Gas treatment device after gas pressure protection and safety pressure relief of excimer laser

Abstract

The utility model discloses a gas treatment device after gas pressure protection and safety pressure relief of an excimer laser, which comprises a rupture disk device (1) with one end capable of being communicated with a resonant cavity of the excimer laser. The other end of the rupture disk device (1) is provided with a one-way safety valve (2) which can be jacked open by working gas leaked from the resonant cavity when a diaphragm (14) of the rupture disk device (1) is ruptured, and the one-way safety valve (2) is connected with an absorption device (3) which can purify the leaked working gas; and the absorption device (3) is provided with an exhaust port (4) capable of exhausting purified gas. According to the utility model, the structure is simple, external air can be prevented from flowing backwards into the excimer laser, the internal gas is kept pure, the discharged gas is absorbed and purified, so that the discharged gas can reach the emission standard, and the harm to workers and the environment is eliminated.

Description

[Technical Field]

[0001] This utility model relates to the field of excimer lasers, and more specifically to a gas treatment device for gas pressure protection and safe depressurization of excimer lasers. [Background Technology]

[0002] With advancements in industrial processing technology and advancements in research on the mechanisms of laser-biological tissue interaction and clinical applications, excimer lasers have developed rapidly, especially rare gas halide excimer lasers, such as ArF 193nm, KrF 248nm, and XeCl 308nm, which have been widely used in scientific research, medicine, and industry. Along with the widespread application of rare gas halide excimer lasers, the protection, emission, and treatment methods for gaseous halides have become crucial issues.

[0003] Traditional excimer gas protection devices lack waste gas treatment equipment. When the gas pressure inside the laser exceeds a predetermined value and depressurization occurs, the gas is directly discharged into the atmosphere, posing a serious threat to human health and the environment. In addition, traditional excimer gas pressure protection devices often adopt a fully open design, which cannot maintain unidirectional gas flow during depressurization. This can lead to situations such as external air flowing back into the excimer laser cavity, causing damage to the cavity. Moreover, traditional excimer gas pressure protection devices have a relatively complex structure, occupy a large space, and have a high cost.

[0004] Therefore, this utility model was created based on the above-mentioned shortcomings. [Utility Model Content]

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a gas handling device for gas pressure protection and safe depressurization of excimer lasers. When the gas pressure inside the excimer laser resonant cavity exceeds a set value, the gas is depressurized to protect the laser. Simultaneously, a certain absolute gas pressure of over 0.2 MPa is maintained inside the excimer laser, ensuring the internal pressure exceeds atmospheric pressure. This prevents external air from flowing back into the excimer laser, keeping the internal gas pure. Furthermore, the emitted gas is absorbed and purified to meet emission standards, eliminating hazards to workers and the environment.

[0006] This utility model is achieved through the following technical solution:

[0007] A gas pressure protection and safety relief gas treatment device for an excimer laser includes a rupture disc device at one end that can be connected to the resonant cavity of the excimer laser. The other end of the rupture disc device is provided with a one-way safety valve that can be opened by the working gas leaking from the resonant cavity when the diaphragm of the rupture disc device ruptures. An absorption device that can purify the leaked working gas is connected to the one-way safety valve. The absorption device is provided with an exhaust port that can discharge the purified gas.

[0008] The rupture disc device includes a first connecting seat, a connecting ring, a diaphragm, and a second connecting seat. The diaphragm is fixed inside the connecting ring, and the connecting ring is disposed between the first connecting seat and the second connecting seat. One end of the first connecting seat is provided with an air inlet communicating with the resonant cavity of the excimer laser. The second connecting seat is provided with an air outlet for airflow when the diaphragm ruptures, and the air outlet is connected to a one-way safety valve.

[0009] The one-way safety valve includes a valve seat, one end of which is connected to the air outlet on the second connecting seat, and the other end is fixedly connected to the absorption device. The valve seat has a valve port, and the valve port is provided with a valve head that can close the valve port and open the valve port under the push of a gas at a set pressure. The valve head includes a valve core that cooperates with the valve port and a return spring that pushes the valve core. The valve core and the edge of the valve port are provided with sealing rings.

[0010] The absorption device includes a housing, one end of which is connected to a valve seat, and the other end of which is provided with an end cap. The end cap is provided with an exhaust port, and the housing contains purification material.

[0011] The housing is provided with a stop plate at one end connected to the valve seat. One end of the return spring abuts against the stop plate, and the other end abuts against the valve core. The stop plate is provided with a channel for airflow to flow into the purification material.

[0012] The shell is provided with two mesh screens at intervals, which divide the internal space of the shell into a first space, a second space and a third space in sequence. The purification material includes a first filter material disposed in the first space, an absorbent substance disposed in the second space that can chemically react with halogen-containing gases, and a second filter material disposed in the third space.

[0013] Both the first and second filter materials are glass wool, and the absorbent is solid alkali particles.

[0014] The first connecting seat, the connecting ring, and the second connecting seat are welded together, and the second connecting seat, the valve seat, the housing, and the end cap are sequentially threaded and sealed together.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] 1. This utility model maintains the excimer laser resonant cavity free from pollution and has high safety while depressurizing.

[0017] 2. This utility model eliminates harm to workers when releasing harmful gases, and at the same time does not affect the working environment or pollute the air.

[0018] 3. This utility model connects the rupture disc device, one-way safety valve, and absorption device in sequence, integrating pressure protection, one-way gas emission, and hazardous substance absorption modules into a single unit for more efficient and coordinated results. This integration of the three modules reduces floor space, resulting in a smaller size and lower cost while achieving multifunctional problem-solving.

[0019] 4. This utility model can adjust the opening pressure of the one-way safety valve according to the force of the reset spring, which can reduce the waste of working gas. [Attached Image Description]

[0020] Figure 1 This is a perspective view of the utility model;

[0021] Figure 2 This is an exploded view of the present invention;

[0022] Figure 3 This is a cross-sectional view of the present invention.

Detailed Implementation Methods

[0023] The present invention will be further described below with reference to the accompanying drawings:

[0024] like Figures 1 to 3As shown, the gas pressure protection and safety relief gas handling device for the excimer laser includes a rupture disc device 1 with one end connected to the excimer laser resonant cavity. In this embodiment, the rupture disc device 1 has a pressure rating of 0.7 MPa, corresponding to excimer laser working gases such as XeCl and ArF. Once the working gas pressure inside the excimer laser resonant cavity exceeds 0.7 MPa, the diaphragm 14 of the rupture disc device 1 ruptures to release pressure, and the gas leaks to a one-way safety valve 2 connected to the other end of the rupture disc device 1. The working gas then pushes open the one-way safety valve 2 and enters the absorption device 3 connected to the one-way safety valve 2 before being discharged. The one-way safety valve 2 allows the gas to flow in one direction, preventing external air from flowing back into the excimer laser cavity and keeping the laser cavity clean and uncontaminated. The absorption device 3 purifies and absorbs the leaked halogen-containing gas, ensuring that the gas discharged through the exhaust port 4 on the absorption device 3 is harmless to humans and the environment. In practice, when the diaphragm 14 of the rupture disc device ruptures, the rupture disc device 1 needs to be replaced. However, the excimer laser receives pressure protection, and the leaked gas is purified. In this embodiment, the opening pressure of the one-way safety valve 2 is 0.2 MPa. That is, when the diaphragm 14 ruptures and releases gas from the laser resonant cavity, the one-way safety valve 2 closes when the gas pressure in the cavity drops below 0.2 MPa, preventing the entry of external air.

[0025] like Figures 1 to 3 As shown, the rupture disc device 1 includes a first connecting seat 11, a connecting ring 13, a diaphragm 14, and a second connecting seat 12. The diaphragm 14 is fixed inside the connecting ring 13. The connecting ring 13 is disposed between the first connecting seat 11 and the second connecting seat 12. The first connecting seat 11, the connecting ring 13, and the second connecting seat 12 are welded together. One end of the first connecting seat 11 is provided with an air inlet 15 that communicates with the resonant cavity of the excimer laser. The second connecting seat 12 is provided with an air outlet 16 that allows airflow when the diaphragm 14 ruptures. The air outlet 16 is connected to a one-way safety valve 2.

[0026] like Figures 1 to 3As shown, the one-way safety valve 2 includes a valve seat 21. One end of the valve seat 21 is connected to the air outlet 16 on the second connecting seat 12, and the other end is fixedly connected to the absorption device 3. The valve seat 21 is provided with a valve port 22. The valve port 22 is provided with a valve head 23 that can close the valve port 22 and open the valve port 22 under the push of a gas at a set pressure. The valve head 23 includes a valve core 231 that cooperates with the valve port 22 and a return spring 232 that pushes the valve core 231. The valve core 231 and the edge of the valve port 22 are provided with a sealing ring 24. When the gas pressure inside the excimer laser resonator cavity exceeds 0.7 MPa, the diaphragm 14 ruptures, and the gas inside the cavity enters the valve seat 21 through the inlet 15 and outlet 16. The gas pushes open the valve core 231, compresses the return spring 232, and the gas flows out from the gap between the valve core 231 and the valve port 22 and enters the absorption device 3. After being purified in the absorption device 3, it is discharged into the external atmosphere through the exhaust port 4, without causing harm to the environment or human body.

[0027] like Figure 3 As shown, the absorption device 3 includes a housing 31, one end of which is connected to a valve seat 21, and the other end of which is provided with an end cap 32. The end cap 32 is provided with the exhaust port 4. In this example, the second connecting seat 12, valve seat 21, housing 31, and end cap 32 are sequentially threaded and sealed together, making assembly and installation convenient. The entire device consists of a rupture disc device 1, a one-way safety valve 2, and an absorption device 3, integrating pressure protection, one-way gas emission, and harmful substance absorption into a single unit. This compact structure achieves multi-functional problem-solving while reducing space and cost.

[0028] like Figure 3 As shown, the housing 31 contains purification material, and the housing 31 is provided with an abutment plate 34 at one end connected to the valve seat 21. One end of the return spring 232 abuts against the abutment plate 34, and the other end abuts against the valve core 231. The abutment plate 34 is provided with a channel 35 that allows airflow to flow into the purification material.

[0029] like Figure 2 and Figure 3As shown, the housing 31 is provided with two mesh screens 36 spaced apart, which divide the internal space of the housing 31 into a first space 37, a second space 38 and a third space 39 in sequence. The purification material 33 includes a first filter material 331 disposed in the first space 37, an absorbent material 332 disposed in the second space 38 that can chemically react with halogen-containing gases, and a second filter material 333 disposed in the third space 39. The first filter material 331 and the second filter material 333 are both glass wool, and the absorbent material 332 is solid alkali particles. When the depressurized gas enters the absorption device 3 through the one-way safety valve 2, the gas is first purified by glass wool filtration in the first space 37, and then enters the solid alkali particles in the second space 38. The halogen-containing gas in the gas will react chemically with the solid alkali particles, and the harmful halogen gas will be absorbed. The remaining safe gas is discharged through the exhaust port 4. When the gas in the cavity is depressurized and falls below 0.2 MPa, the reset spring 232 resets the valve core 231, and the valve core 231 closes the valve port 22, so that external air will not flow back from the exhaust port 4 and contaminate the working gas in the excimer laser cavity.

[0030] This utility model provides an integrated and portable gas pressure safety relief and harmful gas treatment and emission solution. The above description of this embodiment is in conjunction with the accompanying drawings. However, this utility model is not limited to the above embodiment. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this invention.

Claims

1. A gas handling device for gas pressure protection and safety depressurization after excimer laser, characterized in that: It includes a rupture disc device (1) that can be connected to the resonant cavity of an excimer laser at one end, and a one-way safety valve (2) that can be opened by the working gas leaking from the resonant cavity when the diaphragm (14) of the rupture disc device (1) ruptures. An absorption device (3) that can purify the leaked working gas is connected to the one-way safety valve (2), and an exhaust port (4) that can discharge the purified gas is provided on the absorption device (3).

2. The gas handling device for gas pressure protection and safe depressurization of excimer lasers according to claim 1, characterized in that: The rupture disc device (1) includes a first connecting seat (11), a connecting ring (13), a diaphragm (14), and a second connecting seat (12). The diaphragm (14) is fixed inside the connecting ring (13). The connecting ring (13) is located between the first connecting seat (11) and the second connecting seat (12). One end of the first connecting seat (11) is provided with an air inlet (15) that communicates with the resonant cavity of the excimer laser. The second connecting seat (12) is provided with an air outlet (16) that allows airflow when the diaphragm (14) ruptures. The air outlet (16) is connected to a one-way safety valve (2).

3. The gas handling device for gas pressure protection and safe depressurization of excimer lasers according to claim 2, characterized in that: The one-way safety valve (2) includes a valve seat (21), one end of which is connected to the air outlet (16) on the second connecting seat (12), and the other end is fixedly connected to the absorption device (3). The valve seat (21) is provided with a valve port (22). The valve port (22) is provided with a valve head (23) that can close the valve port (22) and open the valve port (22) under the push of a gas at a set pressure. The valve head (23) includes a valve core (231) that cooperates with the valve port (22) and a return spring (232) that pushes the valve core (231).

4. The gas handling device for gas pressure protection and safe depressurization of excimer lasers according to claim 3, characterized in that: The valve core (231) and the valve port (22) are provided with sealing rings (24) at their edges.

5. The gas handling device for gas pressure protection and safety depressurization of excimer lasers according to claim 3, characterized in that: The absorption device (3) includes a housing (31), one end of which is connected to a valve seat (21), and the other end of the housing (31) is provided with an end cap (32), the end cap (32) is provided with an exhaust port (4), and the housing (31) contains purification material.

6. The gas handling device for gas pressure protection and safe depressurization of an excimer laser according to claim 5, characterized in that: The housing (31) is provided with an abutment plate (34) at one end connected to the valve seat (21). One end of the return spring (232) abuts against the abutment plate (34) and the other end abuts against the valve core (231). The abutment plate (34) is provided with a channel (35) for airflow to flow into the purification material.

7. The gas handling device for gas pressure protection and safe depressurization of an excimer laser according to claim 6, characterized in that: The housing (31) is provided with two mesh screens (36) spaced apart. The two mesh screens (36) divide the internal space of the housing (31) into a first space (37), a second space (38) and a third space (39) in sequence. The purification material includes a first filter material (331) disposed in the first space (37), an absorbent material (332) disposed in the second space (38) that can chemically react with halogen-containing gas, and a second filter material (333) disposed in the third space (39).

8. The gas handling device for gas pressure protection and safe depressurization of an excimer laser according to claim 7, characterized in that: Both the first filter material (331) and the second filter material (333) are glass wool.

9. The gas handling device for gas pressure protection and safe depressurization of an excimer laser according to claim 8, characterized in that: The absorbent material (332) is a solid alkali particle.

10. The gas handling device for gas pressure protection and safe depressurization of an excimer laser according to claim 6, characterized in that: The first connecting seat (11), the connecting ring (13) and the second connecting seat (12) are welded together, and the second connecting seat (12), the valve seat (21), the housing (31) and the end cap (32) are sequentially threaded and sealed together.

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