Liquid storage structure and polishing liquid supply system

CN224690915UActive Publication Date: 2026-08-28JUNYI (SUZHOU) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202521870811.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-01
Publication Date
2026-08-28
Estimated Expiration
2035-09-01

AI Technical Summary

Technical Problem

[0003]然而,上述技术方案在实际应用中存在一定局限性

Benefits of technology

1、本实用新型中,实现了一种储液结构及研磨液供应系统,浮块与密封板等构成封堵组件,配合注液管和供应管,能随存储罐内研磨液液位变化自动实现研磨液的供应与补充,提高生产效率;密封板顶部的密封垫可有效密封注液管,防止空气进入,保证研磨液质量;安装架、安装滑杆等结构确保密封板升降稳定,辅助套簧合理设置保障系统稳定运行;搅动组件的搅动电机、搅拌杆和搅拌叶片能搅动研磨液,防止沉淀分层,提升使用效果,极具实用价值与推广前景。

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Abstract

The utility model discloses a kind of liquid storage structure and polishing liquid supply system, including the storage tank for the storage of polishing liquid, the top of one side of the storage tank is equipped with for the injection pipe of polishing liquid supplement, the bottom of the other side of the storage tank is equipped with for the supply pipe of polishing liquid supply, the inside of the storage tank and the position of the injection pipe corresponding installation are equipped with for the injection pipe plugging plugging assembly, the plugging assembly includes liftable sealing plate, the top of the sealing plate is fixedly connected with the sealing gasket matched with the injection pipe, the bottom of the sealing plate is equipped with for the float block of the sealing plate lift and move buoyancy function.The utility model is through ingenious design and reasonable structure layout, realize the automatic supply and supplement of polishing liquid, good sealing, structure stable and reliable and agitating function, effectively solve the problems in the prior art, with higher practical value and popularization and application prospect.
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