A single crystal furnace inner wall cleaning device

Abstract

This utility model relates to the field of single-crystal furnace body maintenance technology, and in particular to a single-crystal furnace inner wall cleaning device, including a suction pipe, a rotating sleeve, a gear ring, a drive assembly, two cleaning rollers, two polishing rollers, and a cleaning brush. The inner wall of the suction pipe has suction holes, and the outer wall of the expanded diameter section at the bottom of the suction pipe has multiple suction holes, which communicate with the suction holes. The rotating sleeve is rotatably connected to the outer wall of the suction pipe, and its circumferential outer wall has multiple mounting holes. The gear ring is fixedly connected to the outer wall of the rotating sleeve. The design of the rotating sleeve, gear ring, and drive assembly in this application allows the cleaning rollers, polishing rollers, and cleaning brush to rotate around the suction pipe, cleaning the inner wall of the single-crystal furnace. This solves the problem that traditional manual cleaning is difficult to cover complex corners. Furthermore, the division of labor among the cleaning rollers, polishing rollers, and cleaning brush improves cleaning efficiency and avoids the problem of easily scratching the inner wall of the furnace during manual cleaning.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace body maintenance technology, and more specifically, to a single crystal furnace inner wall cleaning device. Background Technology

[0002] In the production of single-crystal materials, the single-crystal furnace is the core equipment, and the cleanliness of its internal environment has a decisive impact on the quality of single-crystal growth. As single-crystal production continues, various impurities gradually adhere to the inner wall of the furnace, including residual raw material particles, reaction-generated deposits, and deposits caused by high-temperature oxidation.

[0003] Existing technologies for cleaning the inner wall of single crystal furnaces mostly rely on manual hand tools for wiping or scraping. This method is not only inefficient and difficult to cover the complex corners of the furnace inner wall, but it is also very easy to scratch the inner wall of the furnace during operation, damaging its surface smoothness, and thus affecting the stability of single crystal growth and product quality. Utility Model Content

[0004] This invention proposes a cleaning device for the inner wall of a single crystal furnace, which improves cleaning efficiency and avoids the problem of easily scratching the inner wall of the furnace during manual cleaning.

[0005] The technical solution of this utility model is: a single crystal furnace inner wall cleaning device, including a dust suction pipe, a rotating sleeve, a toothed ring, a drive assembly, two cleaning rollers, two polishing rollers and a cleaning brush;

[0006] The inner wall of the suction pipe is provided with an air suction hole, and the outer wall of the bottom enlarged section of the suction pipe is provided with a plurality of dust suction holes, and the air suction holes are connected to the dust suction holes.

[0007] The rotating sleeve is rotatably connected to the outer wall of the suction pipe, and the outer circumferential wall of the rotating sleeve is provided with multiple mounting holes.

[0008] The gear ring is fixedly connected to the outer wall of the rotating sleeve;

[0009] The drive assembly is used to drive the gear ring to rotate;

[0010] The cleaning roller is installed in the corresponding mounting hole;

[0011] The grinding roller is installed in the corresponding mounting hole;

[0012] The cleaning brush is fixedly connected to the bottom of the rotating sleeve.

[0013] Preferably, the cleaning brush has a ring structure, and the bristles of the cleaning brush are located at the bottom.

[0014] Preferably, the outer wall of the rotating sleeve has multiple positioning holes, a fixing ring is fitted on the outer wall of the rotating sleeve, a threaded sleeve is rotatably connected to the outer circumference of the fixing ring, and the inner wall of the threaded sleeve is threadedly connected to the outer wall of the rotating sleeve.

[0015] Preferably, the bottom of the fixing ring is fixedly connected to a plurality of locking rods, the bottom of the locking rods passing through the positioning holes and extending below them, and the outer wall of the locking rods is fixedly connected to a plurality of limiting blocks.

[0016] Preferably, both the cleaning roller and the polishing roller have a slot at the top, and the inner wall of the slot has a limit groove. The bottom of the locking rod is inserted into the slot, and the limit block is inserted into the inner wall of the limit groove.

[0017] Preferably, both the cleaning roller and the polishing roller have grooves at their bottoms, and a protruding rod is fixedly connected to the bottom of the inner wall of the mounting hole, with the protruding rod engaging with the groove.

[0018] Preferably, the drive assembly includes a housing, which is rotatably connected to a rotating sleeve. The housing is fixedly connected to the outer wall of the suction pipe. A stepper motor is fixedly connected to the upper cavity of the housing, and the output end of the stepper motor extends into the lower cavity of the housing.

[0019] Preferably, a dustproof grille is fixedly connected to the top of the housing, and a gear is fixedly connected to the output end of the stepper motor, the gear meshing with a gear ring.

[0020] Preferably, a grip sleeve is fixedly connected to the outer wall of the suction pipe, and the grip sleeve is located above the housing.

[0021] The beneficial effects of this utility model, achieved through the above technical solution, are as follows:

[0022] 1. The design of the rotating sleeve, gear ring, and drive assembly enables the cleaning roller, polishing roller, and cleaning brush to rotate around the dust suction pipe to clean the inner wall of the single crystal furnace. This solves the problem that traditional manual cleaning is difficult to cover complex corners. At the same time, the cleaning roller, polishing roller, and cleaning brush work together to improve cleaning efficiency and avoid the problem of easily scratching the inner wall of the furnace by manual cleaning.

[0023] 2. The design of positioning holes, fixing rings, threaded sleeves, locking rods, and limiting blocks makes the installation and disassembly of cleaning rollers and polishing rollers more convenient. Through the cooperation of locking grooves, limiting grooves, locking rods, and limiting blocks, as well as the cooperation of grooves and protruding rods, the cleaning rollers and polishing rollers are ensured to be installed firmly and will not loosen during the rotation cleaning process. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2This is a schematic diagram of the internal structure of the present invention;

[0026] Figure 3 This is a schematic diagram of the rotating sleeve mounting structure of this utility model;

[0027] Figure 4 This is a schematic diagram of the installation structure of the fixing ring of this utility model;

[0028] Figure 5 This is a schematic diagram of the installation structure of the limiting block of this utility model.

[0029] In the diagram: 1. Suction pipe; 2. Suction port; 3. Dust suction port; 4. Rotating sleeve; 5. Mounting hole; 6. Positioning hole; 7. Protruding rod; 8. Cleaning brush; 9. Cleaning roller; 901. Grinding roller; 10. Slot; 11. Limiting slot; 12. Locking rod; 13. Limiting block; 14. Fixing ring; 15. Threaded sleeve; 16. Gear ring; 17. Housing; 18. Dustproof grille; 19. Stepper motor; 20. Gear; 21. Grip sleeve. Detailed Implementation

[0030] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In this utility model, unless otherwise explicitly specified and limited, the term "fixed connection" should be interpreted broadly. For example, "fixed connection" can mean fixed installation, detachable connection, or integral connection; it can mean mechanical connection or electrical connection; it can mean direct connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] like Figures 1-3 As shown, a single crystal furnace inner wall cleaning device includes a dust suction pipe 1, a rotating sleeve 4, a toothed ring 16, a drive assembly, two cleaning rollers 9, two polishing rollers 901, and a cleaning brush 8.

[0033] The inner wall of the suction pipe 1 is provided with a suction hole 2, and the outer wall of the bottom expansion section of the suction pipe 1 is provided with multiple suction holes 3. The suction hole 2 and the suction hole 3 are connected. The rotating sleeve 4 is rotatably connected to the outer wall of the suction pipe 1. The outer circumference of the rotating sleeve 4 is provided with multiple mounting holes 5. The toothed ring 16 is fixedly connected to the outer wall of the rotating sleeve 4.

[0034] The drive assembly is used to drive the gear ring 16 to rotate. The cleaning roller 9 is installed in the corresponding mounting hole 5, the polishing roller 901 is installed in the corresponding mounting hole 5, and the cleaning brush 8 is fixedly connected to the bottom of the rotating sleeve 4.

[0035] The suction holes 2 and 3 on the suction pipe 1 collect and discharge the dust and debris generated during the cleaning process, preventing dust from remaining inside the furnace.

[0036] The design of the rotating sleeve 4, the toothed ring 16, and the drive assembly enables the cleaning roller 9, the polishing roller 901, and the cleaning brush 8 to rotate around the suction pipe 1 to clean the inner wall of the single crystal furnace. This solves the problem that traditional manual cleaning is difficult to cover complex corners. At the same time, the cleaning roller 9, the polishing roller 901, and the cleaning brush 8 work together to improve cleaning efficiency and avoid the problem of easily scratching the inner wall of the furnace during manual cleaning.

[0037] In this embodiment, as Figure 2 As shown, the cleaning brush 8 has a ring structure, and the bristles of the cleaning brush 8 are located at the bottom.

[0038] The cleaning brush 8 has a ring structure with bristles at the bottom, which can clean the inner wall of the single crystal furnace when the rotating sleeve 4 rotates. Compared with the non-ring structure, it can reduce cleaning dead corners and further improve the cleaning effect.

[0039] In this embodiment, as Figures 3-5 As shown, the outer wall of the rotating sleeve 4 has multiple positioning holes 6, and a fixing ring 14 is fitted on the outer wall of the rotating sleeve 4. A threaded sleeve 15 is rotatably connected to the outer circumference of the fixing ring 14, and the inner wall of the threaded sleeve 15 is threadedly connected to the outer wall of the rotating sleeve 4.

[0040] Multiple locking rods 12 are fixedly connected to the bottom of the fixing ring 14. The bottom of the locking rods 12 passes through the positioning hole 6 and extends to its lower part. Multiple limiting blocks 13 are fixedly connected to the outer wall of the locking rods 12.

[0041] Both the cleaning roller 9 and the polishing roller 901 have a slot 10 at the top, and a limit groove 11 is provided on the inner wall of the slot 10. The bottom of the locking rod 12 is inserted into the slot 10, and the limit block 13 is inserted into the inner wall of the limit groove 11.

[0042] Both the cleaning roller 9 and the polishing roller 901 have grooves at their bottoms, and a protruding rod 7 is fixedly connected to the bottom of the inner wall of the mounting hole 5. The protruding rod 7 is inserted into the groove.

[0043] The design of positioning hole 6, fixing ring 14, threaded sleeve 15, locking rod 12 and limiting block 13 makes the installation and disassembly of cleaning roller 9 and polishing roller 901 more convenient.

[0044] The cooperation of the slot 10, the limiting slot 11 with the locking rod 12 and the limiting block 13, as well as the cooperation of the groove and the protruding rod 7, ensures that the cleaning roller 9 and the polishing roller 901 are installed firmly and will not loosen during the rotation cleaning process.

[0045] In this embodiment, as Figure 2As shown, the drive assembly includes a housing 17, which is rotatably connected to the rotating sleeve 4. The housing 17 is fixedly connected to the outer wall of the suction pipe 1. A stepper motor 19 is fixedly connected in the upper cavity of the housing 17, and the output end of the stepper motor 19 extends into the lower cavity of the housing 17.

[0046] A dustproof grille 18 is fixedly connected to the top of the housing 17, and a gear 20 is fixedly connected to the output end of the stepper motor 19. The gear 20 meshes with the gear ring 16.

[0047] A grip sleeve 21 is fixedly connected to the outer wall of the suction pipe 1, and the grip sleeve 21 is located above the housing 17.

[0048] The stepper motor 19, through the meshing transmission of the gear 20 and the gear ring 16, can control the speed and rotation angle of the rotating sleeve 4.

[0049] Working principle: In use, the top of the suction pipe 1 is connected to an external vacuum cleaner. The operator holds the grip sleeve 21 and inserts the device into the single crystal furnace body after the internal structure has been disassembled. The stepper motor 19 in the drive assembly is started. The output end of the stepper motor 19 drives the gear 20 to rotate. Since the gear 20 meshes with the gear ring 16, it drives the gear ring 16 to rotate. The gear ring 16 drives the rotating sleeve 4 to rotate on the outer wall of the suction pipe 1.

[0050] During the rotation of the rotating sleeve 4, the annular cleaning brush 8 at the bottom first performs a preliminary cleaning of the inner wall of the single crystal furnace, sweeping away larger dust and impurities. Next, the cleaning roller 9 and the polishing roller 901 rotate with the rotating sleeve 4. The cleaning roller 9 further cleans the residual stains on the inner wall of the furnace, while the polishing roller 901 polishes the surface of the inner wall, making it smoother. Dust and debris generated during the cleaning and polishing process are sucked into the suction pipe 1 through the suction holes 3 on the outer wall of the expanded diameter section at the bottom of the suction pipe 1 and the air suction holes 2 on the inner wall, and then discharged.

[0051] When installing the cleaning roller 9 and the polishing roller 901, first, insert the grooves at the bottom of the cleaning roller 9 and the polishing roller 901 into the protrusions 7 at the bottom of the inner wall of the mounting hole 5 to achieve axial fixation. Then, align the slots 10 at the top of the cleaning roller 9 and the locking rods 12 at the bottom of the fixing ring 14 and insert them so that the limiting block 13 is engaged in the limiting groove 11 to achieve circumferential fixation. Finally, rotate the threaded sleeve 15 to connect it with the rotating sleeve 4, and fix the fixing ring 14 on the rotating sleeve 4 to ensure that the cleaning roller 9 and the polishing roller 901 are securely installed.

[0052] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. A single crystal furnace inner wall cleaning device, characterized by, include: A vacuum tube (1) has an air suction hole (2) on its inner wall and a plurality of vacuum holes (3) on the outer wall of the bottom expansion section of the vacuum tube (1). The air suction hole (2) is connected to the vacuum holes (3). Rotating sleeve (4), the rotating sleeve (4) is rotatably connected to the outer wall of the suction pipe (1), and the outer wall of the rotating sleeve (4) is provided with multiple mounting holes (5). Gear ring (16), the gear ring (16) is fixedly connected to the outer wall of the rotating sleeve (4); A drive assembly for driving the gear ring (16) to rotate; Two cleaning rollers (9) are installed in corresponding mounting holes (5); Two grinding rollers (901) are installed in corresponding mounting holes (5); A cleaning brush (8) is fixedly connected to the bottom of a rotating sleeve (4).

2. The single crystal furnace inner wall cleaning device according to claim 1, characterized in that: The cleaning brush (8) has a ring structure, and the bristles of the cleaning brush (8) are located at the bottom.

3. The single crystal furnace inner wall cleaning device according to claim 2, characterized in that: The outer wall of the rotating sleeve (4) is provided with multiple positioning holes (6), and a fixing ring (14) is fitted on the outer wall of the rotating sleeve (4). A threaded sleeve (15) is rotatably connected to the outer circumference of the fixing ring (14), and the inner wall of the threaded sleeve (15) is threadedly connected to the outer wall of the rotating sleeve (4).

4. The single crystal furnace inner wall cleaning device according to claim 3, characterized in that: The bottom of the fixed ring (14) is fixedly connected to a plurality of locking rods (12), the bottom of the locking rods (12) passes through the positioning hole (6) and extends to its lower part, and the outer wall of the locking rods (12) is fixedly connected to a plurality of limiting blocks (13).

5. The single crystal furnace inner wall cleaning device according to claim 4, characterized in that: The cleaning roller (9) and the polishing roller (901) are both provided with a slot (10) at the top. The inner wall of the slot (10) is provided with a limiting groove (11). The bottom of the clamping rod (12) is inserted into the slot (10) and the limiting block (13) is inserted into the inner wall of the limiting groove (11).

6. The single crystal furnace inner wall cleaning device according to claim 5, characterized in that: The bottom of the cleaning roller (9) and the polishing roller (901) are both provided with grooves, and the bottom of the inner wall of the mounting hole (5) is fixedly connected with a protruding rod (7), which is inserted into the groove.

7. The single crystal furnace inner wall cleaning device according to claim 6, characterized in that: The drive assembly includes a housing (17), which is rotatably connected to a rotating sleeve (4). The housing (17) is fixedly connected to the outer wall of the suction pipe (1). A stepper motor (19) is fixedly connected in the upper cavity of the housing (17). The output end of the stepper motor (19) extends into the lower cavity of the housing (17).

8. The single crystal furnace inner wall cleaning device according to claim 7, characterized in that: A dustproof grille (18) is fixedly connected to the top of the housing (17), and a gear (20) is fixedly connected to the output end of the stepper motor (19), which meshes with the gear ring (16).

9. The single crystal furnace inner wall cleaning device according to claim 7, characterized in that: The outer wall of the suction pipe (1) is fixedly connected to a grip sleeve (21), which is located above the housing (17).

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