Layout structure of three-head sheet inserting machine
By employing a three-head wafer insertion machine layout structure, along with a rational layout and automated operation process, the problems of silicon wafer damage and low production efficiency caused by improper equipment layout have been solved, achieving high-efficiency production and low breakage rate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI FUCHUAN AUTOMATION EQUIP CO LTD
- Filing Date
- 2025-05-21
- Publication Date
- 2026-05-26
AI Technical Summary
In existing technologies, improper equipment layout can lead to damage to silicon wafers or the equipment itself, as well as low production efficiency.
The design of the three-head inserter layout includes three conveyor lines arranged sequentially at intervals along the x-axis. Each conveyor line is equipped with an inserting device at its end. The full basket conveyor line and the return basket line are used for efficient basket transport. The handling device uses a robotic arm to move baskets between the production lines, resulting in a reasonable layout and automated operation process.
It improved silicon wafer processing capacity and production efficiency, reduced breakage rate, optimized logistics routes, and reduced equipment damage and handling costs.
Smart Images
Figure CN224290556U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of chip inserter technology, and in particular to the layout structure of a three-head chip inserter. Background Technology
[0002] In the field of precision manufacturing technology for semiconductor materials (especially high-purity silicon wafers), the precision requirements for equipment configuration are extremely stringent. Equipment configuration forms the fundamental pillar of the equipment architecture within a production line or laboratory, and its rational design has a direct and critical impact on the operational efficiency, long-term stability, and overall production efficiency of the equipment.
[0003] Improper equipment configuration can lead to a series of adverse consequences. For example, an unreasonable layout between devices may cause components to interfere with each other and damage the equipment itself. Poor physical contact between devices may cause wear or failure of precision components, thereby increasing maintenance costs and extending downtime. More seriously, such configuration defects may cause physical damage during the transport and positioning of silicon wafers, thereby directly affecting the electrical characteristics and reliability of semiconductors, ultimately leading to a significant decrease in product yield. Utility Model Content
[0004] The technical problem to be solved by this utility model is: in order to solve the technical problem of damage to silicon wafers or equipment body and low production efficiency caused by improper layout in the prior art, this utility model provides a three-head wafer insertion machine layout structure to improve production efficiency and reduce the breakage rate.
[0005] The technical solution adopted by this utility model to solve its technical problem is: a three-head wafer insertion machine layout structure, which includes: three conveyor production lines arranged sequentially and spaced apart along the x-axis direction, each of the conveyor production lines being used to convey silicon wafers along the y-axis direction, and each of the conveyor production lines having a wafer insertion device at the end, and the wafer insertion device having a basket for loading the silicon wafer.
[0006] A full-blue conveyor line is set on one side of the third conveyor line, and the full-blue conveyor line is used to convey baskets loaded with silicon wafers along the y-axis direction.
[0007] The basket return production line is located on one side of the full basket conveyor line and is used to convey empty baskets along the y-axis direction.
[0008] A transport device is provided, which is arranged horizontally along the x-axis above three conveyor lines, a full basket conveyor line, and a return basket production line. The transport device includes a transport robot that can move along the x-axis and z-axis, and the transport robot is used to transport flower baskets between the return basket production line, the full basket conveyor line, and the insert device.
[0009] The specific technical effects are as follows: Each production line can independently and continuously transport silicon wafers along the y-axis, which greatly improves the silicon wafer handling capacity. At the same time, the setting of full basket conveyor lines and return basket production lines ensures that baskets loaded with silicon wafers and empty baskets can flow efficiently and orderly, further improving the overall production efficiency. Insertion devices are set at the end of each conveyor production line. This layout helps reduce the physical impact and friction of silicon wafers during handling and transportation, thereby reducing the breakage rate caused by improper operation or unreasonable equipment layout. The setting of handling devices allows for direct handling and exchange of baskets between production lines, greatly optimizing the logistics path and reducing handling time and costs. Through reasonable equipment layout and automated operation processes, the technical problems of silicon wafer or equipment damage and low production efficiency caused by improper layout in existing technologies are effectively solved, achieving improved production efficiency and reduced breakage rate.
[0010] Furthermore, the number of the handling robots is two, and the two handling robots are arranged at intervals.
[0011] The specific technical effect is that the number of handling robots is matched with the number of return basket production lines and full basket conveyor lines. The simultaneous operation of two handling robots can significantly reduce the waiting time for flower basket handling. While one robot is moving a full basket from the insert device or full basket conveyor line to the designated position, another robot can grab an empty basket from the return basket production line and transport it to the required position, thus achieving efficient parallel operation.
[0012] Furthermore, the spacing between the two handling robots matches the spacing between the return basket production line and the full basket conveyor line.
[0013] The specific technical effects are: matching the spacing helps ensure that the handling robot can accurately align with the target position of the return basket production line and the full basket conveyor line when handling the flower basket, avoiding excessive movement of the handling robot in the x-axis direction. In addition, this design avoids the waste of space caused by excessive spacing, and also prevents the robot's operation from being restricted or interfering with each other due to insufficient spacing.
[0014] Furthermore, the basket return production line includes a flipping mechanism and a basket return conveying mechanism. The flipping mechanism is located at the first end of the basket return conveying mechanism, and the conveying device is located above the flipping mechanism. The flipping mechanism is used to flip the basket from a horizontal state to a vertical state.
[0015] The specific technical benefits are as follows: The design of the basket return and conveying mechanism ensures stable transport of empty baskets in a horizontal state. Compared to a vertical state, the center of gravity of a basket in a horizontal state is lower, making it less prone to tipping over. Through the automated basket return and conveying mechanism and the flipping mechanism, the transport and flipping process of empty baskets requires almost no manual intervention, which greatly reduces labor intensity, human error, and improves overall production efficiency. The flipping mechanism can automatically flip the basket from a horizontal state to a vertical state. In a vertical state, the basket is more convenient for the wafer insertion device to insert silicon wafers. The handling robot can directly transport the basket in a vertical state to the wafer insertion device, thereby improving production efficiency.
[0016] Furthermore, the handling robot moves between a first position and a second position in the z-axis direction to handle the flower basket. When the flower basket is in the first position, a gap is formed between the lowermost edge of the handling robot and the uppermost edge of the flower basket in a vertical state on the flipping mechanism.
[0017] The specific technical effect is that the design of this spacing ensures that there will be no interference or collision between the flower basket and the handling robot during the flipping process, effectively preventing equipment damage or production interruption caused by physical conflict, and improving the safety and stability of the production line.
[0018] Furthermore, the conveying direction of the return basket conveying mechanism is opposite to the conveying direction of the full basket conveying line.
[0019] The specific technical benefits are as follows: through the reverse conveying design, empty flower baskets can be directly returned to the operating range of the handling robot without the need for additional conveying equipment or space. The handling robot can grab the flower baskets and perform subsequent handling operations more quickly, which reduces the waiting time of the handling robot and improves handling efficiency.
[0020] Furthermore, each of the conveyor production lines includes: a feeding device and a conveyor line device. The feeding device is located at the beginning of the conveyor line device and is used to convey silicon wafers onto the conveyor line device. The wafer insertion device is located at the end of the conveyor line device, and the conveyor line device is used to convey silicon wafers.
[0021] The specific technical effects are as follows: The feeding device is located at the beginning of the conveyor line and can automatically and continuously transport silicon wafers onto the conveyor line. The conveyor line can transport silicon wafers quickly and accurately, reducing the waiting time of silicon wafers on the production line and improving the overall production efficiency. The wafer insertion device is located at the end of the conveyor line and can receive and process silicon wafers in a timely manner, ensuring the continuity and efficiency of the production process. The feeding device, conveyor line, and wafer insertion device are arranged sequentially on the conveyor production line, with a compact layout that effectively utilizes the production line space.
[0022] Furthermore, the total length of the conveyor line along the y-axis is L2, and L2 ranges from 1300mm to 1600mm.
[0023] Furthermore, the total length of the conveying device along the x-axis is L3, and the range of L3 is 2200mm to 2400mm.
[0024] The specific technical effect is that this size range ensures that the handling device can move smoothly between the first conveyor line and the return basket line without being too large or too small, which would prevent it from reaching the designated position or interfering with other equipment.
[0025] Compared with the prior art, the beneficial effects of this utility model are:
[0026] (1) Each production line of this utility model can independently and continuously transport silicon wafers along the y-axis, which greatly improves the silicon wafer processing capacity. At the same time, the setting of full basket conveyor line and return basket production line ensures that baskets loaded with silicon wafers and empty baskets can flow efficiently and orderly, further improving the overall production efficiency.
[0027] (2) The present invention provides a wafer insertion device at the end of each conveyor production line. This layout structure helps to reduce the physical impact and friction of silicon wafers during processing and handling, thereby reducing the breakage rate of silicon wafers caused by improper operation or unreasonable equipment layout.
[0028] (3) The present invention has a handling device that allows flower baskets to be directly transported and exchanged between production lines, which greatly optimizes the logistics path and reduces handling time and cost.
[0029] (4) This utility model effectively solves the technical problems of silicon wafer or equipment damage and low production efficiency caused by improper layout in the prior art through reasonable equipment layout and automated operation process, and realizes the improvement of production efficiency and the reduction of breakage rate. Attached Figure Description
[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0031] Figure 1 This is a schematic diagram of the layout structure of the three-head chip inserter of this utility model in the xy plane.
[0032] Figure 2 This is a partial structural diagram of the three-head chip inserter layout of this utility model in the xz plane.
[0033] In the diagram: 1. Conveyor line; 101. Feeding device; 102. Conveyor line device; 2. Insertion device; 3. Full basket conveyor line; 4. Basket return line; 401. Tilting mechanism; 402. Basket return conveyor mechanism; 5. Handling device; 501. Handling robot. Detailed Implementation
[0034] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.
[0035] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0036] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0037] like Figures 1 to 2 The diagram shows the preferred embodiment of this utility model. The layout structure of the three-head wafer inserter in this embodiment includes: three conveyor production lines 1 arranged sequentially and spaced apart along the x-axis direction. Each conveyor production line 1 is used to convey silicon wafers along the y-axis direction. Each conveyor production line 1 has a wafer inserting device 2 at its end. The wafer inserting device 2 is equipped with a basket for loading silicon wafers.
[0038] Full blue conveyor line 3 is set on one side of the third conveyor line 1. Full blue conveyor line 3 is used to convey baskets loaded with silicon wafers along the y-axis direction.
[0039] The return basket production line 4 is located on one side of the full basket conveyor line 3. The return basket production line 4 is used to convey empty baskets along the y-axis direction.
[0040] The transport device 5 is arranged horizontally above the three conveyor lines 1, the full basket conveyor line 3 and the return basket production line 4 along the x-axis. The transport device 5 includes a transport robot 501 that can move along the x-axis and z-axis. The transport robot 501 is used to transport flower baskets between the return basket production line 4, the full basket conveyor line 3 and the insert device 2.
[0041] Therefore, each production line can independently and continuously transport silicon wafers along the y-axis, which greatly improves the silicon wafer handling capacity. At the same time, the full basket conveyor line 3 and the return basket production line 4 ensure that baskets loaded with silicon wafers and empty baskets can flow efficiently and orderly, further improving the overall production efficiency. The wafer insertion device 2 is set at the end of each conveyor production line 1. This layout structure helps to reduce the physical impact and friction of silicon wafers during handling and transportation, thereby reducing the breakage rate of silicon wafers caused by improper operation or unreasonable equipment layout. The transportation device 5 can directly transport and exchange baskets between production lines, which greatly optimizes the logistics path and reduces transportation time and costs. Through reasonable equipment layout and automated operation process, the technical problems of silicon wafer or equipment damage and low production efficiency caused by improper layout in the prior art are effectively solved, realizing the improvement of production efficiency and the reduction of breakage rate.
[0042] For details, see Figure 1 As shown, based on the structure and placement requirements of each conveyor line 1, the spacing between two adjacent conveyor lines 1 in the three conveyor lines 1 is different. Therefore, the spacing between two adjacent inserting devices 2 in the three inserting devices 2 is also different. The three inserting devices 2 are set from left to right as the first inserting device 2, the second inserting device 2, and the third inserting device 2. The spacing between the first inserting device 2 and the second inserting device 2 along the x-axis is L8, and the spacing between the second inserting device 2 and the third inserting device 2 along the x-axis is L6. The range of L8 is 100mm to 270mm, and the range of L6 is 390mm to 570mm.
[0043] The distance between the insert device 2 and the conveying device 5 along the y-axis is L5, and the range of L5 is -150mm to 100mm.
[0044] Each insertion device 2 has a total length of L7 along the y-axis, and L7 ranges from 500mm to 580mm, in order to ensure that the silicon wafer can be completely inserted into the basket in the insertion device 2.
[0045] In this embodiment, there are two handling robots 501, which are arranged at intervals.
[0046] Therefore, the number of handling robots 501 is matched with the number of basket return production line 4 and full basket conveyor line 3. The simultaneous operation of two handling robots 501 can significantly reduce the waiting time for basket handling. While one robot is moving a full basket from the insert device 2 or the full basket conveyor line 3 to the designated position, the other robot can grab an empty basket from the basket return production line 4 and transport it to the required position, thus achieving efficient parallel operation.
[0047] In this embodiment, the spacing between the two handling robots 501 matches the spacing between the return basket production line 4 and the full basket conveyor line 3.
[0048] Therefore, matching the spacing helps ensure that the handling robot 501 can accurately align with the target positions of the return basket production line 4 and the full basket conveyor line 3 when handling flower baskets, avoiding excessive movement of the handling robot 501 in the x-axis direction. This design also avoids wasting space due to excessive spacing, and prevents the robot's operation from being restricted or interfering with each other due to insufficient spacing.
[0049] In this embodiment, the basket return production line 4 includes a flipping mechanism 401 and a basket return conveying mechanism 402. The flipping mechanism 401 is disposed at the first end of the basket return conveying mechanism 402, and the conveying device 5 is located above the flipping mechanism 401. The flipping mechanism 401 is used to flip the basket from a horizontal state to a vertical state.
[0050] Therefore, the design of the basket return conveyor 402 ensures stable transport of empty baskets in a horizontal state. Compared to the vertical state, the center of gravity of the basket is lower in the horizontal state, making it less prone to tipping over. Through the automated basket return conveyor 402 and the flipping mechanism 401, the transport and flipping process of the empty basket requires almost no manual intervention, which greatly reduces labor intensity, human error, and improves overall production efficiency. The flipping mechanism 401 can automatically flip the basket from the horizontal state to the vertical state. The basket in the vertical state is more convenient for the wafer insertion device 2 to perform silicon wafer insertion operations. The handling robot 501 can directly transport the basket in the vertical state to the wafer insertion device 2, thereby improving production efficiency.
[0051] In this embodiment, the handling robot 501 moves between a first position and a second position in the z-axis direction to handle the flower basket (it should be noted that the first position is the position where the handling robot 501 lifts the flower basket to its highest point, and the second position is the position where the handling robot 501 descends to perform the specific handling task). When the flower basket is in the first position, a gap is formed between the lowest edge of the handling robot 501 and the highest edge of the flower basket in a vertical state on the flipping mechanism 401.
[0052] Specifically, the handling robot 501 has two operating positions in the z-axis direction—a first position and a second position. The first position is where the handling robot 501 raises the flower basket to its highest point, typically used for transporting the flower basket. The second position is where the handling robot 501 descends to perform a specific handling task, such as moving an empty flower basket to the insert device 2, moving a full flower basket from the insert device 2, moving a full flower basket to the full basket conveyor line 3, or moving an empty flower basket after it has been flipped out from the flipping mechanism 401. Therefore, this spacing design ensures that during the flipping process, the flower basket and the handling robot 501 will not interfere or collide, effectively preventing equipment damage or production interruptions caused by physical conflicts, and improving the safety and stability of the production line.
[0053] For details, see Figure 2 As shown, when the handling robot 501 is in the first position, the distance between the lowest edge of the handling robot 501 and the lowest edge of the ground or the conveyor line 1 is L1, and the range of L1 is 630mm to 900mm.
[0054] In this embodiment, the conveying direction of the return basket conveying mechanism 402 is opposite to the conveying direction of the full basket conveying line 3.
[0055] Therefore, through the reverse conveying design, empty flower baskets can be directly returned to the operating range of the handling robot 501 without the need for additional conveying equipment or space. The handling robot 501 can grab the flower baskets and perform subsequent handling operations more quickly, which reduces the waiting time of the handling robot 501 and improves handling efficiency.
[0056] In this embodiment, each conveying production line 1 includes: a feeding device 101 and a conveying line device 102. The feeding device 101 is located at the beginning of the conveying line device 102 and is used to convey silicon wafers onto the conveying line device 102. The wafer insertion device 2 is located at the end of the conveying line device 102 and the conveying line device 102 is used to convey silicon wafers.
[0057] Specifically, in each conveyor production line 1, the distance along the x-axis between the leftmost edge of the feeding device 101 and the leftmost edge of the conveyor device 102 is L4, and the range of L4 is 250mm to 350mm, in order to avoid interference between the silicon wafer in the feeding device 101 and the conveyor device 102.
[0058] Thus: the feeding device 101 is located at the beginning of the conveyor line device 102, which can automatically and continuously transport silicon wafers to the conveyor line. The conveyor line device 102 can transport silicon wafers quickly and accurately, reducing the waiting time of silicon wafers on the production line and improving the overall production efficiency. The wafer insertion device 2 is located at the end of the conveyor line device 102, which can receive and process silicon wafers in a timely manner, ensuring the continuity and efficiency of the production process. The feeding device 101, the conveyor line device 102 and the wafer insertion device 2 are arranged in sequence on the conveyor production line 1, with a compact layout, which effectively utilizes the production line space.
[0059] In this embodiment, the total length of the conveyor line 1 along the y-axis is L2, and the range of L2 is 1300mm to 1600mm. This size range is to ensure that the silicon wafers have enough space to move and operate in processes such as wafer loading, slitting and testing.
[0060] In this embodiment, the total length of the conveying device 5 along the x-axis is L3, and L3 ranges from 2200mm to 2400mm. Therefore, this size range ensures that the conveying device 5 can move smoothly between the first conveying line 1 and the return basket line 4, without being too large or too small, which would prevent it from reaching the designated position or interfering with other equipment.
[0061] The workflow of this utility model is as follows:
[0062] Silicon wafers are conveyed from the feeding device 101 to the conveyor line device 102. The silicon wafers are continuously conveyed on the conveyor line device 102, and after passing through processes such as wafer loading, wafer splitting, and inspection, they are inserted into the baskets in the insertion device 2. When the baskets are fully loaded, the handling robot 501 automatically grabs the full baskets and transports them to the full basket conveyor line 3. The full basket conveyor line 3 is responsible for transporting the baskets loaded with silicon wafers to the next process for further processing. At the same time, empty baskets are transported to the flipping mechanism 401 through the return basket conveyor mechanism 402. The flipping mechanism 401 flips the horizontal baskets to a vertical position to facilitate the handling robot 501 to grab them. After grabbing the empty baskets, the handling robot 501 transports them back to the insertion device 2, ready to load silicon wafers again.
[0063] Compared with the prior art, the beneficial effects of this utility model are:
[0064] (1) Each production line of this utility model can independently and continuously transport silicon wafers along the y-axis, which greatly improves the silicon wafer processing capacity. At the same time, the setting of the full basket conveyor line 3 and the return basket production line 4 ensures that the baskets loaded with silicon wafers and the empty baskets can flow efficiently and orderly, further improving the overall production efficiency.
[0065] (2) The present invention provides a wafer insertion device 2 at the end of each conveying production line 1. This layout structure helps to reduce the physical impact and friction of silicon wafers during processing and handling, thereby reducing the breakage rate of silicon wafers caused by improper operation or unreasonable equipment layout.
[0066] (3) The present invention is equipped with a handling device 5, which can directly handle and exchange flower baskets between production lines, greatly optimizing the logistics path and reducing handling time and cost.
[0067] (4) This utility model effectively solves the technical problems of silicon wafer or equipment damage and low production efficiency caused by improper layout in the prior art through reasonable equipment layout and automated operation process, and realizes the improvement of production efficiency and the reduction of breakage rate.
[0068] The above description is based on the preferred embodiments of this utility model. Through the above description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined by the scope of the claims.
Claims
1. A triple-prong blade machine layout structure, characterized by, include: Three conveyor production lines (1) are arranged in sequence at intervals along the x-axis. Each conveyor production line (1) is used to convey silicon wafers along the y-axis. Each conveyor production line (1) is provided with a wafer insertion device (2) at its end. The wafer insertion device (2) is provided with a basket for loading the silicon wafer. Full blue conveyor line (3), the full blue conveyor line (3) is set on one side of the third conveyor line (1), the full blue conveyor line (3) is used to convey baskets loaded with silicon wafers along the y-axis direction; The basket return production line (4) is located on one side of the full basket conveyor line (3) and is used to convey empty baskets along the y-axis direction. The transport device (5) is arranged horizontally above three conveyor lines (1), full basket conveyor line (3) and return basket line (4) along the x-axis direction. The transport device (5) includes a transport robot (501) that can move along the x-axis and z-axis directions. The transport robot (501) is used to transport flower baskets between the return basket line (4), the full basket conveyor line (3) and the insert device (2).
2. The triple prong clipper layout of claim 1, wherein, The number of the handling robot (501) is two, and the two handling robot (501) are arranged at intervals.
3. The three-head inserter layout structure as described in claim 2, characterized in that, The spacing between the two handling robots (501) matches the spacing between the return basket production line (4) and the full basket conveyor line (3).
4. The three-head inserter layout structure as described in claim 1, characterized in that, The basket return production line (4) includes a flipping mechanism (401) and a basket return conveying mechanism (402). The flipping mechanism (401) is located at the head end of the basket return conveying mechanism (402). The conveying device (5) is located above the flipping mechanism (401). The flipping mechanism (401) is used to flip the basket from a horizontal state to a vertical state.
5. The three-head inserter layout structure as described in claim 4, characterized in that, The handling robot (501) moves between a first position and a second position in the z-axis direction to handle the flower basket. When the flower basket is in the first position, a gap is formed between the lowermost edge of the handling robot (501) and the uppermost edge of the flower basket in a vertical state on the flipping mechanism (401).
6. The three-head inserter layout structure as described in claim 4, characterized in that, The conveying direction of the return basket conveying mechanism (402) is opposite to the conveying direction of the full basket conveying line (3).
7. The three-head inserter layout structure as described in claim 1, characterized in that, Each of the conveying production lines (1) includes: a feeding device (101) and a conveying line device (102). The feeding device (101) is located at the beginning of the conveying line device (102) and is used to convey silicon wafers onto the conveying line device (102). The wafer insertion device (2) is located at the end of the conveying line device (102) and the conveying line device (102) is used to convey silicon wafers.
8. The three-head chip inserter layout structure as described in claim 1, characterized in that, The total length of the conveyor line (1) along the y-axis is L2, and the range of L2 is 1300mm to 1600mm.
9. The three-head inserter layout structure as described in claim 1, characterized in that, The total length of the conveying device (5) along the x-axis is L3, and the range of L3 is 2200mm to 2400mm.