Single-sided coating equipment

Abstract

The utility model provides single-sided coating equipment which comprises a cavity, a vacuum device, a winding device and a sputtering device, and the cavity comprises a feeding cavity, a discharging cavity and a process cavity, the winding device comprises an unwinding mechanism placed in the feeding cavity, a winding mechanism placed in the discharging cavity and a film coating drum placed in the process cavity and located on a base material conveying path between the unwinding mechanism and the winding mechanism, and the sputtering device is placed in the process cavity and is opposite to the film coating drum. Inflation sealing devices are arranged between the feeding cavity and the process cavity and between the discharging cavity and the process cavity, each inflation sealing device comprises a mounting plate with a slit, an inflation sealing strip arranged in the slit and an air pipe channel communicated with the inflation sealing strip, and the slits are kept unblocked after the inflation sealing strips are deflated so that base materials can pass through. The slit is blocked after the inflatable sealing strip is inflated so as to realize sealing; the inflation sealing device is adopted to replace a gate valve, the cost of the opening and closing mechanism can be greatly reduced, the structure is simple, and maintenance is convenient.

Description

Technical Field

[0001] This utility model belongs to the field of coating equipment technology, and more specifically, it relates to a single-sided coating equipment. Background Technology

[0002] Roll-on coating equipment is a device that coats the surface of a substrate, which is a roll of material, in a vacuum chamber, thereby preparing a thin film with certain functions on the surface of the substrate.

[0003] Existing technologies include roll-to-roll single-sided coating equipment, which coats only one side of a substrate. These equipment typically place the coating drum and sputtering source within a process chamber, and separate the unwinding and rewinding mechanisms into separate loading and unloading chambers to avoid disrupting the vacuum environment within the process chamber during loading and unloading. Currently, gate valves are used between the loading / unloading chambers and the process chamber. Opening the gate valve allows the substrate to pass through, while closing it achieves a seal. However, these gate valves are costly. Utility Model Content

[0004] The purpose of this invention is to provide a single-sided coating equipment that can reduce the cost of the opening and closing mechanism between the loading and unloading chambers and the process chamber.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a single-sided coating equipment, including a cavity, a vacuum device, a winding device, and a sputtering device. The cavity includes a loading cavity, a unloading cavity, and a process cavity. The winding device includes an unwinding mechanism placed in the loading cavity, a winding mechanism placed in the unloading cavity, and a coating drum placed in the process cavity and located on the substrate transport path between the unwinding mechanism and the winding mechanism. The sputtering device is placed in the process cavity and is arranged opposite to the coating drum.

[0007] An inflation sealing device is provided between the feeding chamber and the process chamber, and between the unloading chamber and the process chamber. The inflation sealing device includes a mounting plate with a slit, an inflation sealing strip set inside the slit, and an air pipe channel connected to the inflation sealing strip. The slit remains unobstructed after the inflation sealing strip is deflated to allow the substrate to pass through, and the slit is blocked after the inflation sealing strip is inflated to achieve a seal.

[0008] Furthermore, guide structures are provided at both ends of the slit along its length direction. The guide structures are used to guide the inflatable sealing strip to expand along the width direction of the slit when it is inflated.

[0009] Furthermore, the guide structure is a guide arc surface, which curves towards the center of the slit.

[0010] Furthermore, the mounting plate includes a first mounting plate and a second mounting plate arranged symmetrically, the slit is formed by the first slit of the first mounting plate and the second slit of the second mounting plate, and the inflatable sealing strip includes a first inflatable sealing strip disposed inside the first slit and a second inflatable sealing strip disposed inside the second slit.

[0011] Furthermore, the sputtering device includes multiple coating units uniformly distributed along the circumference of the coating drum, each coating unit including an independent chamber and a sputtering source placed in the independent chamber, and the vacuum device including multiple sets of molecular pumps corresponding to the multiple coating units, each set of molecular pumps including multiple molecular pumps placed in the independent chamber.

[0012] Furthermore, the sputtering source within each coating unit includes a pair of planar cathode targets.

[0013] Furthermore, the process chamber includes two process zones arranged side by side and connected to each other, each process zone containing a coating drum and a sputtering device.

[0014] Furthermore, it also includes an antistatic device, which is placed inside the process chamber and positioned opposite the coating drum.

[0015] Furthermore, it also includes a laser cutting device, placed inside the feeding chamber and located on the substrate transport path between the coating drum and the winding mechanism to cut off the edge portion of the substrate.

[0016] Furthermore, a cooling structure is provided inside the coating drum.

[0017] Compared with the prior art, the single-sided coating equipment provided by this utility model has at least one of the following beneficial effects:

[0018] 1. By installing an air-filled sealing device between the feeding chamber, the unloading chamber and the process chamber to replace the gate valve, the cost of the opening and closing mechanism can be greatly reduced. The structure is simple and maintenance is convenient.

[0019] 2. Each sputtering source is equipped with a corresponding independent chamber, which can complete sputtering coating of different materials according to different process requirements.

[0020] 3. By installing a laser cutting device inside the feeding chamber, the chance of atmospheric pollution to the substrate is reduced compared to cutting in an atmospheric environment. In addition, the integrated automated operation saves labor input. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the single-sided coating equipment in this utility model;

[0023] Figure 2 This is a schematic diagram of the assembly of the air-filled sealing device and the side plate in this utility model;

[0024] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0025] Figure 4 This is a cross-sectional schematic diagram of the air-filled sealing device in this utility model;

[0026] The main markings in the attached figures are as follows:

[0027] 1. Substrate;

[0028] 21. Feeding chamber; 22. Discharging chamber; 23. Process chamber; 26. Side plate 26;

[0029] 3. Coated drum;

[0030] 41. Mounting plate; 42. Inflatable sealing strip; 43. Air tube channel; 44. Guide structure; 411. First mounting plate; 412. Second mounting plate; 421. First inflatable sealing strip; 422. Second inflatable sealing strip; 431. First air tube channel; 432. Second air tube channel;

[0031] 51. Sputtering source; 52. Independent chamber;

[0032] 6. Static electricity elimination device. Detailed Implementation

[0033] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0034] Please refer to the following: Figures 1 to 4 The single-sided coating equipment provided by this utility model is used to coat one side of a substrate 1. It mainly includes a cavity, a vacuum device, a winding device, and a sputtering device.

[0035] The cavity includes a loading cavity 21, a unloading cavity 22, and a process cavity 23. The winding device includes an unwinding mechanism placed in the loading cavity 21, a winding mechanism placed in the unloading cavity 22, and a coating drum 3 placed in the process cavity 23 and located on the substrate transport path between the unwinding mechanism and the winding mechanism. The sputtering device is placed in the process cavity 23 and is positioned opposite to the coating drum 3. The coating drum 3 and the sputtering device can cooperate to coat one side of the substrate 1, while the vacuum environment in the process cavity 23 is not broken during loading and unloading.

[0036] In this invention, an inflatable sealing device is provided between the feeding chamber 21 and the process chamber 23, and between the unloading chamber 22 and the process chamber 23. The inflatable sealing device includes a mounting plate 41 with a slit, an inflatable sealing strip 42 disposed inside the slit, and an air pipe channel 43 communicating with the inflatable sealing strip 42. The slit remains unobstructed after the inflatable sealing strip 42 deflates, allowing the substrate 1 to pass through. The slit is sealed after the inflatable sealing strip 42 is inflated, thus achieving a seal. Therefore, this invention uses an inflatable sealing device to replace a gate valve, significantly reducing the cost of the opening and closing mechanism, and offering a simple structure and convenient maintenance.

[0037] It should be noted that the feeding chamber 21 and the process chamber 23, as well as the unloading chamber 22 and the process chamber 23, can be separated by a side plate 26 with a window, and the inflation sealing device is installed on the side plate 26. In addition, the inflation sealing device can have one or two inflation sealing strips 42, that is, the inflation sealing strips 42 can be installed on one or both sides of the slit inside the mounting plate 41.

[0038] Preferably, such as Figures 2 to 4 As shown, the inflatable sealing device includes a mounting plate 41, an inflatable sealing strip 42, and an air passage 43. The mounting plate 41 is fixed to the window of the side plate 26 and includes a first mounting plate 411 and a second mounting plate 412 symmetrically arranged, with a first slit in the first mounting plate 411 corresponding to a second slit in the second mounting plate 412. The inflatable sealing strip 42 includes a first inflatable sealing strip 421 disposed inside the first slit and a second inflatable sealing strip 422 disposed inside the second slit. The air passage 43 includes a first air passage 431 disposed inside the side plate 26 and communicating with the first inflatable sealing strip 421, and a second air passage 432 disposed inside the side plate 26 and communicating with the second inflatable sealing strip 422. In practical applications, gas enters the two inflatable sealing strips 42 through the two air passages 43, causing the two inflatable sealing strips 42 to expand and seal the slits, thereby achieving a seal; when the gas is discharged, the two inflatable sealing strips 42 contract, allowing the substrate 1 to pass through the slits again.

[0039] like Figure 3As shown, guide structures 44 are provided at both ends of the slit along its length. These guide structures 44 guide the inflatable sealing strip 42 to expand along the width of the slit during inflation. The guide structure 44 can be, but is not limited to, a guide arc surface, which curves towards the center of the slit. This design allows the guide structure 44 to guide the inflatable sealing strip 42 to quickly seal the slit during inflation, improving the sealing effect.

[0040] In addition, it should be noted that the cavity in the single-sided coating equipment is preferably composed of multiple sub-cavities such as the loading cavity 21, the unloading cavity 22, and the process cavity 23. The cavity is made of stainless steel and is also equipped with cavity doors corresponding to each sub-cavity to facilitate loading and unloading. The cavity door flange is equipped with a sealing ring, and a negative pressure space is formed after the cavity door is closed.

[0041] In addition, it should be noted that the vacuum device in the single-sided coating equipment includes a vacuum pump located outside the cavity, specifically including a backing pump for coarse evacuation and a molecular pump for fine evacuation. The backing pump can be composed of a Roots pump and a rotary vane pump, and the molecular pump can be used in conjunction with cryogenic technology to remove water vapor released by condensed organic materials / sputtered materials.

[0042] Furthermore, it should be noted that the winding device in the single-sided coating equipment can consist of an unwinding roller, a rewinding roller, multiple coating drums 3, a guide roller assembly, a tension measurement and control mechanism, a substrate correction mechanism, an online film thickness detection mechanism, and a coating main roller speed control mechanism. The guide roller assembly can be divided into three parts: the first part is located in the feeding chamber 21, the second part is located in the process chamber 23, and the third part is located in the unloading chamber 22. Each part of the guide roller assembly consists of one or more combinations of guide rollers, tension rollers, flattening rollers, olive rollers, and auxiliary cooling rollers, and is driven by a motor to transport the substrate 1.

[0043] The number of coating drums 3 can be set according to actual needs. Taking two coating drums 3 as an example, the process cavity 23 includes two process areas arranged side by side and connected. Each process area contains a coating drum 3 and a sputtering device, which can increase the diameter of the coating drum 3 to a certain extent.

[0044] Each coating drum 3 is equipped with a cooling structure to reduce the temperature of the substrate 1 and prevent the substrate 1 from being damaged by high temperature.

[0045] Furthermore, the single-sided coating equipment provided by this invention can also improve the film quality and efficiency of the substrate 1.

[0046] like Figure 1As shown, the sputtering device in the single-sided coating equipment includes multiple coating units evenly distributed along the circumference of the coating drum 3. Each coating unit includes an independent chamber 52 and a sputtering source 51 placed in the independent chamber 52. The vacuum device includes multiple sets of molecular pumps corresponding to the multiple coating units. Each set of molecular pumps includes multiple molecular pumps placed in the independent chamber 52.

[0047] It should be noted that the number of coating units can be set according to actual needs. Preferably, six coating units are arranged around the periphery of each coating drum 3, and each coating unit is equipped with an independent chamber 52, which is formed by multiple isolation baffles. When gas is introduced into each independent chamber 52, there will be no mutual interference, allowing for the sputtering coating of different materials according to different process requirements. This greatly improves coating efficiency while meeting diverse process needs. Furthermore, each coating unit is equipped with four uniformly distributed molecular pumps, which can achieve a uniform vacuum distribution within the chamber, improving film uniformity and purity, thereby enhancing film quality.

[0048] It should also be noted that the sputtering source 51 in each coating unit includes a pair of planar cathode targets and is discharged using a medium-frequency power supply.

[0049] In addition, such as Figure 1 As shown, the single-sided coating equipment provided by this utility model also includes an antistatic device 6, which is placed inside the process chamber 23 and positioned opposite to the coating drum 3. Antistatic treatment can be performed before and after coating, effectively improving the adhesion between the substrate 1 and the film layer.

[0050] Furthermore, in existing technologies, a coating device is typically used to coat both sides of the substrate 1, followed by a secondary cutting process in an atmospheric environment. In contrast, this invention employs a laser cutting device to remove and collect the uneven edge portions on both sides of the coated substrate 1 before winding it up.

[0051] The single-sided coating equipment also includes a laser cutting device, placed inside the feeding chamber 22 and located on the substrate transport path between the coating drum 3 and the winding mechanism, to cut off the edge portion of the substrate 1. After double-sided coating is completed, the substrate 1 enters the feeding chamber 22, is cut by the laser cutting device, and then wound up. This design reduces the probability of atmospheric pollution of the substrate 1. In addition, it integrates automated operation, saving labor input, and ensures that all substrates 1 exiting the chamber are qualified products, eliminating the need for secondary processing to remove defective products from both sides.

[0052] In addition, the single-sided coating equipment provided by this utility model can also be equipped with an ion cleaning device and / or a baking device on the substrate transport path.

[0053] like Figures 1 to 4As shown, taking the preferred single-sided coating equipment of this utility model as an example, its process flow is as follows: feeding---baking---ion cleaning---coating 1---coating 2---laser edge cutting---unloading and winding.

[0054] This single-sided coating equipment employs an air-sealing device between the loading chamber 21 and the process chamber 23, and between the unloading chamber 22 and the process chamber 23. The air-sealing device includes a mounting plate 41 with a slit, an air-sealing strip 42, and an air pipe channel 43. When the air-sealing strip 42 is deflated, the slit allows the substrate 1 to pass through. When the loading chamber 21 and the unloading chamber 22 need to be opened during loading and unloading, gas is injected into the air-sealing strip 42 to seal and isolate the process chamber 23. This ensures that the process chamber 23 remains in a vacuum state even when the vacuum in the loading chamber 21 and the unloading chamber 22 is broken, thus eliminating the need for repeated vacuuming of the process chamber 23 and improving work efficiency.

[0055] In addition, each sputtering source 51 is equipped with a corresponding independent chamber 52, which can complete sputtering coating of different materials according to different process requirements.

[0056] In addition, online laser cutting is performed in the feeding chamber 22, and the unevenly coated edge parts on both sides of the substrate 1 are cut off and collected before winding. Compared with coating the substrate 1 and then performing secondary cutting in the atmospheric environment, the probability of atmospheric pollution to the substrate 1 is reduced. In addition, the integrated automated operation saves labor input.

[0057] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A single-sided coating apparatus, comprising a cavity, a vacuum device, a winding device, and a sputtering device, wherein the cavity includes a loading cavity, a unloading cavity, and a process cavity; the winding device includes an unwinding mechanism placed in the loading cavity, a winding mechanism placed in the unloading cavity, and a coating drum placed in the process cavity and located on the substrate transport path between the unwinding mechanism and the winding mechanism; the sputtering device is placed in the process cavity and disposed opposite to the coating drum, characterized in that: An inflation sealing device is provided between the feeding chamber and the process chamber, and between the unloading chamber and the process chamber. The inflation sealing device includes a mounting plate with a slit, an inflation sealing strip disposed inside the slit, and an air pipe channel communicating with the inflation sealing strip. The slit remains unobstructed after the inflation sealing strip is deflated to allow the substrate to pass through, and the slit is blocked after the inflation sealing strip is inflated to achieve a seal.

2. The single-sided coating equipment as described in claim 1, characterized in that, The slit is provided with guide structures at both ends along its length direction, and the guide structures are used to guide the inflatable sealing strip to expand along the width direction of the slit when it is inflated.

3. The single-sided coating equipment as described in claim 2, characterized in that, The guide structure is a guide arc surface, which curves toward the center of the slit.

4. The single-sided coating equipment as described in claim 1, characterized in that, The mounting plate includes a first mounting plate and a second mounting plate arranged symmetrically. The slit is formed by the cooperation of a first slit of the first mounting plate and a second slit of the second mounting plate. The inflatable sealing strip includes a first inflatable sealing strip disposed inside the first slit and a second inflatable sealing strip disposed inside the second slit.

5. The single-sided coating equipment as described in any one of claims 1-4, characterized in that, The sputtering device includes a plurality of coating units evenly distributed along the circumference of the coating drum. Each coating unit includes an independent chamber and a sputtering source placed in the independent chamber. The vacuum device includes a plurality of molecular pumps corresponding to the plurality of coating units. Each set of molecular pumps includes a plurality of molecular pumps placed in the independent chamber.

6. The single-sided coating equipment as described in claim 5, characterized in that, The sputtering source within each coating unit includes a pair of planar cathode targets.

7. The single-sided coating equipment as described in any one of claims 1-4, characterized in that, The process chamber includes two process zones arranged side by side and connected to each other, with a coating drum and a sputtering device placed in each process zone.

8. The single-sided coating equipment as described in any one of claims 1-4, characterized in that, It also includes an antistatic device, which is placed inside the process chamber and positioned opposite to the coating drum.

9. The single-sided coating equipment as described in any one of claims 1-4, characterized in that, It also includes a laser cutting device, placed inside the feeding chamber and located on the substrate transport path between the coating drum and the winding mechanism to cut off the edge portion of the substrate.

10. The single-sided coating equipment as described in any one of claims 1-4, characterized in that, The coating drum is equipped with a cooling structure.

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