Precursor Filter

Abstract

This utility model discloses a precursor filter, including a cylindrical body, a head, a perforated plate disposed on the cylindrical body, several through holes formed in the perforated plate, and several filter elements inserted into each through hole at their ends. A pull plate is provided on the side of the perforated plate opposite to the filter elements. Each filter element end is provided with a limiting component, which has a retractable state as the filter element end passes through the through hole and a connected state to the pull plate. A clamping component is provided between the pull plate and the perforated plate to drive the pull plate to move away from the perforated plate. This utility model has the following advantages and effects: It enables convenient installation of the filter elements, thereby reducing manual labor intensity and improving equipment assembly efficiency.

Description

Technical Field

[0001] This utility model relates to a filtration device, and more particularly to a precursor filter. Background Technology

[0002] Precursor filters are key equipment used to separate, purify, or collect precursor materials (such as nanoparticles, semiconductor precursors, chemical synthesis intermediates, etc.). Their core function is to remove impurities, solvents, or byproducts through physical or chemical means to ensure the purity and performance of the target product.

[0003] Existing precursor filters mainly consist of a cylinder, end caps mounted on the cylinder, a perforated plate inside the cylinder, and multiple filter elements fixed to the perforated plate by fasteners. The fasteners are nuts, with the filter element ends passing through the perforated plate and threaded into the nuts to secure them. However, in practice, each nut must be tightened individually for fixation. Due to the large amount of work involved in tightening the nuts, and the large number of filter elements, this significantly increases the workload of manual tightening, leading to reduced equipment assembly efficiency. To address these issues, this improved solution has been developed. Utility Model Content

[0004] The purpose of this invention is to provide a precursor filter that enables convenient installation of the filter element, thereby reducing manual labor intensity and improving equipment assembly efficiency.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a precursor filter, including a cylinder, a head, a perforated plate disposed on the cylinder, a plurality of through holes opened in the perforated plate, and a plurality of filter elements inserted into each through hole at their ends. A pull plate is provided on the side of the perforated plate opposite to the filter element. Each filter element end is provided with a limiting component. The limiting component has a retracted state as the filter element end passes through the through hole and a connected state connecting the pull plate. A clamping component is provided between the pull plate and the perforated plate to drive the pull plate to move opposite to the perforated plate.

[0006] By adopting the above technical solution, when the limiting component is in the retracted state, it passes through the through hole along with the end of the filter element. Then, the limiting component is switched to the connecting state to connect with the pull plate. The set clamping component then drives the pull plate to move against the tube sheet, thereby achieving the fixed installation of several filter elements on the tube sheet. By using the pull plate in conjunction with the limiting component to connect several filter elements, a small number of clamping components are needed to drive all the filter elements for fixing, thus achieving convenient filter element installation, reducing manual labor intensity, and improving equipment assembly efficiency.

[0007] The limiting component is further configured as follows: the limiting component includes a mounting hole opened on the side wall of the filter element end, a limiting claw hinged in the mounting hole, and a tension spring that drives the limiting claw to rotate out of the mounting hole.

[0008] By adopting the above technical solution, when the limiting component is in the storage state, the limiting claw is located in the mounting hole. When the limiting component is in the connection state, the limiting claw rotates out of the mounting hole under the action of the tension spring to connect with the pull plate.

[0009] The further configuration is as follows: the number of the limiting claws is set to two and the two limiting claws are symmetrically arranged along the length direction of the filter element; the number of the tension springs is set to two and each is connected to one of the two limiting claws.

[0010] By adopting the above technical solution, this arrangement makes the connected structure more stable.

[0011] Further configured as follows: the pull plate is provided with a plurality of limiting holes corresponding one-to-one with the filter element. When the limiting component is in the storage state, the limiting component can pass through the limiting hole with the end of the filter element. When the limiting claw is in the engagement state, the mounting hole restricts the limiting claw from rotating on the side opposite to the limiting hole.

[0012] By adopting the above technical solution, the limiting component in the storage state passes through the through hole and the limiting hole sequentially with the end of the filter element. When in the connecting state, the limiting claw rotates out of the mounting hole to abut against the opposite side of the pull plate, thereby forming a limiting connection. This structure not only fulfills the limiting function but also allows the limiting component to pass smoothly through the through hole and the limiting hole, making assembly operations more convenient.

[0013] The further configuration is as follows: the clamping assembly consists of a plurality of clamping bolts that pass through the pull plate and abut against the tube sheet, and each of the clamping bolts is threadedly connected to the pull plate.

[0014] By adopting the above technical solution, the structure of the tightening bolt and the pull plate being threaded together and abutting against the tube sheet is used to achieve the opposite movement of the pull plate and the tube sheet, thereby achieving the fixed installation of the filter element on the tube sheet.

[0015] A further feature is provided: each of the filter elements is provided with a double sealing structure between itself and the tube sheet.

[0016] By adopting the above technical solution, the design of the double-seal structure achieves double sealing, avoids leakage, and achieves a better sealing effect.

[0017] The double-sealing structure is further configured as follows: the sealing element is a sealing element disposed between the filter element and the tube sheet, the sealing element includes a first sealing part disposed between the tube sheet and the filter element on the opposite side of the pull plate and the tube sheet, and a second sealing part disposed between the through hole wall and the end side wall of the filter element.

[0018] By adopting the above technical solution, the cooperation between the first sealing part and the second sealing part achieves a double seal to ensure the sealing effect.

[0019] The second sealing part is further configured such that the outer peripheral wall of the second sealing part gradually narrows towards the pull plate to form a guide slope.

[0020] By adopting the above technical solution, the guide slope structure allows the seal to be inserted into the through hole more smoothly and forms a tighter counter-sealing force.

[0021] In summary, this utility model has the following beneficial effects: it enables convenient installation of the filter element, thereby reducing manual labor intensity and improving equipment assembly efficiency. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of an embodiment;

[0023] Figure 2 for Figure 1 Enlarged view of section A in the middle;

[0024] Figure 3 This is a partial structural diagram of an embodiment.

[0025] In the diagram: 1. Cylinder; 2. End cap; 3. Perforated plate; 4. Through hole; 5. Filter element; 6. Pull plate; 7. Limiting assembly; 71. Mounting hole; 72. Limiting claw; 73. Tensioning spring; 8. Limiting hole; 9. Abutting bolt; 10. Sealing element; 101. First sealing part; 102. Second sealing part; 11. Guide slope. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings.

[0027] refer to Figures 1 to 3 A precursor filter includes a cylindrical body 1, a head 2 installed on the cylindrical body 1, a perforated plate 3 with an opening in the cylindrical body 1, a plurality of through holes 4 formed in the perforated plate 3, and a plurality of filter elements 5 with their ends inserted into each through hole 4. A pull plate 6 is provided on the side of the perforated plate 3 opposite to the filter elements 5, and the pull plate 6 is located above the perforated plate 3. Each filter element 5 has a limiting component 7 at its end, which has a retracted state as the end of the filter element 5 passes through the through hole 4 and a connected state to connect with the pull plate 6. A clamping component is provided between the pull plate 6 and the perforated plate 3 to drive the pull plate 6 to move opposite to the perforated plate 3.

[0028] The limiting assembly 7 includes a mounting hole 71 formed in the end sidewall of the filter element 5 and penetrating the filter element 5, a limiting claw 72 hinged to the mounting hole 71 via a pivot, and a tension spring 73 that drives the limiting claw 72 to rotate out of the mounting hole 71. Two limiting claws 72 are provided, and the two limiting claws 72 are symmetrically arranged along the length of the filter element 5. The two limiting claws 72 are hinged to the mounting hole 71 via the same pivot. Two tension springs 73 are provided, each connected to one of the two limiting claws 72. The two ends of the tension spring 73 are fixedly connected to the limiting claw 72 and the wall of the mounting hole 71, and the tension spring 73 is a tension spring.

[0029] The pull plate 6 has several limiting holes 8 that correspond one-to-one with the filter element 5. When the limiting component 7 is in the retracted state, the limiting component 7 can pass through the limiting hole 8 with the end of the filter element 5. When the limiting claw 72 is in the engaged state, the mounting hole 71 restricts the rotation of the limiting claw 72 on the side opposite to the limiting hole 8. The clamping component consists of multiple clamping bolts 9 that pass through the pull plate 6 and abut against the tube sheet 3. Each clamping bolt 9 is threadedly connected to the pull plate 6.

[0030] Each filter element 5 and the perforated plate 3 are provided with a double sealing structure. The double sealing structure is a sealing element 10 disposed between the filter element 5 and the perforated plate 3. The sealing element 10 includes a first sealing part 101 disposed between the filter element 5 and the side of the pull plate 6 opposite to the perforated plate 3; and a second sealing part 102 disposed between the wall of the through hole 4 and the end side wall of the filter element 5. The outer peripheral wall of the second sealing part 102 is gradually narrowed towards the pull plate 6 to form a guide slope 11. The first sealing part 101 and the second sealing part 102 are integrally connected, and the sealing element 10 is made of rubber material.

[0031] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A precursor filter, comprising a cylindrical body (1), a head (2), a perforated plate (3) disposed on the cylindrical body (1), a plurality of through holes (4) formed in the perforated plate (3), and a plurality of filter elements (5) with their ends inserted into each through hole (4), characterized in that: The flower plate (3) is provided with a pull plate (6) on the side opposite to the filter element (5). Each filter element (5) is provided with a limiting component (7) at its end. The limiting component (7) has a storage state that passes through the through hole (4) with the end of the filter element (5) and a connecting state that connects to the pull plate (6). A clamping component is provided between the pull plate (6) and the flower plate (3) to drive the pull plate (6) to move opposite to the flower plate (3).

2. The precursor filter according to claim 1, characterized in that: The limiting component (7) includes a mounting hole (71) opened on the side wall of the end of the filter element (5), a limiting claw (72) hinged in the mounting hole (71), and a tension spring (73) that drives the limiting claw (72) to rotate out of the mounting hole (71).

3. The precursor filter according to claim 2, characterized in that: The number of the limiting claws (72) is set to two and the two limiting claws (72) are symmetrically arranged along the length direction of the filter element (5). The number of the tension springs (73) is set to two and they are respectively connected to the two limiting claws (72).

4. The precursor filter according to claim 3, characterized in that: The pull plate (6) is provided with a plurality of limiting holes (8) corresponding to the filter element (5). When the limiting component (7) is in the storage state, the limiting component (7) can pass through the limiting hole (8) with the end of the filter element (5). When the limiting claw (72) is in the connecting state, the mounting hole (71) restricts the limiting claw (72) from rotating on the side opposite to the limiting hole (8).

5. The precursor filter according to claim 1, characterized in that: The clamping assembly consists of a plurality of clamping bolts (9) that pass through the pull plate (6) and abut against the tube sheet (3), and each of the clamping bolts (9) is threadedly connected to the pull plate (6).

6. The precursor filter according to claim 1, characterized in that: Each of the filter elements (5) is provided with a double sealing structure between itself and the tube sheet (3).

7. The precursor filter according to claim 6, characterized in that: The double sealing structure is a sealing element (10) disposed between the filter element (5) and the tube sheet (3). The sealing element (10) includes a first sealing part (101) disposed between the tube sheet (3) and the filter element (5) on the opposite side of the pull plate (6) and the tube sheet (3), and a second sealing part (102) disposed between the wall of the through hole (4) and the end side wall of the filter element (5).

8. The precursor filter according to claim 7, characterized in that: The outer peripheral wall of the second sealing part (102) is gradually narrowed towards the pull plate (6) to form a guide slope (11).

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