Semiconductor-grade silicon dioxide vacuum sintering furnace

Abstract

The utility model provides a semiconductor grade silicon dioxide vacuum sintering furnace which comprises a furnace body, a heating cavity is formed in the middle of the furnace body, and a rear door body is arranged at the first end of the furnace body; the material dragging trolley is arranged in the furnace body in a sliding mode, and a workpiece is placed on the material dragging trolley; the front door body is arranged on one side of the material dragging trolley, and when the material dragging trolley slides into the heating cavity, the front door body seals the second end of the furnace body; the device has the beneficial effects that through the arrangement of the pressing and rotating assembly, a workpiece on the material dragging trolley can be fixed from the two ends, it is ensured that the workpiece is always kept stable in the heating process, and the workpiece can be driven to rotate by the pressing and rotating assembly. In the heating process, the workpieces can be heated more uniformly through rotation of the workpieces, the heating effect and the product quality are improved, the workpieces can be automatically assembled and disassembled through arrangement of the material dragging trolley, the labor intensity of workers is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] This application belongs to the field of vacuum furnace technology, specifically relating to a semiconductor-grade silicon dioxide vacuum sintering furnace. Background Technology

[0002] With the increasing demands for material performance in high-end manufacturing, the high-temperature sintering and heat treatment of silica powder workpieces under vacuum or protective atmosphere has become a key technological aspect. Existing technologies for processing such workpieces suffer from the following prominent problems: Under static heating methods, the varying distances between the workpiece's circumferential surface and the heat source easily create temperature differences, leading to problems such as coating material decomposition and decreased interfacial adhesion, thus affecting the functionality of precision components. Traditional equipment relies on manual loading and unloading, which is not only inefficient but also results in prolonged exposure of the heating chamber to the atmosphere, reducing product quality. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related technologies.

[0004] To address the aforementioned problems, this application provides a semiconductor-grade silicon dioxide vacuum sintering furnace, comprising:

[0005] The furnace body has a heating chamber in the middle, a support base at the bottom, and a rear door at the first end.

[0006] A trolley is slidably disposed inside the furnace body, and a workpiece is placed on the trolley;

[0007] The front door is located on one side of the trolley. When the trolley slides into the heating chamber, the front door seals the second end of the furnace body.

[0008] A clamping and rotating assembly is disposed on the front door body and the rear door body, which can fix the workpiece located in the heating chamber along the axial direction and drive it to rotate.

[0009] Optionally, the clamping rotation assembly includes:

[0010] A first pressure head is disposed on the rear door body, and a first driving member is disposed on one side of the first pressure head. The first driving member is used to drive the first pressure head to rotate.

[0011] The second pressure head is disposed on the front door body and is provided with a second driving member, which is used to drive the second pressure head to move along the axial direction of the workpiece.

[0012] Optionally, a third driving component is also included, which is disposed on the side of the front door body away from the trolley and is used to drive the trolley and the front door body to move.

[0013] Optionally, it also includes a guide rail, on which the material trolley is mounted, and the guide rail is slidably connected to the furnace body.

[0014] Optionally, a fourth driving component is provided between the guide rail and the trolley, the fourth driving component being used to drive the trolley to move up and down on the guide rail.

[0015] Optionally, a heater is provided inside the furnace body for heating the heating chamber.

[0016] Optionally, a heat insulation layer is provided inside the furnace body, and the heat insulation layer is disposed between the heater and the furnace body.

[0017] Optionally, a vacuum pumping system is also connected to the furnace body.

[0018] Optionally, the furnace body is also equipped with a gas charging and discharging system and an air-cooled heat exchange system.

[0019] Optionally, the furnace body is provided with a locking component, which is used to lock and fix the front door and the rear door to the furnace body.

[0020] Beneficial effects

[0021] The semiconductor-grade silicon dioxide vacuum sintering furnace provided in this embodiment of the invention, through the setting of a clamping rotating assembly, can fix the workpiece on the trolley from both ends, ensuring that the workpiece remains stable during the heating process, and can also drive the workpiece to rotate. During the heating process, the rotation of the workpiece can make its heating more uniform, improve the heating effect and product quality. The setting of the trolley can realize automated loading and unloading of workpieces, reduce the labor intensity of workers, and improve work efficiency. Attached Figure Description

[0022] Figure 1 This is a structural diagram of the front door and furnace body of this utility model in the open state;

[0023] Figure 2 This is a structural diagram showing the sealed state of the front door and furnace body of this utility model.

[0024] The reference numerals in the attached figures are as follows:

[0025] 1. Furnace body; 2. Rear door; 3. Material trolley; 4. Front door; 5. First pressure head; 6. First drive component; 7. Second pressure head; 8. Second drive component; 9. Third drive component; 10. Guide rail; 11. Fourth drive component; 12. Heater; 13. Insulation layer; 14. Vacuum pumping system; 15. Gas charging and discharging system; 16. Air-cooled heat exchange system; 17. Locking component. Detailed Implementation

[0026] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0028] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0030] See also Figure 1-2 As shown, an embodiment of this application provides a semiconductor-grade silicon dioxide vacuum sintering furnace, comprising:

[0031] Furnace body 1, a heating chamber is provided in the middle of furnace body 1, a support base is provided at the bottom of furnace body 1, and a rear door 2 is provided at the first end of furnace body 1;

[0032] The material trolley 3 is slidably disposed inside the furnace body 1, and the workpiece is placed on the material trolley 3;

[0033] Front door 4, which is located on one side of the trolley 3, seals the second end of the furnace body 1 when the trolley 3 slides into the heating chamber.

[0034] A pressing and rotating assembly is disposed on the front door body 4 and the rear door body 2, which can fix the workpiece located in the heating chamber along the axial direction and drive it to rotate.

[0035] Specifically, furnace body 1 serves as the main frame of the entire vacuum furnace. The heating chamber in the middle is the area for heating the workpiece, with an internal operating temperature of approximately 1600℃. This heating chamber is lined with a special heat-insulating material to effectively reduce heat loss and improve energy efficiency. A rear door 2 is located at the first end of furnace body 1. The rear door 2 has a strong seal with the furnace body 1, ensuring that the heating chamber remains under vacuum during operation. When maintenance or cleaning of the components inside the heating chamber is required, the rear door 2 can be opened for easy access by personnel. The bottom of furnace body 1 is supported and fixed by support bases.

[0036] The trolley 3 is stably slidably positioned inside the furnace body 1. Its surface undergoes special treatment, providing sufficient strength and high-temperature resistance to ensure the safe placement of various workpieces. In actual operation, the operator places the workpiece to be processed onto the trolley 3, and then uses an external drive to slowly slide the trolley 3 into the heating chamber. The entire process is simple and efficient, effectively avoiding damage to the workpiece. The external drive can be an electric motor drive, enabling automated feeding and improving work efficiency.

[0037] The front door 4 is located on one side of the trolley 3. When the trolley 3 slides into the heating chamber, the front door 4 seals the second end of the furnace body 1. The front door 4 uses multi-layer sealing materials to ensure that the heating chamber can maintain a good vacuum state under high temperature and high pressure working environment.

[0038] The clamping and rotating assembly is mounted on the front door body 4 and the rear door body 2. During the heat treatment of the workpiece, the clamping and rotating assembly can fix the workpiece axially within the heating chamber, ensuring its stability throughout the heating process. Furthermore, it can drive the workpiece to rotate. This rotation during heating allows for more uniform heating, improving the heating effect and product quality.

[0039] The clamping rotation assembly includes:

[0040] A first pressure head 5 is disposed on the rear door body 2. A first driving member 6 is disposed on one side of the first pressure head 5. The first driving member 6 is used to drive the first pressure head 5 to rotate.

[0041] The second pressure head 7 is disposed on the front door body 4, and the second pressure head 7 is provided with a second driving member 8, which is used to drive the second pressure head 7 to move along the axial direction of the workpiece.

[0042] Specifically, the clamping rotation assembly includes a first pressure head 5, a first driving component 6, a second pressure head 7, and a second driving component 8. The first pressure head 5 is mounted on the rear door body 2, and a fixed frame is mounted on the trolley 3. The fixed frame is made of high-temperature resistant material. After the workpiece is placed on the fixed frame, the axis of the workpiece is on the same axis as the first pressure head 5 and the second pressure head 7. After the trolley 3 drives the workpiece into the heating chamber, it directly contacts one end of the workpiece. The first pressure head 5 is made of a special alloy material that is resistant to high temperature and high strength to ensure that it can tightly fit the workpiece under high pressure and high temperature environment and provide stable clamping force. The first driving component 6, which is usually a servo motor, is equipped on one side of the first pressure head 5 and can drive the first pressure head 5 to rotate.

[0043] The second pressure head 7 is mounted on the front door body 4 and is responsible for pressing the workpiece from the other end and adjusting its position in the axial direction. The second pressure head 7 is also made of a special high-temperature resistant alloy. The second driving component 8 on the second pressure head 7 is typically an electric push rod or a hydraulic drive device. Taking an electric push rod as an example, when a workpiece needs to be pressed, the control system issues a command, the telescopic rod of the electric push rod extends, and pushes the second pressure head 7 to move along the axial direction of the workpiece until it is in close contact with the workpiece and applies a suitable pressing force, fixing the workpiece between the first pressure head 5 and the second pressure head 7. A damper is installed between the second driving component 8 and the second pressure head 7 to achieve smooth pressing and prevent damage to the workpiece.

[0044] In operation, after the trolley 3 delivers the workpiece into the heating chamber, the front door 4 closes and seals the second end of the furnace body 1. At this time, the second drive unit 8 is activated, pushing the second pressure head 7 towards the workpiece, contacting one end of the workpiece and applying a certain clamping force to fix the workpiece between the first pressure head 5 and the second pressure head 7. Subsequently, the first drive unit 6 drives the first pressure head 5 to rotate, thereby causing the workpiece to begin rotating. Throughout the heating process, the first pressure head 5 continues to rotate to ensure that the workpiece is heated evenly, while the second pressure head 7, under the control of the second drive unit 8, is finely adjusted in the axial direction as needed to ensure that the workpiece is always in a stable clamped state, avoiding workpiece position displacement due to thermal expansion and contraction or other factors. When heating is complete, the second drive unit 8 drives the second pressure head 7 back to its original position, the front door 4 opens, and the trolley 3 transports the workpiece out of the heating chamber.

[0045] The semiconductor-grade silicon dioxide vacuum sintering furnace also includes a third driving component 9, which is located on the side of the front door 4 away from the trolley 3, and is used to drive the trolley 3 and the front door 4 to move.

[0046] Specifically, the third drive unit 9 is installed on the side of the front door 4 away from the trolley 3, and is used to drive the trolley 3 and the front door 4 to move. The third drive unit 9 is either a drive trolley or a motor with a suitable power and a screw drive mechanism. This combination can efficiently convert the rotational motion of the motor into linear motion, achieving precise displacement control. In actual operation, when the trolley 3 containing the workpiece needs to be sent into the heating chamber of the furnace body 1, the operator issues a command through the control system. The third drive unit 9 starts and pushes the front door 4 and the connected trolley 3 to move synchronously into the furnace body 1. The trolley 3 smoothly slides into the heating chamber along the preset track inside the furnace body 1. When the trolley 3 is completely inside the heating chamber, the front door 4 accurately reaches the sealing position at the second end of the furnace body 1, completing the sealing of the furnace body 1. After heating is completed, the third drive unit 9 pulls the front door 4 and the trolley 3 out of the heating chamber. This allows the processed workpiece to be smoothly transported out of the furnace body 1, facilitating subsequent processing steps.

[0047] With the addition of the third drive component 9, the semiconductor-grade silicon dioxide vacuum sintering furnace achieves automated movement of the trolley 3 and the front door 4, significantly improving work efficiency and reducing errors and safety hazards that may arise from manual operation. Simultaneously, its cooperation with the clamping and rotating assembly makes the entire workpiece processing flow smoother and more efficient. During the clamping and rotating heating process of the workpiece, the third drive component 9 ensures the stability of the trolley 3 and the front door 4, providing favorable external conditions for the heating process. After heating is complete, the third drive component 9 can quickly transport the processed workpiece out, preparing it for the next processing cycle.

[0048] The semiconductor-grade silicon dioxide vacuum sintering furnace also includes a guide rail 10, on which the material trolley 3 is mounted, and the guide rail 10 is slidably connected to the furnace body 1.

[0049] Specifically, the guide rail 10 is slidably connected to the furnace body 1, and the trolley 3 is mounted on the guide rail 10. Rollers adapted to the guide rail 10 are provided on the bottom of the furnace body 1. This significantly reduces the resistance during the movement of the trolley 3, ensuring smooth operation. Driven by the third drive component 9, the guide rail 10 at the bottom of the trolley 3 moves along a preset direction. When a workpiece needs to be fed into the heating chamber, the third drive component 9 pushes the front door 4 and the connected trolley 3, precisely sliding them into the heating chamber in the middle of the furnace body 1.

[0050] A fourth driving component 11 is provided between the guide rail 10 and the trolley 3, and the fourth driving component 11 is used to drive the trolley 3 to move up and down on the guide rail 10.

[0051] Specifically, the fourth drive component 11 is positioned between the guide rail 10 and the trolley 3, serving as the power source for the trolley 3 to move up and down on the guide rail 10. The fourth drive component 11 typically employs an electric lifting mechanism, consisting of components such as a motor, reducer, lead screw, and nut. In practical operation, the fourth drive component 11 can move the workpiece and adjust its height to ensure it is pressed between the first pressure head 5 and the second pressure head 7. For example, when dealing with certain workpieces, it may be necessary to raise or lower the trolley 3 to a specific height to ensure the workpiece is secured by the first pressure head 5 and the second pressure head 7. The operator sends commands to the fourth drive component 11 through the control system, thereby pushing the trolley 3 up and down on the guide rail 10. During the lifting process, the control system of the fourth drive component 11 can monitor the position of the trolley 3 in real time and make precise adjustments based on a preset height value, ensuring the trolley 3 accurately reaches the target height.

[0052] When the trolley 3 is about to enter the heating chamber of the furnace body 1 under the action of the third drive component 9, the fourth drive component 11 can adjust the trolley 3 to a suitable height in advance to ensure that the first pressure head 5 and the second pressure head 7 can fix the two ends of the workpiece. After heating is completed, the fourth drive component 11 can adjust the trolley 3 to a height that is convenient for operators to load and unload workpieces, which is convenient for subsequent operations.

[0053] A heater 12 is provided inside the furnace body 1, and the heater 12 is used to heat the heating chamber.

[0054] Specifically, the heater 12 is located inside the furnace body 1 and will not interfere with the slide rail 10 or the trolley 3. It is made of a high-temperature resistant, high-resistance heating material, such as high-purity graphite. This alloy material possesses excellent high-temperature resistance, enabling it to operate stably for extended periods in high-temperature environments without deformation or melting. Simultaneously, it has a high resistivity, allowing for efficient conversion of electrical energy into heat without the problem of high-temperature, vacuum-induced contamination of the workpiece. The heater 12 is typically rod-shaped or tubular.

[0055] When the semiconductor-grade silicon dioxide vacuum sintering furnace is started and enters the working state, the power supply delivers electrical energy to the heater 12. Because the heater 12 has high resistance, when current passes through it, electrical energy is rapidly converted into heat energy, the temperature of the heater 12 rises sharply, and then a large amount of heat is radiated into the heating chamber for heating treatment of the workpiece.

[0056] The furnace body 1 is provided with a heat insulation layer 13, which is disposed between the heater 12 and the furnace body 1.

[0057] Specifically, insulation layers 13 are also installed on the front door body 4 and the rear door body 2. The insulation layer 13 is made of high-performance, high-purity insulation material with extremely low thermal conductivity, such as graphite felt. It has excellent heat insulation performance and can effectively prevent heat from being lost from the heating cavity to the outside of the furnace body 1. Graphite felt has the advantages of being lightweight, high temperature resistant, and chemically stable. It can maintain a stable structure and performance in high-temperature environments, providing a reliable heat insulation barrier for the heating cavity.

[0058] When the heater 12 is energized and heats up, providing the necessary heat to the workpiece inside the heating chamber, the insulation layer 13 firmly seals most of the heat generated by the heater 12 within the heating chamber. This not only allows the heating chamber to quickly reach and maintain a stable high-temperature environment, meeting the process requirements of workpiece heat treatment, but also significantly reduces heat leakage to the outside of the furnace body 1. Compared to the absence of the insulation layer 13, its presence significantly reduces energy consumption, improves energy utilization efficiency, and saves enterprises substantial production costs.

[0059] In actual operation, the thermal insulation performance of the insulation layer 13 has a significant impact on the uniformity and stability of the temperature within the heating chamber. Because the insulation layer 13 effectively reduces heat loss, the temperature distribution within the heating chamber is more uniform, avoiding temperature differences caused by localized heat loss. This is crucial for ensuring the quality of workpiece heat treatment, especially for precision workpieces requiring extremely high temperature uniformity. The insulation layer 13 ensures that all parts of the workpiece are processed under the same temperature conditions, thereby improving the consistency of workpiece performance and quality.

[0060] Furthermore, the insulation layer 13 also protects the furnace body 1 from the effects of high temperatures. The heater 12 generates extremely high temperatures during operation; without the insulation layer 13, these temperatures could damage the furnace body 1 material, shortening its service life. The insulation layer 13 effectively reduces the surface temperature of the furnace body 1, minimizing the thermal stress on it, extending its service life, and improving the reliability and stability of the equipment.

[0061] The furnace body 1 is also connected to a vacuum pumping system 14.

[0062] Specifically, the vacuum pumping system 14 mainly consists of a vacuum pump, vacuum pipes, valves, and a vacuum measuring device. The vacuum pipes connect the vacuum pump to the furnace body 1; they are typically made of stainless steel to ensure that corrosion and oxidation do not affect workpiece performance during long-term use. Valves are installed on the vacuum pipes to control the direction and flow rate of gas. Precise control of the valve opening and closing allows for precise adjustment of the vacuum level inside the furnace. For example, at the initial startup stage, opening the corresponding valves allows the vacuum pump to quickly evacuate the furnace body 1; when the vacuum level inside the furnace approaches the preset value, adjusting the valve opening allows for fine-tuning of the vacuum level, ensuring that the vacuum level inside the furnace remains stable within the process requirements.

[0063] Vacuum measuring devices monitor the vacuum level inside the furnace in real time and feed the data back to the control system. Common vacuum measuring devices include thermocouple vacuum gauges and ionization vacuum gauges. These measuring devices can accurately transmit the vacuum level information inside the furnace to the control system. The control system adjusts the working state of the vacuum pumping system 14 in real time according to the preset vacuum level value to ensure that the vacuum environment inside the furnace is always stable and meets the process requirements.

[0064] In the workflow of the semiconductor-grade silicon dioxide vacuum sintering furnace, after the trolley 3 delivers the workpiece into the heating chamber and the front door 4 and rear door 2 are closed and sealed, the vacuum pumping system 14 is activated. The vacuum pump starts working, extracting air from the furnace body 1 through the vacuum pipeline. As air is continuously extracted, the furnace pressure gradually decreases. When the vacuum measuring device detects that the vacuum level inside the furnace has reached the preset initial heating vacuum level, the heater 12 is energized and heats up to heat the workpiece. During the heating process, the vacuum pumping system 14 continues to operate to maintain the vacuum environment inside the furnace. Because in a vacuum state, the oxidation and contamination of the workpiece by gas molecules can be effectively reduced, while the heat transfer efficiency is improved, allowing the workpiece to be heated more evenly and quickly, thereby improving the quality and effect of heat treatment. After heating is completed, the vacuum pumping system 14 continues to operate until the trolley 3 transports the workpiece out of the heating chamber and the front door 4 is opened.

[0065] The furnace body 1 is also equipped with a gas charging and discharging system 15 and an air-cooled heat exchange system 16.

[0066] Specifically, the charging and discharging system 15 mainly consists of a gas source, gas pipelines, valves, and pressure control devices. The gas source can provide different types of gases according to process requirements, such as inert gases like nitrogen and argon. These gases can protect the workpiece and prevent oxidation during heat treatment.

[0067] The gas pipeline connects the gas source to furnace body 1, using corrosion-resistant, high-strength tubing to ensure stable and safe gas delivery. Valves are installed on the gas pipeline; precise control of valve opening and closing allows for accurate regulation of gas flow and pressure. The pressure control device monitors the gas pressure inside the furnace in real time and provides feedback control to the valves based on preset pressure values, ensuring the gas pressure inside the furnace remains stable within the process requirements.

[0068] In actual operation, after the workpiece is heated, the furnace needs to be purged. The purging / venting system 15 opens the corresponding valves according to the process settings, injecting specific gas into the furnace body 1 at a certain flow rate and pressure. This not only helps the workpiece cool quickly but also prevents oxidation during cooling, improving the surface quality and performance of the workpiece. When equipment maintenance is required or the furnace door needs to be opened, the purging / venting system 15 releases the gas from the furnace, restoring the furnace pressure to atmospheric pressure, ensuring the safety of operators and the normal maintenance of the equipment.

[0069] The air-cooled heat exchange system 16 is mainly composed of components such as a fan, air duct, heat exchanger, and temperature sensor.

[0070] The fan is the power source for the air-cooled heat exchange system 16, providing strong airflow to deliver cooling air into the furnace body 1. The air ducts ensure that the cooling air is evenly distributed within the furnace, improving the cooling effect. The heat exchanger exchanges heat between the cooling air and the furnace interior, allowing the cooling air to absorb heat and heat up while simultaneously lowering the furnace temperature. Temperature sensors monitor the furnace temperature in real time and feed the data back to the control system.

[0071] Once the workpiece has finished heating, the air-cooled heat exchange system 16 is activated. A fan draws in cool outside air and delivers it into the furnace body 1 through ducts. As the cool air flows within the furnace, it exchanges heat with the high-temperature workpiece and the furnace body 1, absorbing heat and increasing in temperature. Then, the heated air returns to the heat exchanger through the ducts, where it exchanges heat with an external cooling medium (such as cold water), lowering its temperature before being sent back into the furnace by the fan, forming a circulating cooling process. In this way, the air-cooled heat exchange system 16 can quickly and efficiently reduce the furnace temperature, allowing the workpiece to reach the required cooling rate in a short time, meeting the requirements of different heat treatment processes.

[0072] During the workpiece heating stage, the vacuum pumping system 14 creates a vacuum inside the furnace, the heater 12 provides heat, and the insulation layer 13 reduces heat loss, ensuring uniform heating of the workpiece in a vacuum environment. After heating is complete, the charging / discharging system 15 first introduces a specific gas into the furnace, creating favorable conditions for the cooling process of the air-cooled heat exchange system 16. The air-cooled heat exchange system 16 then quickly starts, rapidly reducing the furnace temperature by circulating cooling air. Simultaneously, the charging / discharging system 15 adjusts the gas flow and pressure in a timely manner according to the furnace pressure and process requirements, ensuring the stability and safety of the entire cooling process. Throughout the process, the control system precisely controls each system based on data from temperature and pressure sensors, ensuring the efficient and stable operation of the semiconductor-grade silicon dioxide vacuum sintering furnace and providing process assurance for the workpiece heat treatment.

[0073] The furnace body 1 is provided with a locking member 17, which is used to lock and fix the front door 4 and the rear door 2 on the furnace body 1.

[0074] Specifically, the locking component 17 typically employs a high-strength mechanical locking device, consisting of a latch, a hook, a transmission mechanism, and control components. The latch and hook are respectively installed at corresponding positions on the furnace body 1, the front door 4, and the rear door 2, and are capable of withstanding enormous pressure and tension, ensuring a secure locking state throughout equipment operation.

[0075] The transmission mechanism is responsible for translating the commands from the control components into actions of the locking ring. Common transmission methods include electric, pneumatic, or hydraulic drives. Taking electric drive as an example, the motor drives the locking ring to rotate through transmission components such as gears and chains, thereby achieving the opening and closing action.

[0076] The control unit is connected to the equipment's control system and receives instructions from operators or automation programs. When it is necessary to close the front door 4 and the rear door 2, the control system sends a signal to the control unit of the locking element 17. The control unit drives the transmission mechanism to tightly engage the locking rings, firmly fixing the front door 4 and the rear door 2 to the furnace body 1. During equipment operation, the control unit also monitors the status of the locking element 17 in real time. If any abnormality is detected, such as a loose latch or incomplete locking, it will immediately report to the control system, which will then take appropriate measures, such as issuing an alarm or suspending equipment operation, to ensure the safety of the equipment and personnel.

[0077] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application. The above are merely preferred embodiments of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this application, and these improvements and modifications should also be considered within the protection scope of this application.

Claims

1. A semiconductor-grade silicon dioxide vacuum sintering furnace, characterized in that, include: Furnace body (1), a heating chamber is provided in the middle of the furnace body (1), a support base is provided at the bottom of the furnace body (1), and a rear door (2) is provided at the first end of the furnace body (1); Material trolley (3), which is slidably disposed inside the furnace body (1), and on which workpieces are placed; Front door (4), the front door (4) is located on one side of the trolley (3), when the trolley (3) slides into the heating chamber, the front door (4) seals the second end of the furnace body (1); A pressing and rotating assembly is disposed on the front door body (4) and the rear door body (2), which can fix the workpiece located in the heating chamber along the axial direction and drive it to rotate.

2. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, The clamping rotation assembly includes: The first pressure head (5) is disposed on the rear door body (2). A first driving member (6) is disposed on one side of the first pressure head (5). The first driving member (6) is used to drive the first pressure head (5) to rotate. The second pressure head (7) is disposed on the front door body (4). The second pressure head (7) is provided with a second driving member (8), which is used to drive the second pressure head (7) to move along the axial direction of the workpiece.

3. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, It also includes a third drive unit (9), which is located on the side of the front door body (4) away from the trolley (3) and is used to drive the trolley (3) and the front door body (4) to move.

4. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, It also includes a guide rail (10), the material trolley (3) is mounted on the guide rail (10), and the guide rail (10) is slidably connected to the furnace body (1).

5. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 4, characterized in that, A fourth driving component (11) is provided between the guide rail (10) and the trolley (3), and the fourth driving component (11) is used to drive the trolley (3) to rise and fall on the guide rail (10).

6. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, A heater (12) is provided inside the furnace body (1), and the heater (12) is used to heat the heating chamber.

7. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 6, characterized in that, The furnace body (1) is provided with a heat insulation layer (13), which is located between the heater (12) and the furnace body (1).

8. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, The furnace body (1) is also connected to a vacuum pumping system (14).

9. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, The furnace body (1) is also equipped with a gas charging and discharging system (15) and an air-cooled heat exchange system (16).

10. The semiconductor-grade silicon dioxide vacuum sintering furnace according to claim 1, characterized in that, The furnace body (1) is provided with a locking member (17), which is used to lock and fix the front door (4) and the rear door (2) on the furnace body (1).

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