Micro coaxial radio frequency probe card
By designing a micro coaxial RF probe card with a fixed protective mechanism, the electromagnetic interference problem caused by the simple structure of existing probe cards is solved, achieving stable signal transmission and accurate test results, and adapting to the testing needs of devices of different specifications.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU DESHENGYU ELECTRONICS CO LTD
- Filing Date
- 2025-05-15
- Publication Date
- 2026-05-08
AI Technical Summary
Existing RF test probe cards have a simple structure and lack good shielding design, which makes it easy for external electromagnetic interference to mix into the test signal, resulting in large errors in the test results. They are difficult to adapt to different specifications of devices under test and complex test requirements, and the probe position and angle cannot be precisely adjusted.
A micro coaxial RF probe card was designed, which adopts a fixed protection mechanism including a fixed bracket, a coaxial RF connector, a protective copper tube, a positioning block and a grounding tube to ensure signal transmission stability and shielding effect. The probe is fixed by limit bolts to achieve precise position and angle adjustment.
It improves the integrity of signal transmission and the accuracy of testing, reduces external electromagnetic interference, and ensures the stability and reliability of probe cards under different device specifications and complex testing environments.
Smart Images

Figure CN224216758U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of probe technology, specifically a micro coaxial radio frequency probe card. Background Technology
[0002] Radio frequency (RF) probe cards are crucial tools in the field of RF testing. They are mainly used in product development, production testing, and fault diagnosis in many fields such as communications, semiconductors, and aerospace to accurately measure and analyze RF signals. RF technology has been widely used in many fields such as communications, semiconductors, and aerospace. In product development in these fields, accurate measurement and analysis of RF signals are of paramount importance, and micro coaxial RF probe cards have emerged as a key tool for RF testing.
[0003] Existing RF test probe cards have relatively simple structures, often using a single material and rudimentary fixing methods. Due to the lack of good shielding design, external electromagnetic interference can easily mix into the test signal, resulting in large errors in the test results. They are difficult to accurately reflect the true RF performance of the device under test and cannot adapt to different specifications of devices under test and complex testing requirements. Existing probe cards cannot accurately adjust the probe position and angle, which not only increases the testing difficulty but may also damage chip pins due to poor contact. Therefore, this application proposes an alternative technical solution to address this problem. Utility Model Content
[0004] To address the shortcomings of existing technologies, this utility model provides a micro-coaxial RF probe card, which offers advantages such as good fixation and protection, increased signal transmission, and side-view capabilities. It solves the problems of existing RF test probe cards having relatively simple structures, often using single materials and rudimentary fixing methods. Due to the lack of good shielding design, external electromagnetic interference easily mixes into the test signal, resulting in large errors in test results. These probes fail to accurately reflect the true RF performance of the device under test (DUT), are unsuitable for DUTs of different specifications, and cannot meet complex testing requirements. Furthermore, existing probe cards cannot precisely adjust the probe position and angle, further increasing the difficulty of testing.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a micro coaxial radio frequency probe card, comprising a substrate body, wherein a fixing and protective mechanism is provided at the top and bottom of the substrate body;
[0006] The fixed protection mechanism includes a fixed bracket fixedly installed on the top of the substrate body, a coaxial RF connector is provided inside the fixed bracket, an RF probe body is provided on the top of the coaxial RF connector, a protective copper tube is fixedly connected to the outside of the coaxial RF connector, and a positioning block fixedly installed at the bottom of the coaxial RF connector and fixedly connected to the fixed bracket.
[0007] The bottom of the substrate body is movably connected to a bottom support base, and the bottom support base is internally threaded with a limiting bolt that is threadedly connected to the substrate body. The bottom of the coaxial RF connector is provided with a grounding pipe that is movably connected to the bottom support base.
[0008] Furthermore, a fixing groove is provided on the inner bottom wall of the fixing bracket, and the coaxial radio frequency connector is inserted into the fixing bracket through the fixing groove.
[0009] Furthermore, the positioning block is an epoxy resin block, which surrounds the outer side of the coaxial RF connector and fits tightly with the coaxial RF connector and the fixing bracket.
[0010] Furthermore, the protective copper tube is a polytetrafluoroethylene tube, and the top of the radio frequency probe body is arc-shaped.
[0011] Furthermore, the bottom support base has a groove inside, and the grounding pipe is movably connected to the bottom support base through the groove. The grounding pipe is a beryllium copper pipe.
[0012] Furthermore, the interior of the substrate body and the interior of the bottom support are provided with matching threaded grooves, and the limiting bolt is connected to the substrate body and the bottom support by threads.
[0013] Compared with the prior art, the technical solution of this application has the following beneficial effects:
[0014] This micro coaxial RF probe card features a fixed protective mechanism. A mounting bracket secures the coaxial RF connector via a fixing slot. The RF probe body is positioned on top of the coaxial RF connector, its rounded tip facilitating contact with the device under test (DUT) and ensuring accurate signal transmission. A protective copper tube encases the coaxial RF connector to prevent signal leakage and resist external electromagnetic interference, ensuring signal integrity. A positioning block ensures precise positioning of the coaxial RF connector, preventing displacement. A grounding tube provides grounding shielding for the RF probe, reducing external electromagnetic interference and ensuring signal transmission stability. During testing, the RF probe body contacts the DUT, and the signal is transmitted through the coaxial RF connector. The fixed protective mechanism ensures stable operation and accurate testing. Attached Figure Description
[0015] Figure 1 This is a cross-sectional view of the structure of this utility model;
[0016] Figure 2 This is a three-dimensional structural schematic diagram of the present utility model.
[0017] In the figure: 1. Main body of the substrate; 2. Fixing bracket; 3. Coaxial RF connector; 4. RF probe body; 5. Protective copper tube; 6. Positioning block; 7. Bottom support base; 8. Limiting bolt; 9. Grounding tube. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0019] Please see Figures 1 to 2 The micro coaxial radio frequency probe card in this embodiment includes a substrate body 1, and a fixing and protective mechanism is provided on the top and bottom of the substrate body 1.
[0020] In this embodiment, the fixed protection mechanism includes a fixed bracket 2 fixedly installed on the top of the substrate body 1. A coaxial RF connector 3 is provided inside the fixed bracket 2. A fixing groove is opened in the inner bottom wall of the fixed bracket 2. The coaxial RF connector 3 is inserted into the fixed bracket 2 through the fixing groove, which helps to install and fix the coaxial RF connector 3. An RF probe body 4 is provided on the top of the coaxial RF connector 3. A protective copper tube 5 is fixedly connected to the outside of the coaxial RF connector 3. The protective copper tube 5 is a polytetrafluoroethylene tube. The top of the RF probe body 4 is arc-shaped to increase the strength of the protection.
[0021] The bottom of the coaxial RF connector 3 is fixedly installed with a positioning block 6 that is fixedly connected to the fixing bracket 2. The positioning block 6 is an epoxy resin block. The positioning block 6 surrounds the outer side of the coaxial RF connector 3. The positioning block 6 fits tightly with the coaxial RF connector 3 and the fixing bracket 2, which helps to stably fix the coaxial RF connector 3.
[0022] In this embodiment, a bottom support 7 is movably connected to the bottom of the substrate body 1. A limiting bolt 8, which is threadedly connected to the substrate body 1, is threaded inside the bottom support 7. Matching threaded grooves are opened inside the substrate body 1 and the bottom support 7. The limiting bolt 8 is threadedly connected to the substrate body 1 and the bottom support 7, which helps to fix the substrate body 1 and the bottom support 7. A grounding tube 9, which is movably connected to the bottom support 7, is provided at the bottom of the coaxial RF connector 3. A tube groove is opened inside the bottom support 7. The grounding tube 9 is movably connected to the bottom support 7 through the tube groove. The grounding tube 9 is a beryllium copper tube, which helps to shield the signal.
[0023] It should be noted that this micro coaxial RF probe card, through its fixed protection mechanism, has a fixed bracket 2 that securely holds the coaxial RF connector 3 via a fixed slot. The RF probe body 4 is located on top of the coaxial RF connector 3, and its arc-shaped top facilitates contact with the device under test, ensuring accurate signal transmission. The protective copper tube 5 wraps around the coaxial RF connector 3 to prevent signal leakage and resist external electromagnetic interference, ensuring signal integrity. The positioning block 6 ensures the precise position of the coaxial RF connector 3 and prevents displacement. The grounding tube 9 provides grounding shielding for the RF probe, reducing external electromagnetic interference and ensuring signal transmission stability. During testing, the RF probe body 4 contacts the device under test, and the signal is transmitted through the coaxial RF connector 3. The fixed protection mechanism ensures stable operation and accurate testing.
[0024] The working principle of the above embodiments is as follows:
[0025] In this micro coaxial RF probe card, the substrate body 1 serves as the basic support structure for the entire probe card. Its top and bottom fixing and protective mechanisms play a crucial role. The fixing bracket 2 provides an installation position for the coaxial RF connector 3, which is stably fixed in place by a fixing slot. The coaxial RF connector 3 is an important channel for signal transmission. The RF probe body 4 at its top is used to contact the device under test. The arc-shaped design at the top of the RF probe body 4 helps to better contact the test point. The protective copper tube 5 wraps around the outside of the coaxial RF connector 3, providing insulation and protection to prevent signal leakage and external interference. During use, the positioning block 6 fits tightly against the substrate. The coaxial RF connector 3 and the fixed bracket 2 ensure the positional accuracy of the coaxial RF connector 3, preventing displacement during operation. At the bottom, the bottom support 7 is connected to the substrate body 1 via limiting bolts 8. The groove inside the bottom support 7 is used to install the grounding tube 9. The grounding tube 9 is movably connected to the bottom support 7, providing grounding shielding for the RF probe, ensuring signal transmission stability, and reducing external electromagnetic interference. When performing RF testing, the RF probe body 4 contacts the device under test and transmits RF signals through the coaxial RF connector 3. Throughout the process, the fixed protection mechanism ensures that all components work stably and accurately, guaranteeing the accuracy and reliability of the test.
[0026] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A micro coaxial radio frequency probe card, comprising a substrate body (1), characterized in that: The top and bottom of the substrate body (1) are provided with fixing and protective mechanisms; The fixed protection mechanism includes a fixed bracket (2) fixedly installed on the top of the substrate body (1), a coaxial radio frequency connector (3) is provided inside the fixed bracket (2), a radio frequency probe body (4) is provided on the top of the coaxial radio frequency connector (3), a protective copper tube (5) is fixedly connected to the outside of the coaxial radio frequency connector (3), and a positioning block (6) fixedly installed at the bottom of the coaxial radio frequency connector (3) and fixedly connected to the fixed bracket (2). The bottom of the substrate body (1) is movably connected to a bottom support base (7), and the bottom support base (7) is internally threaded with a limiting bolt (8) that is threadedly connected to the substrate body (1). The bottom of the coaxial radio frequency connector (3) is provided with a grounding tube (9) that is movably connected to the bottom support base (7).
2. The micro coaxial radio frequency probe card according to claim 1, characterized in that: The inner bottom wall of the fixed bracket (2) is provided with a fixing groove, and the coaxial radio frequency connector (3) is inserted into the fixed bracket (2) through the fixing groove.
3. The micro coaxial radio frequency probe card according to claim 1, characterized in that: The positioning block (6) is an epoxy resin block. The positioning block (6) surrounds the outer side of the coaxial RF connector (3). The positioning block (6) is in close contact with the coaxial RF connector (3) and the fixing bracket (2).
4. A micro coaxial radio frequency probe card according to claim 1, characterized in that: The protective copper tube (5) is a polytetrafluoroethylene tube, and the top of the radio frequency probe body (4) is arc-shaped.
5. A micro coaxial radio frequency probe card according to claim 1, characterized in that: The bottom support base (7) has a groove inside, and the grounding pipe (9) is movably connected to the bottom support base (7) through the groove. The grounding pipe (9) is a beryllium copper pipe.
6. A micro coaxial radio frequency probe card according to claim 1, characterized in that: The substrate body (1) and the bottom support (7) are provided with matching threaded grooves, and the limiting bolt (8) is threadedly connected to the substrate body (1) and the bottom support (7).