A lamp replacement fixture

Abstract

This application provides a lamp replacement fixture. The heater includes a base, a lamp connected to the base, and a clamp that fixes the base into a quartz cavity. The lamp replacement fixture includes a clamp release component and a load-bearing guide component. The clamp release component includes a clamp action part that acts on the clamp, and the force applied to the clamp is opposite to the clamping force of the clamp on the quartz cavity, so as to release the clamp's fixed constraint on the quartz cavity. The clamp release component is disposed on the load-bearing guide component, which is used to align the base and prevent the lamp from falling into the quartz cavity during the clamp removal process. This lamp replacement fixture, by setting the clamp release component and the load-bearing guide component, significantly improves replacement efficiency, effectively reduces the risk of impact damage, improves operational safety and reliability, and enhances the convenience of equipment maintenance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, specifically to a lamp replacement fixture. Background Technology

[0002] In traditional cleaning processes, to improve cleaning effectiveness, some cleaning tanks require a heater to circulate and heat the cleaning solution. Existing heaters typically use multiple heating lamps connected in parallel, and are equipped with a temperature monitoring system to ensure the cleaning process meets temperature requirements.

[0003] However, heating lamps have a limited lifespan and must be replaced when they reach that point or become damaged. Because the heating lamp and its stainless steel clamps retain residual heat after use, thick heat-resistant gloves must be worn during replacement to prevent burns to the operator. However, these gloves severely restrict operational flexibility, increasing the difficulty of disassembling and installing the lamp.

[0004] Furthermore, the heating lamps are made of quartz, and both the lamps and the quartz cavity are brittle materials, making them susceptible to damage from impacts during operation while wearing gloves. Additionally, the heating element must be kept clean; improper handling or touching the heating area can cause contamination. Currently, the replacement of the heating lamps relies entirely on the operator's experience and care, lacking standardized support methods, resulting in low replacement efficiency and severely impacting the continuity of the cleaning process. Utility Model Content

[0005] In view of the low replacement efficiency of heater lamps in existing semiconductor wet cleaning equipment, this application provides a lamp replacement fixture. This fixture, by incorporating a clamp release component and a load-bearing guide component, significantly improves replacement efficiency, effectively reduces the risk of impact damage, enhances operational safety and reliability, and improves equipment maintenance convenience.

[0006] This application provides a lamp replacement fixture for a heater in a semiconductor wet cleaning equipment. The heater includes a base, a lamp connected to the base, and a clamp for fixing the base into a quartz cavity. The replacement fixture includes:

[0007] The clamp release assembly includes a clamp action part that acts on the clamp and applies a force to the clamp in the opposite direction to the clamping force of the clamp on the quartz cavity, so as to release the clamp from the fixed constraint of the quartz cavity.

[0008] A load-bearing guide assembly is provided, and the clamp release assembly is disposed on the load-bearing guide assembly. The load-bearing guide assembly is used to align the base and prevent the lamp tube from falling into the quartz cavity during the disassembly of the clamp.

[0009] In one embodiment, the clamp release assembly further includes an operating handle, a linkage slider group, and an elastic reset mechanism;

[0010] Along the first direction, one end of the linkage slider group is connected to the operating handle, and the other end of the linkage slider group is connected to the clamp action part;

[0011] The elastic reset mechanism is used to provide a reverse restoring force to the linkage slider group in the second direction;

[0012] The first direction is perpendicular to the second direction.

[0013] In one embodiment, the linkage slider group includes two parallel sliders, which are connected by a guide rod along the second direction.

[0014] In one implementation, limit blocks are provided at both ends of the slide rod to constrain the sliding stroke of the two sliders, and the limit blocks are fixedly connected to the load-bearing guide assembly.

[0015] In one embodiment, the elastic reset mechanism is a spring sleeved on the slide rod, with both ends of the spring connected to the two sliders respectively.

[0016] In one embodiment, the clamp working part includes two parallel disassembly rods.

[0017] In one embodiment, the disassembly rod is provided with a slot.

[0018] In one embodiment, the load-bearing guide assembly includes a base and a frame, the frame being vertically disposed at one end of the base, the frame having a window for fitting the base, and the clamp release assembly being disposed on the surface of the frame away from the base.

[0019] In one embodiment, the base has a rectangular cross-section, and the length of the base is not greater than the length inside the quartz cavity; the frame has a rectangular longitudinal cross-section.

[0020] In one embodiment, the base is made of stainless steel and has a layer of low thermal conductivity insulating material.

[0021] As described above, the lamp replacement fixture of this application has the following beneficial effects:

[0022] The lamp replacement fixture of this application, by setting up a clamp release component and a load-bearing guide component, allows operators to perform difficult manual operations without wearing heavy heat-resistant gloves, reducing the risk of burns and component contamination caused by inconvenient operation. At the same time, the structural limit ensures the standardization of the replacement process, reduces human error, improves the safety and reliability of equipment maintenance, significantly improves replacement efficiency, and effectively reduces the risk of impact damage. Attached Figure Description

[0023] Figure 1 The diagram shows the structure of a cleaning tank in a semiconductor wet cleaning device in the prior art.

[0024] Figure 2 The diagram shows a schematic of the installation window of the heater in the quartz cavity of the cleaning tank in the prior art.

[0025] Figure 3 The diagram shown is a structural schematic of a lamp replacement fixture according to an embodiment of the present utility model.

[0026] Figure 4 The diagram shown is a cross-sectional view of the clamp release assembly in the replacement fixture of this utility model embodiment;

[0027] Figure 5 The diagram shows the structure of the clamp action part acting on the clamp in the replacement fixture of this utility model embodiment.

[0028] Component designation explanation

[0029] 10, Quartz cavity; 11, Mounting window; 12, Circulating fluid inlet; 13, Circulating fluid outlet; 21, Base; 22, Clamp; 23, Power cord; 100, Load-bearing guide assembly; 110, Base support; 120, Frame; 200, Clamp release assembly; 210, Clamp action part; 211, Removal rod; 212, Slot; 220, Linkage slider assembly; 221, Slider; 222, Slide rod; 223, Limit block; 230, Elastic reset mechanism; 240, Operating handle. Detailed Implementation

[0030] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0031] Please see Figures 1 to 5It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0032] In semiconductor cleaning processes, to improve the cleaning effect, a heater is typically used in the cleaning tank to circulate and heat the cleaning solution. The structure of the cleaning tank is as follows: Figure 1 As shown, it includes a quartz cavity 10, and a circulating liquid inlet 12 and a circulating liquid outlet 13 disposed on the quartz cavity 10; the quartz cavity 10 is provided with an installation window 11, which is used to install a heater, such as... Figure 2 As shown, the heater includes a base 21, a lamp tube (not shown in the figure, the lamp tube is located inside the quartz cavity 10) connected to the base 21, a power cord 23 connected to the base 21, and a clamp 22 that fixes the base 21 inside the quartz cavity 10.

[0033] Heaters typically employ multiple lamps operating in parallel. To ensure the temperature requirements of the cleaning process, the temperature of the cleaning tank needs to be monitored. However, the lamps have a limited lifespan and must be replaced when they reach their end or become damaged. Since the lamps and their stainless steel clamps retain residual heat after operation, thick heat-resistant gloves must be worn during replacement to prevent burns to operators. However, these gloves severely restrict operational flexibility, increasing the difficulty of lamp disassembly and installation. Furthermore, the lamps are made of quartz, and both the lamps and the quartz cavity are brittle materials, making them susceptible to damage from impacts while wearing gloves. Additionally, the heating element must be kept clean; improper handling can lead to contamination. Currently, lamp replacement relies entirely on the operator's experience and carelessness, lacking standardized support methods, resulting in low replacement efficiency.

[0034] To address the above deficiencies, this application provides a lamp replacement fixture. The following embodiments will provide a detailed description.

[0035] This embodiment provides a lamp replacement fixture, such as... Figure 3 As shown, the replacement fixture includes a clamp release assembly 200 and a load-bearing guide assembly 100.

[0036] The clamp release assembly 200 includes a clamp action part 210. The clamp action part 210 acts on the clamp 22, applying a force opposite to the clamping force exerted by the clamp 22 on the quartz cavity 10, thereby releasing the clamp 22 from its fixed constraint on the quartz cavity 10. By providing the clamp release assembly 200, a precise force can be applied to the clamp 22 that secures the lamp tube to release its tightness, replacing the traditional manual disassembly method that relies on experience. This significantly reduces the difficulty of disassembling and installing the clamp 22, reduces the time spent on each replacement operation, effectively improves the lamp replacement efficiency, and ensures the continuity of the cleaning process.

[0037] The load-bearing guide assembly 100 is used to align the heater base 21 and prevent the lamp tube from falling into the quartz cavity 10 during disassembly of the clamp 22; the clamp release assembly 200 is disposed on the load-bearing guide assembly 100. The load-bearing guide assembly 100 provides stable support and guidance for the lamp tube, offering a preset movement trajectory and protective support during replacement, preventing the lamp tube from shifting or colliding with the quartz cavity 10 or other components during disassembly, transfer, and installation. This reduces the risk of damage to the quartz lamp tube and quartz cavity 10 due to collisions, and lowers equipment maintenance costs.

[0038] The lamp replacement fixture provided in this embodiment significantly improves replacement efficiency and effectively reduces the risk of impact damage through the synergistic effect of the clamp release component 200 and the load-bearing guide component 100. It eliminates the need for operators to perform difficult manual operations while wearing heavy heat-resistant gloves, reducing the risk of burns and component contamination caused by inconvenient operation. At the same time, the structural limiting ensures the standardization of the replacement process, reduces human error, and improves the safety and reliability of equipment maintenance. Furthermore, operators can complete the replacement operation without relying on complex experience, reducing dependence on the operator's skill level and improving the convenience and universality of heater maintenance for semiconductor wet cleaning equipment.

[0039] In optional embodiments, such as Figure 3 As shown, the clamp release assembly 200 also includes an operating handle 240, a linkage slider assembly 220, and an elastic reset mechanism 230. Along a first direction, one end of the linkage slider assembly 220 is connected to the operating handle 240, and the other end is connected to the clamp actuating part 210; the elastic reset mechanism 230 provides a reverse restoring force to the linkage slider assembly 220 along a second direction; the first direction is perpendicular to the second direction, for example, Figure 3As shown, the first direction can be parallel to the X-axis, and the second direction can be parallel to the Y-axis. The operating handle 240 serves as the force input end, providing an ergonomic grip for easy application of force. The linkage slider assembly 220 efficiently transmits the force from the operating handle 240 to the clamp action part 210. Through optimized force transmission path, the operator's force intensity is reduced, making the disassembly and release of the clamp 22 more effortless and convenient, especially suitable for long-term or high-frequency maintenance operations. The coordinated operation of the operating handle 240, the linkage slider assembly 220, and the elastic reset mechanism 230 creates a closed-loop control for the "release-reset" action of the clamp 22, ensuring orderly and timely responses from all components during operation.

[0040] In optional embodiments, such as Figure 4 As shown, the linkage slider assembly 220 includes two parallel sliders 221, which are guided and connected by a slide rod 222 along the second direction. The two parallel sliders 221 are guided and connected by the slide rod 222, which provides rigid constraints and a precise guiding path for the movement of the sliders 221, ensuring that the two sliders 221 remain parallel when moving along the second direction, avoiding tilting, offset, or jamming, and significantly improving the overall stability and consistency of the linkage slider assembly 220.

[0041] In an optional embodiment, Figure 4 As shown, limit blocks 223 are provided at both ends of the slide bar 222 to constrain the sliding stroke of the two sliders 221, and the limit blocks 223 are fixedly connected to the bearing guide assembly 100. The limit blocks 223 rigidly constrain the sliding range of the two sliders 221 by physical blocking, which can accurately limit the maximum sliding distance of the sliders 221 along the slide bar 222, prevent the sliders 221 from sliding off the slide bar 222, avoid the sliders 221 from colliding with other components, and ensure the safety of the operation process.

[0042] In optional embodiments, such as Figure 3 and Figure 4 As shown, the elastic reset mechanism 230 is a spring sleeved on the slide rod 222, with both ends of the spring connected to the two sliders 221 respectively. Specifically, the spring is sleeved on the slide rod 222 between the two sliders 221, and both ends of the spring are connected to the opposite surfaces of the two sliders 221 respectively. The slide rod 222 provides axial guidance and constraint for the spring, effectively preventing radial displacement, twisting, or lateral bending of the spring during extension and contraction, ensuring that the spring always deforms and resets stably along the axial direction, and avoiding reset jamming or inconsistent action caused by spring misalignment. When the external force applied to the slider 221 disappears, the spring returns to its natural state, causing the slider 221 to reset.

[0043] In optional embodiments, such as Figure 3 and Figure 4 As shown, the clamping action part 210 includes two parallel disassembly rods 211. (As indicated...) Figure 5 As shown, the two parallel disassembly rods 211 can simultaneously contact the symmetrical positions of the clamp 22 and apply force, so that the clamp 22 always maintains a balanced state during the force application process, avoiding the clamp 22 from tilting, shifting or local deformation caused by unilateral force application, ensuring that the clamp 22 can smoothly detach from the quartz cavity 10 in the preset direction, and improving the reliability of the clamp 22 release action.

[0044] In an optional embodiment, the disassembly rod 211 is provided with a slot 212, which is used to limit the clamp 22. The slot 212 forms a physical limit by adapting its shape to the contact point of the clamp 22, which can firmly lock the clamp 22 onto the disassembly rod 211, preventing relative sliding or separation between the clamp 22 and the disassembly rod 211 during the application of force, and ensuring that the force can be stably transmitted to the clamp 22. The shape of the slot 212 can be precisely designed according to the structure of the contact point of the clamp 22 (such as protrusions, edges, etc.), so that the clamp 22 is fixed at the force-bearing position of the slot 212 and meets the mechanical requirements, ensuring that the force can be concentrated on the key force-bearing point of the clamp 22, improving the effectiveness of the clamp 22 release action, and reducing the operation time caused by ineffective force application. Optionally, the disassembly rod 211 is made of stainless steel, such as SUS316.

[0045] In optional embodiments, such as Figure 3 As shown, the load-bearing guide assembly 100 includes a base 110 and a frame 120. The frame 120 is vertically disposed at one end of the base 110. The frame 120 has a window for mounting the base 21. The clamp release assembly 200 is disposed on the surface of the frame 120 away from the base 110. The base 110 provides a bottom support for the lamp tube, preventing it from falling into the quartz cavity 10 due to gravity or external force during replacement. The window on the frame 120 is used to mount the base 21. Through shape adaptation, the frame 120 and the base 21 are precisely aligned, allowing the load-bearing guide assembly 100 to be quickly positioned and installed in the corresponding position on the equipment, reducing installation and debugging time. At the same time, the window structure restricts the movement of the frame 120, ensuring that the relative position of the load-bearing guide assembly 100 and the main body of the equipment is fixed, providing a stable operating reference for lamp replacement.

[0046] In optional embodiments, such as Figure 3As shown, the base 110 has a rectangular cross-section, and its length is no greater than the internal length of the quartz cavity 10; the frame 120 has a rectangular longitudinal section. The design of the base 110 ensures that it can be smoothly inserted into the quartz cavity 10 or placed against the inner wall of the cavity, avoiding spatial interference problems caused by excessive size, and enabling the base 110 to achieve stable load-bearing within the limited space of the quartz cavity 10; at the same time, the rectangular structure facilitates matching with the linear shape of the lamp tube, providing a close-fitting support surface for the lamp tube and improving operational flexibility in confined spaces.

[0047] In an optional embodiment, the base 110 is made of stainless steel, and a low thermal conductivity insulating material layer is provided on the base 110. Stainless steel has high strength and corrosion resistance, capable of withstanding the weight of the lamp and the operational force during replacement. It is not prone to rusting or deformation due to long-term bearing or contact with moisture and cleaning agents in the cleaning tank environment, extending the service life of the base 110 and ensuring its long-term stable load-bearing function. The low thermal conductivity insulating material layer covering the surface of the base 110 effectively blocks the heat generated during the operation or replacement of the heating lamp from being transferred to the base 110 and surrounding components, preventing the surface temperature of the base 110 from becoming too high and reducing the risk of burns to operators. The low thermal conductivity insulating material also has an insulating function, isolating the potential leakage risk of the lamp from the current conduction between the base 110 and the lamp itself, preventing leakage and short circuits caused by lamp insulation damage or electrode contact with the base 110, providing electrical safety for equipment operation and maintenance.

[0048] The use of the lamp replacement fixture provided in this embodiment includes both the disassembly and installation processes.

[0049] The disassembly process includes: (1) After disconnecting the power supply, disconnect the terminals, insert the base 110 of the lamp tube replacement fixture into the quartz cavity 10 along the bottom end of the lamp tube, and align the frame 120 with the base 21 of the heater, confirming that the slot 212 of the disassembly rod 211 is aligned with the clamp 22 of the heater; (2) The operator holds the two operating handles 240 and applies force towards the middle (so that the two operating handles 240 are close to each other), so that the clamp 22 is disengaged from the quartz cavity 10, and the clamp 22 clamps the base 21 simultaneously; (3) Use the operating handles 240 to pull the heater outward. After the heater is completely pulled out of the quartz cavity 10, release the operating handles 240, the spring returns to its original state, and the slider 211 and the disassembly rod 211 are pushed open by the spring until the slider 211 reaches the limit block 223; (4) Manually remove the lamp tube from the lamp tube replacement fixture, thus completing the disassembly.

[0050] The installation process includes: (1) placing the lamp tube with the protective film on the base 110, and putting the clamp 22 on the base 21. Then, put the disassembly rod 211 of the lamp tube replacement fixture on the clamp 22. Align the base 21 with the frame 120 and finally completely remove the protective film; (2) hold the operating handle 240 of the lamp tube replacement fixture and apply force to the middle (so that the two operating handles 240 are close to each other) so that the disassembly rod 211 applies force to the clamp 22. The clamp 22 clamps the base 21 and places the heater into the installation position in the quartz cavity 10; (3) after installation, release the force applied to the operating handle 240, pull out the lamp tube replacement fixture, and tighten the terminal to complete the replacement.

[0051] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A lamp replacement jig, a heater comprising a base, a lamp tube connected to the base, and a clamp for fixing the base in a quartz chamber, characterized in that, The lamp replacement fixture includes: The clamp release assembly includes a clamp action part that acts on the clamp and applies a force to the clamp. The clamping force exerted by the clamp on the quartz cavity is opposite in direction to release the clamp's fixed constraint on the quartz cavity; A load-bearing guide assembly is provided, and the clamp release assembly is disposed on the load-bearing guide assembly. The load-bearing guide assembly is used to align the base and prevent the lamp tube from falling into the quartz cavity during the disassembly of the clamp.

2. The tube replacement jig of claim 1, wherein The clamp release assembly also includes an operating handle, a linkage slider group, and an elastic reset mechanism; Along the first direction, one end of the linkage slider group is connected to the operating handle, and the other end of the linkage slider group is connected to the clamp action part; The elastic reset mechanism is used to provide a reverse restoring force to the linkage slider group in the second direction; The first direction is perpendicular to the second direction.

3. The tube replacement tool of claim 2, wherein The linkage slider group includes two parallel sliders, which are connected by a guide rod along the second direction.

4. The tube replacement tool of claim 3, wherein Limiting blocks are provided at both ends of the slide rod to constrain the sliding stroke of the two sliders, and the limiting blocks are fixedly connected to the bearing guide assembly.

5. The lamp replacement jig according to claim 3 or 4, characterized by The elastic reset mechanism is a spring sleeved on the slide rod, and the two ends of the spring are respectively connected to the two sliders.

6. The lamp replacement jig according to any one of claims 1 to 4, characterized by The clamp's working part includes two parallel disassembly rods.

7. The lamp replacement tool of claim 6, wherein, The disassembly rod is provided with a slot.

8. The lamp replacement jig according to any one of claims 1 to 4, characterized by The load-bearing guide assembly includes a base and a frame. The frame is vertically disposed at one end of the base and has a window for fitting the base. The clamp release assembly is disposed on the surface of the frame away from the base.

9. The lamp replacement tool of claim 8, wherein, The base has a rectangular cross-section, and its length is no greater than the length inside the quartz cavity; the frame has a rectangular longitudinal cross-section.

10. The lamp replacement tool of claim 8, wherein, The base is made of stainless steel and has a layer of low thermal conductivity insulating material.

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