Tail gas treatment device

Abstract

The utility model relates to atomic layer deposition technical field provides a tail gas treatment device, including primary decomposition device and secondary decomposition device, primary decomposition device includes first casing and first filter structure, and first casing has the air inlet end and with air inlet end opposite first end is arranged, air inlet end and first end all with first casing intercommunication, secondary decomposition device includes second casing and second filter structure, and second filter structure is equipped with water absorption spare, and second casing has with first end opposite joint intercommunication second end and with second end set up exhaust end, second end with exhaust end all second casing intercommunication, the utility model discloses a tail gas treatment device, and add secondary decomposition device, and, increase water absorption spare in secondary decomposition device, utilize water absorption spare to absorb the water vapor formed in tail gas treatment process, to improve even avoid the formation of waterlogging in tail gas treatment device, also can alleviate or eliminate the environmental problem brought by waterlogging.

Description

Technical Field

[0001] This utility model relates to the field of atomic layer deposition technology, and in particular provides an exhaust gas treatment device. Background Technology

[0002] Atomic Layer Deposition (ALD) is a thin film deposition technology based on self-limiting surface chemical reactions. It can control film thickness and composition with atomic-level precision, achieving the growth of nanoscale, uniform, and pinhole-free dense films. Specifically, it involves alternately introducing gaseous precursor pulses into a reaction chamber, where a chemical adsorption reaction occurs on the substrate surface to form a thin film. Because a sufficient amount of precursor needs to be provided to adsorb onto the substrate surface during use, excess precursor inevitably gets pumped away, exposing the pump to the precursor pulses and reducing its lifespan. The design of the heat sink, a core component of ALD exhaust gas treatment, is crucial in determining the safety of ALD exhaust emissions.

[0003] Common ALD (Alternating Current Discharge) heat trap structures can be broadly categorized into three types: straight-through, spiral, and filtered. The straight-through heat trap, currently the most common type, features a direct airflow. However, due to the short time the exhaust gas spends in the heat trap, it's prone to incomplete decomposition before discharge, compromising exhaust safety. The spiral heat trap has an internal spiral-shaped columnar structure, with the exhaust gas flowing in a spiral pattern. This increased channel length significantly extends the time the exhaust gas spends in the heat trap, allowing for better high-temperature decomposition. However, its complex structure makes manufacturing more challenging. The filtered heat trap adds a filter to the straight-through design. Its basic principle is the same as the straight-through type, relying on the internal filter to adsorb and retain harmful substances. Therefore, it doesn't require as high a temperature as the straight-through and spiral types.

[0004] Regardless of the type of heat trap structure mentioned above, the exhaust gas treatment process will generate a certain amount of water vapor, which will accumulate in the heat trap and eventually corrode the equipment. Additionally, dust and harmful substances will seep out from the equipment connections along with the accumulated water, causing environmental pollution and other problems. Utility Model Content

[0005] The purpose of this invention is to provide an exhaust gas treatment device that solves the problem of water accumulation in existing exhaust gas treatment devices and the resulting environmental pollution.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: This application provides an exhaust gas treatment device, including: A primary decomposition device, comprising a first housing and a first filter structure disposed within the first housing, the first housing having an air inlet end and a first end disposed opposite to the air inlet end, both the air inlet end and the first end being connected to the first housing. A secondary decomposition device includes a second housing and a second filter structure disposed within the second housing. The second filter structure is provided with a water-absorbing element. The second housing has a second end that is connected to and communicates with the first end and an exhaust end disposed with the second end. The second end and the exhaust end are connected to the second housing.

[0007] The beneficial effects of this utility model are as follows: The exhaust gas treatment device of this utility model adds a secondary decomposition device, and adds a water absorption component in the secondary decomposition device. The water absorption component absorbs the water vapor formed during the exhaust gas treatment process, thereby improving or even avoiding the formation of water accumulation in the exhaust gas treatment device, and can also alleviate or eliminate the environmental problems caused by water accumulation.

[0008] In some embodiments, the second filter structure includes a plurality of second filter screens stacked sequentially along the direction from the second end to the exhaust end, and the water-absorbing element is provided between at least two adjacent second filter screens.

[0009] In some embodiments, in the projection direction from the second end to the exhaust end, the projection of the second filter screen at least partially overlaps with the projection of the water-absorbing element.

[0010] In some embodiments, the first filter structure includes a plurality of first filter screens, wherein the mesh openings of each first filter screen are staggered.

[0011] In some embodiments, the exhaust gas treatment device further includes a heating structure disposed on the peripheral sidewall of the first housing.

[0012] In some embodiments, a heat-conducting structure is further provided between the heating structure and the peripheral sidewall of the first housing.

[0013] In some embodiments, the exhaust gas treatment device further includes a heat insulation structure, which is sleeved around the heating structure and connected to the first housing.

[0014] In some embodiments, the first housing includes a first main body portion with a tubular structure and a cover plate portion covering the first main body portion. The cover plate portion has the air inlet end. The first main body portion includes a pipe body and a first flange portion disposed at one end of the pipe body portion away from the cover plate portion. The insulation structure has a second flange portion and a third flange portion disposed opposite to each other. The second flange portion is connected to the first flange portion, and the third flange portion is connected to the cover plate portion.

[0015] In some embodiments, the second housing includes a second main body portion with a cylindrical structure and a fourth flange portion, the fourth flange portion being located at the open end of the second main body portion and connected to the first flange portion. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the exhaust gas treatment device provided in an embodiment of the present utility model; Figure 2 A cross-sectional view of the exhaust gas treatment device provided in an embodiment of this utility model; Figure 3 A schematic diagram of the structure of the first filter screen of the first filter structure of the exhaust gas treatment device provided in the embodiment of this utility model; Figure 4 52 is a schematic diagram of the second filter structure of the exhaust gas treatment device provided in the embodiment of this utility model.

[0018] The following are the labeling elements in the figure: 10. Primary decomposition device; 11. First housing; 12. First filter structure; 10a. Air inlet; 121. First filter screen; 111. First main body; 112. Cover plate; 1111. Pipe body; 1112. First flange; 20. Secondary decomposition device; 21. Second housing; 22. Second filter structure; 23. Water suction element; 20a. Exhaust end; 221. Second filter screen; 211. Second main body; 212. Fourth flange; 30. Heating structure; 40. Heat-conducting structure; 50. Insulation structure; 51. Second flange section; 52. Third flange section; Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0020] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0021] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0022] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] Please refer to Figure 1 and Figure 2 This application provides an exhaust gas treatment device, including a primary decomposition device 10 and a secondary decomposition device 20.

[0024] The first-stage decomposition device 10 includes a first housing 11 and a first filter structure 12 disposed in the first housing 11. The first housing 11 has an air inlet end 10a and a first end disposed opposite to the air inlet end 10a. Both the air inlet end 10a and the first end are connected to the first housing 11. The secondary decomposition device 20 includes a second housing 21 and a second filter structure 22 disposed within the second housing 21. The second filter structure 22 is provided with a water-absorbing element 23. The second housing 21 has a second end that is connected to and communicates with the first end and an exhaust end 20a disposed with the second end. The second end and the exhaust end 20a are connected to the second housing 21.

[0025] Understandably, the primary decomposition device 10 and the secondary decomposition device 20 can be the same decomposition device, that is, the size, internal structure layout, filter material and quantity of the two are the same. Alternatively, the primary decomposition device 10 and the secondary decomposition device 20 can also be different decomposition devices, with the main difference being the degree of filtration.

[0026] The first housing 11 is the main body of the primary decomposition device 10, used to contain the exhaust gas and support the first filter structure 12. The inlet end 10a is an air inlet formed on the first housing 11, and the first end is an air outlet opposite to the inlet. The first filter structure 12 is a filter element that reacts with the exhaust gas to achieve purification. For example, the first filter structure 12 can be a particulate filter, a sintered metal powder filter element, a pre-collection filter component, a three-way catalytic converter (TWC) carrier, a water-washed metal filter element, etc. The exhaust gas enters the first housing 11 through the inlet end 10a, is purified and filtered by the first filter structure 12, and then enters the secondary decomposition device 20 through the first end.

[0027] The second housing 21 is the main body of the secondary decomposition device 20, used to contain the exhaust gas and support the second filter structure 22. The exhaust end 20a is an exhaust port formed on the second housing 21, and the second end is an air inlet opposite to the first end. The second filter structure 22 is a filter element that reacts with the exhaust gas to achieve purification. For example, the second filter structure 22 can be a particulate filter, a sintered metal powder filter element, a pre-collection filter component, a three-way catalytic converter (TWC) carrier, a water-washed metal filter element, etc. The exhaust gas entering the secondary decomposition device 20 is filtered by the second filter assembly and then discharged from the exhaust end 20a.

[0028] The absorbent component 23 is a structural component made of absorbent or hydrophilic materials. For example, the absorbent component 23 can be made of activated carbon, super absorbent resin, modified starch, etc.

[0029] The exhaust gas treatment device of this utility model adds a secondary decomposition device 20, and adds a water absorption element 23 to the secondary decomposition device 20. The water absorption element 23 absorbs the water vapor formed during the exhaust gas treatment process, so as to improve or even avoid the formation of water accumulation in the exhaust gas treatment device, and can also alleviate or eliminate the environmental problems caused by water accumulation.

[0030] Please refer to Figure 2 and Figure 4 In some embodiments, the second filter structure 22 includes a plurality of second filter screens 221 stacked sequentially along the direction from the second end to the exhaust end 20a, and at least one water-absorbing element 23 is provided between two adjacent second filter screens 221.

[0031] Understandably, each of the second filters 221 is stacked sequentially along the direction of exhaust gas intake, thereby achieving step-by-step purification.

[0032] The water-absorbing element 23 is disposed between two second filter screens 221. It should be understood that, among multiple sets of second filter screens 221, the water-absorbing element 23 can be disposed between any two adjacent second filter screens 221, or between several or all of the two adjacent second filter screens 221.

[0033] Please refer to Figure 2 In some embodiments, the projection of the second filter screen 221 in the projection direction from the second end to the exhaust end 20a at least partially overlaps with the projection of the water absorption member 23.

[0034] Understandably, the higher the degree of overlap between the projection of the second filter screen 221 and the projection of the water-absorbing element 23, the larger the water-absorbing area of ​​the water-absorbing element 23, and the better the water absorption effect. Optionally, the projection of the second filter screen 221 and the projection of the water-absorbing element 23 coincide in the projection direction from the second end to the exhaust end 20a. That is, their areas are the same in the projection direction from the second end to the exhaust end 20a.

[0035] Please refer to Figure 2 and Figure 3 In some embodiments, the first filter structure 12 includes a plurality of first filter screens 121, the mesh openings of each first filter screen 121 being staggered.

[0036] Understandably, the staggered arrangement of the mesh openings of each first filter screen 121 means that the holes between adjacent filter screens are not aligned, thus forming a meandering channel, which is conducive to the decomposition and adsorption of exhaust gas.

[0037] Please refer to Figure 2 In some embodiments, the exhaust gas treatment device further includes a heating structure 30 disposed on the peripheral sidewall of the first housing 11.

[0038] Understandably, the heating structure 30 is used to heat the primary decomposition unit 10 to meet the temperature requirements of the filtration and purification process.

[0039] For example, the heating structure 30 is a heating tube fitted onto the peripheral sidewall of the first housing 11.

[0040] Please refer to Figure 2 In some embodiments, a heat-conducting structure 40 is also provided between the heating structure 30 and the peripheral sidewall of the first housing 11.

[0041] Understandably, the heat-conducting structure 40 is used to achieve heat transfer, transferring the heat from the heating structure 30 to the first housing 11.

[0042] The thermally conductive structure 40 can be a thermally conductive coating, a thermally conductive adhesive layer, etc.

[0043] Please refer to Figure 2 In some embodiments, the exhaust gas treatment device further includes a heat insulation structure 50, which is sleeved around the heating structure 30 and connected to the first housing 11.

[0044] Understandably, the function of the insulation structure 50 is to prevent heat loss from the heating structure 30 and improve heat transfer efficiency.

[0045] Please refer to Figure 2 In some embodiments, the first housing 11 includes a first main body 111 with a tubular structure and a cover plate 112 covering the first main body 111. An air inlet 10a is provided on the cover plate 112. The first main body 111 includes a pipe body 1111 and a first flange 1112 provided at one end of the pipe body 1111 away from the cover plate 112. The heat insulation structure 50 has a second flange 51 and a third flange 52 disposed opposite to each other. The second flange 51 is connected to the first flange 1112, and the third flange 52 is connected to the cover plate 112.

[0046] Understandably, the two flange portions of the insulation structure 50 are connected to the first flange portion 1112 and the cover plate portion 112 respectively to improve the connection stability and the insulation performance of the heating structure 30.

[0047] Please refer to Figure 2 In some embodiments, the second housing 21 includes a second main body 211 in a cylindrical structure and a fourth flange 212, the fourth flange 212 being located at the open end of the second main body 211 and connected to the first flange 1112.

[0048] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A tail gas treatment device, characterized in that, include: A primary decomposition device, comprising a first housing and a first filter structure disposed within the first housing, the first housing having an air inlet end and a first end disposed opposite to the air inlet end, both the air inlet end and the first end being connected to the first housing; A secondary decomposition device includes a second housing and a second filter structure disposed within the second housing. The second filter structure is provided with a water-absorbing element. The second housing has a second end that is connected to and communicates with the first end and an exhaust end disposed with the second end. The second end and the exhaust end are connected to the second housing.

2. The exhaust gas treatment device according to claim 1, characterized in that: The second filtration structure includes a plurality of second filter screens stacked sequentially along the direction from the second end to the exhaust end, and the water-absorbing element is provided between at least two adjacent second filter screens.

3. The exhaust gas treatment device according to claim 2, characterized in that: In the projection direction from the second end to the exhaust end, the projection of the second filter screen at least partially overlaps with the projection of the water-absorbing element.

4. The exhaust gas treatment device according to claim 1, characterized in that: The first filter structure includes a plurality of first filter screens, and the mesh openings of each first filter screen are arranged in an alternating manner.

5. The exhaust gas treatment device according to any one of claims 1 to 4, characterized in that: The exhaust gas treatment device also includes a heating structure disposed on the peripheral sidewall of the first housing.

6. The exhaust gas treatment device according to claim 5, characterized in that: A heat-conducting structure is also provided between the heating structure and the peripheral sidewall of the first housing.

7. The exhaust gas treatment device according to claim 5, characterized in that: The exhaust gas treatment device also includes a heat insulation structure, which is sleeved around the heating structure and connected to the first housing.

8. The exhaust gas treatment device according to claim 7, characterized in that: The first housing includes a first main body portion with a tubular structure and a cover plate portion covering the first main body portion. The cover plate portion has the air inlet end. The first main body portion includes a pipe body and a first flange portion disposed at one end of the pipe body portion away from the cover plate portion. The heat insulation structure has a second flange portion and a third flange portion disposed opposite to each other. The second flange portion is connected to the first flange portion, and the third flange portion is connected to the cover plate portion.

9. The exhaust gas treatment device according to claim 8, characterized in that: The second housing includes a second main body portion with a cylindrical structure and a fourth flange portion, the fourth flange portion being located at the open end of the second main body portion and connected to the first flange portion.

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