Matching equipment and power supply module using same

Abstract

The utility model provides matching equipment which comprises a shell, a partition plate is arranged in the shell, and the partition plate is used for dividing the shell into a radio frequency space used for containing radio frequency circuit components; the driving space is used for accommodating a driving component of the radio frequency circuit component; and the low-pressure space is used for accommodating devices such as a circuit board for controlling the system. According to the scheme provided by the utility model, different components of the whole matcher are arranged in different and independent spaces, so that electromagnetic interference among the components is avoided, and the operation stability of matcher equipment is further improved. The invention also provides a power supply module using the matching equipment.

Description

Technical Field

[0001] This utility model relates to the field of plasma applications, and in particular to a matching device and a power module using the matching device. Background Technology

[0002] In a typical radio frequency discharge plasma generation system, the output impedance of the radio frequency power supply is generally 50 ohms, while the equivalent impedance of the plasma reaction chamber is generally not 50 ohms, and it also varies under different process conditions. Transmission line theory indicates that when the output impedance of the radio frequency power supply differs from the load impedance (i.e., the equivalent impedance of the plasma reaction chamber), the output power of the radio frequency power supply will be lost, failing to reach maximum output efficiency, resulting in energy waste, damage to the radio frequency power supply itself, and even safety issues such as excessive local heat leading to fires. Furthermore, since the load impedance is related to the process conditions for plasma generation, an impedance matching device that automatically adjusts the load impedance needs to be added between the radio frequency power supply and the plasma reaction chamber when using an inductively coupled plasma source. This impedance matching device can adjust the actual value of adjustable components (such as adjustable capacitors) based on the actual impedance of the plasma reaction chamber under different process conditions, using built-in sensors and a control system, to ensure the load impedance equals 50 ohms, achieving impedance matching and avoiding the aforementioned problems.

[0003] (1) 1. Matching devices include high-voltage components and low-voltage components. They are very sensitive to electromagnetic interference (EMI) during use. EMI can cause unstable operation of the equipment or even damage to the components, which is a significant limiting factor for the quality of matching devices.

[0004] (2) 2. With the development of technology and the improvement of integration level, the matching device needs to complete the necessary heat dissipation on the basis of small size, which puts forward higher requirements for the heat dissipation efficiency of the matching device.

[0005] Referring to the technical solution disclosed in CN217470562U, a matching device structure is disclosed. This structure divides the high and low voltage areas into partitions through a plate (38) to meet the requirements of electromagnetic interference resistance, and adopts an independent fan cooling method to ensure the heat dissipation efficiency of the high voltage area. Utility Model Content

[0006] This application provides a matching device, including a housing, with a partition inside the housing to divide the housing into: a radio frequency space for accommodating radio frequency circuit components; a driving space for accommodating driving components for the radio frequency circuit components; and a low-voltage space for accommodating circuit boards and other devices for the control system.

[0007] Secondly, this application provides an RF power module, including the aforementioned matching device. The power module also includes an output port, which is connected to the RF input port of the matching device via an RF cable.

[0008] By using the above technical solutions, compared with the prior art, this utility model has the following beneficial effects:

[0009] • By separating the three spaces inside the matching device with partitions, electromagnetic interference between different module components can be effectively avoided;

[0010] • Electromagnetic shielding effect is further achieved by using partitions and shells made of metal materials;

[0011] • By adjusting the real and imaginary parts of the impedance using two capacitors respectively, impedance matching can be achieved more accurately;

[0012] • The bias bar configuration provides DC voltage detection functionality for the output port of this matching unit.

[0013] Example

[0014] Example 1 is a matching device, including a housing, characterized in that a partition is disposed inside the housing, the partition being used to divide the housing into:

[0015] Radio frequency space, used to house radio frequency circuit components;

[0016] The driving space is used to house the driving components of the radio frequency circuit.

[0017] Low-pressure space used to house components such as circuit boards used in control systems.

[0018] Example 2 is the matching device described in Example 1, characterized in that the housing is provided with the following at a position corresponding to the radio frequency space:

[0019] At least two variable capacitors, wherein the central axes of the at least two variable capacitors are arranged in parallel;

[0020] An inductor coil, wherein the inductor coil is arranged in a spiral shape and the central axis of the inductor coil is perpendicular to the central axis of the variable capacitor;

[0021] The tail of all the variable capacitors is electrically connected to one end of the inductor coil.

[0022] Example 3 is a matching device according to Example 2, characterized in that the housing further includes a fixed capacitor, a grounding inductor, an RF input module, and an RF output module;

[0023] The end of the inductor coil away from the variable capacitor is electrically connected to one end of the fixed capacitor via a conductive connector and further electrically connected to the RF output module;

[0024] At least one end of the variable capacitor away from the inductor coil is electrically connected to the RF input module;

[0025] At least one end of the variable capacitor, away from the inductor coil, is electrically connected to the ground inductor and connected to the housing through the ground inductor.

[0026] Example 4 is a matching device according to Example 3, characterized in that the variable capacitors are all bolted to the partition via insulating connectors.

[0027] Example 5 is a matching device according to Example 3, characterized in that an RF shield is provided at the position of the housing corresponding to the RF output module, and the signal lines of the RF output module are at least partially disposed within the RF shield.

[0028] Example 6 is a matching device according to any one of Examples 2-5, characterized in that the drive space includes:

[0029] The number of motors is the same as the number of variable capacitors. The variable capacitors are connected to the motors one-to-one, and the drive shafts of the motors and the variable capacitors are arranged collinearly.

[0030] Example 7 is a matching device according to Example 6, characterized in that an RF fan is provided at one end of the housing corresponding to the inductor coil, and an RF heat dissipation hole is provided on the side wall of the housing opposite to the fan.

[0031] Example 8 is a matching device according to Example 6, characterized in that the transmission connection is achieved by a pin-shaped connector and an insulated coupling installed between the motor and the variable capacitor.

[0032] Example 9 is a matching device according to Example 6, characterized in that the low-voltage space is adjacent to both the driving space and the radio frequency space, and the partition has a hole at a position corresponding to the low-voltage space and the driving space for circuit connection between the two spaces.

[0033] Example 10 is a matching device according to Example 6, characterized in that the partition is provided with internal heat dissipation holes at the position corresponding to the top of the motor.

[0034] Example 11 is a matching device according to Example 6, characterized in that a low-pressure fan is provided at a position between the partition and the driving space and the low-pressure space, the low-pressure fan being disposed within the driving space for guiding airflow between the low-pressure space and the driving space.

[0035] Example 12 is a matching device according to Example 6, characterized in that the housing is provided with motor heat dissipation holes at the positions corresponding to one end of the motor.

[0036] Example 13 is a matching device according to Example 3, characterized in that the housing is provided with a cooling input port and a cooling output port, and a water pipe made of insulating material is provided in the radio frequency space.

[0037] Example 14 is a matching device according to Example 13, characterized in that a water distribution channel is provided at the position of the housing corresponding to the RF output module, and the inductor coil is hollow, so that coolant can flow through the water distribution channel and from the inside through the inductor coil.

[0038] Example 15 is a matching device according to any one of Examples 1-5, characterized in that the matching device further includes a biasing rod, the tail end of which is mounted on the housing;

[0039] The housing is provided with a bias shield at the position corresponding to the tail end of the bias rod.

[0040] Example 16 is a matching device according to Example 1, characterized in that both the partition and the housing are made of metal.

[0041] Example 17 is a power module including a matching device as described in any of Examples 1-16, characterized in that the power module includes an output port connected to the input of the matching device via an RF cable. Attached Figure Description

[0042] Figure 1 This is an overall schematic diagram of the matching device in this application;

[0043] Figure 2 This is a schematic diagram of the radio frequency spatial components of the matching device of this application;

[0044] Figure 3 This is a schematic diagram of the variable capacitor connection of the matching device in this application;

[0045] Figure 4 This is an overall schematic diagram of the fixed capacitor connection of the matching device in this application;

[0046] Figure 5 This is a schematic diagram of the linear inductance of the matching device of this application;

[0047] Figure 6 This is a schematic diagram of the variable capacitor drive of the matching device in this application;

[0048] Figure 7 This is a schematic diagram of the partition of the matching device in this application;

[0049] Figure 8 This is a schematic diagram of the low-pressure space of the matching equipment in this application;

[0050] Figure 9 This is a schematic diagram of the housing of the matching device in this application;

[0051] Figure 10 This is a schematic diagram of the interlock switch of the matching device in this application;

[0052] Figure 11 This is a schematic diagram of the inductor coil of the water-cooling scheme for the matching equipment in this application;

[0053] Figure 12 This is a schematic diagram of the water cooling scheme for the matching equipment in this application. Detailed Implementation

[0054] This application discloses a matching device applied in the field of plasma, used to achieve impedance matching between a power supply and a plasma device.

[0055] like Figure 1 As shown, one embodiment of this technical solution includes a housing 1, and the interior of the housing 1 is connected by different partitions 11 (such as...). Figure 7 As shown, the space is divided into three functional spaces: radio frequency space 2, drive space 3, and low voltage space 4.

[0056] like Figure 1 and Figure 2 As shown, in any embodiment of this application, the RF space 2 includes two variable capacitors installed inside the housing 1, namely variable capacitor 200 and variable capacitor 201, and includes an inductor coil 210, a fixed capacitor 202 and a grounding inductor 211 installed on the bottom surface of the housing 1, an RF input module 22 installed on the side wall of the housing 1 near the variable capacitor 201, an RF output module 23 installed on the side wall of the housing 1 away from the variable capacitors 200 and 201, a biasing rod 25 installed on the side wall of the housing 1 opposite to the RF input module 22, and insulating connectors 260 and 261 installed on the partition plate 11. In this design, the inductor coil 210 adopts a spiral coil, mainly for the high inductance value required by the matching scheme. Other design forms can be selected in different schemes. For example, a straight coil can be selected for low inductance value requirements (such as...). Figure 5 ).

[0057] like Figures 2-4As shown, in any embodiment of this application, the central axes of variable capacitors 200 and 201 are arranged parallel to each other, and the tails of variable capacitors 200 and 201 are electrically connected to one end of inductor coil 210. The central axis of inductor coil 210 is arranged perpendicular to the central axis of variable capacitor 200. The end of inductor coil 210 away from variable capacitor 200 is electrically connected to one end of fixed capacitor 202 via conductive connector 241 and extends to the copper block 230 of RF output module 23.

[0058] Through the above scheme, the components mainly used to achieve impedance matching in any embodiment of this application are variable capacitor 200, variable capacitor 201, fixed capacitor 202, inductor coil 210, and grounding inductor 211. Variable capacitors 200 and 201 are both variable capacitors with controllable capacitance values ​​within a certain range. For the purpose of covering the matching range, their actual variable capacitance ranges are not the same. Variable capacitor 200 controls the imaginary part of the impedance, while variable capacitor 201 controls the real part. Only by combining the two can the real-time impedance value of the matching device be adjusted to complete impedance matching. This design scheme selects only two variable capacitors as components for matching path control, mainly for the following reasons: in matching path control, two variable capacitors are sufficient; more variable capacitors would only complicate the control algorithm and increase the overall size of the matching device. Inductor coil 210 and grounding inductor 211 are basic components inside the matching device, participating together in the impedance matching process, and their inductance values ​​are both fixed. Finally, the fixed capacitor 202 used in this design plays a compensating role in the matching circuit, which can change the impedance matching range to meet different matching requirements. Furthermore, depending on different matching requirements, it may also be placed in other positions in the matching circuit. In addition to changing the matching range, the fixed capacitor 202 also serves to shunt current and divide voltage.

[0059] like Figure 2-4 As shown, in any embodiment of this application, the end of the variable capacitor 200 is directly electrically connected to the copper rod 220 of the RF input module 22. The head of the variable capacitor 201 is directly connected to the housing 1 through the grounding inductor 211.

[0060] like Figure 2 and Figure 7 As shown, in any embodiment of this application, variable capacitors 200 and 201 are bolted to partition 11 via insulating connectors 260 and 261. The use of insulating connectors prevents high voltage on the capacitors from affecting the drive space 3 and low-voltage space 4 through partition 11, and the partition 11 effectively avoids unnecessary electromagnetic leakage to prevent interference with the operation of drive space 3 and low-voltage space 4.

[0061] Through the above scheme, the bias rod 25 provides the DC voltage detection function of the output port of this matching device. The tail of the bias rod 25 is directly mounted on the shield 141 mounted on the side wall of the housing 1, and the detection line at the head is bolted to the conductive connector 241.

[0062] like Figure 4-6 As shown, in any embodiment of this application, the drive space 3 is located near the radio frequency space 2 and is separated from the radio frequency space 2 by a partition 11. The partition 11 and the housing 1 are both made of aluminum alloy. Due to the effective blocking of electromagnetic waves by the metal, electromagnetic radiation interference from the radio frequency space 2 can be avoided from interfering with the normal operation of the drive space 3 and the low-voltage space 4. The drive space 3 includes a motor 300 connected to the variable capacitor 200 and a motor 301 connected to the variable capacitor 201. The central axes of the motor 300 and the variable capacitor 200 are collinear, and the central axes of the motor 301 and the variable capacitor 201 are also collinear. The actual capacitance values ​​of the variable capacitor 200 and the variable capacitor 201 are changed by the rotation of the motor 300 and the motor 301, respectively, to achieve coverage of the matching range.

[0063] like Figure 6 As shown, in any embodiment of this application, the transmission connection is achieved through a pin-shaped connector 32 installed at the head of the motor and an insulating coupling 31. The use of the insulating coupling 31 prevents the high voltage on the capacitor from being transmitted to the motor and the low-voltage space 4, effectively avoiding motor breakdown and unnecessary electromagnetic leakage.

[0064] like Figure 7 As shown, the low-voltage space 4 is adjacent to both the radio frequency space 2 and the drive space 3. The low-voltage space 4 is separated from the radio frequency space 2 and the drive space 3 by stepped partitions 12 and 13, respectively. As mentioned above, both stepped partitions 12 and 13 are made of aluminum alloy. Due to the effective blocking of electromagnetic waves by the metal, the electromagnetic radiation from the radio frequency space 2 can be prevented from interfering with the normal operation of the drive space 3 and the low-voltage space 4.

[0065] like Figure 7-8As shown, in any embodiment of this application, three circuit boards are installed in the low-voltage space 4 for matching unit control and communication. The signal lines of the RF input module 22, the control lines of the first motor 301, and the control lines of the internal fan all pass through the top hole 120 of the stepped partition 12 and connect to the circuit board. The control line of the external fan first enters the drive space 3 through the hole 100 on the housing 1, and then passes through the top hole 120 of the stepped partition 12 and connects to the circuit board. The RF output module 23 and the bias rod 25 are located in the RF space 2. To avoid electromagnetic interference, in this design, the signal lines of the RF output module 23 are completely housed inside the shield 140, and the signal lines need to pass through the wire groove 15 to enter the low-voltage space 4 and connect to the circuit board. Similarly, the signal lines of the bias rod 25 are completely housed inside the shield 141, and the signal lines need to pass through the shield 140 and the wire groove 15 to enter the low-voltage space 4 and connect to the circuit board.

[0066] As described above, by placing the different components of the entire matching unit in different and independent spaces, electromagnetic interference between components is avoided, thereby further improving the operational stability of the matching unit.

[0067] like Figure 1 , 9 As shown in Figure 10, in one embodiment of this application, the technical solution includes an RF fan 500, which is located on the outside of the housing 1 at one end corresponding to the central axis of the inductor coil 210. An RF heat dissipation hole 510 is provided at the other end of the housing 1 opposite to the RF fan 500. Through this arrangement, airflow can directly pass through the inductor coil 210 for efficient heat dissipation. An internal heat dissipation hole 512 is provided on the top of the partition 11 at the upper part of the motor to guide the airflow from the RF space 2 into the drive space 3, thereby enhancing the motor's heat dissipation effect.

[0068] This technical solution includes a low-pressure fan 501, which is mounted on the partition 13 and located within the drive space 3. The low-pressure fan 501 draws airflow from the drive space 3 into the low-pressure space 4. The bottom plate 101 of the housing 1 has auxiliary heat dissipation holes 511 at a position corresponding to the low-pressure space 4 away from the low-pressure fan 501, used to exhaust airflow from the low-pressure space 4, thereby achieving heat dissipation for the low-pressure space 4. The cover plate 100 of the housing 1 has motor heat dissipation holes at positions corresponding to the motors 300 and 301, connecting the external space of the housing 1 with the drive space 3. These holes serve two purposes: firstly, to dissipate heat from the motors 300 and 301, and secondly, to allow the low-pressure fan 501 to draw airflow into the low-pressure space 4 to dissipate heat from the circuit board.

[0069] like Figure 11-12As shown, in any embodiment of this application, water cooling is used to dissipate heat from the variable capacitor 200 and / or variable capacitor 201 and / or inductor coil 210 and / or RF space 2. The input and output interfaces of the cooling water are arranged side-by-side on the side wall of the housing 1. After entering the RF space 2, the cooling water flows through an insulated water pipe through the copper water distribution channel of the RF output module 23 (replacing the copper block 230 and conductive connector 241 of the RF output module 23). The inductor coil is hollow, allowing the cooling water to pass through the inside of the inductor coil 210, flow through the copper water distribution channel (replacing the conductive connector 240) at the tails of the first and second inductors, and then flow out of the RF space 2 through the insulated water pipe and the output interface. Water cooling is primarily used to cool important components in the RF space 2, such as inductors and capacitors, and is more efficient than air cooling.

[0070] like Figure 10 As shown, in any embodiment of this application, the matching device is equipped with three interlocking switches 40, respectively located at the top of the stepped partition 12 within the drive space 3, the bottom of the housing 1, and the upper part of the input port of the RF input module 22 outside the housing 1. The matching device can only be powered on when the cover plate 100 and the bottom plate 101 of the housing 1 are installed and the RF cable is connected to the input port. This layer of mechanical safety protection can effectively avoid the risk of electromagnetic leakage and the risk of arcing caused by improper interface connection during the actual use of the matching device.

[0071] This application also discloses a power module using the matching device disclosed in any of the above embodiments. The input-to-output connection of the power module is as follows: the output port of the power module is connected to the input port of the RF input module 22 of the matching device through an RF cable, and enters the end of the variable capacitor 200 through a conductive connector. The end of the variable capacitor 201 is grounded through a grounding inductor 211. The tails of the variable capacitor 200 and the variable capacitor 201 are connected to one end of the inductor coil 210 through a conductive connector 240. The other end of the inductor coil 210 is connected to the output port of the RF output module 23 through a conductive connector 241 and a copper block 230 of the RF output module 23, with a fixed capacitor 202 connected between them and grounded.

Claims

1. A matching device comprising a housing, characterized in that The housing is internally provided with a partition, which is used to divide the housing into: Radio frequency space, used to house radio frequency circuit components; The driving space is used to house the driving components of the radio frequency circuit. Low-pressure space used to house components such as circuit boards used in control systems.

2. The matching device according to claim 1, characterized in that, The housing is provided with the following at a position corresponding to the radio frequency space: At least two variable capacitors, wherein the central axes of the at least two variable capacitors are arranged in parallel; An inductor coil, wherein the inductor coil is arranged in a spiral shape and the central axis of the inductor coil is perpendicular to the central axis of the variable capacitor; The tail of all the variable capacitors is electrically connected to one end of the inductor coil.

3. The matching device of claim 2, wherein, The housing also includes a fixed capacitor, a grounding inductor, an RF input module, and an RF output module; The end of the inductor coil away from the variable capacitor is electrically connected to one end of the fixed capacitor via a conductive connector and further electrically connected to the RF output module; At least one end of the variable capacitor away from the inductor coil is electrically connected to the RF input module; At least one end of the variable capacitor, away from the inductor coil, is electrically connected to the ground inductor and connected to the housing through the ground inductor.

4. The matching device according to claim 3, characterized in that, The variable capacitors are all bolted to the partition via insulating connectors.

5. The matching device of claim 3, wherein, An RF shield is provided on the housing at the position corresponding to the RF output module, and at least part of the signal line of the RF output module is placed inside the RF shield.

6. The matching device according to any of claims 2-5, characterized in that, The drive space includes: The number of motors is the same as the number of variable capacitors. The variable capacitors are connected to the motors one-to-one, and the drive shafts of the motors and the variable capacitors are arranged collinearly.

7. The matching device of claim 6, wherein, An RF fan is provided at one end of the housing corresponding to the inductor coil, and RF heat dissipation holes are provided on the side wall of the housing opposite to the fan.

8. The matching device of claim 6, wherein, The drive connection is achieved through a pin-shaped connector and an insulated coupling installed between the motor and the variable capacitor.

9. The matching device of claim 6, wherein, The low-voltage space is adjacent to both the driving space and the radio frequency space. The partition has holes at the positions corresponding to the low-voltage space and the driving space for circuit connection between the two spaces.

10. The matching device according to claim 6, characterized in that, The partition plate has internal heat dissipation holes at the position corresponding to the top of the motor.

11. The matching device according to claim 6, characterized in that, A low-pressure fan is provided at the position between the drive space and the low-pressure space corresponding to the partition. The low-pressure fan is located in the drive space and is used to guide airflow between the low-pressure space and the drive space.

12. The matching device according to claim 6, characterized in that, The housing has heat dissipation holes at the position corresponding to one end of the motor.

13. The matching device according to claim 3, characterized in that, The housing is provided with a cooling input port and a cooling output port, and a water pipe made of insulating material is provided in the radio frequency space.

14. The matching device according to claim 13, characterized in that, The housing is provided with a water distribution channel at the position corresponding to the RF output module, and the inductor coil is hollow, so that the coolant can flow through the water distribution channel and through the inductor coil from the inside.

15. The matching device according to any one of claims 1-5, characterized in that, The matching device also includes a bias rod, the tail end of which is mounted on the housing; The housing is provided with a bias shield at the position corresponding to the tail end of the bias rod.

16. The matching device according to claim 1, characterized in that, Both the partition and the shell are made of metal.

17. A power module comprising a matching device as described in any one of claims 1-16, characterized in that, The power module includes an output port, which is connected to the input of the matching device via an RF cable.

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