Photomask storage device

Abstract

The utility model discloses a photomask storage device which comprises a shell, a compartment arranged in the shell and an interlayer space located between the shell and the compartment, the compartment comprises an inner space used for storing a photomask, the photomask storage device comprises an air draft device arranged on the shell, the air draft device is communicated with the interlayer space, and the interlayer space is communicated with the shell. The compartment is provided with an open hole, and the open hole is communicated with the internal space and the interlayer space; and the interlayer space and the air draft device are arranged to form a heat dissipation channel, so that a heat dissipation environment is provided for the high-temperature photomask.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing packaging structure, and in particular to a photomask storage device. Background Technology

[0002] In existing semiconductor chip manufacturing processes, exposure and development processes are required to obtain patterned circuit layers. This process involves using a photomask, which is irradiated with a laser within a specific container. After use, the photomask remains hot; placing it directly into a storage housing can cause deformation of both the housing and the photomask inside due to heat conduction, affecting their subsequent use. The cleanliness of the photomask also directly impacts the yield of the exposure and development process. To isolate external dust, the housing is typically sealed, resulting in poor heat dissipation. Utility Model Content

[0003] One of the objectives of this invention is to provide a photomask storage device to solve the technical problem of poor heat dissipation of the housing in the prior art.

[0004] To achieve one of the above-mentioned objectives of the utility model, one embodiment of the utility model provides a photomask storage device, including a housing, a compartment disposed within the housing, and an interlayer space located between the housing and the compartment. The compartment includes an internal space for storing photomasks. The photomask storage device includes a ventilation device disposed within the housing, the ventilation device communicating with the interlayer space. The compartment is provided with an opening, the opening communicating with the internal space and the interlayer space.

[0005] As a further improvement of one embodiment of this utility model, the width of the interlayer space ranges from 1cm to 4cm.

[0006] As a further improvement of one embodiment of the present utility model, the compartment includes two side plates arranged opposite to each other and a top plate connecting the two side plates; the shell includes two side walls arranged opposite to each other and a top wall connecting the two side walls; the interlayer space includes an interlayer area formed by the side plates and their adjacent side walls and an interlayer area formed by the top plate and the top wall.

[0007] As a further improvement of one embodiment of the present invention, it includes two exhaust devices disposed on the two side walls, each of the exhaust devices being disposed at the center of the side wall.

[0008] As a further improvement of one embodiment of the present invention, the photomask storage device includes a first sensor disposed on the top plate, the first sensor being used to determine whether a photomask exists in the compartment.

[0009] As a further improvement of one embodiment of the present invention, the compartment includes a fixing plate disposed on the side plate and used to support the photomask. The fixing plate includes a connecting part that is vertically connected to the side plate and a supporting part that is vertically connected to the connecting part.

[0010] As a further improvement of one embodiment of the present invention, the side plate and the fixing plate are provided with a plurality of evenly arranged openings.

[0011] As a further improvement of one embodiment of the present invention, several fixing plates are arranged at intervals along the vertical direction, with the lowest fixing plate being spaced apart from the bottom wall of the housing.

[0012] As a further improvement of one embodiment of the present invention, the housing includes an end wall and a door body disposed opposite to each other. The end wall is disposed in a vertical direction and perpendicular to the side wall. The photomask storage device includes a second sensor disposed on the end wall. The second sensor is used to determine whether the support portion has a photomask.

[0013] As a further improvement of one embodiment of the present invention, a plurality of the fixing plates are arranged at intervals along the vertical direction, and a plurality of the second sensors correspond one-to-one with the fixing plates.

[0014] Compared with the prior art, the present invention provides a photomask storage device, which includes a mezzanine space and an exhaust device. The exhaust device connects to the internal space of the compartment through the mezzanine space, providing a heat dissipation channel for the compartment. The photomask with a high temperature after use can be ventilated and cooled in time. In addition, the exhaust device can further remove dust from the compartment, improving the cleanliness of the photomask. Attached Figure Description

[0015] Figure 1 This is a front view of a photomask storage device according to one embodiment of the present invention.

[0016] Figure 2 This is a schematic diagram of the photomask storage device from another angle in one embodiment of the present invention.

[0017] Figure 3 This is a schematic diagram showing the disassembled shell and compartment in one embodiment of the present invention.

[0018] Figure 4 This is a frontal cross-sectional view of the photomask storage device in one embodiment of this utility model.

[0019] Figure 5 This is a top sectional view of the photomask storage device according to one embodiment of the present invention. Detailed Implementation

[0020] The present invention will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the protection scope of the present invention.

[0021] It should be noted that the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Furthermore, the terms "first," "second," "third," "fourth," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] The terms “connection,” “connected to,” or any other variations are intended to encompass various relative positions where a connection exists, including both direct and indirect connections. A direct connection can be formed through a pneumatic conduit, while an indirect connection can be formed through devices such as valves or sensors, through pneumatic components such as brake control units, or through any other medium such as air.

[0023] Please see Figure 1 This is a schematic diagram of the structure of a photomask storage device 100 provided in an embodiment of the present invention. The photomask 200 is also called a mask.

[0024] In one embodiment, the photomask storage device 100 includes a housing 10, a compartment 30, and an interlayer space 101 located between the housing 10 and the compartment 30. The compartment 30 is disposed within the housing 10, and at least a portion of the housing 10 and the compartment 30 are spaced apart, such that an interlayer space 101 is formed between the housing 10 and the compartment 30.

[0025] The compartment 30 includes an internal space 310 for storing the photomask 200. The photomask storage device 100 includes a ventilation device 50 disposed on the housing 10. The ventilation device 50 is connected to the interlayer space 101. The compartment 30 is provided with an opening 301, which is connected to the internal space 310 and the interlayer space 101.

[0026] Thus, the exhaust device 50 can promptly remove heat from the internal space 310 through the interlayer space 101 and the opening 301, providing a heat dissipation environment for the photomask 200 and facilitating the timely cooling of the photomask 200 after use when it is hot. Furthermore, the use of the photomask 200 inevitably involves opening the housing 10 and taking out or placing the photomask 200, which leads to dust accumulation in the compartment 30 and on the photomask 200. The exhaust device 50 also helps to remove dust promptly, improving the cleanliness of the storage environment for the photomask 200.

[0027] In one embodiment, the width of the interlayer space ranges from 1cm to 4cm. In practical applications, the external storage space is equipped with several identical photomask storage devices 100 and a robotic arm that cooperates with the photomask storage devices 100. The robotic arm is used to retrieve and place photomasks 200 from the several photomask storage devices 100 as needed. It is understood that the several photomask storage devices 100 and the robotic arm require a large storage space, and the robotic arm also needs a fixed space for movement. Therefore, the housing 10 and the compartment 30 should be arranged as compactly as possible while meeting heat dissipation requirements, so as to reduce the space occupied by each photomask storage device 100.

[0028] In actual use, the size of the specific photomask 200 is also fixed. For example, the length and width of the specific photomask 200 are 20cm*20cm. The compartment 30 is set to be 2cm-4cm larger than the size of the photomask 200, so as to facilitate the removal and placement of the photomask 200 and prevent the photomask 200 from rubbing against and colliding with the compartment 30, which would cause the photomask to wear.

[0029] In one embodiment, the compartment 30 includes two opposing side panels 31 and a top panel 32 connecting the two side panels 31. The housing 10 includes two opposing side walls 11 and a top wall 12 connecting the two side walls 11. The interlayer space 101 includes an interlayer region formed by the side panels 31 and their adjacent side walls 11, and an interlayer region formed by the top panel 32 and the top wall 11. The interlayer regions are interconnected to form the interlayer space 101. It is understood that the width of each interlayer region ranges from 1cm to 4cm.

[0030] Specifically, combined Figure 2-3 As shown, the housing 10 is a cuboid and also includes a door and an end wall 13 disposed opposite to each other. The door is opened for taking out and placing the photomask 200. The door is also the door of the compartment 30, meaning that the compartment 30 and the housing 10 share a door. In a specific embodiment, the compartment 30 and the housing 10 also share an end wall 13.

[0031] In one embodiment, the photomask storage device 100 includes two exhaust devices 50 disposed on two side walls 11. Each exhaust device 50 is located at the center of the side wall 11, which facilitates uniform airflow. A through hole 110 is provided at the center of each side wall 11, and the through hole 110 extends laterally. In other embodiments, the exhaust device 50 may also be disposed on the top wall 12, as long as it can connect the interlayer space 101 and the internal space 310.

[0032] The compartment 30 includes a fixing plate 33 disposed on the side plate 31 and used to support the light cover 200. The fixing plate 33 includes a connecting part 331 that is vertically connected to the side plate 31 and a supporting part 332 that is vertically connected to the connecting part 331.

[0033] It is understood that the side plate 31 is arranged vertically, and the fixing plate 33 is arranged in a bent L-shape. The fixing plate 33 includes a horizontal connecting part 331 and a vertical supporting part 332, thereby supporting the horizontally placed photomask 200. The supporting part 332 reduces the contact area with the photomask 200 and reduces the wear of the photomask 200.

[0034] Specifically, the side plate 31 and the fixing plate 33 can be integrally formed, or they can be assembled together for easy disassembly.

[0035] In one embodiment, the side plate 31 and the fixing plate 33 are provided with a plurality of evenly arranged openings 301, the top plate 32 is also provided with openings 301, and the connecting part 331 also includes a plurality of openings 301. On the one hand, it provides uniform air duct holes, which is conducive to air duct transmission between the internal space 310 and the exhaust device 50. On the other hand, it reduces the weight of the compartment 30. The photomask storage device 100 is a support column that is integrally set on the outside. After setting the shell 10 and the compartment 30, considering the load-bearing capacity of the external support column, it should be ensured that the weight of the photomask storage device 100 does not increase too much.

[0036] It is understood that each photomask 200 is stored horizontally, and several photomasks 200 are arranged at intervals in the vertical direction. The exhaust device 50 is connected to the center of the side wall 11 in the horizontal direction. In other words, the exhaust direction of the exhaust device 50 is horizontal, which is conducive to more smoothly removing the heat between adjacent photomasks 200.

[0037] In one embodiment, several fixing plates 33 are arranged at intervals along the vertical direction, with the lowest fixing plate 33 spaced apart from the bottom wall 14 of the housing 10. Specifically, the bottom wall 14 is positioned opposite the top wall 12, and a distance is maintained between the fixing plate 33 and the bottom wall 14 to facilitate heat flow.

[0038] The bottom end of the side plate 31 and the bottom wall 14 of the housing 10 are connected and fixed by a fastening device, such as a screw. The screw passes through the outer end of the bottom wall 14 into the side plate 31 to support and fix the side plate 31, thereby supporting and fixing the compartment 30. The fastening device is detachable, which facilitates the disassembly and maintenance of the compartment 30.

[0039] In one embodiment, the housing 10 includes an end wall 13 and a door body disposed opposite to each other. The end wall 13 is disposed in a vertical direction and perpendicular to the side wall 11. The photomask storage device 100 includes a second sensor 62 disposed on the end wall 13. The second sensor 62 is used to determine whether the support part 332 has a photomask 200.

[0040] Specifically, the second sensor 62 is positioned horizontally and facing the door. Each second sensor 62 can be an optical sensor, which emits light in a horizontal direction to detect the presence of the photomask 200.

[0041] The fixing plates 33 are arranged at intervals along the vertical direction, and the second sensors 62 correspond one-to-one with each fixing plate 33. In other words, the second sensors 62 should correspond one-to-one with each photomask 200. Thus, the second sensors 62 can respectively determine whether each support part 332 has a photomask 200.

[0042] In one embodiment, the photomask storage device 100 includes a first sensor 60 disposed on the top plate 32. The first sensor 60 is used to determine whether the partition 30 contains a photomask 200. The first sensor 60 is disposed vertically and may be a displacement sensor, a photosensor, or the like.

[0043] The beneficial effects of this utility model are as follows: a sandwich space 101 is formed between the shell 10 and the compartment 30, and the exhaust device 50 is connected to the internal space 310 through the sandwich space 101, which can remove the heat of the internal space 310 in time, providing a heat dissipation environment for the photomask 200, which is conducive to the timely cooling of the photomask 200 that has just been used and is at a high temperature; the exhaust device 50 is also conducive to timely removal of dust, improving the cleanliness of the storage environment of the photomask 200.

[0044] This can be formed by referring to any of the technical solutions provided above, and will not be elaborated here.

[0045] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0046] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A reticle storage device, comprising: The device includes a housing, a compartment disposed within the housing, and an interlayer space located between the housing and the compartment. The compartment includes an internal space for storing a photomask. The photomask storage device includes a ventilation device disposed within the housing, which communicates with the interlayer space. The compartment is provided with an opening that communicates with the internal space and the interlayer space.

2. The photomask storage device according to claim 1, characterized in that, The width of the interlayer space ranges from 1cm to 4cm.

3. The photomask storage device according to claim 1, characterized in that, The compartment includes two side panels arranged opposite each other and a top plate connecting the two side panels. The shell includes two side walls arranged opposite each other and a top wall connecting the two side walls. The interlayer space includes an interlayer area formed by the side panels and their adjacent side walls and an interlayer area formed by the top plate and the top wall.

4. The photomask storage device according to claim 3, characterized in that, It includes two exhaust devices disposed on the two side walls, each of which is disposed at the center of the side wall.

5. The photomask storage device according to claim 3, characterized in that, The photomask storage device includes a first sensor disposed on the top plate, the first sensor being used to determine whether a photomask exists in the compartment.

6. The photomask storage device according to claim 3, characterized in that, The compartment includes a fixing plate disposed on the side plate and used to support the photomask. The fixing plate includes a connecting part that is vertically connected to the side plate and a supporting part that is vertically connected to the connecting part.

7. The photomask storage device according to claim 6, characterized in that, The side plate and the fixing plate are provided with a number of evenly arranged openings.

8. The photomask storage device according to claim 6, characterized in that, The fixing plates are arranged at intervals along the vertical direction, with the bottom fixing plate spaced apart from the bottom wall of the housing.

9. The photomask storage device according to claim 6, characterized in that, The housing includes an end wall and a door body arranged opposite to each other. The end wall is arranged in a vertical direction and perpendicular to the side wall. The photomask storage device includes a second sensor disposed on the end wall. The second sensor is used to determine whether the support part has a photomask.

10. The photomask storage device according to claim 9, characterized in that, The fixed plates are arranged at intervals along the vertical direction, and the second sensors correspond one-to-one with the fixed plates.

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