Wafer scratch prevention jig

Abstract

The utility model relates to the field of wafer production technology discloses a kind of wafer scratch-preventing jigs, including base, the top of base is fixedly connected with first mounting plate, the inner wall of first mounting plate is slidably connected with multiple sliding plates, the top of multiple sliding plates is fixedly connected with guide rail, the outer wall of guide rail is slidably connected with transition bridge box, multiple through holes are arranged in the inner wall of transition bridge box, the top of first mounting plate is fixedly connected with multiple fixed blocks in proximity edge, the side of multiple fixed blocks is fixedly connected with shaft sleeve, the inner wall of shaft sleeve is rotatably connected with bolt, the outer wall of bolt is fixedly connected with handle, the front and rear sides of transition bridge box are fixedly connected with handle. In the utility model, when working, transition bridge box position needs to be adjusted, first push handle, then through the mutual cooperation between subsequent parts, finally wafer is placed on the placing bridge plate of the inner wall of transition bridge box, wafer is directly contacted by placing bridge plate, and scratch is prevented.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a wafer anti-scratch fixture. Background Technology

[0002] Wafer anti-scratch fixtures play a crucial role in the manual handling, transfer, and temporary storage of wafers. They assist in wafer retrieval by providing stable support, isolation, protection, and precise guidance, thus protecting wafers from scratches and managing related accessories in an orderly manner. This allows operators to quickly access wafers and avoids wafer breakage and defects caused by direct contact and collisions. Wafer anti-scratch fixtures are widely used in semiconductor factories at wafer cassette manual handling stations, wafer inspection pre-processing stages, and scenarios involving the temporary transfer of small batches of wafers.

[0003] When wafer handling is assisted by stable support, isolation protection, and precise guidance to achieve scratch protection and orderly management of related accessories, wafer scratch protection fixtures are required. Existing wafer scratch protection fixtures are mostly integrated fixed structures and simple splicing designs, lacking the flexibility to adapt to different wafer cassette sizes. Moreover, the protected area is mostly made of a single material. When manually handling wafers, it is easy for the operator to scratch the next wafer when lifting it from the wafer cassette, resulting in broken wafers and defective products. This will significantly increase production costs, reduce product quality, and shorten the service life. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a wafer anti-scratch fixture, which aims to improve the problem that lifting the wafer during pick-up and drop-off will scratch the next wafer in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a wafer anti-scratch fixture, comprising a base, a first mounting plate fixedly connected to the top of the base, a plurality of sliding plates slidably connected to the inner wall of the first mounting plate, a guide rail fixedly connected to the top of each of the plurality of sliding plates, a transition bridge box slidably connected to the outer wall of the guide rail, a plurality of through holes opened in the inner wall of the transition bridge box, a plurality of fixing blocks fixedly connected to the top of the first mounting plate near the edge, a bushing fixedly connected to the opposite side of the plurality of fixing blocks, a pin rotatably connected to the inner wall of the bushing, a handle fixedly connected to the outer wall of the pin, handles fixedly connected to the front and rear sides of the transition bridge box, and a plurality of placement bridge plates fixedly connected to the inner wall of the transition bridge box.

[0006] As a further description of the above technical solution: A second mounting plate is fixedly connected to the top left side of the base, and the inner wall of the second mounting plate has multiple weight-reducing grooves.

[0007] As a further description of the above technical solution: A positioning post is fixedly connected to the top of the base near the edge, and the outer wall of the positioning post is slidably connected to the inner wall of the second mounting plate.

[0008] As a further description of the above technical solution: The inner wall of the positioning column is slidably connected to a mating interface, and a storage box is fixedly connected to the top of the mating interface.

[0009] As a further description of the above technical solution: The top of the second mounting plate is fixedly connected with multiple pads, and the top of the second mounting plate near the edge is fixedly connected with multiple support columns.

[0010] As a further description of the above technical solution: Each of the support columns has a storage compartment fixedly connected to its top, and the outer wall of the storage compartment is fixedly connected to the inner wall of the storage box.

[0011] As a further description of the above technical solution: The storage box is fixedly connected to hooks on both the front and back sides, and a carrying strap is fixedly connected to the inner wall of the hooks.

[0012] As a further description of the above technical solution: A sliding baffle is slidably connected to the left side of the storage box, and an identification plate is fixedly connected to the outer wall of the sliding baffle.

[0013] This utility model has the following beneficial effects: 1. In this utility model, during operation, the base serves as a stable foundation, and the first mounting plate on top provides support for subsequent components. When the position of the transition bridge box needs to be adjusted, the handle is pushed, and the guide rail at the bottom of the transition bridge box slides along the inner wall of the first mounting plate with the sliding plate, achieving precise position adjustment. After the position is determined, the handle on the outer wall of the pin is rotated, causing the pin to rotate along the inner wall of the bushing and insert into the through hole of the transition bridge box. The bushing is fixed by the fixing block on the first mounting plate, thereby locking the transition bridge box. Finally, the wafer is placed on the placement bridge plate on the inner wall of the transition bridge box. The placement bridge plate avoids direct contact between the wafer and the wafer, and at the same time, its anti-static properties ensure the safe placement and transfer of the wafer, preventing scratches, improving product quality, and increasing service life. Attached Figure Description

[0014] Figure 1 This is a front perspective view of a wafer anti-scratch fixture proposed in this utility model; Figure 2 This is a side view of a wafer anti-scratch fixture proposed in this utility model; Figure 3This is a partial structural diagram of a wafer anti-scratch fixture proposed in this utility model; Figure 4 This is a schematic diagram of the second mounting plate of a wafer anti-scratch fixture proposed in this utility model; Figure 5 This is a cross-sectional view of a wafer anti-scratch fixture proposed in this utility model; Figure 6 This is a schematic diagram of the pin of a wafer anti-scratch fixture proposed in this utility model; Figure 7 This is a partial structural exploded view of a wafer anti-scratch fixture proposed in this utility model.

[0015] Legend: 1. Base; 2. First mounting plate; 3. Sliding plate; 4. Guide rail; 5. Transition bridge box; 6. Through hole; 7. Fixing block; 8. Bushing; 9. Pin; 10. Turn handle; 11. Handle; 12. Bridge plate placement; 13. Second mounting plate; 14. Weight reduction groove; 15. Positioning post; 16. Connecting interface; 17. Pad; 18. Support post; 19. Storage box; 20. Storage compartment; 21. Hook; 22. Lifting strap; 23. Sliding baffle; 24. Identification plate. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see the appendix Figure 2 Appendix Figure 6 and attached Figure 7 An embodiment of this utility model provides a wafer anti-scratch fixture, including a base 1, a first mounting plate 2 fixedly connected to the top of the base 1, a plurality of sliding plates 3 slidably connected to the inner wall of the first mounting plate 2, a guide rail 4 fixedly connected to the top of each of the plurality of sliding plates 3, a transition bridge box 5 slidably connected to the outer wall of the guide rail 4, a plurality of through holes 6 opened in the inner wall of the transition bridge box 5, a plurality of fixing blocks 7 fixedly connected to the top of the first mounting plate 2 near the edge, a bushing 8 fixedly connected to the side of the plurality of fixing blocks 7 that is far away from each other, a pin 9 rotatably connected to the inner wall of the bushing 8, a handle 10 fixedly connected to the outer wall of the pin 9, a handle 11 fixedly connected to the front and rear sides of the transition bridge box 5, and a plurality of placement bridge plates 12 fixedly connected to the inner wall of the transition bridge box 5. Specifically, the base 1 stably supports the weight of the entire device, providing a stable mounting base for all components above, preventing jig wobbling during use, and ensuring stability during wafer handling. The first mounting plate 2, fixedly connected to its top, serves as a mounting carrier for the sliding structure and, through its flat surface, ensures the installation of subsequent components, providing a foundation for wafer handling. Multiple sliding plates 3, slidably connected to the inner wall of the first mounting plate 2, flexibly adjust their positions along the inner wall, thereby driving the top-fixed guide rail 4 to move synchronously. The stable horizontal direction of the guide rail 4 provides guidance for the transition bridge box 5 during position adjustment, preventing displacement that could damage the wafer during handling, ensuring smooth and precise movement, and avoiding wafer collisions due to displacement. Box 5 is the core area for temporary placement and transport of wafers. The fixing block 7 provides mounting points for the bushing 8. Multiple through holes 6 are opened on its inner wall. The pins 9 connected to the inner wall of the bushing 8 are inserted to achieve connection and fixation, preventing the horizontal displacement of the transition bridge box 5. The handle 10 fixed on the outer wall of the pin 9 can be manually rotated to control the movement of the pin 9, completing quick fixing and unlocking, improving the operating efficiency of the fixture. The handles 11 fixed on the front and rear sides of the transition bridge box 5 make it convenient for operators to manually move and adjust the position, improving the ease of operation. The multiple placement bridge plates 12 fixed on its inner wall are the carriers for direct placement of wafers, preventing direct contact between wafers from causing scratches. At the same time, the anti-static material of the bridge plates themselves prevents static electricity from attracting impurities and causing secondary scratches.

[0018] Please see the appendix Figure 3 Appendix Figure 4 and attached Figure 7 A second mounting plate 13 is fixedly connected to the top left side of the base 1. The inner wall of the second mounting plate 13 is provided with multiple weight reduction grooves 14. The inner wall of the positioning column 15 is slidably connected to the interface 16. The top of the interface 16 is fixedly connected to the storage box 19. The top of the base 1 is fixedly connected to the positioning column 15 near the edge. The outer wall of the positioning column 15 is slidably connected to the inner wall of the second mounting plate 13. Specifically, the second mounting plate 13 is fixed to the top left side of the base 1, and can form a cooperative support with the first mounting plate 2 to enhance the load-bearing stability of the top of the fixture. At the same time, it provides a mounting carrier for the subsequent positioning components. The multiple weight-reducing grooves 14 opened on its inner wall can reduce the overall weight of the fixture while ensuring the structural strength of the second mounting plate 13, making it easier for operators to move and adjust. The positioning post 15 at the top edge of the base 1 has its outer wall slidably connected to the inner wall of the second mounting plate 13, which can guide and limit the position of the second mounting plate 13 to prevent it from shifting. The interface 16 slidably connected to the inner wall of the positioning post 15 can accurately align with the storage box 19, and the storage box 19 is fixed on the top of the interface 16 and can be used to store wafers, improving the ease of use of the fixture.

[0019] Please see the appendix Figure 1 AppendixFigure 4 and attached Figure 5 Multiple pads 17 are fixedly connected to the top of the second mounting plate 13. Multiple support columns 18 are fixedly connected to the top of the second mounting plate 13 near the edge. Storage compartments 20 are fixedly connected to the top of each of the multiple support columns 18. The outer wall of the storage compartment 20 is fixedly connected to the inner wall of the storage box 19. Specifically, the multiple pads 17 on the top of the second mounting plate 13 can elevate the components above, preventing direct friction between the components and the second mounting plate 13, while filling gaps and enhancing structural stability. The multiple support pillars 18 at the top edge can firmly support the storage cell 20 at the top, ensuring that the storage cell 20 is installed flat and preventing deformation due to uneven force. The outer wall of the storage cell 20 is fixed to the inner wall of the storage box 19 and installed on both sides of the inner wall of the storage cell 20, which facilitates the classified storage of wafers, improves storage orderliness, and makes retrieval more convenient.

[0020] Please see the appendix Figure 1 Appendix Figure 3 and attached Figure 7 The storage box 19 is fixedly connected to the front and rear sides with hooks 21, and the inner wall of the hooks 21 is fixedly connected with a carrying strap 22. The left side of the storage box 19 is slidably connected with a sliding baffle 23, and the outer wall of the sliding baffle 23 is fixedly connected with a sign 24. Specifically, the hooks 21 on the front and rear sides of the storage box 19 serve as a fixed carrier for the carrying strap 22, which can stably install the carrying strap 22 on the storage box 19. Operators can easily move the storage box 19 through the carrying strap 22, avoiding direct contact with the box body and causing the parts to fall. The sliding baffle 23 on the left side of the storage box 19 makes it easy to change the identification information of the wafers being moved. The label 24 on its outer wall makes it easy to mark the type of parts, allowing users to quickly identify the items in the box and improve operational efficiency.

[0021] Working Principle: Firstly, the base 1 serves as a stable support foundation for the entire device. Its robust structural design effectively counteracts external impacts during operation, preventing fixture wobbling. The first mounting plate 2, fixed to the top of the base 1, provides a precise mounting base for subsequent components, ensuring accurate alignment of each part. When the transition bridge box 5 needs adjustment based on the wafer cassette position, the operator grasps the handles 11 on the front and rear sides of the transition bridge box 5 and applies force. The guide rail 4 at the bottom of the transition bridge box 5 drives the sliding plate 3 to slide smoothly along the groove on the inner wall of the first mounting plate 2. The guiding effect of the guide rail 4 prevents the transition bridge box 5 from shifting, achieving precise positioning. After the position is adjusted and determined, rotate the handle 10 on the outer wall of the pin 9 so that the pin 9 rotates and pushes along the inner wall of the bushing 8 on the outer side of the fixing block 7 and inserts into the through hole 6 of the transition bridge box 5. The sliding connection between the fixing block 7 and the bushing 8, with the beveled surface of the bushing 8, can prevent the pin 9 from shifting during operation, thus avoiding displacement of the transition bridge box 5 during wafer handling, which would affect the handling process and damage the wafer surface. Finally, place the wafers one by one on the placement bridge plate 12 on the inner wall of the transition bridge box 5. At the same time, its anti-static material can prevent static electricity from attracting impurities, ultimately achieving safe placement and transmission of the wafers and preventing scratches.

[0022] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer anti-scratch fixture, comprising a base (1), characterized in that: The base (1) is fixedly connected to the top of a first mounting plate (2). Multiple sliding plates (3) are slidably connected to the inner wall of the first mounting plate (2). Guide rails (4) are fixedly connected to the top of each of the multiple sliding plates (3). A transition bridge box (5) is slidably connected to the outer wall of the guide rails (4). Multiple through holes (6) are opened on the inner wall of the transition bridge box (5). Multiple fixing blocks (7) are fixedly connected to the top of the first mounting plate (2) near the edge. A bushing (8) is fixedly connected to the opposite side of the multiple fixing blocks (7). A pin (9) is rotatably connected to the inner wall of the bushing (8). A handle (10) is fixedly connected to the outer wall of the pin (9). Handles (11) are fixedly connected to the front and rear sides of the transition bridge box (5). Multiple placement bridge plates (12) are fixedly connected to the inner wall of the transition bridge box (5).

2. The wafer anti-scratch fixture according to claim 1, characterized in that: The second mounting plate (13) is fixedly connected to the top left side of the base (1), and the inner wall of the second mounting plate (13) is provided with multiple weight reduction grooves (14).

3. The wafer anti-scratch fixture according to claim 1, characterized in that: A positioning post (15) is fixedly connected to the top of the base (1) near the edge, and the outer wall of the positioning post (15) is slidably connected to the inner wall of the second mounting plate (13).

4. The wafer anti-scratch fixture according to claim 3, characterized in that: The inner wall of the positioning column (15) is slidably connected to the interface (16), and the top of the interface (16) is fixedly connected to the storage box (19).

5. A wafer anti-scratch fixture according to claim 2, characterized in that: The top of the second mounting plate (13) is fixedly connected with a plurality of pads (17), and the top of the second mounting plate (13) near the edge is fixedly connected with a plurality of support columns (18).

6. A wafer anti-scratch fixture according to claim 5, characterized in that: Each of the support columns (18) has a storage compartment (20) fixedly connected to its top, and the outer wall of the storage compartment (20) is fixedly connected to the inner wall of the storage box (19).

7. A wafer anti-scratch fixture according to claim 4, characterized in that: The storage box (19) is fixedly connected to hooks (21) on both the front and back sides, and the inner wall of the hooks (21) is fixedly connected to a carrying strap (22).

8. A wafer anti-scratch fixture according to claim 4, characterized in that: A sliding baffle (23) is slidably connected to the left side of the storage box (19), and an identification plate (24) is fixedly connected to the outer wall of the sliding baffle (23).

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