Crystal bar cutting device
By adjusting the position of the cutter head assembly of the crystal rod cutting device and using a multi-wire cutting machine, the problem of secondary segmentation of the head material in the existing technology has been solved, achieving efficient and precise head material cutting and improving product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- YUZE NEW ENERGY (KUNMING) CO LTD
- Filing Date
- 2025-05-29
- Publication Date
- 2026-05-08
AI Technical Summary
In the existing technology, multi-blade crystal rod cutting machines are limited by mechanical structure and cannot cut the head material into head cap and reverse cut material in one go, which leads to secondary division, increases the number of material handling times and labor consumption, and single-blade cutting is prone to producing non-perpendicular section defects, affecting product quality.
A crystal rod cutting device is designed. By adjusting the position of multiple cutter head assemblies, the minimum cutting distance between the first and second cutter head assemblies is reduced, enabling the multi-cutter head assembly to cut the head material into head caps and reverse-cut materials in one go. A multi-wire cutting machine and counterweight are used to ensure cutting accuracy and stability.
This technology enables the cutting of raw materials into head caps and reverse-cut materials in a single operation, improving processing efficiency, avoiding beveled cutting surfaces, and increasing the product qualification rate.
Smart Images
Figure CN224210237U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal cutting technology, and more specifically, to a crystal rod cutting device. Background Technology
[0002] As a fundamental material in the semiconductor industry, the processing precision of single-crystal silicon rods directly affects the quality of the final product. In the Czochralski method of single-crystal growth, after the crystal rod is pulled, its head naturally forms a conical or arc-shaped cap structure. According to the requirements of the crystal growth process, this head material needs to be precisely divided into two parts: a conical cap and a cylindrical head reverse-cut material.
[0003] Currently, the industry commonly uses multi-head crystal rod cutting machines for crystal rod cutting, controlling the blade spacing through preset programs to achieve cutting of different specifications. However, in actual operation, it has been found that due to mechanical structure limitations, there is a fixed minimum safe distance between the first and second blades of the equipment. This distance is usually designed to be around 350mm to meet the basic requirements of equipment stability and cutting accuracy. However, according to crystal growth process specifications, the ideal length of the reverse-cut material should be controlled at around 150mm, which is significantly less than the minimum spacing of the existing dual-head equipment.
[0004] Therefore, the existing solution involves first using a multi-blade cutter to cut the entire headstock (including the head cover and the back-cut material) as a whole, and then moving the headstock to a single-blade cutter for secondary cutting. This method not only increases the number of material handling operations and labor time, but more importantly, in the single-blade cutter process, due to the significant diameter change at the junction of the head cover and the back-cut material, the single-blade cutting is prone to producing non-perpendicular section defects, affecting product quality. Utility Model Content
[0005] The purpose of this invention is to provide a crystal rod cutting device that can cut the head material into a head cap and a reverse cut material in one process, thereby improving processing efficiency, avoiding the generation of cutting bevels, and improving the product processing qualification rate.
[0006] The embodiments of this utility model can be implemented as follows:
[0007] This utility model provides a crystal rod cutting device, comprising:
[0008] The feeding mechanism is used to place crystal rods along a first direction;
[0009] A cutting mechanism is provided on the feeding mechanism. The cutting mechanism includes a plurality of cutter head assemblies and an adjustment assembly arranged along the first direction. The cutter head assembly includes a cutting chamber and a counterweight chamber. The adjustment assembly is used to adjust the position of the cutter head assembly along the first direction.
[0010] In the first cutter head assembly arranged along the first direction, the counterweight chamber and the cutting chamber are arranged along the first direction; in the second cutter head assembly arranged along the first direction, the cutting chamber and the counterweight chamber are arranged along the first direction.
[0011] In an optional embodiment, the adjustment component includes a slide rail disposed along the first direction, and the cutter head assembly slides in cooperation with the slide rail.
[0012] In an optional embodiment, the cutter head assembly further includes a housing, in which the cutting chamber and the counterweight chamber are disposed, and the housing is also provided with a through hole for the crystal rod to pass through.
[0013] In an optional embodiment, a cutting machine is installed inside the cutting chamber.
[0014] In an optional embodiment, a driving component is further provided inside the housing, which is used to drive the cutting machine to move toward or away from the feeding mechanism.
[0015] In an optional embodiment, a counterweight block is provided in the counterweight chamber, and the counterweight block is mounted on the cutting machine.
[0016] In an optional embodiment, the cutting machine is a multi-wire cutting machine, and a wire-passing hole is provided on the side wall of the through hole.
[0017] In an optional embodiment, the feeding mechanism includes a conveyor disposed along the first direction.
[0018] In an optional embodiment, the feeding mechanism is further provided with an installation groove.
[0019] In an optional embodiment, in the last cutter head assembly arranged along the first direction, the counterweight chamber and the cutting chamber are arranged along the first direction.
[0020] The beneficial effects of the crystal rod cutting device provided in this embodiment of the present invention include:
[0021] The crystal rod cutting device of this invention includes a feeding mechanism and a cutting mechanism. The feeding mechanism is used to place the crystal rod along a first direction. The cutting mechanism is disposed on the feeding mechanism. The cutting mechanism includes multiple cutter head assemblies and an adjusting assembly arranged along the first direction. Each cutter head assembly includes a cutting chamber and a counterweight chamber. The adjusting assembly is used to adjust the position of the cutter head assembly along the first direction. Specifically, in the first cutter head assembly arranged along the first direction, the counterweight chamber and the cutting chamber are arranged along the first direction; in the second cutter head assembly arranged along the first direction, the cutting chamber and the counterweight chamber are also arranged along the first direction. This invention, by adjusting the position of the cutting chamber and the counterweight chamber in the second cutter head assembly, reduces the distance between the cutting chamber of the second cutter head assembly and the cutting chamber of the first cutter head assembly, thereby changing the minimum distance between the cutting chambers of the first and second cutter head assemblies, making the minimum distance less than the required length of the head-cut material. During actual cutting, the cutting line of the first cutter assembly cuts the head cover and the reverse material apart. The cutting lines of the first cutter assembly and the second cutter assembly can completely remove the reverse material, realizing the cutting of the head material into the head cover and the reverse material in one process, improving processing efficiency, eliminating the need for secondary single-blade cutting, avoiding the generation of cutting bevels, and improving the product processing qualification rate. Attached Figure Description
[0022] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of a crystal rod cutting device in the prior art;
[0024] Figure 2 This is a schematic diagram of the crystal rod cutting device provided in this embodiment.
[0025] Icons: 100-Crystal rod cutting device; 10-Feeding mechanism; 20-Cutting mechanism; 30-Cutter head assembly; 31-Cutting chamber; 32-Counterweight chamber; 200-Crystal rod; 201-Head cover; 202-Reverse cutting material. Detailed Implementation
[0026] Please refer to Figure 1In existing technologies, single-crystal silicon rods are a fundamental material in the semiconductor industry, and the processing precision during their production directly affects the quality of the final product. In the Czochralski single-crystal growth process, after the crystal rod 200 is pulled, its head naturally forms a conical or arc-shaped cap 201 structure. According to the crystal growth process requirements, this head material needs to be precisely divided into two parts: the conical cap 201 and the cylindrical head reverse-cut material 202.
[0027] Currently, the industry commonly uses multi-head crystal ingot 200 cutting machines for crystal ingot 200 cutting operations, controlling the blade spacing through a preset program to achieve cutting of different specifications. However, in actual operation, it has been found that due to mechanical structure limitations, there is a fixed minimum safe distance between the first blade assembly 30 and the second blade assembly 30 of the equipment. Specifically, this distance is usually designed to be around 350mm to meet the basic requirements of equipment stability and cutting accuracy. However, according to crystal growth process specifications, the ideal length of the head reverse-cut material 202 should be controlled at around 150mm, which is significantly smaller than the minimum spacing of the existing dual blades.
[0028] Therefore, the existing solution involves using the first cutting head assembly 30 to cut the entire head stock (including the head cover 201 and the reverse-cutting material 202) as a whole. Subsequently, the first and second cutting head assemblies 30, the second and third cutting head assemblies 30, and the rearward-arranged cutting head assemblies 30 sequentially cut the crystal ingot 200 into round bars with a length greater than or equal to 350 mm. Then, the head stock is removed from the feeding mechanism 10 and moved to the single-blade cutting machine station for secondary cutting.
[0029] This processing method not only increases the number of material handling operations and labor time, but more importantly, in the single-blade cutting process, due to the large diameter change at the junction of the head cover 201 and the reverse cutting material 202, the single-blade cutting is prone to producing non-perpendicular section processing defects, which affects product quality.
[0030] To address the aforementioned technical problems, this utility model provides a crystal rod cutting device 100, which can reduce the minimum cutting distance between the first cutter assembly 30 and the second cutter assembly 30. This allows the first cutter assembly 30 and the second cutter assembly 30 to cut the head material into a head cover 201 and a reverse cut material 202 in one operation, eliminating the need for a second single-blade cutting machine. This improves processing efficiency, avoids the formation of cutting bevels, and increases the product processing qualification rate.
[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0034] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0035] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0036] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.
[0037] Please refer to Figure 2 The crystal rod cutting device 100 provided by this utility model includes a feeding mechanism 10 and a cutting mechanism 20. The feeding mechanism 10 is used to place the crystal rod 200 along a first direction. It can be understood that the crystal rod 200 is generally a cylindrical structure. In this embodiment, the axial direction of the crystal rod 200 is consistent with the first direction.
[0038] The cutting mechanism 20 is disposed on the feeding mechanism 10 and is used to cut the crystal ingot 200 on the feeding mechanism 10 into segments. Specifically, the cutting mechanism 20 includes a plurality of cutter head assemblies 30 arranged along a first direction and an adjustment assembly. The cutter head assembly 30 includes a cutting chamber 31 and a counterweight chamber 32. The adjustment assembly is used to adjust the position of the cutter head assembly 30 along the first direction.
[0039] It is understood that in this embodiment, multiple cutter head assemblies 30 are arranged along the first direction, and the cutter head assemblies 30 cut the crystal ingot 200 into multiple segments along its axial direction. The length of the cut crystal ingot 200 is adjusted by setting an adjustment component to adjust the distance between the cutter head assemblies 30.
[0040] Since there is a minimum distance between the cutter head assemblies 30 in this embodiment, it is not possible to directly cut the lower cover 201 and the reverse cutting material 202. Therefore, in order to reduce the minimum cutting distance between the first cutter head assembly 30 and the second cutter head assembly 30, the present invention adopts the following solution:
[0041] In the first cutter head assembly 30 arranged along the first direction, the counterweight chamber 32 and the cutting chamber 31 are arranged along the first direction; in the second cutter head assembly 30 arranged along the first direction, the cutting chamber 31 and the counterweight chamber 32 are arranged along the first direction.
[0042] It is understandable that the cutting chamber 31 of the first cutter assembly 30, positioned along the first direction, is located close to the second cutter assembly 30; and the cutting chamber 31 of the second cutter assembly 30, positioned along the first direction, is located close to the first cutter assembly 30. This reduces the distance between the cutting chambers 31 of the first and second cutter assemblies 30, thereby reducing the minimum distance between the two cutting chambers 31. This minimum distance is less than the required length of the reverse-cutting material 202, allowing the first and second cutter assemblies 30 to directly cut the reverse-cutting material 202 without the need for a secondary single-blade cutting machine, improving processing efficiency, avoiding the formation of cutting bevels, and increasing the product processing qualification rate.
[0043] Specifically, in this embodiment, in order to adjust the distance between the cutter head assemblies 30, the adjustment assembly includes a slide rail disposed along a first direction, and the cutter head assembly 30 slides in conjunction with the slide rail. It can be understood that, in this embodiment, by preset the position of the cutter head assembly 30, crystal rods 200 of different lengths can be cut.
[0044] Specifically, in this embodiment, the crystal rod cutting device 100 is a nine-blade cutting machine, which includes nine blade assemblies 30. In other embodiments, the crystal rod cutting device 100 is provided with other numbers of blade assemblies 30, such as seven blade assemblies 30, etc. This utility model does not limit the number of blade assemblies 30.
[0045] In this embodiment, the cutter head assembly 30 also includes a housing. Specifically, the housing contains a cutting chamber 31 and a counterweight chamber 32. The housing also has a through hole for the crystal rod 200 to pass through. Furthermore, in this embodiment, the housing slides with a slide rail, thereby moving the cutting chamber 31 and the counterweight chamber 32 along a first direction to change the cutting position.
[0046] It is understood that in this embodiment, the housing has a certain thickness to provide sufficient space for installing the cutting chamber 31 and the counterweight chamber 32. There is a minimum distance between adjacent cutter head assemblies 30; for example, in this embodiment, the minimum distance between adjacent cutter head assemblies 30 is 350mm. It is understood that if such a method is used… Figure 1 In the existing solution shown, the minimum distance between the cutting chambers 31 of the first cutter assembly 30 and the second cutter assembly 30 is 350mm, while the length of the reverse cutting material 202 in this embodiment is 150mm, which cannot meet the requirement of directly cutting the head cover 201 and the reverse cutting material 202. Therefore, in the solution of this application (such as...) Figure 2 As shown, the minimum distance between the cutting chambers 31 of the first cutter head assembly 30 and the second cutter head assembly 30 is reduced to 120-130mm, which enables the cutting of 150mm reverse-cut material 202.
[0047] Optionally, in other embodiments, the minimum distance between the cutter head assemblies 30 can be set to any other length, specifically according to the thickness of the housing; this invention does not limit this. Of course, in other embodiments, the length of the reverse-cutting material 202 can also be freely set, as long as the minimum distance between the cutting chambers 31 of the first and second cutter head assemblies 30 is less than or equal to the length of the reverse-cutting material 202; this invention does not limit the specific values mentioned above.
[0048] Furthermore, a cutting machine (not shown) is installed inside the cutting chamber 31 for cutting the crystal ingot 200 on the feeding mechanism 10. Specifically, in this embodiment, the cutting machine is a multi-wire cutting machine, and a wire-passing hole is provided on the side wall of the through hole. It can be understood that the multi-wire cutting machine is installed inside the housing and cuts the crystal ingot 200 by means of a high-speed moving steel wire, wherein the steel wire of the multi-wire cutting machine passes through the wire-passing hole, thereby cutting the crystal ingot 200.
[0049] Furthermore, a counterweight (not shown) is installed inside the counterweight chamber 32. The counterweight is mounted on the cutting machine. It is understood that by setting the counterweight, a constant tension is provided to the cutting wire, preventing wire slack or excessive tightness during processing, ensuring the stability and accuracy of the cutting process; it can also counteract displacement deviations caused by wire vibration, ensuring the perpendicularity and surface finish of the cut, and improving processing quality.
[0050] In this embodiment, a driving component is also provided inside the housing. The driving component is used to drive the cutting machine to move toward or away from the feeding mechanism 10. It can be understood that the driving component is used to drive the cutting machine to move perpendicular to the axis of the crystal rod 200, thereby performing vertical cutting on the crystal rod 200. Specifically, in this embodiment, the cutting machine with multiple cutter head assemblies 30 simultaneously cuts the crystal rod 200.
[0051] Furthermore, in this embodiment, the feeding mechanism 10 also includes a conveying member arranged along a first direction. The conveying member is used to move the crystal rod 200 on the feeding mechanism 10 along the first direction. Specifically, the crystal rod 200 is fed from one end of the feeding mechanism 10, and the conveying member moves the crystal rod 200 to the cutting station. Specifically, the conveying member can be configured as a transmission belt, roller conveyor, etc., and this utility model does not limit the specific type of the conveying member.
[0052] Furthermore, to prevent the crystal ingot 200 from sliding on the feeding mechanism 10, in this embodiment, the feeding mechanism 10 is also provided with a mounting groove. It is understood that the mounting groove is arranged along the first direction to facilitate the installation of the crystal ingot 200 within the mounting groove. Specifically, the mounting groove can be configured as a "V"-shaped groove, an arc-shaped groove, etc., and this utility model does not limit the shape of the mounting groove.
[0053] To improve the cutting accuracy of the tail material, in this embodiment, the counterweight chamber 32 and the cutting chamber 31 of the last cutter head assembly 30, which is arranged along the first direction, are also arranged along the first direction. It can be understood that the tail of the crystal rod 200 is also a conical structure. By placing the cutting chamber 31 close to the tail of the crystal rod 200, the amount of residual material removed from the tail is reduced, thereby improving the utilization rate of the crystal rod 200 material.
[0054] In this embodiment, the minimum cutting distance between the first and second cutting head assemblies can be reduced by interchanging the last cutting head assembly 30 and the second cutting head assembly 30 arranged along the first direction. This allows the first and second cutting head assemblies 30 to cut the head material into a head cover 201 and a reverse-cut material 202 in one operation, eliminating the need for a second single-blade cutting machine, improving processing efficiency, avoiding the formation of cutting bevels, and increasing the product processing qualification rate.
[0055] The beneficial effects of the crystal rod cutting device 100 provided in this embodiment of the present invention include:
[0056] The crystal rod cutting device 100 of this utility model includes a feeding mechanism 10 and a cutting mechanism 20. The feeding mechanism 10 is used to place the crystal rod 200 along a first direction. The cutting mechanism 20 is disposed on the feeding mechanism 10. The cutting mechanism 20 includes a plurality of cutter head assemblies 30 arranged along the first direction and an adjusting assembly. The cutter head assembly 30 includes a cutting chamber 31 and a counterweight chamber 32. The adjusting assembly is used to adjust the position of the cutter head assembly 30 along the first direction. In the first cutter head assembly 30 arranged along the first direction, the counterweight chamber 32 and the cutting chamber 31 are arranged along the first direction; in the second cutter head assembly 30 arranged along the first direction, the cutting chamber 31 and the counterweight chamber 32 are arranged along the first direction. This invention adjusts the positions of the cutting chamber 31 and the counterweight chamber 32 in the second cutter assembly 30, reducing the distance between the cutting chamber 31 of the second cutter assembly 30 and the cutting chamber 31 of the first cutter assembly 30. This alters the minimum distance between the cutting chambers 31 of the first and second cutter assemblies 30, ensuring that this minimum distance is less than the required length of the head-cutting material 202. During actual cutting, the cutting line of the first cutter assembly 30 cuts the head cover 201 and the back-cutting material 202. The cutting lines of both the first and second cutter assemblies 30 can completely remove the back-cutting material 202, achieving the cutting of the head material into the head cover 201 and the back-cutting material 202 in a single process. This improves processing efficiency, eliminates the need for a secondary single-blade cutting machine, avoids the formation of cutting bevels, and increases the product processing qualification rate.
[0057] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.
Claims
1. A crystal rod cutting device, characterized in that, include: The feeding mechanism is used to place crystal rods along a first direction; A cutting mechanism is provided on the feeding mechanism. The cutting mechanism includes a plurality of cutter head assemblies and an adjustment assembly arranged along the first direction. The cutter head assembly includes a cutting chamber and a counterweight chamber. The adjustment assembly is used to adjust the position of the cutter head assembly along the first direction. In the first cutter head assembly arranged along the first direction, the counterweight chamber and the cutting chamber are arranged along the first direction; in the second cutter head assembly arranged along the first direction, the cutting chamber and the counterweight chamber are arranged along the first direction.
2. The crystal rod cutting device according to claim 1, characterized in that, The adjustment component includes a slide rail arranged along the first direction, and the cutter head assembly slides in cooperation with the slide rail.
3. The crystal rod cutting device according to claim 1, characterized in that, The cutter head assembly also includes a housing, in which the cutting chamber and the counterweight chamber are disposed, and the housing is also provided with a through hole for the crystal rod to pass through.
4. The crystal rod cutting device according to claim 3, characterized in that, A cutting machine is installed inside the cutting chamber.
5. The crystal rod cutting device according to claim 4, characterized in that, The housing is also equipped with a driving component, which is used to drive the cutting machine to move toward or away from the feeding mechanism.
6. The crystal rod cutting device according to claim 4, characterized in that, The counterweight chamber is equipped with a counterweight block, which is installed on the cutting machine.
7. The crystal rod cutting device according to claim 4, characterized in that, The cutting machine is a multi-wire cutting machine, and a wire-passing hole is provided on the side wall of the through hole.
8. The crystal rod cutting device according to claim 1, characterized in that, The feeding mechanism includes a conveyor component arranged along the first direction.
9. The crystal rod cutting device according to claim 1, characterized in that, The feeding mechanism is also provided with an installation slot.
10. The crystal rod cutting device according to any one of claims 1-9, characterized in that, In the last cutter head assembly arranged along the first direction, the counterweight chamber and the cutting chamber are arranged along the first direction.