A micro-nano bubble generating device

Abstract

This utility model discloses a foaming device, belonging to the field of microbubble cleaning technology, specifically relating to a micro / nanobubble generating device, comprising: a cavity with a fluid inlet and a mixed fluid outlet, the fluid inlet being used to receive a gas-liquid mixed fluid with a certain pressure; and a multi-stage vortex module disposed within the cavity; the multi-stage vortex module includes a flow channel composed of several blade units, used to cause the passing gas-liquid mixed fluid to undergo at least two rotational directional changes in opposite directions, thereby breaking the gas into microbubbles under the repeated impact and shearing action of the liquid. The blades in this utility model are assembled, and different numbers of blades can be selected depending on the length of the pipe; the blade shape is fluid-mechanically designed to facilitate the rotation of the liquid flow, achieving efficient and stable microbubble generation while significantly improving cost control, maintainability, and adaptability.

Description

Technical Field

[0001] This utility model discloses a foaming device, belonging to the field of microbubble cleaning technology, specifically relating to a device for generating micro-nano bubbles. Background Technology

[0002] Micro- and nanobubbles possess characteristics such as small size, huge specific surface area, long residence time in water, and negative surface charge. Their interfacial properties enable them to efficiently adsorb and remove impurities from water, especially oily contaminants on solid interfaces. Cleaning technology based on micro- and nanobubbles offers excellent cleaning results without the use of traditional chemical agents, significantly reducing operating costs. It can be applied to fields such as semiconductor and LCD panel cleaning, pesticide residue removal from vegetables, space sterilization and disinfection, and skin cleaning.

[0003] In semiconductor manufacturing processes, wafer cleaning and drying are crucial auxiliary steps throughout the entire process. Their core objective is to efficiently and non-destructively remove various contaminants (such as particles, organic matter, and metallic impurities) from the wafer surface and achieve complete residue-free drying. As integrated circuit technology continues to advance to nanometer and even more advanced levels, the patterns on wafers are becoming increasingly complex, delicate, and fragile. Traditional mainstream technologies such as RCA chemical cleaning (using solutions such as SC-1 and SC-2) combined with megasonic enhancement and spin-rinse dryer (SRD) are gradually revealing their limitations. While megasonic cleaning effectively removes particles, the uneven energy distribution caused by its cavitation effect can lead to localized excessive energy in extremely fine patterned structures (such as FinFET fins or high aspect ratio trenches), resulting in "acoustic cavitation damage" and causing structural bending or breakage. Traditional spin drying relies on centrifugal force generated by high-speed rotation; for high aspect ratio structures, residual cleaning fluid is difficult to completely remove, and the surface tension of the liquid during evaporation can stretch the structure, causing "pattern collapse" and irreversible device damage. To overcome these technical bottlenecks, the industry urgently needs a gentle, uniform, penetrating, and non-destructive cleaning and drying solution. Microbubble technology is an innovative solution that has emerged and gained widespread attention in this context.

[0004] The mainstream rotary shearing method in existing microbubble generation technology typically uses an integral impeller or rotor as its core component. This design has several significant inherent drawbacks: First, because the impeller is a fixed-length integral structure, its size and generation capacity cannot be flexibly adjusted once manufactured, lacking adaptability to different process flow rates and requirements; second, to achieve the high shear force required to efficiently shear and pulverize air into micron-sized bubbles, this technology heavily relies on extremely high-speed rotating mechanisms (typically tens of thousands of revolutions per minute) to drive the impeller. This not only leads to high costs and manufacturing precision requirements for drive equipment but also introduces high energy consumption, high noise, and maintenance costs and reliability risks due to high-speed wear. These factors collectively limit the potential for further cost reduction, efficiency improvement, and widespread application of this technology in large-scale production. Utility Model Content

[0005] Purpose of the utility model: To provide a device for generating micro-nano bubbles to solve the problems mentioned above.

[0006] Technical solution: A device for generating micro / nano bubbles, the device comprising:

[0007] A cavity having a fluid inlet and a mixed fluid outlet, the fluid inlet being used to receive a gas-liquid mixed fluid at a certain pressure;

[0008] And, a multi-stage vortex module disposed within the cavity;

[0009] The multi-stage vortex module includes a flow channel composed of several blade units, which is used to make the gas-liquid mixture undergo at least two rotational changes in opposite directions, thereby breaking the gas into microbubbles under the repeated impact and shearing action of the liquid.

[0010] In a further embodiment, the multi-stage swirling flow module includes multiple independent left-handed blades and multiple independent right-handed blades, which are alternately combined and installed in the cavity to form a flow channel with repeatedly changing rotation direction.

[0011] In a further embodiment, both the left-handed and right-handed blades have fluid dynamically designed curved airfoils, with their installation angles tilted relative to the fluid flow direction, ranging from 15° to 60°.

[0012] In a further embodiment, both the left-handed blade and the right-handed blade are provided with slots at their ends, and the left-handed blade and the right-handed blade are detachably installed in the cavity by engaging with the slots.

[0013] In a further embodiment, the number of left-handed and right-handed blades can be increased or decreased depending on the length of the cavity and the desired microbubble generation effect.

[0014] In a further embodiment, the multi-stage vortex module causes the rotational directions of two adjacent vortex motions of the fluid to be opposite.

[0015] The cavity is basically cylindrical, and the flow channel cross-section of the multi-stage vortex module is circular.

[0016] In a further embodiment, the fluid inlet is connected to a liquid inlet pipe and an air inlet pipe. The input end of the liquid inlet pipe is connected to a liquid input device, and the output end is connected to the liquid input end of the air inlet pipe. The gas input end of the air inlet pipe is connected to a gas supply device, and the gas output end is connected to the fluid inlet of the cavity.

[0017] In a further embodiment, the mixed fluid outlet is connected to a mixed outlet pipe.

[0018] Beneficial effects: This invention allows the gas-liquid mixture to undergo multiple forward and reverse rotations within a special flow channel, achieving efficient shearing and breaking of the gas into microbubbles solely through fluid kinetic energy. This completely eliminates the need for expensive and easily damaged high-speed rotating mechanisms, thereby significantly reducing equipment manufacturing costs, energy consumption, and maintenance requirements. Simultaneously, the flow channel impeller adopts a modular design, flexibly assembled from multiple independent blades, breaking through the size limitations of traditional integral impellers. It can be quickly adapted to different pipe lengths and processing capacity requirements, greatly enhancing application flexibility and adaptability. Furthermore, this design simplifies the assembly process, effectively saving manpower and time costs.

[0019] In summary, this invention achieves efficient and stable microbubble generation while making significant progress in cost control, maintainability, and adaptability. Attached Figure Description

[0020] Figure 1 This is an isometric drawing of this utility model.

[0021] Figure 2 This is a cross-sectional view of the present invention.

[0022] Figure 3 This is an isometric view of the multi-stage vortex module of this utility model.

[0023] Figure 4 This is the main view of the multi-stage vortex module of this utility model.

[0024] Figure reference numerals: 1. Cavity; 2. Multi-stage vortex module; 3. Left-handed blade; 4. Right-handed blade; 5. Slot; 6. Liquid inlet pipe; 7. Air inlet pipe; 8. Mixing outlet pipe. Detailed Implementation

[0025] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0028] A device for generating micro-nano bubbles includes: a cavity 1 and a multi-stage vortex module 2.

[0029] In one embodiment, such as Figures 1 to 4 As shown, a cavity 1 has a fluid inlet and a mixed fluid outlet, wherein the fluid inlet is used to receive a gas-liquid mixed fluid with a certain pressure;

[0030] And, a multi-stage vortex module 2 disposed within the cavity 1;

[0031] The multi-stage vortex module 2 includes a flow channel composed of several blade units, which is used to make the gas-liquid mixture undergo at least two rotational changes in opposite directions, thereby breaking the gas into microbubbles under the repeated impact and shearing action of the liquid.

[0032] In one embodiment, such as Figures 1 to 4 As shown, the multi-stage swirling flow module 2 includes multiple independent left-handed blades 3 and multiple independent right-handed blades 4. The left-handed blades 3 and right-handed blades 4 are alternately combined and installed in the cavity 1 to form a flow channel with repeatedly changing rotation direction.

[0033] In one embodiment, such as Figures 1 to 4 As shown, both the left-handed blade 3 and the right-handed blade 4 have curved airfoils designed by hydrodynamics, and their installation angle is set at an angle relative to the direction of fluid flow, with the angle ranging from 15° to 60°.

[0034] In one embodiment, such as Figures 1 to 4 As shown, both the left-handed blade 3 and the right-handed blade 4 are provided with slots 5 at their ends, and the left-handed blade 3 and the right-handed blade 4 are installed in the cavity 1 in a detachable manner by cooperating with the slots 5.

[0035] In one embodiment, such as Figures 1 to 4 As shown, the number of left-handed blades 3 and right-handed blades 4 can be increased or decreased according to the length of the cavity 1 and the desired microbubble generation effect.

[0036] In one embodiment, such as Figures 1 to 4 As shown, the multi-stage vortex module 2 makes the rotation directions of two adjacent vortex movements of the fluid opposite.

[0037] In one embodiment, such as Figures 1 to 4 As shown, the cavity 1 is basically cylindrical, and the flow channel cross-section of the multi-stage variable vortex module 2 is circular.

[0038] In one embodiment, such as Figures 1 to 4 As shown, the fluid inlet is connected to a liquid inlet pipe 6 and an air inlet pipe 7. The input end of the liquid inlet pipe 6 is connected to a liquid input device, and the output end is connected to the liquid input end of the air inlet pipe 7. The gas input end of the air inlet pipe 7 is connected to a gas supply device, and the gas output end is connected to the fluid inlet of the cavity 1.

[0039] In one embodiment, such as Figures 1 to 4 As shown, the mixed fluid outlet is connected to the mixed outlet pipe 8.

[0040] Working Principle: When this invention is in operation, the microbubble assembly is first connected to the liquid input device and the gas supply device. Liquid at a certain pressure, mixed with gas at a certain pressure, is input into the specially designed cavity 1 through the liquid inlet pipe 6 and the gas inlet pipe 7. Simultaneously, the multi-stage vortex module 2 operates, causing the gas-liquid mixture to rotate counterclockwise first, then clockwise, then counterclockwise again, and then clockwise again, repeatedly. This continuous force impacts the liquid, breaking the gas into microbubbles. The microbubbles dissolve in the liquid and are finally released from the mixing outlet pipe 8, ready for use in various cleaning applications.

[0041] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A device for generating micro / nano bubbles, characterized in that, The generating device includes: A cavity having a fluid inlet and a mixed fluid outlet, the fluid inlet being used to receive a gas-liquid mixed fluid at a certain pressure; And, a multi-stage vortex module disposed within the cavity; The multi-stage vortex module includes a flow channel composed of several blade units, which is used to make the gas-liquid mixture undergo at least two rotational changes in opposite directions, thereby breaking the gas into microbubbles under the repeated impact and shearing action of the liquid.

2. The micro / nano bubble generating device according to claim 1, characterized in that, The multi-stage swirling flow module includes multiple independent left-handed blades and multiple independent right-handed blades. The left-handed and right-handed blades are alternately combined and installed in the cavity to form a flow channel with repeatedly changing rotation direction.

3. The micro / nano bubble generating device according to claim 2, characterized in that, Both the left-handed and right-handed blades have fluid dynamically designed curved airfoils, with their installation angles tilted relative to the fluid flow direction, ranging from 15° to 60°.

4. The micro / nano bubble generating device according to claim 2, characterized in that, Both the left-handed and right-handed blades have slots at their beginning and end, and the left-handed and right-handed blades are detachably installed in the cavity by engaging with the slots.

5. The micro / nano bubble generating device according to claim 4, characterized in that, The number of left-handed and right-handed blades can be increased or decreased depending on the length of the cavity and the desired microbubble generation effect.

6. The micro / nano bubble generating device according to claim 1, characterized in that, The multi-stage vortex module causes the rotational directions of two adjacent vortex motions of the fluid to be opposite.

7. The micro / nano bubble generating device according to claim 1, characterized in that, The cavity is basically cylindrical, and the flow channel cross-section of the multi-stage vortex module is circular.

8. The micro / nano bubble generating device according to claim 1, characterized in that, The fluid inlet is connected to a liquid inlet pipe and an air inlet pipe. The input end of the liquid inlet pipe is connected to a liquid input device, and the output end is connected to the liquid input end of the air inlet pipe. The gas input end of the air inlet pipe is connected to a gas supply device, and the gas output end is connected to the fluid inlet of the cavity.

9. The micro / nano bubble generating device according to claim 1, characterized in that, The mixed fluid outlet is connected to the mixed outlet pipe.

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