Primary vacuum pump with pressure sensing device

Abstract

A primary vacuum pump (100) is described, comprising: i) a pressure sensing device (110) for sensing a pressure relative to the primary vacuum pump (100); and ii) a control device (120) coupled to the pressure sensing device (110) and configured to control the primary vacuum pump (100) at least partially based on the sensed pressure; wherein the primary vacuum pump (100) is designed as a separate device.

Description

FIELD OF THE INVENTION

[0001] The present invention relates to a primary vacuum pump, comprising: a pressure sensing device for sensing a pressure relative to the primary vacuum pump, and a control device coupled to the pressure sensing device and configured to control the primary vacuum pump at least partially based on the sensed pressure, wherein the primary vacuum pump is configured as a standalone device. Furthermore, the present invention relates to a method for operating a primary vacuum pump. TECHNICAL BACKGROUND

[0002] There are a variety of technical applications in which a vacuum is created using one or more vacuum pumps. A vacuum pump is used, in particular, to create or maintain a vacuum by removing gases, vapors, molecules, atoms, or ions from an enclosed space (the system to be evacuated). A vacuum pump can be used in various applications to achieve a low pressure range required for specific processes. A distinction can be made between primary vacuum pumps and secondary vacuum pumps.

[0003] The term “primary vacuum pump” can in particular refer to a pump used to reduce the pressure in a system from atmospheric pressure to a medium vacuum range (e.g. 1 bar to 10 -3mbar), i.e., a backing vacuum. These pumps are generally robust and can remove large quantities of gas quickly. One advantage of a primary vacuum pump is its ability to generate a significant pressure drop in a short time. An example of a primary vacuum pump could be a rotary vane pump or a scroll pump.

[0004] The term "secondary vacuum pump" can specifically refer to a pump used to reduce the pressure in a system from a medium vacuum range to a high or ultra-high vacuum range. These pumps are often more sensitive and specialized than primary vacuum pumps and are used after the primary pump has already significantly reduced the pressure (thus, secondary vacuum pumps cannot be used independently). One advantage of a secondary vacuum pump is its ability to achieve extremely low pressures required for specific applications. An example of a secondary vacuum pump might be a turbomolecular pump or an ion pump.

[0005] In operation, a primary vacuum pump is typically connected to the system being evacuated and begins pumping until a desired low pressure is reached. Operation is usually monitored, if at all, by the system being evacuated. REVELATION

[0006] There may be a need to operate a primary vacuum pump efficiently.

[0007] The object is achieved by means of the independent claims. Further embodiments are shown in the dependent claims.

[0008] According to one embodiment of the invention, a primary vacuum pump (e.g. a rotary vane pump) is described, comprising: i) a pressure sensing device (e.g. a pressure sensor) for detecting / measuring a pressure relative to the primary vacuum pump (in particular in an inlet area or on the suction side). ii) a control device (e.g., a processor, a system controller, an electronics, a hardware and / or software) coupled to the pressure sensing device (signal-wise) and configured to control the primary vacuum pump at least partially based on the sensed pressure (in particular with regard to the pumping speed). iii) The primary vacuum pump is preferably designed as a stand-alone device (e.g. with its own motor, independent of other devices, etc.).

[0009] According to a further embodiment of the invention, a system to be evacuated, e.g. an analysis device (e.g. a chromatography device), is described, comprising: a primary vacuum pump as described above, wherein the primary vacuum pump is coupled to the system, in particular the analysis device (e.g. connected in such a way that a vacuum can be provided with respect to the system, in particular the analysis device), and wherein the primary vacuum pump is operated or can be operated independently and independently of the system, in particular that of the analysis device.

[0010] According to a further embodiment of the invention, a method for operating a primary vacuum pump is described, the method comprising: i) detecting a pressure of the primary vacuum pump, and ii) controlling the primary vacuum pump, in particular the pumping speed, at least partially based on the detected pressure, iii) wherein the primary vacuum pump is operated as a standalone device (or is operated independently of other devices).

[0011] In the context of this document, the term "primary vacuum pump" can, in particular, refer to a pump or pumping device that is suitable for carrying out an initial evacuation of a system or for generating a base vacuum. In one embodiment, a primary vacuum pump can draw in air directly at normal pressure (atmosphere) (in particular, the intake side can be at normal pressure) and can therefore be used directly and independently of other devices / pumps. A primary vacuum pump can thus serve as a basis for reducing the pressure to a level that allows other, more specialized pumps (secondary vacuum pumps such as a turbomolecular pump) to operate efficiently. In one embodiment, a primary vacuum pump can draw in air or gas directly from the environment at atmospheric pressure. In one embodiment, a primary vacuum pump generates a rough / medium (pre-)vacuum in the range up to approximately 10 -2 or 10 -3mbar. Examples of primary vacuum pumps may include: rotary vane pumps (oil-lubricated or dry), scroll pumps, diaphragm pumps, piston pumps, and Roots pumps.

[0012] In the context of this document, the term "secondary vacuum pump" can in particular refer to a pump or pumping device that is suitable for achieving pressures in the (vacuum) system that are significantly below the operating range of a primary vacuum pump. It generally does not operate directly at atmospheric pressure, but requires a pre-vacuum generated by the primary vacuum pump. In contrast to a primary vacuum pump, the intake side of a secondary vacuum pump cannot be at atmospheric pressure, but requires a negative pressure. In one embodiment, a secondary vacuum pump generates a high vacuum (e.g., in the range 10 -3 mbar to 10 -7 mbar) or an ultra-high vacuum (e.g. greater than 10 -7mbar). Examples of secondary vacuum pumps can include turbomolecular pumps, diffusion pumps, and ion pumps (or ion getter pumps). Unlike a primary vacuum pump, a secondary vacuum pump cannot be operated independently of other devices / pumps or standalone.

[0013] In the context of this document, the term “standalone” can mean in particular that a primary vacuum pump functions or can function independently and without the need for additional external devices or systems. In one embodiment, the primary vacuum pump can be designed as a complete and inherently functional device that has all the necessary components and controls integrated, thus enabling standalone and independent operation. In one embodiment, the primary vacuum pump can have its own drive / motor and / or its own pump module to enable standalone or independent operation. In one embodiment, the primary vacuum pump can form a self-contained unit, in particular in which all functions for providing a primary vacuum are present.In one embodiment, the intake side can be coupled, in particular connected, directly (in particular immediately) to the (vacuum) system or the space to be evacuated. In one embodiment, evacuation of the space / system (which is separate from the primary vacuum pump) is possible with the primary vacuum pump without additional equipment (in other words: connection and evacuation). In a further embodiment, the stand-alone primary vacuum pump is configured to perform a self-test (in particular completely internally) independently of other devices. In a further embodiment, the stand-alone primary vacuum pump is configured to (independently) perform a test to determine whether a malfunction is caused in the primary vacuum pump itself or by another device.

[0014] In the context of the present document, the term "pressure sensing device" may, in particular, refer to a device capable of sensing a pressure associated with the primary vacuum pump. In one example, the device is configured to measure the current pressure (and forward this data to a control device). A pressure sensing device may, for example, comprise one or more pressure sensors. In one embodiment, the pressure sensing device may be configured to perform a self-test (at least partially autonomously).

[0015] In the context of the present document, the term "control device" can in particular refer to a device that is configured to control, in particular to regulate, the primary vacuum pump (at least partially) based on the pressure values ​​detected by the pressure detection device. This control can comprise various functions, such as adjusting the pump speed, triggering an alarm in the event of pressure deviations, or shutting down the pump to prevent contamination. The control device can thereby effect a dynamic adjustment of the pump performance and contribute to the efficiency and safety of the entire system. The control device can be a control unit of the primary vacuum pump. Furthermore, the control device can be implemented as one or more processors, a controller, or software. In a preferred embodiment, the control device is independent of other control components, e.g.a control unit of the (vacuum) system such as an analysis device.

[0016] According to an exemplary embodiment, the invention may be based on the idea that a primary vacuum pump can be operated efficiently if a pressure sensing device is provided (particularly in an inlet area) and a control device controls the primary vacuum pump based on the pressure sensed by the pressure sensing device. This allows the primary vacuum pump to operate independently of other devices, thereby increasing efficiency and reliability.

[0017] The pressure sensing device allows for continuous monitoring of the pump's operating status, enabling precise control and adjustment of pump parameters. One advantage can be the ability to adjust pump performance based on the actual pressure, which can lead to improved efficiency and reliability. Another advantage can be the ability to take immediate action in the event of pressure deviations, such as adjusting the pump speed or shutting down the pump to prevent contamination. The standalone design of the vacuum pump facilitates its integration and use in various applications without the need for additional external devices.

[0018] In one embodiment, the standalone primary vacuum pump can perform a self-test and thus independently and autonomously test / monitor its functionality. In another embodiment, the standalone functionality of the primary vacuum pump can enable the detection of a malfunction or operational problem, particularly as to whether this problem affects the primary vacuum pump or the system to be evacuated. EXEMPLARY IMPLEMENTATION EXAMPLES

[0019] In one embodiment, the pressure sensing device and the control device are signal-coupled. In other words, the coupling is designed such that signals / data / measured values ​​can be transmitted (one-sided or two-sided). In one example, measured pressure values ​​(with or without evaluation) can be sent from the pressure sensing device to the control device. In another example, the control device can provide specifications to the pressure sensing device, e.g., measurement parameters. In one embodiment, signals from the pressure sensing device are transmitted to the control device, or vice versa. In one embodiment, the signals are transmitted digitally. In one example, corresponding electronics are present in the primary vacuum pump for this purpose. In one example, the control device and the pressure sensing device are wired, e.g., via a cable or other data connection.In one example, the control device and the pressure sensing device are coupled wirelessly, e.g. via radio, WLAN, etc. In another example, the control device and the pressure sensing device are installed in the same unit.

[0020] In one embodiment, the primary vacuum pump has its own housing. In one embodiment, the primary vacuum pump has its own drive / motor (in particular arranged within its own housing). One advantage can be increased independence and flexibility of the pump because it is not dependent on external drive sources. In one embodiment, the primary vacuum pump has its own pump module (or pump components, e.g. a rotary vane) (in particular arranged within its own housing). One advantage is improved efficiency and performance of the pump because the pump module is specifically tailored to the requirements of the pump. In one embodiment, the primary vacuum pump has its own oil area (in particular arranged within its own housing).One benefit is improved lubrication and cooling of the pump, which can lead to longer service life and lower maintenance requirements.

[0021] In one embodiment, the primary vacuum pump is free and / or independent of any other device (e.g., another pump, an external control device, the system to be evacuated). One advantage is increased mobility and flexibility of use of the pump, as it is not tied to a specific device. In one embodiment, the primary vacuum pump forms a self-contained unit (particularly within the housing). One advantage is improved safety and cleanliness, as no external connections are required that could potentially leak. Furthermore, transportation and handling can be significantly improved.

[0022] In one embodiment, the intake side of the primary vacuum pump can be directly coupled, in particular immediately, to the space to be evacuated. In one embodiment, the intake side (or the inlet area) of the primary vacuum pump can be operated under normal pressure or atmospheric pressure. In one embodiment, the primary vacuum pump enables the evacuation of the space without additional equipment. In one embodiment, the inlet or inlet area is arranged in / on the housing.

[0023] In one embodiment, the primary vacuum pump is configured to independently provide the primary vacuum (in other words, without additional equipment). In one embodiment, the intake side of the primary vacuum pump can be in the normal pressure range during operation. In one embodiment, the standalone primary vacuum pump is capable of generating and maintaining a specific vacuum level without the support of additional pumps or additional equipment. In one embodiment, the standalone primary vacuum pump operates independently and does not require an upstream or downstream pump to reach or support its intended pressure range. In one embodiment, the primary vacuum pump can draw air or gases directly from a system. In one embodiment, the primary vacuum pump can independently generate the target vacuum within its operating range.In one embodiment, the primary vacuum pump does not require a backing pump or secondary pump to perform its function. In one embodiment, the primary vacuum pump contains all the necessary mechanisms, such as drive, control, and possibly cooling / lubrication, to operate independently.

[0024] In one embodiment, the primary vacuum pump is designed as at least one of the following: rotary vane pump, scroll pump, or Roots pump. These (non-exhaustive) primary vacuum pumps may be particularly well suited for standalone operation.

[0025] In one embodiment, a rotary vane pump has a housing with an eccentrically mounted rotor. The rotor may have (movable) rotary vanes that enclose the gas in chambers (between the vanes), compress it, and pump it toward the outlet. Oil is typically used for sealing and lubrication.

[0026] In one embodiment, a scroll pump uses two spiral elements: one spiral is fixed, while the other moves eccentrically. The gas is trapped between the spirals and gradually compressed. Unlike a rotary vane pump, a scroll pump can operate oil-free.

[0027] In one embodiment, a Roots pump uses two synchronized, counter-rotating pistons that move the gas from the intake side to the outlet side. The gas is not compressed but continuously pumped.

[0028] In one embodiment, the control device is configured to control and / or regulate the pumping speed based on the detected pressure. One advantage of this can be improved control of the pumping speed based on the current pressure, which can lead to more efficient and precise vacuum generation. Another advantage can be increased operational reliability, because the pump can automatically respond to pressure changes to ensure optimal operating conditions. An additional advantage can be a reduction in energy consumption, as the pumping speed can be adjusted to deliver only the necessary power.

[0029] In one embodiment, the primary vacuum pump, in particular the control device and / or the pressure sensing device, is configured to independently perform a self-test (for the primary vacuum pump) based on the sensed pressure. This can have the advantage that the primary vacuum pump can initially test its own functionality independently of other devices and also monitor it over the longer term. In one embodiment, when the vacuum pump is switched on, the pressure sensing device can record the (inlet-side) pressure and use this to determine, for example, the operating conditions and / or whether the device is functioning at all (without the need for additional devices). In one embodiment of a simple self-test, a blockage can be installed on the intake side, e.g., the intake flange is closed / sealed with a sheet metal piece or a plug.This minimizes the space to be evacuated and allows the pump to reach its maximum vacuum as quickly as possible.

[0030] In one embodiment, the control device is configured to detect, in particular to localize, an operational malfunction / operational problem and / or damage (in particular a leak, e.g. of oil) based on the detected pressure. This can have the advantage of enabling improved monitoring and control of the vacuum pump. For example, operational malfunctions can be detected at an early stage and, ideally, localized. Damage and leaks can be avoided through timely detection and reaction. If, for example, the speed increases and the pressure decreases at the same time, this can be an indication of a leak. In one embodiment, the control device can be configured to output an error diagnosis or error message at certain pressures or pressure profiles. Thus, in one embodiment, the advantageous functioning of the standalone primary vacuum pump can be adjusted to further operational malfunctions orDamage can be extended. In particular, such a diagnosis can be provided independently of other devices and therefore more reliably and accurately.

[0031] In one embodiment, the control device is configured to determine, based on the detected pressure, whether a malfunction is caused by the primary vacuum pump itself (or by another device, e.g., the system to be evacuated itself). One advantage may be improved monitoring of the operating conditions of the vacuum pump, whereby it can be determined whether a malfunction is due to the pump itself or another device. This can enable particularly reliable fault diagnosis and / or efficient troubleshooting. In particular, the primary vacuum pump and the system do not have to be disconnected from each other to diagnose the fault.

[0032] In one embodiment, the control device is configured to control at least one of the following based on the detected pressure: pump speed (pump speed), resistance, conductivity, power, and temperature. Based on the detected / monitored pressure, particularly efficient operation can be enabled. Vacuum pump parameters such as speed, temperature, etc. can be used as control variables.

[0033] In one embodiment, the control device is configured to monitor the operation of a backflow preventer valve based on the detected pressure. A backflow preventer valve can preferably be provided in the inlet area or the intake side of the vacuum pump and prevents backflow of gas into the system to be evacuated. Monitoring this valve can make operation more efficient and safer.

[0034] In one embodiment, the primary vacuum pump has an inlet (inlet region, suction region, suction side). In one embodiment, the pressure sensing device is coupled to an inlet, in particular being arranged on or in an inlet path (or inlet region). This configuration can make it possible to measure the pressure directly at the inlet of the vacuum pump, which can ensure precise and timely monitoring of the pressure level within the system. The inlet can serve as the interface through which the gas enters the pump, and coupling the pressure sensing device to this point can ensure that the sensed pressure corresponds to the actual operating conditions of the pump. Arranging the pressure sensing device in an inlet path can preferably provide particularly accurate measurements without obstructing the gas flow.

[0035] According to one embodiment, the coupling between the inlet (inlet area, in the path) and the pressure sensing device is sealed. This allows the pressure sensing device to be protected, e.g., from lubricants such as oil. In one embodiment, the pressure sensing device is resistant to lubricants, in particular oil and / or oil vapors. One advantage may be that the pressure sensing device has a longer service life and reliability due to its resistance to oil and / or oil vapors. Furthermore, potentially more reliable results can be achieved.

[0036] In one embodiment, the pressure sensing device comprises at least one pressure sensor. A variety of pressure sensors are known that can be implemented in the pressure sensing device, e.g., piezoelectric pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, inductive pressure sensors, optical pressure sensors, resonant pressure sensors, differential pressure sensors, thermal conductivity pressure sensors, or a combination of two or more sensors. In one embodiment, the at least one pressure sensor is configured / optimized for a primary vacuum.

[0037] In one embodiment, the control device is configured to determine, based on the detected pressure, whether a malfunction is caused by the primary vacuum pump itself or by the system to be evacuated, e.g., an analysis device. This allows for precise diagnosis of whether a malfunction originates from the primary vacuum pump or the system or analysis device. One advantage is improved maintenance efficiency through precise fault localization. This differentiation in fault diagnosis is based primarily on the advantageous autonomy of the primary pump according to the invention. Advantageously, in one example, the primary vacuum pump and the system or analysis device do not have to be separated from one another (particularly during operation).

[0038] In one embodiment, the operation of the primary vacuum pump is monitored, in particular exclusively, within the (control device of the) primary vacuum pump. This can have the advantage that malfunctions and / or damage can be localized more efficiently and accurately. In particular, it can be determined whether a fault occurs in the primary vacuum pump or at another location.

[0039] In an exemplary embodiment, at least one of the following features / advantages may be provided: a) pressure feedback when the pump is running, b) speed variation based on the pressure feedback, c) pressure feedback when the pump is stopped to check the backflow protection, d) immediate shutdown in case of insufficient pressure to avoid contamination.

[0040] In an exemplary embodiment, one aspect of the invention involves reading the pressure (and thus the pumping capacity) at the pump inlet. One idea could be to equip the inlet flange (or the pump body in the suction area) with a pressure sensor. This measuring device can be oil vapor-resistant, and its connections (cable harness) can be connected to the electronic control unit. The connection between the pressure sensor and the inlet flange (or housing) can be sealed (O-ring or vacuum sealant). A particular advantage can be that, during pump operation, it is always possible to determine whether the pump is functioning properly, thus ensuring the desired vacuum.

[0041] In an exemplary embodiment, if there is a pressure problem (e.g., caused by a pressure leak (O-ring problem) or oil below a certain level), an alarm can first be triggered that exceeds a certain threshold. Otherwise, the pump can be shut down to avoid contamination. To avoid stopping the analysis with the instruments, the pump can compensate for this pressure loss and increase the speed. In the event that the pressure level reached by the pump is not needed, a different threshold can be set so that the pump can reduce the pressure level (pressure increases) to reduce power consumption. When the pump is stopped (and kept connected to the main supply), the pump can check that the check valve is working properly.Even in this case, if the pressure exceeds a certain limit, the control device can give an alarm to the instrument to stop the contamination by oil vapors that flow back into the chamber, which must be kept clean.

[0042] In an exemplary embodiment, an important parameter of such a pump, e.g., a rotary vane pump, is the pumping speed, particularly the suction capacity. The suction capacity that a rotary vane pump can achieve depends, among other things, on: the geometric parameters of the rotor and the pump chamber (length, diameter, eccentricity), the conductivity of the inlet area, the rotor speed, the temperatures, and the flows or volumes to be pumped. If temperatures are ignored and the geometric parameters of the pump and the inlet pipe are fixed, one way to change the suction capacity of the pump is to adjust the rotor speed by controlling the electric motor accordingly. SHORT DESCRIPTION OF THE CHARACTERS

[0043] Other objects and many of the attendant advantages of embodiments of the present invention will be readily appreciated and better understood by reference to the following more detailed description of embodiments taken in conjunction with the accompanying drawings. Features that are substantially or functionally the same or similar are designated by the same reference numerals. Fig. 1 shows a primary vacuum pump using the example of a rotary vane pump, according to an exemplary embodiment of the invention. Fig. 2 shows in cross section the operation of a rotary vane pump in four phases, according to an exemplary embodiment of the invention. The Fig. 3A, Fig. 3B, and Fig. 3C show in plan view the operation of a specific rotary vane pump according to an exemplary embodiment of the invention. DETAILED DESCRIPTION OF THE FIGURES

[0044] The representation in the drawing is schematic.

[0045] Fig. 1 shows a primary vacuum pump 100 using the example of a rotary vane pump, according to an exemplary embodiment of the invention. The primary vacuum pump 100 comprises an inlet 130 (inlet area or intake side, here tubular in design) coupled to a pressure sensing device 110. In the example shown, the pressure sensing device 110 is arranged in / on the inlet path of the inlet 130 (here attached to the side wall) and connected to a control device 120. The pressure sensing device 110 is signal-coupled to the control device 120 via a signal connection or data connection 125. The control device is coupled to the pressure sensing device 110 and configured to control the primary vacuum pump 100 at least partially based on the sensed pressure.In the inlet path of the inlet 130, a non-return valve 140 is also arranged, the functioning of which can preferably be monitored by the pressure detection device 110.

[0046] The primary vacuum pump 100 is designed as a stand-alone device and includes its own housing (body) 152, its own motor (rotor 150), its own pump module (see rotary vane 151), and its own oil compartment. Also shown in this example are a laminate shutter 153, a float valve 154, and an oil filter 155. The pressure sensing device 110 is resistant to oil and oil vapors and enables monitoring of the pressure in the inlet 130. In particular, the inlet 130 can be connected directly to the system to be evacuated (not shown) under normal pressure conditions.

[0047] Fig. 2 shows, in cross-section, the operation of a rotary vane pump 100 according to an exemplary embodiment of the invention. The operating sequence of the vacuum pump 100 is shown in four phases. Phase 1: Gas flows through the inlet 130 into the rotor 150 area and is stopped by a rotary vane 151. Phase 2: The rotary vane 151 is rotated by the rotor 150, whereby the inlet 130 is blocked. Phase 3: Because the outlet 131 is additionally blocked, the gas is compressed between the rotary vanes 151. Phase 4: The outlet 131 is opened and the compressed gas flows out. After that, new gas can be sucked in and removed according to phase 1. During one or more of these steps, the pressure sensing device 110 can measure the pressure (in the inlet area 130) and the control device 120 can, for example, adjust the pumping speed or speed of the rotor 150.

[0048] The Fig. 3A, Fig. 3B, and Fig.3C shows a top view of the operation of a rotary vane pump 100 according to an exemplary embodiment of the invention. The inlet area 130 is raised so that the rotor 150 with the rotary vane 151 can be seen.

[0049] The design can be achieved by using two overlapping perforated discs in the pump's inlet flange. Rotating one of them (or both) can change the surface area through which the gas load can flow, thus altering the conductance of the inlet port. Another possibility is to provide only one disc and use the shape of the pump body. By driving this disc, the pump's pumping speed can be changed. This design can allow for flexible adjustment of the pumping speed, particularly based on the pressure measurements of the pressure sensing device. Reference symbol 100 Primary vacuum pump 110 Pressure sensing device 120 Control device 125 Signal coupling 130 entrance 131 Outlet 140 Non-return valve 150 rotor 151 rotary valve 152 Body, housing 153 laminate roller shutters 154 Float valve 155 Oil filter

Claims

[1] A primary vacuum pump (100) comprising: a pressure detecting device (110) for detecting a pressure relative to the primary vacuum pump (100); and a control device (120) coupled to the pressure sensing device (110) and configured to control the primary vacuum pump (100) based at least in part on the sensed pressure; wherein the primary vacuum pump (100) is designed as a stand-alone device. [2] The primary vacuum pump (100) according to claim 1, wherein the pressure detection device (110) and the control device (120) are signal-coupled, in particular such that signals from the pressure detection device (110) are transmitted to the control device (120), further in particular digitally. [3] The primary vacuum pump (100) according to claim 1 or 2, comprising at least one of the following features: its own housing (152); its own motor, in particular arranged within its own housing (152); a separate pump module, in particular arranged within the separate housing (152); a separate oil area, in particular arranged within the separate housing (152); free and / or independent of any other device; forms a closed unit, in particular within its own housing (152); an inlet, in particular the intake side, can be coupled, in particular connected, directly, in particular immediately, to the space to be evacuated, wherein the inlet is arranged in particular on its own housing (152); enables evacuation of a system separate from the primary vacuum pump (100) without additional equipment. [4] The primary vacuum pump (100) according to one of the preceding claims, configured to independently provide the primary vacuum, in particular wherein the inlet, in particular the suction side, of the primary vacuum pump can be in the normal pressure range during operation. [5] The primary vacuum pump (100) according to one of the preceding claims, designed as at least one of the following: rotary vane pump, scroll pump, roots pump, diaphragm pump, piston pump. [6] The primary vacuum pump (100) according to any one of the preceding claims, wherein the control device (120) is configured to control and / or regulate the pumping speed based on the detected pressure. [7] The primary vacuum pump (100) according to one of the preceding claims, wherein the primary vacuum pump (100), in particular the control device (120) and / or the pressure detection device (110), is configured to independently perform a self-test for the primary vacuum pump (100) based on the detected pressure. [8] The primary vacuum pump (100) according to one of the preceding claims, wherein the control device (120) is configured to detect, in particular to localize, an operational malfunction and / or damage, in particular a leak, based on the detected pressure. [9] The primary vacuum pump (100) according to any one of the preceding claims, wherein the control device (120) is configured to determine, based on the detected pressure, whether a malfunction is caused by the primary vacuum pump (100) itself. [10] The primary vacuum pump (100) according to any one of the preceding claims, wherein the control device (120) is configured to control at least one of the following based on the detected pressure: Pump speed, resistance, conductivity, temperature. [11] The primary vacuum pump (100) according to any one of the preceding claims, wherein the control device (120) is configured to monitor the operation of a check valve (140) based on the sensed pressure. [12] The primary vacuum pump (100) according to any one of the preceding claims, further comprising: an inlet (130), wherein the pressure sensing device (110) is coupled to the inlet (130), in particular arranged on / in an inlet path / suction path. [13] The primary vacuum pump (100) according to any one of the preceding claims, wherein the coupling between the inlet (130) and the pressure sensing device (110) is sealed. [14] The primary vacuum pump (100) according to any one of the preceding claims, wherein the pressure sensing device (110) is resistant to oil and / or oil vapors. [15] The primary vacuum pump (100) according to any one of the preceding claims, wherein the control device (120) comprises independent electronics for signal processing. [16] The primary vacuum pump (100) according to any one of the preceding claims, wherein the pressure sensing device (110) comprises a pressure sensor. [17] An analysis device comprising: a primary vacuum pump (100) according to any one of the preceding claims; wherein the primary vacuum pump (100) is coupled to the analysis device, and wherein the primary vacuum pump (100) is operated independently and independently of the analysis device. [18] The analysis device according to claim 17, wherein the control device (120) is arranged to determine, based on the detected pressure, whether a malfunction is caused by the primary vacuum pump (100) itself or by the analysis device, in particular without disconnecting the primary vacuum pump (100) from the analysis device. [19] A method of operating a primary vacuum pump (100), the method comprising: Detecting a pressure of the primary vacuum pump (100); and Controlling the primary vacuum pump (100), in particular the pumping speed, based at least in part on the sensed pressure; wherein the primary vacuum pump (100) is operated as a standalone device. [20] The method according to claim 19, wherein the operation of the primary vacuum pump (100) is monitored, in particular exclusively, within the primary vacuum pump (100).

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