A plate-and-frame mounting positioning device

Abstract

The utility model discloses a kind of plate frame installation positioning device, including locating seat, locating seat is equipped with working groove, the end of working groove is through the end surface of locating seat, the both sides of locating seat located in working groove are rotatably installed with multiple supporting wheels arranged in straight line;The both sides of locating seat located in working groove are rotatably installed with compression seat, and compression seat is arranged in the through end of working groove;Compression seat is rotatably installed with compression wheel in one end, and linear power element is hinged in the other end. Realize the pull-out type disassembly of plate frame, not only the plate frame is high in convenience, and it is convenient to take and place photoetching plate;At the same time, the positioning of plate frame is reliable and rapid, and the parallelism of photoetching plate and wafer is guaranteed.

Description

Technical Field

[0001] This utility model belongs to the field of plate component positioning technology, and particularly relates to a plate frame installation and positioning device. Background Technology

[0002] Currently, in wafer exposure and lithography processes, the positioning of the photomask stage is a crucial structure in exposure and lithography equipment, responsible for precisely placing the photomask in a predetermined position. Currently, the photomask stage is fixed to the equipment using a complex structure and is not easily removed. While this ensures a certain degree of parallelism between the photomask and the wafer, it is not conducive to the placement and removal of the photomask. Another approach is to allow easy removal of the stage, which facilitates photomask placement and removal, but the stage positioning process is complex, inefficient, and cannot guarantee the parallelism between the photomask and the wafer. Utility Model Content

[0003] This invention provides a plate and frame mounting and positioning device to facilitate easy placement and precise and rapid positioning, while ensuring the parallelism between the photomask and the wafer.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a plate and frame installation and positioning device, including a positioning seat, a working groove provided on the positioning seat, one end of the working groove penetrating the end face of the positioning seat, and multiple support wheels arranged in a straight line rotatably installed on both sides of the positioning seat located in the working groove.

[0005] Both sides of the positioning seat located in the working groove are rotatably mounted with clamping seats, which are arranged at the through end of the working groove; one end of the clamping seat is rotatably mounted with a clamping wheel, and the other end is hinged to a linear power element.

[0006] As an improvement, a plurality of limit wheels arranged in a straight line are rotatably mounted on the positioning seat located above the support wheel, and a channel for pull-out assembly and disassembly is formed between the limit wheels and the support wheel.

[0007] As a further improvement, multiple clearance slots are provided on both sides of the positioning seat located in the working slot, and guide wheels are rotatably installed in the clearance slots.

[0008] As a further improvement, mounting seats are installed on both sides of the positioning seat located in the working groove, and the mounting seats are equipped with the support wheel, the clamping seat, the linear power element, the limiting wheel and the guide wheel.

[0009] As a further improvement, a wheel seat is provided on the positioning seat on the side opposite to the through end of the working groove, and a support wheel is rotatably mounted on the wheel seat. The support wheel and the two pressing wheels are arranged in an equilateral triangle.

[0010] As a further improvement, micrometers are fixedly installed on both mounting bases and the wheel base, and the three micrometers are arranged in an equilateral triangle, with each micrometer having an adjusting rod.

[0011] After adopting the above technical solution, the effect of this utility model is:

[0012] The plate frame mounting and positioning device includes a positioning seat with a working groove. One end of the working groove passes through the end face of the positioning seat. Multiple support rollers arranged in a straight line are rotatably mounted on both sides of the positioning seat located in the working groove. A clamping seat is also rotatably mounted on both sides of the positioning seat located in the working groove, and the clamping seat is arranged at the through end of the working groove. A clamping wheel is rotatably mounted on one end of the clamping seat, and a linear power element is hinged to the other end. Based on the above structure, in use, the plate frame on which the photolithography plate is placed is placed on the support rollers, and the plate frame moves inward by rotating the support rollers. Then, the clamping seat is driven by the linear power element to swing. During the swing, the clamping wheel abuts against the end face of the plate frame, causing the plate frame to continue to move inward and be clamped and positioned on the positioning seat.

[0013] In summary, the use of this board frame mounting and positioning device enables the pull-out assembly and disassembly of the board frame, which not only makes it convenient to pick up and put down the board frame, but also facilitates the handling of the photomask; at the same time, the positioning of the board frame is reliable and rapid, and the parallelism between the photomask and the wafer is guaranteed.

[0014] Because multiple limit wheels arranged in a straight line are rotatably installed on the positioning seat above the support roller, a channel for the plate frame to be pulled out and disassembled is formed between the limit wheels and the support roller. The limit wheels block and restrict the upper surface of the plate frame, so that the plate frame can only slide in the channel, which helps to improve positioning accuracy.

[0015] Because the positioning seat located in the working slot has multiple clearance slots on both sides, and guide wheels are rotatably installed in the clearance slots, the plate frame is guided by the guide wheels on both sides when it moves inward, thus avoiding the problem of wear caused by contact between the positioning seat and the plate frame, as well as large-angle sway.

[0016] Since mounting seats are installed on both sides of the positioning seat located in the working slot, and the mounting seats are equipped with support wheels, clamping seats, linear power components, limit wheels and guide wheels, the problem of damage between the plate frame and the positioning seat is further avoided by the mounting seats; at the same time, the problem of inconvenience in processing and assembling all components in the positioning seat is solved.

[0017] Because the positioning seat on the opposite side of the through end of the working groove is equipped with a wheel seat, and a support wheel is rotatably mounted on the wheel seat, the support wheel and the two pressing wheels are arranged in an equilateral triangle, so that the plate frame is surrounded by the support wheel, the pressing wheel and the supporting wheel, which helps to improve the positioning accuracy and parallelism accuracy.

[0018] Since micrometers are fixedly installed on both mounting bases and the wheel base, and the three micrometers are arranged in an equilateral triangle, each micrometer is equipped with an adjusting rod. When the clamping wheel pushes the plate frame inward, it will contact the support wheel. In actual use, the plate frame end face corresponding to the clamping wheel and the support wheel has an inclined surface. When the clamping wheel continuously applies pressure to the plate frame, the inclined surface will cause the plate frame to move upward (i.e., the plate frame moves inward and upward at the same time) until it abuts against the adjusted adjusting rod, thereby completing the leveling of the plate frame and effectively ensuring the parallelism between the wafer and the photomask. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 yes Figure 1 A structural diagram from another angle;

[0022] Figure 3 yes Figure 2 Enlarged view of A in the middle;

[0023] Among them, 1-positioning seat; 101-working groove; 102-avoidance groove; 2-supporting wheel; 3-pressing seat; 301-pressing wheel; 302-linear power element; 4-limiting wheel; 5-guide wheel; 6-mounting seat; 7-wheel seat; 701-support wheel; 8-micrometer; 801-adjusting top rod. Detailed Implementation

[0024] The present invention will be further described in detail below through specific embodiments.

[0025] like Figures 1 to 3 As shown, a plate frame mounting and positioning device includes a positioning seat 1, which has a working groove 101. One end of the working groove 101 passes through the end face of the positioning seat 1. Multiple support rollers 2 arranged in a straight line are rotatably mounted on both sides of the positioning seat 1 located in the working groove 101. A clamping seat 3 is also rotatably mounted on both sides of the positioning seat 1 located in the working groove 101. The clamping seat 3 is arranged at the through end of the working groove 101. A clamping wheel 301 is rotatably mounted on one end of the clamping seat 3, and a linear power element 302 is hinged to the other end. The linear power element 302 is a linear drive component such as a cylinder and is hinged to the positioning seat 1.

[0026] Multiple limiting wheels 4 arranged in a straight line are rotatably mounted on the positioning seat 1 located above the supporting wheel 2. The limiting wheels 4 and the supporting wheel 2 form a channel for pulling and disassembling the plate frame (not shown in the figure).

[0027] Preferably, the positioning seat 1 located in the working groove 101 is provided with multiple clearance grooves 102 on both sides, and a guide wheel 5 is rotatably installed in the clearance groove 102.

[0028] In this scheme, mounting seats 6 are installed on both sides of the positioning seat 1 located in the working groove 101. The mounting seats 6 are equipped with support wheels 2, clamping seats 3, linear power elements 302, limit wheels 4 and guide wheels 5.

[0029] A wheel seat 7 is provided on the positioning seat 1 opposite to the through end of the working groove 101. A support wheel 701 is rotatably mounted on the wheel seat 7. The support wheel 701 and the two pressing wheels 301 are arranged in an equilateral triangle. Micrometers 8 are fixedly mounted on the two mounting seats 6 and the wheel seat 7. The three micrometers 8 are arranged in an equilateral triangle. Each micrometer 8 is provided with an adjusting rod 801.

[0030] The above-described embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Any modifications and alterations to the technical solution of the present utility model without departing from its design spirit shall fall within the protection scope defined by the claims of the present utility model.

Claims

1. A plate and frame mounting and positioning device, comprising a positioning base, characterized in that: The positioning seat is provided with a working groove, one end of which passes through the end face of the positioning seat. Multiple support wheels arranged in a straight line are rotatably installed on both sides of the positioning seat located in the working groove. Both sides of the positioning seat located in the working groove are rotatably mounted with clamping seats, which are arranged at the through end of the working groove; one end of the clamping seat is rotatably mounted with a clamping wheel, and the other end is hinged to a linear power element.

2. The plate frame mounting and positioning device as described in claim 1, characterized in that: Multiple limiting wheels arranged in a straight line are rotatably mounted on the positioning seat located above the supporting wheel, and a channel for pull-out assembly and disassembly is formed between the limiting wheels and the supporting wheel.

3. The plate frame mounting and positioning device as described in claim 2, characterized in that: The positioning seat located in the working slot has multiple clearance slots on both sides, and guide wheels are rotatably installed in the clearance slots.

4. The plate frame mounting and positioning device as described in claim 3, characterized in that: Mounting seats are installed on both sides of the positioning seat located in the working groove. The mounting seats are equipped with the supporting wheel, the pressing seat, the linear power element, the limiting wheel and the guide wheel.

5. The plate frame mounting and positioning device as described in claim 4, characterized in that: A wheel seat is provided on the positioning seat opposite to the through end of the working groove, and a support wheel is rotatably mounted on the wheel seat. The support wheel and the two pressing wheels are arranged in an equilateral triangle.

6. The plate frame mounting and positioning device as described in claim 5, characterized in that: A micrometer is fixedly installed on both mounting bases and the wheel base. The three micrometers are arranged in an equilateral triangle, and each micrometer is equipped with an adjusting rod.

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