Cleaning device for FOUP

Abstract

A cleaning device for an FOUP comprises a rotating seat mechanism and a cleaning mechanism which are installed on a shell mechanism. The rotating seat mechanism comprises a rotation driving module, a rotating disc module connected to the rotation driving module, and a bearing frame module erected on the rotating disc module. And the turntable module can be used for placing and positioning the box body of the FOUP with the opening facing downwards. The bearing frame module can bear the cover body of the FOUP. The rotation driving module can drive the turntable module to drive the bearing frame module to rotate relative to the shell mechanism. Through the structural design that the rotating seat mechanism can bear the box body and the cover body of the FOUP at the same time, and the cleaning mechanism can spray cleaning fluid to the box body and the cover body which are driven by the rotating disc module and the bearing frame module to rotate, cleaning dead corners of the box body and the cover body can be reduced, and the cleaning efficiency of the FOUP is improved.

Description

Technical Field

[0001] This utility model relates to a cleaning device for cleaning semiconductor equipment, and more particularly to a cleaning device for FOUP. Background Technology

[0002] In wafer fabrication processes, wafers frequently need to be transferred between multiple processing stations. To ensure that wafers are not damaged or contaminated during transfer, front-opening unified pods (FOUPs) are typically used to store them. To maintain the cleanliness of the FOUP, the pod body and cover must be cleaned and dusted regularly.

[0003] Currently, the cleaning process for FOUP involves disassembling the FOUP box body and lid, and then transferring the box body and lid to different cleaning equipment for separate cleaning. Therefore, two different cleaning equipment need to be installed in the factory area, which requires a large space for equipment installation.

[0004] On the other hand, current cleaning equipment generally includes a cleaning tank for housing the box body or the lid, and multiple water spray pipes installed in the cleaning tank. Cleaning fluid is sprayed onto the box body or the lid using these water spray pipes to perform the cleaning operation. However, because the water spray pipes are fixed in place within the inner wall of the cleaning tank, they cannot reach every corner of the box body or the lid, easily creating specific cleaning dead zones. Utility Model Content

[0005] The purpose of this invention is to provide a cleaning device for FOUP that can improve upon at least one of the shortcomings of prior art.

[0006] This invention relates to a cleaning device for FOUPs (Follicular Units), which is suitable for connection to a cleaning fluid supply device and can simultaneously clean the FOUP's box body and lid. The cleaning device includes a housing mechanism that internally defines a cleaning space, and a cleaning mechanism mounted on the housing mechanism.

[0007] The cleaning device further includes a rotating base mechanism installed on the housing structure and used to connect and guide the cleaning fluid supplied by the cleaning fluid supply device. The rotating base mechanism includes a drive module installed on the housing structure, a turntable module disposed within the cleaning space and connected to the drive module, and a support frame module mounted on the turntable module. The turntable module allows the box body to be positioned with its opening facing downwards. The support frame module supports the lid. The drive module can be controlled to activate and drive the turntable module to rotate the support frame module horizontally relative to the housing structure. The cleaning mechanism can spray the cleaning fluid onto the box body and lid, which are rotated by the turntable module and the support frame module.

[0008] The cleaning device for FOUP described in this utility model includes a cleaning mechanism comprising multiple lateral spraying modules distributed along the periphery of the turntable module within the cleaning space, and a lower spraying module located on the top side of the turntable module. Each lateral spraying module has multiple lateral spraying heads distributed vertically at intervals. Each lateral spraying module can spray the cleaning fluid towards the box body and the cover via the lateral spraying heads. The lower spraying module can spray the cleaning fluid upwards towards the interior of the box body.

[0009] The cleaning device for FOUP described in this utility model has a lower spray module having a central tube fixed to the housing mechanism and extending upward through the turntable module, and at least one lower spray head extending obliquely upward from the top of the central tube. The lower spray module can spray the cleaning fluid upward toward the interior of the housing body through the at least one lower spray head.

[0010] The cleaning device for FOUP described in this utility model has a lower spray module with multiple lower spray heads extending obliquely upward from the top of the central tube. The lower spray module can spray the cleaning fluid upward toward the interior of the box body through the lower spray heads.

[0011] The cleaning device for FOUP described in this utility model includes a turntable module connected to the drive module, a plurality of uprights erected on the top side of the turntable body, and a plurality of positioning components respectively disposed on the uprights and used to cooperate in positioning the box body.

[0012] The cleaning device for FOUP described in this utility model has a rotating positioning part on the turntable body, and the rotating seat mechanism further includes a positioning sensor disposed in the housing mechanism and used to sense the rotating positioning part. The positioning sensor generates a positioning signal when it senses the rotating positioning part.

[0013] The cleaning equipment for FOUP described in this utility model includes a support frame module comprising a leg body erected on the top side of the turntable body, and a plurality of positioning components spaced apart on the top side of the leg body for cooperating in positioning the cover.

[0014] The cleaning device for FOUP described in this utility model further includes a first object sensing module disposed on the housing mechanism. The first object sensing module generates a first object signal when it senses that the turntable module is carrying the box body.

[0015] The cleaning device for FOUP described in this utility model further includes a second object sensing module disposed on the housing mechanism. The second object sensing module generates a second object signal when it senses that the support frame module is carrying the cover.

[0016] The cleaning device for FOUP according to this utility model includes a housing mechanism comprising a housing body defining the cleaning space and a door module disposed on the housing body. The housing body also has an entrance and exit communicating with the cleaning space. The door module includes a slide rail unit mounted on the housing body, a door mounted on the slide rail unit, and a drive unit mounted on the housing body and connected to the door. The drive unit can be controlled to drive the door to move along the slide rail unit, thereby changing the door between a closed position that closes the entrance and exit and an open position that exposes the entrance and exit.

[0017] The beneficial effects of this utility model are as follows: the turntable module and the support frame module of the rotating seat mechanism can be used to support the box body and the cover of the FOUP, and will drive the box body and the cover to rotate relative to the cleaning mechanism. This structural design can not only reduce the cleaning dead angles of the box body and the cover, but also improve the cleaning efficiency of the FOUP. Attached Figure Description

[0018] Other features and effects of this utility model will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0019] Figure 1 This is a perspective view illustrating an embodiment of the present invention for a FOUP cleaning device, and showing the situation when a door is in an open position;

[0020] Figure 2 This is a front view illustrating the door in a closed position in this embodiment;

[0021] Figure 3 This is an incomplete perspective view illustrating the structure of this embodiment; some components of the shell body are omitted from the figure.

[0022] Figure 4 This is a front sectional view illustrating the configuration of this embodiment when it is used to support a box body and a lid;

[0023] Figure 5 yes Figure 4 A top sectional view along section line AA illustrates the situation when this embodiment supports the box body;

[0024] Figure 6 yes Figure 4 A top sectional view along the BB section line illustrates the situation when this embodiment supports the cover. Detailed Implementation

[0025] See Figure 1 , Figure 2 , Figure 3 This utility model relates to an embodiment of a cleaning device 200 for a FOUP (Front Opening Unified Pod), suitable for connection to a cleaning fluid supply device (not shown), capable of simultaneously cleaning a pod body 901 (see attached figure) of a FOUP (Front Opening Unified Pod) with the cleaning fluid provided by the cleaning fluid supply device. Figure 4 ) and a cover 902 (see appendix) Figure 4 The cleaning fluid supply equipment provides two types of cleaning fluid: liquid and gas.

[0026] In addition, the cleaning device 200 is also suitable for signal connection to a remote control device (not shown), and can be controlled by the remote control device.

[0027] The cleaning device 200 includes a housing mechanism 3, and a rotating seat mechanism 4, a cleaning mechanism 5, a first object sensing module 6 and a second object sensing module 7 mounted on the housing mechanism 3.

[0028] The housing mechanism 3 includes a housing body 31 and a door module 32 mounted on the housing body 31. The housing body 31 defines a cleaning space 310 and has an entrance / exit 311 communicating with the cleaning space 310. The entrance / exit 311 allows the box body 901 and the cover 902 to be moved in and out of the cleaning space 310. Furthermore, the left and right side walls of the housing body 31 are respectively provided with two symmetrical first detection holes 312 and two second detection holes 313 located above the first detection holes 312.

[0029] The door module 32 includes a slide rail unit 321 extending vertically and disposed on the front side of the housing body 31, a door body 322 mounted on the slide rail unit 321, and a drive unit 323 mounted on the housing body 31 and connected to the door body 322. The drive unit 323 is a telescopic cylinder device, which can be driven to extend and retract vertically, thereby driving the door body 322 relative to the slide rail unit 321 to a closed position that closes the entrance / exit 311 (e.g., Figure 2 As shown), and an opening position that exposes the entrance / exit 311 (as shown). Figure 1 (As shown) the up-and-down sliding changes.

[0030] In this embodiment, the door module 32 adopts an upward and downward sliding structure design. However, since there are many types of door modules 32 that can be used to close the entrance 311, they can also be modified to, for example, but not limited to, a side-hinged or side-sliding structure design. Therefore, in practice, the type of door module 32 is not limited to the above-mentioned forms.

[0031] See Figure 3 , Figure 4 , Figure 5 , Figure 6 The rotating seat mechanism 4 includes a drive module 41 fixed to the housing body 31, a turntable module 42 connected to the drive module 41 and located within the cleaning space 310, a support frame module 43 erected on the top side of the turntable module 42, and a positioning sensor 44 installed within the cleaning space 310 and located below the turntable module 42. The drive module 41 has a drive shaft 413 protruding upwards and exposed within the cleaning space 310, and the turntable module 42 is connected to the drive shaft 413.

[0032] In this embodiment, the drive module 41 includes a motor 411, a pulley assembly 412 with the drive shaft 413, and a drive belt 414 connecting the motor 411 and the pulley assembly 412. The drive module 41 can drive the turntable module 42 via the drive shaft 413 to drive the support frame module 43 to rotate horizontally relative to the housing body 31. Since there are many types of drive modules 41 that can be used to drive the turntable module 42, and it can also be changed to, for example, but not limited to, a type that uses gear transmission, the type of drive module 41 is not limited to the above-described form in practice.

[0033] The turntable module 42 includes a turntable body 421 coaxially connected to the drive shaft 413, four uprights 423 erected on the top side of the turntable body 421, and four positioning members 424 respectively disposed on the top side of the uprights 423. The turntable body 421 has a vertically penetrating rotating positioning part 422. The positioning members 424 can be used to cooperate in supporting and positioning the box body 901, with the box body 901 facing downwards and positioned above the turntable body 421, so that the supported box body 901 is positioned between the first detection holes 312.

[0034] In this embodiment, the positioning member 424 is used to position and abut the four corners of the box body 901, thereby positioning the box body 901. However, in other embodiments of this utility model, the positioning member 424 can also be modified to, for example, but not limited to, abut the four sides of the box body 901, which can also be used to position the box body 901.

[0035] The support frame module 43 includes a stand body 431 erected on the top side of the turntable body 421, and four positioning members 432 spaced apart on the top side of the stand body 431. The positioning members 432 can be used to support the cover 902, and the cover 902 is positioned above the box body 901, so that the supported cover 902 is between the second detection holes 313.

[0036] In this embodiment, the positioning member 432 is used to position and abut the four corners of the cover 902, thereby positioning the cover 902. However, in other embodiments of this utility model, the positioning member 432 can also be modified to, for example, but not limited to, abut the four sides of the cover 902, which can also be used to position the cover 902.

[0037] The positioning sensor 44 is located below the turntable body 421 and can be used to detect the rotating positioning part 422 upwards. In this embodiment, the rotating positioning part 422 is a through hole running vertically. The positioning sensor 44 is an optical sensor that emits a detection light upwards toward the bottom surface of the turntable body 421. When the detection light penetrates the rotating positioning part 422 and is not detected by the detection light reflected from the turntable body 421, a positioning signal is generated. However, in practice, many types of positioning sensors 44 can be used to detect the rotational positioning of the turntable body 421. For example, but not limited to, the rotating positioning part 422 of the turntable body 421 can be changed to a radially convex structure, and the positioning sensor 44 can be changed to a microswitch type that is triggered by the rotating positioning part 422. This can also be used to sense the rotational position of the turntable body 421.

[0038] The cleaning mechanism 5 can be connected to the cleaning fluid supply device and can be used to guide the cleaning fluid. The cleaning mechanism 5 includes a plurality of lateral spraying modules 51 that are spaced apart and fixed to the housing body 31 along the periphery of the turntable body 421, and a lower spraying module 52 that is fixed to the housing body 31 and exposed on the top side of the turntable body 421.

[0039] Each side spray module 51 extends vertically and has multiple side spray heads 511 spaced vertically. Each side spray module 51 can spray the cleaning fluid guided to it toward the turntable module 42 and the support frame module 43 through the side spray heads 511, thereby cleaning the outer surface of the box body 901 and the cover 902.

[0040] The lower spray module 52 has a central tube 521 fixed to the housing body 31 and extending upward through the center of the turntable module 42, and two lower spray heads 522 protruding obliquely outward from the top of the central tube 521. The lower spray module 52 can spray the guided cleaning fluid obliquely upward through the lower spray heads 522 to clean the interior of the box body 901 carried by the turntable module 42.

[0041] The first object sensing module 6 and the second object sensing module 7 are mounted vertically spaced on the shell body 31. The first object sensing module 6 can be used to sense whether the turntable module 42 is carrying the box body 901, and will generate a first object signal when it senses that the turntable module 42 is carrying the box body 901. The second object sensing module 7 can be used to sense whether the support frame module 43 is carrying the cover 902, and will generate a second object signal when it senses that the support frame module 43 is carrying the cover 902.

[0042] In this embodiment, both the first object sensing module 6 and the second object sensing module 7 use light blocking optical sensing technology to sense objects. They each have a light receiving component 61 and 71, and a light emitting component 62 and 72 that emits detection light toward the corresponding light receiving component 61 and 71.

[0043] The light receiving component 61 and the light emitting component 62 of the first object sensing module 6 are located on the left and right side walls of the housing body 31, respectively, and are aligned with the first detection hole 312. The detection light can be emitted and received through the first detection hole 312. The emission path of the detection light passes through the location of the box body 901 carried by the turntable module 42. Therefore, when the turntable module 42 is carrying the box body 901, the detection light of the light emitting component 62 will be blocked by the box body 901, so that the light receiving component 61 cannot detect the detection light, and the first object signal is generated accordingly.

[0044] Similarly, the light receiving component 71 and the light emitting component 72 of the second object sensing module 7 are located on the left and right side walls of the housing body 31, respectively, and are aligned with the second detection hole 313, so that the detection light can be emitted and received through the second detection hole 313. The emission path of the detection light passes through the location of the cover 902 supported by the support frame module 43. Therefore, when the support frame module 43 is supporting the cover 902, the detection light of the light emitting component 72 of the second object sensing module 7 will be blocked by the cover 902, so that the light receiving component 71 does not detect the detection light, thereby generating the second object signal.

[0045] However, in other embodiments of this utility model, the first object sensing module 6 and the second object sensing module 7 may also adopt light reflection optical sensing technology to detect the box body 901 and the cover 902 respectively, or they may adopt touch sensing technology to sense whether the turntable module 42 and the support frame module 43 are carrying the box body 901 and the cover 902 respectively. Since there are many ways to sense whether the turntable module 42 and the support frame module 43 are carrying the box body 901 and the cover 902 respectively, the first object sensing module 6 and the second object sensing module 7 are not limited to the above embodiments in practice.

[0046] See Figure 1 , Figure 2 , Figure 4 When the cleaning device 200 of this utility model is used for cleaning the FOUP, it can be controlled by a remote control device. First, the drive unit 323 can be controlled to move the door 322 to the open position, and a robotic arm (not shown) will move the box body 901 and the cover 902 to the turntable module 42 and the support frame module 43 respectively. At this time, the first object sensing module 6 and the second object sensing module 7 will respectively sense the box body 901 and the cover 902, and generate the first object signal and the second object signal respectively. The first object sensing signal and the second object sensing signal can be used by the remote control device to determine whether the box body 901 and the cover 902 are positioned correctly. After the box body 901 and the cover 902 are positioned, the drive unit 323 is controlled to move the door 322 to close the entrance 311.

[0047] See Figure 4 , Figure 5 , Figure 6Next, the drive module 41 is activated, which drives the turntable module 42 and the support frame module 43 to rotate the box body 901 and the cover 902 synchronously. Then, the side spray module 51 and the bottom spray module 52 first use a water-based cleaning fluid to clean the relatively rotating box body 901 and the cover 902, and then use a gas-based cleaning fluid to blow away the water remaining on the surface of the box body 901 and the cover 902, so that they can be air-dried or oven-dried.

[0048] During the rotation of the drive module 41, which drives the turntable module 42 and the support frame module 43, the positioning sensor 44 continuously senses the rotating positioning part 422 to generate a positioning signal. This positioning signal can be used by the remote control device to record the number of rotations of the turntable module 42, and can also be used by the remote control device as a basis for controlling the drive module 41 to stop operating, so that the turntable module 42 can be controlled to stop at the position aligned with the positioning sensor 44.

[0049] In summary, the rotating base mechanism 4's turntable module 42 and support frame module 43, which can support the FOUP's box body 901 and lid 902 and drive the box body 901 and lid 902 to rotate relative to the cleaning mechanism 5, not only reduces cleaning dead angles for the box body 901 and lid 902, thus improving the cleaning effect, but also allows for simultaneous cleaning of one FOUP's box body 901 and lid 902, thereby improving FOUP cleaning efficiency and reducing the required equipment space. Therefore, the FOUP cleaning device 200 of this utility model is indeed a very convenient and practical creation, and it truly achieves the purpose of this utility model.

[0050] The above description is merely an embodiment of this utility model and should not be construed as limiting the scope of this utility model. Any simple equivalent changes and modifications made in accordance with the claims and description of this utility model shall still fall within the scope of this utility model.

Claims

1. A cleaning device for FOUPs, suitable for connection to a cleaning fluid supply device, capable of simultaneously cleaning the FOUP's body and lid, the cleaning device comprising a housing mechanism internally defining a cleaning space, and a cleaning mechanism mounted on the housing mechanism, characterized in that: The cleaning device further includes a rotating seat mechanism installed on the housing mechanism and used to connect and guide the cleaning fluid provided by the cleaning fluid supply device. The rotating seat mechanism includes a drive module installed on the housing mechanism, a turntable module disposed in the cleaning space and connected to the drive module, and a support frame module mounted on the turntable module. The turntable module can be used to position the box body with its opening facing downwards. The support frame module can be used to support the cover. The drive module can be controlled to start and drive the turntable module to drive the support frame module to rotate horizontally relative to the housing mechanism. The cleaning mechanism can spray the cleaning fluid onto the box body and the cover, which are rotated by the turntable module and the support frame module.

2. The cleaning equipment for FOUP according to claim 1, characterized in that: The cleaning mechanism includes multiple lateral spraying modules distributed along the periphery of the turntable module within the cleaning space, and a lower spraying module located on the top side of the turntable module. Each lateral spraying module has multiple lateral spray heads distributed vertically at intervals. Each lateral spraying module can spray the cleaning fluid towards the box body and the cover via the lateral spray heads. The lower spraying module can spray the cleaning fluid upwards towards the interior of the box body.

3. The cleaning equipment for FOUP according to claim 2, characterized in that: The lower spray module has a central tube fixed to the housing mechanism and extending upward through the turntable module, and at least one lower spray head extending obliquely upward from the top of the central tube. The lower spray module can spray the cleaning fluid upward toward the interior of the box body through the at least one lower spray head.

4. The cleaning equipment for FOUP according to claim 3, characterized in that: The lower spray module has multiple lower spray heads that extend obliquely upward from the top of the central tube, and the lower spray module can spray the cleaning fluid upward toward the interior of the box body through the lower spray heads.

5. The cleaning equipment for FOUP according to claim 1, characterized in that: The turntable module includes a turntable body connected to the drive module, multiple uprights erected on the top side of the turntable body, and multiple positioning components respectively disposed on the uprights and used to cooperate in positioning the box body.

6. The cleaning equipment for FOUP according to claim 5, characterized in that: The turntable body has a rotation positioning part, and the rotation seat mechanism further includes a positioning sensor disposed in the housing mechanism and used to sense the rotation positioning part. The positioning sensor generates a positioning signal when it senses the rotation positioning part.

7. The cleaning equipment for FOUP according to claim 5, characterized in that: The support frame module includes a leg body erected on the top side of the turntable body, and a plurality of positioning components spaced apart on the top side of the leg body for cooperating with and positioning the cover.

8. The cleaning equipment for FOUP according to claim 1, characterized in that: It also includes a first object sensing module disposed on the housing mechanism, which generates a first object signal when it senses that the turntable module is carrying the box body.

9. The cleaning equipment for FOUP according to claim 1 or 8, characterized in that: It also includes a second object sensing module disposed on the housing mechanism, which generates a second object signal when it senses that the support frame module is carrying the cover.

10. The cleaning equipment for FOUP according to claim 1, characterized in that: The housing mechanism includes a housing body defining the cleaning space and a door module disposed on the housing body. The housing body also has an entrance and exit communicating with the cleaning space. The door module includes a slide rail unit mounted on the housing body, a door mounted on the slide rail unit, and a drive unit mounted on the housing body and connected to the door. The drive unit can be controlled to drive the door to move along the slide rail unit, thereby changing the door between a closed position that closes the entrance and exit and an open position that exposes the entrance and exit.

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