used to drive the ceramic suction cup to move back and forth in two mutually perpendicular directions on the horizontal plane.

[0008] Optionally, the ceramic suction cup loading and unloading mechanism further includes a telescopic assembly for driving the locking tongue to extend and retract, the telescopic assembly comprising:

[0009] A parallel gripper cylinder is located below the ceramic suction cup, and the movable ends on both sides of the parallel gripper cylinder are respectively provided with expansion and contraction grippers.

[0010] A telescopic slide rail is provided at the bottom of the ceramic suction cup. A telescopic slider that can slide and is connected to the telescopic gripper is provided on the telescopic slide rail. A locking tongue is provided on the telescopic slider.

[0011] Optionally, the latch is provided with an air inlet, and the ceramic suction cup is provided with a vacuum tube. One end of the vacuum tube is connected to the ceramic suction cup, and the other end of the vacuum tube passes through the tension slider and is connected to the air inlet.

[0012] Optionally, the plane error adjustment component includes:

[0013] A fixed base plate is provided with a first slide rail on its top surface;

[0014] A first adjusting plate, the bottom surface of the first adjusting plate is provided with a first slider that cooperates with the first slide rail, the first slider cooperates with the first slide rail to drive the first adjusting plate to reciprocate along a first direction, and the top surface of the first adjusting plate is provided with a second slide rail that is perpendicular to the first slide rail;

[0015] The second adjustment plate has a second slider on its bottom surface that cooperates with the second slide rail. The second slider cooperates with the second slide rail to drive the second adjustment plate to reciprocate along a second direction perpendicular to the first direction. The parallel gripper cylinder is located on the top surface of the second adjustment plate.

[0016] Optionally, the plane error adjustment component further includes:

[0017] The first limiting block is disposed on the side of the fixed base plate;

[0018] Two first spring plungers are disposed on the side of the first adjusting plate and respectively located on both sides of the first limiting block. The first spring plungers cooperate with the first limiting block to elastically limit the first adjusting plate.

[0019] The second limiting block is located on the side of the second adjusting plate;

[0020] Two second spring plungers are disposed on the side of the first adjusting plate and respectively located on both sides of the second limiting block. The second spring plungers cooperate with the second limiting block to elastically limit the second adjusting plate.

[0021] Optionally, the driving component includes:

[0022] Vertical slide rail;

[0023] A vertical slider is slidably mounted on the vertical slide rail;

[0024] A drive motor is used to drive the vertical slider to reciprocate along the vertical slide rail;

[0025] A support frame is mounted on the vertical slider.

[0026] Optionally, the ceramic suction cup loading and unloading mechanism further includes an overload protection component disposed below the planarity error adjustment component, the overload protection component comprising:

[0027] A support plate is disposed on the top of the support frame, and a linear bearing is disposed on the support plate;

[0028] A telescopic rod is installed inside the linear bearing and can reciprocate vertically. One end of the telescopic rod is connected to the bottom surface of the fixed base plate, and the other end of the telescopic rod passes through the linear bearing and is provided with a connecting plate.

[0029] A tension spring is disposed between the support plate and the connecting plate.

[0030] Optionally, a shielding plate is provided on the connecting plate, and a slotted photoelectric sensor is provided on the support frame. The shielding plate and the slotted photoelectric sensor cooperate to perform signal alarm.

[0031] The beneficial effects of this utility model are as follows: the driving component drives the ceramic suction cup to move back and forth under the annular turntable on the rotating worktable, and the retractable locking tongues on both sides of the ceramic suction cup cooperate with the fixed slots of the annular turntable to realize the rapid and automatic loading and unloading of the ceramic suction cup, thereby improving loading and unloading efficiency; the guide chamfer on the edge of the ceramic suction cup, in conjunction with the plane error adjustment component, enables the ceramic suction cup to move and adjust along the horizontal plane, compensating for the horizontal alignment deviation between the ceramic suction cup and the annular turntable, ensuring that the ceramic suction cup is accurately inserted into the annular turntable, and avoiding mechanical collision between the ceramic suction cup and the annular turntable that could cause damage.

[0032] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0033] Figure 1 This is a schematic structural diagram of a ceramic suction cup loading and unloading mechanism according to an embodiment of the present invention;

[0034] Figure 2 This is a schematic structural diagram of a rotary worktable according to an embodiment of the present invention;

[0035] Figure 3This is a schematic structural diagram of the tensioning component of the ceramic suction cup loading and unloading mechanism according to an embodiment of the present invention;

[0036] Figure 4 This is a schematic structural diagram of the drive assembly of a ceramic suction cup loading and unloading mechanism according to an embodiment of the present invention;

[0037] Figure 5 This is a schematic structural diagram of the planar error adjustment component of the ceramic suction cup loading and unloading mechanism according to an embodiment of the present invention;

[0038] Figure 6 This is a schematic structural diagram of the overload protection component of the ceramic suction cup loading and unloading mechanism according to an embodiment of the present invention;

[0039] In the diagram: 100. Ceramic suction cup loading and unloading mechanism; 1. Ceramic suction cup; 11. Locking tongue; 111. Air inlet; 12. Guide chamfer; 2. Drive assembly; 21. Vertical slide rail; 22. Vertical slider; 23. Drive motor; 24. Support frame; 3. Planar error adjustment assembly; 31. Fixed base plate; 32. First adjustment plate; 33. Second adjustment plate; 34. First slide rail; 35. First slider; 36. Second slide rail; 37. Second slider; 38. First limit block; 39. First spring plunger 310. Second limit block; 311. Second spring plunger; 4. Tensioning assembly; 41. Parallel gripper cylinder; 42. Tensioning slide rail; 43. Tensioning gripper; 44. Tensioning slider; 5. Vacuum air pipe; 6. Overload protection assembly; 61. Support plate; 62. Telescopic rod; 63. Tension spring; 64. Linear bearing; 65. Connecting plate; 66. Shielding plate; 67. Slotted photoelectric sensor; 200. Rotary worktable; 201. Annular turntable; 202. Fixed slot; 203. Vacuum air circuit. Detailed Implementation

[0040] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0041] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0042] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0043] Please see Figures 1 to 4 The ceramic suction cup loading and unloading mechanism 100 shown in a preferred embodiment of this application includes a ceramic suction cup 1, a drive assembly 2, and a plane error adjustment assembly 3. The ceramic suction cup 1 has a hollow structure and several vacuum suction holes. Controllable telescopic locking tongues 11 are correspondingly provided on both sides of the ceramic suction cup 1, and guide chamfers 12 are provided on the edge of the ceramic suction cup 1. The locking tongues 11 cooperate with the fixing slots 202 of the annular turntable 201 on the rotary worktable 200 to install and fix the ceramic suction cup 1 within the annular turntable 201. The drive assembly 2 is used to controllably drive the ceramic suction cup 1 to reciprocate vertically. The plane error adjustment assembly 3 is used to drive the ceramic suction cup 1 to reciprocate in two mutually perpendicular directions on the horizontal plane.

[0044] According to the embodiment of this utility model, the ceramic suction cup 1 is driven by the driving component 2 to reciprocate below the annular turntable 201 on the rotary worktable 200. The retractable locking tongues 11 on both sides of the ceramic suction cup 1 cooperate with the fixing slots 202 of the annular turntable 201 to achieve rapid automatic loading and unloading of the ceramic suction cup 1, thereby improving loading and unloading efficiency. The guide chamfer 12 on the edge of the ceramic suction cup 1, in conjunction with the plane error adjustment component 3, enables the ceramic suction cup 1 to move and adjust along the horizontal plane, compensating for the horizontal alignment deviation between the ceramic suction cup 1 and the annular turntable 201, ensuring that the ceramic suction cup 1 is accurately inserted into the annular turntable 201, and avoiding mechanical collision between the ceramic suction cup 1 and the annular turntable 201 that could cause damage.

[0045] The following detailed description uses specific examples:

[0046] Specifically, please see Figure 3 The ceramic suction cup 1 loading and unloading mechanism 100 also includes a tensioning assembly 4 for driving the extension and retraction of the locking tongue 11. The tensioning assembly 4 includes a parallel gripper cylinder 41 and a tensioning slide rail 42. The parallel gripper cylinder 41 is located below the ceramic suction cup 1, and tensioning grippers 43 are correspondingly arranged on the movable ends of both sides of the parallel gripper cylinder 41. The tensioning slide rail 42 is located at the bottom of the ceramic suction cup 1, and a slidable tensioning slider 44 is arranged on the tensioning slide rail 42 and correspondingly connected to the tensioning grippers 43. The locking tongue 11 is arranged on the tensioning slider 44. By driving the tensioning grippers 43 to open and close synchronously through the movable ends of the parallel gripper cylinder 41, a stable clamping force is provided to drive the horizontal extension and retraction of the locking tongue 11, ensuring precise engagement between the locking tongue 11 and the fixed slot 202 on the annular turntable 201, thereby automating the loading and unloading of the ceramic suction cup 1 and improving process switching efficiency.

[0047] Further, please see Figure 3 and Figure 5 The locking tongue 11 has an air inlet 111, and the ceramic suction cup 1 is equipped with a vacuum tube 5. One end of the vacuum tube 5 is connected to the ceramic suction cup 1, and the other end of the vacuum tube 5 passes through the tension / retraction slider 44 and is connected to the air inlet 111. After the locking tongue 11 is fixed in the fixing slot 202 on the annular turntable 201, the ceramic suction cup 1 is connected to the vacuum passage 203 on the rotating worktable 200 through the cooperation of the air inlet 111 on the locking tongue 11 and the vacuum tube 5, thereby realizing the vacuum adsorption function of the ceramic suction cup 1. Specifically, in this embodiment, the vacuum tube 5 is a flexible tube that can adaptively adjust with the movement of the tension / retraction slider 44 and the locking tongue 11 to ensure the adsorption stability of the ceramic suction cup 1.

[0048] Specifically, please see Figure 4 and Figure 5The planar error adjustment assembly 3 includes a fixed base plate 31, a first adjustment plate 32, and a second adjustment plate 33. A first slide rail 34 is provided on the top surface of the fixed base plate 31. A first slider 35, which cooperates with the first slide rail 34, is provided on the bottom surface of the first adjustment plate 32. The first slider 35, in cooperation with the first slide rail 34, drives the first adjustment plate 32 to reciprocate along a first direction. A second slide rail 36, perpendicular to the first slide rail 34, is provided on the top surface of the first adjustment plate 32. A second slider 37, which cooperates with the second slide rail 36, is provided on the bottom surface of the second adjustment plate 33. The second slider 37, in cooperation with the second slide rail 36, drives the second adjustment plate 33 to reciprocate along a second direction perpendicular to the first direction. A parallel gripper cylinder 41 is provided on the top surface of the second adjustment plate 33. The ceramic suction cup 1 has a guide chamfer 12 on its edge. When the ceramic suction cup 1 is inserted into the annular turntable 201 from below, if there is a horizontal alignment deviation between the ceramic suction cup 1 and the annular turntable 201, the annular turntable 201 will be forced to move towards its center position under the action of the guide chamfer 12. At this time, the ceramic suction cup 1 can be moved and adjusted along the horizontal plane by the cooperation of the various structures of the plane error adjustment component 3, so as to compensate for the horizontal alignment deviation between the ceramic suction cup 1 and the annular turntable 201, and make the ceramic suction cup 1 accurately inserted into the annular turntable 201.

[0049] Further, please see Figure 5 The planar error adjustment assembly 3 also includes a first limiting block 38, a first spring plunger 39, a second limiting block 310, and a second spring plunger 311. The first limiting block 38 is located on the side of the fixed base plate 31. The two first spring plungers 39 are located on the side of the first adjusting plate 32 and are respectively positioned on both sides of the first limiting block 38. The first spring plungers 39 cooperate with the first limiting block 38 to elastically limit the first adjusting plate 32. The second limiting block 310 is located on the side of the second adjusting plate 33. The two second spring plungers 311 are located on the side of the first adjusting plate 32 and are respectively positioned on both sides of the second limiting block 310. The second spring plungers 311 cooperate with the second limiting block 310 to elastically limit the second adjusting plate 33. Through the cooperation of the limiting blocks and spring plungers, the adjusting plate can be pushed back to its original position after the external force disappears, maintaining the initial alignment state, facilitating adjustment during the next loading and unloading process of the ceramic suction cup 1. Specifically, there are two first limiting blocks 38 and two second limiting blocks 310, which are respectively set on the symmetrical sides of the fixed base plate 31 and the second adjusting plate 33. There are two sets of first spring plungers 39 and second spring plungers 311, with two spring plungers in each set, and the four sets of spring plungers are respectively arranged around the first adjusting plate 32.

[0050] Specifically, please see Figure 4The drive assembly 2 includes a vertical slide rail 21, a vertical slider 22, a drive motor 23, and a support frame 24. The vertical slider 22 is slidably mounted on the vertical slide rail 21. The drive motor 23 drives the vertical slider 22 to reciprocate along the vertical slide rail 21. The support frame 24 is mounted on the vertical slider 22. The drive assembly 2 drives the ceramic suction cup 1 to reciprocate vertically below the annular turntable 201, thereby enabling the loading and unloading of the ceramic suction cup 1.

[0051] Further, please see Figure 4 and Figure 6 The ceramic suction cup 1 loading and unloading mechanism 100 also includes an overload protection component 6 located below the plane error adjustment component 3. The overload protection component 6 includes a support plate 61, a telescopic rod 62, and a tension spring 63. The support plate 61 is located on the top of the support frame 24, and a linear bearing 64 is mounted on the support plate 61. The telescopic rod 62 is located within the linear bearing 64 and can reciprocate vertically. One end of the telescopic rod 62 is connected to the bottom surface of the fixed base plate 31, and the other end passes through the linear bearing 64 and is connected to a connecting plate 65. The tension spring 63 is located between the support plate 61 and the connecting plate 65. By providing the overload protection component 6, when the horizontal alignment deviation between the ceramic suction cup 1 and the annular turntable 201 is too large, preventing the ceramic suction cup 1 from being inserted into the bottom of the annular turntable 201 for installation, thus causing overload of the loading and unloading mechanism, the fixed base plate 31 is allowed to move downwards relative to the support plate 61, avoiding hard damage to the loading and unloading mechanism. The tension spring 63 can reset the overload protection component 6 after the overload disappears.

[0052] Further, please see Figure 6 A shielding plate 66 is provided on the connecting plate 65, and a slotted photoelectric sensor 67 is provided on the support frame 24. The shielding plate 66 and the slotted photoelectric sensor 67 cooperate to generate a signal alarm. When the loading and unloading mechanism is overloaded, the telescopic rod 62 drives the shielding plate 66 on the connecting plate 65 to move downward, so that the shielding plate 66 enters the detection area of ​​the slotted photoelectric sensor 67 to trigger the alarm signal, which facilitates subsequent processing by the operating system and avoids damage to the mechanism or malfunction.

[0053] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A ceramic suction cup loading and unloading mechanism, characterized in that, include: A ceramic suction cup, wherein the ceramic suction cup has a hollow structure and several vacuum suction holes are provided on the ceramic suction cup, and controllable telescopic locking tongues are provided on both sides of the ceramic suction cup, and guide chamfers are provided on the edge of the ceramic suction cup. The locking tongues cooperate with the fixing slots of the annular turntable on the rotating worktable to install and fix the ceramic suction cup in the annular turntable. A drive component for controllably driving the ceramic suction cup to reciprocate vertically; The planar error adjustment component is used to drive the ceramic suction cup to move back and forth in two mutually perpendicular directions on the horizontal plane.

2. The ceramic suction cup loading and unloading mechanism according to claim 1, characterized in that, It also includes a telescopic assembly for driving the extension and retraction of the bolt, the telescopic assembly comprising: A parallel gripper cylinder is located below the ceramic suction cup, and the movable ends on both sides of the parallel gripper cylinder are respectively provided with expansion and contraction grippers. A telescopic slide rail is provided at the bottom of the ceramic suction cup. A telescopic slider that can slide and is connected to the telescopic gripper is provided on the telescopic slide rail. A locking tongue is provided on the telescopic slider.

3. The ceramic suction cup loading and unloading mechanism according to claim 2, characterized in that, An air inlet is provided on the latch, and a vacuum tube is provided on the ceramic suction cup. One end of the vacuum tube is connected to the ceramic suction cup, and the other end of the vacuum tube passes through the tension slider and is connected to the air inlet.

4. The ceramic suction cup loading and unloading mechanism according to claim 2, characterized in that, The plane error adjustment component includes: A fixed base plate is provided with a first slide rail on its top surface; A first adjusting plate, the bottom surface of the first adjusting plate is provided with a first slider that cooperates with the first slide rail, the first slider cooperates with the first slide rail to drive the first adjusting plate to reciprocate along a first direction, and the top surface of the first adjusting plate is provided with a second slide rail that is perpendicular to the first slide rail; The second adjustment plate has a second slider on its bottom surface that cooperates with the second slide rail. The second slider cooperates with the second slide rail to drive the second adjustment plate to reciprocate along a second direction perpendicular to the first direction. The parallel gripper cylinder is located on the top surface of the second adjustment plate.

5. The ceramic suction cup loading and unloading mechanism according to claim 4, characterized in that, The plane error adjustment component further includes: The first limiting block is disposed on the side of the fixed base plate; Two first spring plungers are disposed on the side of the first adjusting plate and respectively located on both sides of the first limiting block. The first spring plungers cooperate with the first limiting block to elastically limit the first adjusting plate. The second limiting block is located on the side of the second adjusting plate; Two second spring plungers are disposed on the side of the first adjusting plate and respectively located on both sides of the second limiting block. The second spring plungers cooperate with the second limiting block to elastically limit the second adjusting plate.

6. The ceramic suction cup loading and unloading mechanism according to claim 5, characterized in that, The driving component includes: Vertical slide rail; A vertical slider is slidably mounted on the vertical slide rail; A drive motor is used to drive the vertical slider to reciprocate along the vertical slide rail; A support frame is mounted on the vertical slider.

7. The ceramic suction cup loading and unloading mechanism according to claim 6, characterized in that, It also includes an overload protection component disposed below the plane error adjustment component, the overload protection component comprising: A support plate is disposed on the top of the support frame, and a linear bearing is disposed on the support plate; A telescopic rod is installed inside the linear bearing and can reciprocate vertically. One end of the telescopic rod is connected to the bottom surface of the fixed base plate, and the other end of the telescopic rod passes through the linear bearing and is provided with a connecting plate. A tension spring is disposed between the support plate and the connecting plate.

8. The ceramic suction cup loading and unloading mechanism according to claim 7, characterized in that, The connecting plate is provided with a shielding plate, and the support frame is provided with a slotted photoelectric sensor. The shielding plate and the slotted photoelectric sensor cooperate to provide a signal alarm.

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