A vertical nanoimprint apparatus

Abstract

The utility model discloses a vertical nano imprinting equipment, include: frame, the frame is along the vertical direction and is provided with: solidification lamp subassembly, is used for solidification, imprinting roller subassembly, including movable roller, is used for imprinting, glue frame storage and feeding device, is used for storing and feeding glue frame, alignment platform subassembly, is used for receiving wafer, the utility model has the advantages that the overall structure is compact, and each mechanism is integrated in the three -dimensional space, reduces the space occupancy, and simultaneously has no long span's removal and carries distance, improves the efficiency.

Description

Technical Field

[0001] This utility model relates to the field of nanoimprint technology, specifically to a vertical nanoimprint device. Background Technology

[0002] With the development of semiconductor manufacturing technology, the size requirements of integrated circuits are becoming smaller and smaller, placing increasingly higher demands on photolithography technology and leading to ever-increasing costs for photolithography manufacturing. To address this technical challenge, nanoimprint lithography technology has been proposed in this field.

[0003] Nanoimprint lithography refers to the process of imprinting micro / nanostructure patterns onto a substrate using a mold. Currently, nanoimprint lithography is widely used in the manufacture of micro and nanostructures due to its high resolution, high throughput, and low cost.

[0004] Nanoimprinting technology is generally divided into two methods: thermal imprinting and ultraviolet (UV) imprinting. UV imprinting is widely used due to its high structural fidelity and high aspect ratio of microstructure transfer. Existing imprinting equipment has a complex structure. Traditional imprinting equipment places all components on the same plane, relying on high-precision modules to complete the alternating actions of each component through different height differences to complete the imprinting. For example, utility model patent application number 201810521566.7 discloses an integrated device for soft film replacement and nanoimprinting, which occupies a large space and requires a long-stroke module, reducing efficiency. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a vertical nanoimprinting device in which all mechanisms are integrated in a three-dimensional space, reducing space occupation and eliminating long-span transfer distances, thereby improving efficiency.

[0006] Specifically, this utility model discloses a vertical nanoimprinting device, comprising:

[0007] The frame, which is arranged vertically, includes:

[0008] Curing lamp assembly, used for curing;

[0009] Imprint roller assembly, including movable rollers for imprinting;

[0010] A plastic frame storage and loading device for storing and loading plastic frames;

[0011] Alignment platform components are used to receive wafers.

[0012] The advantages of adopting the above technical solution are that the overall structure is compact, all mechanisms are integrated in a three-dimensional space, reducing space occupation, and there is no long span of transfer distance, thus improving efficiency.

[0013] Furthermore, the glue frame storage and feeding device includes a glue frame storage component, a glue frame feeding component, and a glue frame fixing component. The glue frame storage component includes a storage frame with multiple storage slots for storing glue frames. The storage frame is equipped with a vertical moving module, which drives the storage frame to move up and down.

[0014] The advantage of adopting the above technical solution is that by setting up the glue frame storage and feeding components, the glue frame can be stored, moved and fixed, and the glue frame can be automatically loaded and unloaded and automatically fixed, ensuring that the glue frame will not move during the printing process.

[0015] Furthermore, the glue frame feeding assembly is used to move the glue frame between the glue frame storage assembly and the glue frame fixing assembly, and includes: a moving plate, a first moving module, a connecting plate and a fixing head. The moving plate moves along the first moving module, the connecting plate is connected to the moving plate, the fixing head is telescopically mounted on the connecting plate, and the glue frame is provided with a fixing hole that mates with the fixing head.

[0016] The advantage of adopting the above technical solution is that a fixing head is set to fix the glue frame, and then the first moving module drives the glue frame to move to the fixed position for fixing. At the same time, the glue frame after the printing is completed can be moved into the glue frame storage box for storage, realizing automatic loading and unloading of glue frames.

[0017] Furthermore, the frame fixing assembly includes: a fixing frame, one end of which is rotatably fixed to the frame, and the other end is connected to a lifting and rotating assembly, including a fixing plate and a rotating joint. The fixing plate is provided with a slider that can move up and down. The rotating joint connects the slider and the fixing frame. When the slider is at the bottom, the bottom of the fixing frame remains horizontal.

[0018] The advantage of adopting the above technical solution is that one end of the entire fixed frame can be rotated and fixed, while the other end can move slightly up and down and rotate at the same time. After the frame is fixed, by moving up and down and rotating, the frame can be kept in a horizontal position, ensuring the complete transfer of the graphic during the printing process.

[0019] Furthermore, a limit block and a clamping block are provided at the bottom of the fixed frame. The clamping block is connected to a clamping drive component, which drives the clamping block to clamp the rubber frame.

[0020] The advantage of adopting the above technical solution is that the clamping block plays a fixing role, and the clamping drive component drives the clamping block to move up and down.

[0021] Furthermore, the alignment platform assembly includes: a mounting frame, a receiving platform, a lifting drive assembly, a rotation drive assembly, and a translation drive assembly. The receiving platform is mounted on the mounting frame, the lifting drive assembly drives the mounting frame to lift and lower, the rotation drive assembly is located below the receiving platform and is used to drive the receiving platform to rotate, and the translation drive assembly drives the receiving platform to move horizontally.

[0022] The advantage of adopting the above technical solution is that the movable alignment platform enables automatic movement of the wafer and positioning of the frame, ensuring the pattern imprinting position.

[0023] Furthermore, the receiving platform is provided with a receiving column, which passes through the receiving platform and is connected to a lifting plate at its bottom. The lifting plate is connected to a receiving column driving component to drive the receiving column to move up and down.

[0024] The advantage of adopting the above technical solution is that the receiving post plays a role in receiving and lifting, ensuring that the wafer is not damaged during transfer and guaranteeing product quality.

[0025] Furthermore, the frame is also provided with a vision alignment component, including: a camera, a camera mounting plate, and a second moving module. The camera is fixed to the camera mounting plate, and the second moving module drives the camera mounting plate to move in multiple directions.

[0026] The advantage of adopting the above technical solution is that the positioning of the wafer and the frame is achieved through the camera, ensuring the accurate imprinting position of the pattern.

[0027] Furthermore, a vertical cylinder and a vertical guide rail are provided on the side of the movable plate, and a slider is provided on the vertical guide rail. The slider is connected to the connecting plate, and the vertical cylinder drives the connecting plate to move up and down.

[0028] The advantage of adopting the above technical solution is that it enables the movable plate to be raised and lowered, which facilitates docking with the plastic frame storage component and the plastic frame fixing component, and is suitable for various usage situations.

[0029] Furthermore, the alignment platform assembly also includes a mounting platform, and the mounting platform is connected to the frame by a plurality of air-bearing vibration dampers.

[0030] The advantage of adopting the above technical solution is that the air flotation vibration damper effectively reduces vibration, prevents pattern displacement caused by equipment vibration during the printing process, and ensures printing quality. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0032] Figure 1 This is a schematic diagram of the overall structure of the vertical nanoimprinting device of this utility model.

[0033] Figure 2 This is a schematic diagram of the material storage and feeding device in the plastic frame of this utility model.

[0034] Figure 3 This is a schematic diagram of the structure of the glue frame feeding assembly of this utility model. Figure 1

[0035] Figure 4 This is a schematic diagram of the structure of the glue frame feeding assembly of this utility model. Figure 2

[0036] Figure 5 This is a structural diagram of the plastic frame of this utility model.

[0037] Figure 6 This utility model relates to the structure of a glue frame fixing component. Figure 1

[0038] Figure 7 This utility model relates to the structure of a glue frame fixing component. Figure 2

[0039] Figure 8 This is a bottom view of the plastic frame fixing component of this utility model.

[0040] Figure 9 This is an isometric drawing of the alignment platform component of this utility model.

[0041] Figure 10 This is an isometric view of the alignment platform component of this utility model (bottom view).

[0042] Figure 11 This is a structural diagram of the visual alignment component of this utility model.

[0043] Figure 12 This is a structural diagram of the embossing roller assembly of this utility model.

[0044] Figure 13 This is an installation diagram of the embossing roller assembly and the glue frame fixing assembly of this utility model.

[0045] The reference numerals used in the attached figures are as follows:

[0046] Frame 1; Curing lamp assembly 2; Lamp holder 21; Mounting lamp plate 22; Imprinting roller assembly 3; Imprinting roller 31; Roller plate 32; Roller plate 33; Base plate 34; Servo motor 35; Glue frame storage assembly 4; Storage frame 41; Vertical moving module 42; Glue frame 43; Fixing hole 431; Alignment platform assembly 5; Mounting frame 51; Receiving platform 52; Receiving column 521; Air hole 522; Lifting drive assembly 53; Translation drive assembly 54; Lifting plate 55; Guide shaft 56; Rotating plate 57; Glue frame feeding assembly 6; Moving plate 61; First moving module 62; Connecting plate 63; Fixed head 64; Vertical cylinder 65; Vertical guide rail 66; Frame fixing assembly 7; Fixed frame 71; Fixed plate 72; Rotary joint 73; Rotating part 731; Slider 1 74; Limiting block 75; Pressing block 76; Pressing drive 761; Fixed block 77; Limiting plate 771; Rotating shaft 78; Rotating block 79; Vision alignment assembly 8; Camera 81; Camera mounting plate 82; Second moving module 83; Mounting platform 9; Air flotation shock absorber 91. Detailed Implementation

[0047] The present invention will now be described in further detail with reference to the accompanying drawings.

[0048] like Figure 1 As shown, this utility model discloses a vertical nanoimprinting device, comprising:

[0049] Frame 1, wherein the frame 1 is provided with the following components along the vertical direction:

[0050] Curing lamp assembly 2, used for curing;

[0051] Imprint roller assembly 3 includes movable rollers for imprinting;

[0052] A plastic frame storage and loading device for storing and loading plastic frames 43;

[0053] Alignment platform component 5 is used to receive wafers.

[0054] The advantages of adopting the above technical solution are that the overall structure is compact, all mechanisms are integrated in a three-dimensional space, reducing space occupation, and there is no long span of transfer distance, thus improving efficiency.

[0055] The plastic frame storage and feeding device includes a plastic frame storage component 4, a plastic frame feeding component 6, and a plastic frame fixing component 7. The plastic frame storage component 4 includes a storage frame 41 with multiple storage positions for storing plastic frames. A vertical moving module 42 is installed on the storage frame 41, which drives the storage frame 41 to move up and down. The vertical moving module 42 is either a ball screw module or a synchronous motor belt module, installed vertically, and there are two of them, synchronously driving the storage frame 41 to move up and down. Each storage position has multiple storage base plates, which are horizontally arranged and used to store multiple plastic frames 43. A soft film is fixed inside each plastic frame 43, and the soft film is printed with the pattern to be transferred.

[0056] Furthermore, such as Figure 2-5 As shown, the glue frame feeding assembly 6 is used to drive the glue frame 43 to move between the glue frame storage assembly 4 and the glue frame fixing assembly 7. It includes: a moving plate 61, a first moving module 62, a connecting plate 63, and a fixing head 64. The moving plate 61 moves along the first moving module 62. The connecting plate 63 is fixedly connected to the moving plate 61. The moving plate 61 is vertically installed. The fixing head 64 is retractably installed on the connecting plate 63. The glue frame 43 is provided with fixing holes 431 that mate with the fixing head 64. The first moving module 62 is a lead screw motor module, horizontally and symmetrically installed on the frame. The moving plate 61 moves along the first moving module 62. The moving module 62 moves, and the fixed head 64 is cylindrical in shape. There can be 4 to 8 fixed heads. Each fixed head 64 is horizontally installed and fixedly connected to a cylinder, which can be a slide cylinder. The cylinder is fixedly installed on the connecting plate 63. Multiple fixed heads 64 are symmetrically arranged and extend relative to each other. When it is necessary to transfer the glue frame 43, the cylinder connected to the fixed head 64 extends out, and the fixed head extends into the fixing holes 431 on both sides of the glue frame 43. Then the moving plate 61 moves, driving the glue frame 43 to move. The glue frame 43 is located under the glue frame fixing component 7 and fixed by the glue frame fixing component 7, realizing the automatic loading and unloading of the glue frame 43.

[0057] In addition, a vertical cylinder 65 and a vertical guide rail 66 are fixedly installed on the side of the movable plate 61. A slider that can slide up and down is installed on the vertical guide rail 66. The slider is connected to the connecting plate 63. The vertical cylinder 65 drives the connecting plate 63 to move up and down. The vertical cylinder 65 drives the rubber frame 43 to be lifted, so that the rubber frame fixing assembly 7 can fix the rubber frame 43.

[0058] Furthermore, such as Figure 6-8As shown, the frame fixing assembly 7 includes: a fixing frame 71, one end of which is rotatably fixed on the frame 1, and the other end is connected to a lifting and rotating assembly, including a fixing plate 72 and a rotating joint 73. The fixing plate 72 is provided with a slider 74 that can move up and down. The rotating joint 73 is screwed to connect the slider 74 and the fixing frame 71. When the slider 74 is at the bottom, the bottom of the fixing frame 71 remains horizontal. Two symmetrical fixing blocks 77 are provided at the rotatably fixed end of the fixing frame 71. A rotating shaft 78 is rotatably installed in the fixing block 77. The fixing block 77 is fixedly installed on the frame. The rotating block 79 is fixedly installed at both ends of the fixing frame 71. The rotating shaft 78 is rotatably installed in the rotating block 79, so that the fixing block 77 and the rotating block 79 can rotate. At the same time, a limiting plate 771 is fixedly installed on the upper side of the fixing block 77. It is installed on the upper surface of the fixing frame 71 to limit the rotation angle of the entire fixing frame 71. When the rotation angle is too large, the limiting plate 771 contacts the fixing block 77 to prevent the fixing block 77 from continuing to rotate.

[0059] Meanwhile, the fixed plate 72 is vertically mounted and fixed to the frame 1. The rotating joint 73 includes two vertically arranged rotating parts 731, each with a rotating shaft, and the rotating parts 731 can be rotated. The slider 74 can slide slightly up and down by 2-3mm. When pressed to the bottom, the fixed frame 71 is horizontal. After the plastic frame 43 is clamped, the overall weight increases and it naturally presses down by gravity. At the same time, when the roller performs the imprinting action, it needs to press the film inside the plastic frame 43. After the entire mechanism is pressed, the entire fixed frame 71 is eventually horizontal due to gravity and pressure, keeping it parallel to the alignment platform, ensuring the flatness of the plastic frame 43, and ensuring the integrity of the graphic imprinting.

[0060] Furthermore, the bottom of the fixed frame 71 is provided with a limit block 75 and a clamping block 76. The clamping block 76 is connected to a clamping drive component 761. The clamping drive component 761 drives the clamping block 76 to clamp the rubber frame 43. The clamping drive component 761 is fixedly installed at the four corners of the bottom of the fixed frame 71. It can be a planar rotary clamping cylinder. The output end is fixedly connected to the clamping block 76. When it extends, it drives the clamping block 76 to rotate to the side without affecting the lifting and lowering of the rubber frame 43. When it retracts, it rotates inward to clamp the rubber frame 43 to the bottom of the fixed frame 71.

[0061] In some implementation schemes, such as Figure 9-10The alignment platform assembly 5 includes: a mounting frame 51, a receiving platform 52, a lifting drive assembly 53, a rotation drive assembly, and a translation drive assembly 54. The receiving platform 52 is mounted on the mounting frame 51, and a rotating plate 57 is fixedly mounted on the lower side of the receiving platform 52. The rotating plate 57 is connected to the rotation drive assembly, which can be a motor to control the rotation of the rotating plate 57. The lifting drive assembly 53 drives the mounting frame 51 to lift and lower. The lifting drive assembly 53 can be a linear motor mounted at the bottom of the mounting frame 51 to drive the entire mounting frame 51 to lift and lower. At the same time, the mounting frame 51 is provided with a through guide shaft 56. The two ends of the guide shaft 56 are connected to the frame 1 and the mounting platform 9, and the mounting frame 51 moves along the guide shaft 56. The translation drive assembly 54 drives the receiving platform 52 to move horizontally. The translation drive assembly 54 is a linear motor mounted on the mounting frame 51, so that the receiving platform 52 has degrees of freedom of movement in the x and y directions. The translation, lifting, and rotation actions of the receiving platform 52 are all prior art and will not be described again here.

[0062] In addition, the upper surface of the receiving platform 52 is provided with multiple air holes 522, which are connected to a vacuum generator. The air holes 522 are arranged in an array on the receiving platform 52 to adsorb the wafer and fix it.

[0063] Furthermore, the receiving platform 52 is provided with a receiving column 521, which passes through the receiving platform 52. A lifting plate 55 is fixedly connected to the bottom of the receiving platform 521. The lifting plate 55 is connected to a driving component for the receiving column 521, which drives the receiving column 521 to move up and down. The driving component for the receiving column 521 can be a cylinder. The lifting and lowering are controlled by the cylinder. When the cylinder extends, the receiving column 521 extends to receive the wafer. Then the cylinder retracts, and the receiving column 521 retracts back into the receiving platform 52. The wafer falls onto the receiving platform 52. Then the air hole 522 draws in air to form a vacuum environment between the wafer and the gas hole, and the wafer is adsorbed and fixed. After the imprinting is completed, the air hole 522 releases air, the wafer separates from the receiving platform 52, and then the receiving column 521 is pushed out, the wafer is taken away, and the imprinting is completed.

[0064] In some implementation schemes, such as Figure 11 As shown, the frame 1 is also equipped with a vision alignment component 8, including: a camera 81, a camera mounting plate 82, and a second moving module 83. The camera 81 is fixed to the camera mounting plate 82, and the second moving module 83 drives the camera mounting plate 82 to move in multiple directions. The driving method of the second moving module 83 can be achieved by a lead screw motor module, a synchronous belt motor module, or a linear motor, so that the camera mounting plate 82 has the freedom of movement in the x, y, and z directions.

[0065] The camera sensor and vision alignment component sense the alignment points on the frame 43 and transmit their position information to the control system, which works with the alignment platform 5 to align the frame and the wafer.

[0066] In some implementation schemes, such as Figure 12-13 As shown, the alignment platform component 5 also includes an installation platform 9. The installation platform 9 is connected to the frame 1 by multiple air-bearing vibration dampers 91. At the same time, a support block is provided at the bottom of the installation platform 9 to provide support. The mounting frame 51 is located on the upper side of the installation platform 9, and the first moving module 62 is fixedly installed on the installation platform 9.

[0067] In some implementations, the curing lamp assembly 2 includes a lamp holder 21, a mounting plate 22, and a curing lamp. The lamp holder 21 is fixed to the frame 1 and located at the top of the entire equipment. The lamp holder 21 is equipped with a vertically fixed moving module, which can be a lead screw motor module or a linear motor module. The moving module drives the mounting plate 22 to move up and down. The curing lamp is fixedly installed on the underside of the mounting plate 22.

[0068] In some embodiments, the impression roller assembly 3 includes an impression roller 31 and roller plates 32 located on both sides of the impression roller 31. The roller plates 32 are symmetrically installed, and the impression roller 31 and roller plates 32 are rotatably installed. A symmetrically fixed linear motor is installed on the frame 1. The linear motor is set along the impression direction and drives the roller plate 33 to move. The impression roller 31 moves to perform impression. A seat plate 34 is installed at the bottom of the roller plate 33. The roller plate 33 is also equipped with a servo motor 35. The output end is connected to the roller plate 32 through a coupling. The coupling and the roller plate are fixed by screws. When the motor rotates, it drives the roller plate 32 to rotate, realizing the lifting and lowering of the impression roller 31. The impression roller 31 is lowered to start the impression process, and it is raised after the impression process is completed.

[0069] In addition, the rack also has a control system with multiple position sensors to monitor the position of each mechanism.

[0070] In the working process, the first step is to place the wafer on the receiving post 521 by manual or robotic arm. The receiving post 521 descends and the wafer is adsorbed onto the receiving platform 52.

[0071] The second step is that the glue frame feeding assembly 6 transfers the glue frame 43 from the glue frame storage assembly 4 to the glue frame fixing assembly 7 for fixing.

[0072] The third step involves the visual alignment component 8 searching for alignment points, while the bottom alignment platform component 5 completes wafer alignment based on visual information.

[0073] Fourth step: After the wafer alignment is completed, the imprinting roller assembly 3 is activated to complete the imprinting process;

[0074] Step 5: Imprinting completes. Imprinting roller 31 remains stationary, while curing lamp assembly 2 descends to complete wafer adhesive curing.

[0075] Step 6: After curing is complete, the curing lamp rises and resets. At the same time, the alignment platform component 5 ejects the wafer, which is then removed manually or by a robot. The glue frame loading component 6 moves the glue frame 43 to the glue frame storage component 4.

[0076] Step 7: Repeat steps one through six above.

[0077] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A vertical nanoimprint apparatus, characterized by, include: The frame (1) is provided with the following components along the vertical direction: Curing lamp assembly (2), used for curing; Imprint roller assembly (3) includes movable rollers for imprinting; A plastic frame storage and loading device for storing and loading plastic frames (43); Alignment platform component (5) is used to receive wafers.

2. The vertical nanoimprint apparatus according to claim 1, wherein The glue frame storage and feeding device includes a glue frame storage component (4), a glue frame feeding component (6), and a glue frame fixing component (7). The glue frame storage component (4) includes a storage frame (41). The storage frame (41) has multiple storage positions for storing glue frames (43). The storage frame (41) is equipped with a vertical moving module (42), which drives the storage frame (41) to move up and down.

3. The vertical nanoimprint apparatus according to claim 2, wherein The glue frame feeding assembly (6) is used to drive the glue frame (43) to move between the glue frame storage assembly (4) and the glue frame fixing assembly (7), and includes: a moving plate (61), a first moving module (62), a connecting plate (63) and a fixing head (64). The moving plate (61) moves along the first moving module (62), the connecting plate (63) is connected to the moving plate (61), the fixing head (64) is telescopically mounted on the connecting plate (63), and the glue frame (43) is provided with a fixing hole (431) that cooperates with the fixing head (64).

4. The vertical nanoimprint apparatus according to claim 3, wherein The frame fixing assembly (7) includes: a fixing frame (71), one end of which is rotatably fixed on the frame (1), and the other end is connected to a lifting and rotating assembly, including a fixing plate (72) and a rotating joint (73). The fixing plate (72) is provided with a slider (74) that can move up and down. The rotating joint (73) connects the slider (74) and the fixing frame (71). When the slider (74) is at the bottom, the fixing frame (71) remains horizontal.

5. The vertical nanoimprint apparatus according to claim 4, wherein The bottom of the fixed frame (71) is provided with a limit block (75) and a pressing block (76). The pressing block (76) is connected to a pressing drive (761). The pressing drive (761) drives the pressing block (76) to press the rubber frame (43).

6. The vertical nanoimprint apparatus according to claim 1, wherein The alignment platform component (5) includes: a mounting frame (51), a receiving platform (52), a lifting drive component (53), a rotation drive component, and a translation drive component (54). The receiving platform (52) is mounted on the mounting frame (51). The lifting drive component (53) drives the mounting frame (51) to lift. The rotation drive component is located below the receiving platform (52) and is used to drive the receiving platform (52) to rotate. The translation drive component (54) drives the receiving platform (52) to move horizontally.

7. The vertical nanoimprint apparatus according to claim 6, wherein The receiving platform (52) is provided with a receiving column (521), the receiving column (521) passes through the receiving platform (52), and a lifting plate (55) is connected to the bottom. The lifting plate (55) is connected to a driving component of the receiving column (521) to drive the receiving column (521) to move up and down.

8. The vertical nanoimprint apparatus according to claim 1, wherein The frame (1) is also provided with a vision alignment component (8), including: a camera (81), a camera mounting plate (82), and a second moving module (83). The camera (81) is fixed to the camera mounting plate (82), and the second moving module (83) drives the camera mounting plate (82) to move in multiple directions.

9. The vertical nanoimprint apparatus according to claim 3, wherein The moving plate (61) is provided with a vertical cylinder (65) and a vertical guide rail (66) on its side. A slider is provided on the vertical guide rail (66). The slider is connected to the connecting plate (63). The vertical cylinder (65) drives the connecting plate (63) to move up and down.

10. The vertical nanoimprint apparatus according to claim 1, characterized in that, The alignment platform component (5) also includes an installation platform (9), which is connected to the frame (1) by a plurality of air flotation dampers (91).

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