Electrostatic chuck venting performance rapid detection device

Abstract

The utility model discloses a kind of electrostatic chuck ventilation performance rapid detection equipment, comprising: base, the upper surface of one side of which is provided with the first sealed groove of accommodating electrostatic chuck;Pressure-maintaining cover, it is set on base, and it is located the first sealed groove directly above, and its side close to the first sealed groove is equipped with second sealed groove, this pressure-maintaining cover is used for limiting pressure;Airflow detection device, it is set on the other side of base upper surface, for detecting the gas flow passing through electrostatic chuck;Air guide channel, located in base, its gas inlet is connected with the first sealed groove, its gas outlet is connected with airflow detection device, for guiding the gas passing through electrostatic chuck into airflow detection device.The utility model can solve the problem that the price of matched detection equipment is high in traditional electrostatic chuck ventilation performance detection, and detection process is complex.

Description

Technical Field

[0001] This utility model relates to the technical field of ventilation testing equipment, and in particular to a rapid testing device for the ventilation performance of an electrostatic chuck. Background Technology

[0002] Electrostatic chucks, as key components in industries such as semiconductor manufacturing and flat panel displays, play a crucial role in fixing and supporting workpieces during wafer fabrication and panel manufacturing processes. Their ventilation performance directly affects key indicators such as temperature uniformity and adsorption stability during the process, thus impacting product quality and production efficiency. Therefore, rapid and effective testing of the ventilation performance of electrostatic chucks is particularly important during manufacturing, repair, refurbishment, and routine maintenance.

[0003] Traditional methods for testing the ventilation performance of electrostatic chucks often rely on sophisticated instruments, such as high-precision gas flow meters and pressure sensors, and sometimes even complex electronic software for data acquisition and analysis. While these methods can achieve high testing accuracy and play an irreplaceable role in specific scenarios with extremely high precision requirements, they also have significant drawbacks. On the one hand, the high cost of these sophisticated instruments, including purchase and maintenance, greatly increases the operational burden on companies. On the other hand, the operation process is cumbersome, requiring specialized technicians to perform complex parameter settings and adjustments, and data processing is time-consuming, resulting in low testing efficiency.

[0004] Therefore, in the process of repairing and refurbishing electrostatic chucks, the low efficiency of traditional methods severely restricts the progress of repair and refurbishment, making it difficult to meet the high-efficiency requirements in production practice, as a large number of electrostatic chucks need to be tested for ventilation performance quickly.

[0005] Therefore, there is an urgent need to develop a rapid testing device for the ventilation performance of electrostatic chucks to solve the above-mentioned technical problems.

[0006] The statements herein provide only background information relating to this invention and do not necessarily constitute prior art. Utility Model Content

[0007] The purpose of this invention is to provide a rapid testing device for the ventilation performance of electrostatic chucks, which can solve the problems of high cost of supporting testing equipment and complex testing procedures in traditional electrostatic chuck ventilation performance testing.

[0008] To achieve the above objectives, this utility model provides a rapid testing device for the ventilation performance of an electrostatic chuck, comprising:

[0009] The base has a first sealing groove for accommodating an electrostatic chuck on one side of its upper surface.

[0010] A pressure-holding cover is disposed on the base and located directly above the first sealing groove. A second sealing groove is provided on the side of the cover closest to the first sealing groove. The pressure-holding cover is used to limit pressure.

[0011] An airflow detection device is disposed on the other side of the upper surface of the base and is used to detect the gas flow rate passing through the electrostatic chuck.

[0012] An air guide channel, located inside the base, has its air inlet connected to the first sealing groove and its air outlet connected to the airflow detection device, used to guide the gas passing through the electrostatic chuck into the airflow detection device.

[0013] Optionally, the pressure-holding cover has an air guide hole that passes through its central axis; the air inlet of the air guide hole is provided with a first swivel joint, which is used to connect external compressed gas.

[0014] Optionally, the outer diameter of the second sealing groove matches the outer diameter of the small disc at the top of the electrostatic chuck, and the depth of the second sealing groove matches the height of the small disc at the top of the electrostatic chuck.

[0015] The outer diameter of the first sealing groove matches the outer diameter of the large disc at the bottom of the electrostatic chuck, and the depth of the first sealing groove matches the height of the large disc at the bottom of the electrostatic chuck.

[0016] The electrostatic chuck is perfectly housed within the sealed space formed by the second sealing groove and the first sealing groove, that is, the small disc at the top of the electrostatic chuck is housed in the second sealing groove, and the large disc at the bottom of the electrostatic chuck is housed in the first sealing groove.

[0017] Optionally, an upper sealing ring is provided at the point where the second sealing groove contacts the edge of the upper surface of the small disc at the top of the electrostatic chuck.

[0018] Optionally, a lower sealing ring is provided at the point where the first sealing groove contacts the edge of the lower surface of the large circular disk at the bottom of the electrostatic chuck.

[0019] Optionally, the airflow detection device includes:

[0020] The lower connector has a lower air hole that passes through its central axis and is connected to the air outlet of the air guide channel.

[0021] A transparent tube, one end of which is sealed onto the lower connector, the outer diameter of which is the same as the outer diameter of the lower connector;

[0022] The upper connector has an upper air hole that passes through its central axis. The upper connector is sealed at the other end of the transparent tube, and the outer diameter of the upper connector is the same as the outer diameter of the transparent tube.

[0023] The second connector is connected to the outlet end of the upper air hole to adapt to different air pressures;

[0024] An air flotation block is movably disposed inside the transparent tube to indicate the magnitude of the airflow through the electrostatic chuck by the amount of its floating displacement.

[0025] Optionally, the pressure-holding cover structure includes: a small cylindrical structure at the top and a large cylindrical structure at the bottom.

[0026] Optionally, the diameter of the pressure-holding cover's large cylindrical structure is larger than the diameter of the first sealing groove.

[0027] Optionally, multiple positioning holes are provided on the outer ring of the cylindrical structure of the pressure-holding cover, and multiple mounting holes are provided on the upper surface that abuts against the base. The positioning holes and the mounting holes are installed one-to-one by screws.

[0028] Optionally, the mounting hole is a threaded mounting hole, and the screw insertion depth is used to limit the pressure on the electrostatic chuck housed in the first sealing groove and the second sealing groove.

[0029] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0030] 1. The present invention provides a rapid testing device for the air permeability of an electrostatic chuck. By designing a sealed space consisting of a first sealing groove and a second sealing groove, an airflow detection device, and an air guide channel connecting the sealed space and the airflow detection device, a low-cost and convenient testing device is formed.

[0031] 2. The present invention provides a rapid testing device for the ventilation performance of an electrostatic chuck, which adjustably tightens the pressure-holding cover and the base with screws, and sets a lower sealing ring and an upper sealing ring in the first sealing groove and the second sealing groove that contact the electrostatic chuck to limit the pressure of the electrostatic chuck contained therein, and also provides a pressure limiting and sealing method with better operability and better effect. Attached Figure Description

[0032] Figure 1 This is a three-dimensional structural diagram of the electrostatic chuck ventilation performance rapid testing device of this utility model.

[0033] Figure 2 This is a cross-sectional structural diagram of the electrostatic chuck ventilation performance rapid testing device of this utility model.

[0034] Figure 3 This is a three-dimensional structural diagram of the electrostatic chuck ventilation performance rapid testing device of this utility model from another angle. Detailed Implementation

[0035] The following will be combined with the appendix Figures 1-3 The present invention will be further described in detail through preferred embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, only for the purpose of conveniently and clearly illustrating the embodiments of the present invention. Please refer to the accompanying drawings to make the objectives, features, and advantages of the present invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the present invention, should still fall within the scope of the technical content disclosed in the present invention.

[0036] As is known, the electrostatic chuck 500 of this invention has a two-stage disc-shaped stepped structure, namely, a large disc structure at the bottom and a small disc structure at the top, thus forming a two-stage stepped structure upwards and inwards. Furthermore, the electrostatic chuck 500 is provided with multiple vent holes, including PIN (lead) through-holes and helium gas holes. These vent holes extend from the top surface of the small disc at the top of the electrostatic chuck to the bottom surface of the large disc at the bottom of the electrostatic chuck, thus enabling the electrostatic chuck 500 to have venting capabilities.

[0037] This invention provides a rapid testing device for the ventilation performance of an electrostatic chuck, such as... Figure 1 and Figure 2 As shown, the rapid testing device for the ventilation performance of the electrostatic chuck includes: a base 100, one side of which is provided with a first sealing groove 110 for accommodating the electrostatic chuck 500; a pressure-holding cover 300, disposed on the base 100 and located directly above the first sealing groove 110, with a second sealing groove 310 on the side near the first sealing groove 110, the pressure-holding cover 300 being used for pressure limiting; an airflow detection device 200, disposed on the other side of the upper surface of the base 100, for detecting the gas flow rate through the electrostatic chuck 500; and an air guide channel 400, located inside the base 100, with its inlet connected to the first sealing groove 110 via the bottom wall of the first sealing groove 110, and its outlet connected to the airflow detection device 200, for guiding the gas passing through the electrostatic chuck 500 into the airflow detection device 200.

[0038] Among them, such as Figure 2As shown, the pressure-holding cover 300 has a vent hole 320 that passes through its central axis; a first connector 330 is provided at the air inlet 321 of the vent hole 320, which is used to connect external compressed gas; the second sealing groove 310 can accommodate the small disc structure of the electrostatic chuck 500, that is, the outer diameter of the second sealing groove 310 matches the outer diameter of the small disc, and the depth of the second sealing groove 310 matches the height of the small disc.

[0039] The first sealing groove 110 can perfectly accommodate the large disc structure of the electrostatic chuck 500, meaning the outer diameter of the first sealing groove 110 matches the outer diameter of the large disc, and the depth of the first sealing groove 110 matches the height of the large disc. Specifically, when the large disc of the electrostatic chuck 500 is placed in the first sealing groove 110, and the pressure-holding cover 300 is placed on the base 100, the small disc of the electrostatic chuck 500 is embedded in the second sealing groove 310, thus the electrostatic chuck 500 is perfectly housed within the sealed space formed by the first sealing groove 110 and the second sealing groove 310.

[0040] In addition, such as Figure 3 As shown, an upper sealing ring 311 is also provided at the contact point between the second sealing groove 310 and the edge of the upper surface of the small disc of the electrostatic chuck 500, for tightly fitting the edge of the upper surface of the small disc to ensure that the gas in the second sealing groove 310 does not leak out.

[0041] Correspondingly, a lower sealing ring 111 is also provided at the contact point between the first sealing groove 110 and the edge of the lower surface of the large disc of the electrostatic chuck 500, for tightly fitting the edge of the lower surface of the large disc to ensure that the gas in the first sealing groove 110 does not leak out.

[0042] The airflow detection device 200 includes: a lower connector 210 with a lower air hole 211 extending through its central axis, the lower air hole 211 being connected to the air outlet of the air guide channel 400; a transparent tube 220, one end of which is sealed on the lower connector 210, the outer diameter of the transparent tube 220 being the same as the outer diameter of the lower connector 210; an upper connector 230 with an upper air hole 231 extending through its central axis, the upper connector 230 being sealed on the other end of the transparent tube 220, the outer diameter of the upper connector 230 being the same as the outer diameter of the transparent tube 220; a second flexible connector 240 connected to the air outlet 2311 of the upper air hole 231 to adapt to different air pressures; and an air flotation block 250 movably disposed within the transparent tube 220, rising with changes in airflow, thereby determining the magnitude of the airflow passing through the electrostatic chuck 500 based on the amount of upward displacement.

[0043] Furthermore, in one embodiment of the present invention, the structure of the pressure-holding cover 300 includes: a small cylindrical structure at the top and a large cylindrical structure at the bottom, wherein the height of the small cylindrical structure is greater than the height of the large cylindrical structure.

[0044] Furthermore, the outer ring of the cylindrical structure of the pressure-holding cap abuts against the upper surface of the base 100 near the outer diameter of the first sealing groove 110; that is, the diameter of the cylindrical structure of the pressure-holding cap is larger than the diameter of the first sealing groove 110. Multiple positioning holes 340 are provided on the outer ring of the cylindrical structure of the pressure-holding cap, and multiple mounting holes 120 are also provided on the upper surface abutting against the base 100. When the pressure-holding cap 300 is placed on the base 100, the positioning holes 340 and the mounting holes 120 are installed one-to-one by screws 341.

[0045] Furthermore, the mounting hole 120 is a threaded mounting hole, and the tightness of the pressure-holding cover 300 and the base 100 can be controlled by the screwing depth of the screw 341, so as to limit the pressure of the electrostatic chuck 500 contained in the first sealing groove 110 and the second sealing groove 310, and ultimately better ensure the effect of the ventilation performance test of this device.

[0046] In a specific embodiment of the present invention, the positioning holes 340 are arranged at 120° intervals along the outer ring of the cylindrical structure of the pressure cover, that is, there are 3 positioning holes 340; similarly, there are also 3 mounting holes 120.

[0047] Specifically, the operation of the electrostatic chuck ventilation performance rapid testing device of this utility model is as follows:

[0048] S1, place the large disc structure at the bottom of the electrostatic chuck 500 downwards into the first sealing groove 110 of the base 100, align the pressure-holding cover 300 with the electrostatic chuck 500 and install it so that the second sealing groove 310 at the bottom of the pressure-holding cover 300 can just accommodate the small disc structure at the top of the electrostatic chuck 500. After the pressure-holding cover 300 is placed, the outer edge of the large cylindrical structure of the pressure-holding cover presses against the upper surface of the base 100.

[0049] S2, rotate the pressure-holding cover 300 so that the positioning hole 340 of the pressure-holding cover 300 is aligned with the threaded mounting hole of the base 100; screw the screw 341 from the positioning hole 340 into the threaded mounting hole; and adjust the air pressure on the electrostatic chuck 500 placed in the first sealing groove 110 and the second sealing groove 310 by the screwing depth of the screw 341.

[0050] S3, external gas with a certain airflow and pressure is passed through the first union 330 and enters the second sealing groove 310 through the air guide hole 320 of the pressure cover 330. It then enters the first sealing groove 110 through the air vent that runs from the top surface of the small disc at the top of the electrostatic chuck to the bottom surface of the large disc at the bottom of the electrostatic chuck. The gas then passes through the electrostatic chuck 500 and enters the air guide channel 400 from the bottom wall of the first sealing groove 110, and finally enters the airflow detection device 200.

[0051] S4. The strength of the electrostatic chuck's ventilation performance is determined by observing the upward displacement of the air float 250 inside the airflow detection device 200.

[0052] When the upward displacement of the air flotation block 250 is small, it indicates that the airflow and air pressure passing through the electrostatic chuck 500 and entering the airflow detection device 200 are small, and the air permeability of the electrostatic chuck 500 is poor.

[0053] When the upward displacement of the air flotation block 250 is large, it indicates that the airflow and air pressure passing through the electrostatic chuck 500 and entering the airflow detection device 200 are large, and the electrostatic chuck 500 has strong ventilation performance.

[0054] Furthermore, the rapid testing device for the ventilation performance of electrostatic chucks provided by this utility model can test different models of electrostatic chucks. Different models of electrostatic chucks have different ventilation performances due to differences in the arrangement of their ventilation holes. Therefore, when testing the ventilation performance of different models of electrostatic chucks, the air float 250 exhibits different upward displacements. Based on these different upward displacements, the ventilation performance of different models of electrostatic chucks can be qualitatively compared.

[0055] In summary, the electrostatic chuck ventilation performance rapid testing device provided by this utility model can solve the problems of high cost of supporting testing equipment and complex testing procedures in traditional electrostatic chuck ventilation performance testing.

[0056] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0057] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0058] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0059] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0060] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A rapid testing device for the ventilation performance of an electrostatic chuck, characterized in that, include: The base (100) has a first sealing groove (110) for accommodating an electrostatic chuck (500) on one side of its upper surface; A pressure-holding cover (300) is disposed on the base (100) and located directly above the first sealing groove (110). A second sealing groove (310) is provided on the side of the cover closest to the first sealing groove (110). The pressure-holding cover (300) is used to limit pressure. An airflow detection device (200) is disposed on the other side of the upper surface of the base (100) for detecting the gas flow rate passing through the electrostatic chuck (500); An air guide channel (400) is located inside the base (100). Its air inlet is connected to the first sealing groove (110), and its air outlet is connected to the airflow detection device (200). It is used to guide the gas passing through the electrostatic chuck (500) into the airflow detection device (200).

2. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, The pressure-holding cover (300) has an air guide hole (320) that passes through its central axis; the air inlet (321) of the air guide hole (320) is provided with a first union (330), which is used to connect external compressed gas.

3. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, The outer diameter of the second sealing groove (310) matches the outer diameter of the small disc at the top of the electrostatic chuck, and the depth of the second sealing groove (310) matches the height of the small disc at the top of the electrostatic chuck. The outer diameter of the first sealing groove (110) matches the outer diameter of the large disc at the bottom of the electrostatic chuck, and the depth of the first sealing groove (110) matches the height of the large disc at the bottom of the electrostatic chuck. The electrostatic chuck (500) is perfectly housed in the sealed space formed by the second sealing groove (310) and the first sealing groove (110), that is, the small disc at the top of the electrostatic chuck is housed in the second sealing groove (310), and the large disc at the bottom of the electrostatic chuck is housed in the first sealing groove (110).

4. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, A top sealing ring (311) is provided at the point where the second sealing groove (310) contacts the edge of the upper surface of the small disc at the top of the electrostatic chuck.

5. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, A lower sealing ring (111) is provided at the point where the first sealing groove (110) contacts the edge of the lower surface of the large disc at the bottom of the electrostatic chuck.

6. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, The airflow detection device (200) includes: The lower connector (210) has a lower air hole (211) that passes through its central axis, and the lower air hole (211) is connected to the air outlet of the air guide channel (400). A transparent tube (220) is sealed at one end on the lower connector (210), and the outer diameter of the transparent tube (220) is the same as the outer diameter of the lower connector (210); The upper connector (230) has an upper air hole (231) that passes through its central axis. The upper connector (230) is sealed at the other end of the transparent tube (220), and the outer diameter of the upper connector (230) is the same as the outer diameter of the transparent tube (220). The second connector (240) is connected to the air outlet (2311) of the upper air hole (231) to adapt to different air pressures; An air flotation block (250) is movably disposed within the transparent tube (220) to indicate the magnitude of the airflow through the electrostatic chuck (500) by the amount of floating displacement of the air flotation block (250).

7. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 1, characterized in that, The structure of the pressure-holding cover (300) includes: a small cylindrical structure for the top pressure-holding cover and a large cylindrical structure for the bottom pressure-holding cover.

8. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 7, characterized in that, The diameter of the large cylindrical structure of the pressure-holding cover is larger than the diameter of the first sealing groove (110).

9. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 8, characterized in that, Multiple positioning holes (340) are provided on the outer ring of the cylindrical structure of the pressure cover, and multiple mounting holes (120) are provided on the upper surface that abuts against the base (100). The positioning holes (340) and the mounting holes (120) are installed one by one by screws (341).

10. The rapid testing device for the ventilation performance of an electrostatic chuck as described in claim 9, characterized in that, The mounting hole (120) is a threaded mounting hole, and the screw (341) is screwed in to limit the pressure on the electrostatic chuck (500) housed in the first sealing groove (110) and the second sealing groove (310).

Images