Fabry-perot interference filter

Abstract

To provide a Fabry-Perot interference filter that can stably prevent the occurrence of sticking of a first reflection film and a second reflection film.SOLUTION: A Fabry-Perot interference filter 1 comprises: a first reflection film 50; a second reflection film 60; a first layer 10 that supports the first reflection film 50 in a movable part 10a; a third layer 30 that supports the second reflection film 60; and a plurality of projections 80 that are arranged on a surface 14b of the movable part 10a or a surface 31a of the third layer 30. When the plurality of projections 80 are arranged on the surface 31a, the second reflection film 60 covers the entirety of the projections 80 on the surface 31a, an outer edge of the second reflection film 60 is located inside a joining area of the first layer 10 and the third layer 30 when seen from a Z-axis direction, and a portion of the second reflection film 60 located above the projection 80 faces the surface 14b or the first reflection film 50 in the Z-axis direction.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a Fabry-Perot interference filter. [Background technology]

[0002] A Fabry-Perot interference filter is known that includes a first substrate, a second substrate stacked on the first substrate, a first reflective film arranged on a first surface of the first substrate facing the second substrate, a second reflective film arranged on a second surface of the second substrate facing the first substrate across a space, a plurality of first convex portions arranged on the first surface so as to surround the first reflective film, and a plurality of second convex portions arranged on the second surface so as to surround the second reflective film and face the plurality of first convex portions across a space, in which a portion of the first substrate that supports the first reflective film and the plurality of first convex portions is configured as a movable portion for changing the distance between the first reflective film and the second reflective film (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-164069 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned Fabry-Perot interference filter, the distance between the multiple first convex portions and the multiple second convex portions is smaller than the distance between the first reflection film and the second reflection film. Therefore, when the first reflection film approaches the second reflection film, the multiple first convex portions come into contact with the multiple second convex portions before the first reflection film comes into surface contact with the second reflection film. This suppresses the occurrence of sticking between the first reflection film and the second reflection film (a phenomenon in which the first reflection film and the second reflection film stick to each other due to intermolecular forces, etc.).

[0005] However, in the above-mentioned Fabry-Perot interference filter, the first convex portions may fall off from the first surface of the first substrate due to a difference in thermal expansion coefficient between the first substrate and each of the first convex portions, the action of an external force on the Fabry-Perot interference filter, etc. Similarly, the second convex portions may fall off from the second surface of the second substrate due to a difference in thermal expansion coefficient between the second substrate and each of the second convex portions, the action of an external force on the Fabry-Perot interference filter, etc. If such falling off occurs, sticking of the first reflective film and the second reflective film is likely to occur.

[0006] An object of the present invention is to provide a Fabry-Perot interference filter that can stably suppress the occurrence of sticking between a first reflective film and a second reflective film. [Means for solving the problem]

[0007] The Fabry-Perot interference filter of the present invention comprises: [1] "a first reflection film; a second reflection film facing the first reflection film via a space in a light transmission region; a movable layer including a first electrode and supporting the first reflection film in a movable section movable in a first direction in which the first reflection film and the second reflection film face each other; a fixed layer bonded to the movable layer in a bonding region surrounding the light transmission region when viewed from the first direction and supporting the second reflection film; a second electrode facing the first electrode via a space in the first direction; and a convex portion disposed on a movable surface of the movable section facing the fixed layer or on a fixed surface of the fixed layer facing the movable section, the convex portion being disposed on the movable surface. the first reflective film covers the entire convex portion on the movable surface, an outer edge of the first reflective film is located inside the bonding region when viewed from the first direction, and a portion of the first reflective film located on the convex portion faces the fixed surface or the second reflective film in the first direction; and when the convex portion is disposed on the fixed surface, the second reflective film covers the entire convex portion on the fixed surface, an outer edge of the second reflective film is located inside the bonding region when viewed from the first direction, and a portion of the second reflective film located on the convex portion faces the movable surface or the first reflective film in the first direction.

[0008] In the Fabry-Perot interference filter described in [1] above, a convex portion is arranged on the movable surface of the movable portion or on the fixed surface of the fixed layer. When the convex portion is arranged on the movable surface, the first reflection film covers the entire convex portion on the movable surface, and the portion of the first reflection film located on the convex portion faces the fixed surface or the second reflection film in the first direction. When the convex portion is arranged on the fixed surface, the second reflection film covers the entire convex portion on the fixed surface, and the portion of the second reflection film located on the convex portion faces the movable surface or the first reflection film in the first direction. As a result, when the convex portion is arranged on the movable surface, when the first reflection film approaches the second reflection film, the portion of the first reflection film located on the convex portion comes into contact with the fixed surface or the second reflection film before the first reflection film comes into surface contact with the second reflection film in the light transmission region, and the occurrence of sticking of the first reflection film and the second reflection film is suppressed. Similarly, when the convex portion is disposed on the fixed surface, when the first reflection film approaches the second reflection film, a portion of the second reflection film located on the convex portion comes into contact with the movable surface or the first reflection film before the first reflection film comes into surface contact with the second reflection film in the light transmission region, thereby suppressing the occurrence of sticking of the first reflection film and the second reflection film. Furthermore, when the convex portion is disposed on the movable surface, the first reflection film covers the entire convex portion on the movable surface, so that even if there is a difference in thermal expansion coefficient between the movable portion and the convex portion or an external force acts on the Fabry-Perot interference filter, the convex portion is suppressed from falling off the movable surface. Moreover, when the convex portion is disposed on the movable surface, the outer edge of the first reflection film is located inside the bonding region between the movable layer and the fixed layer, so that deterioration, peeling, etc. of the first reflection film is suppressed, and as a result, the effect of suppressing the convex portion from falling off the movable surface is maintained. Similarly, when the convex portion is disposed on the fixed surface, the second reflective film covers the entire convex portion on the fixed surface, so that even if there is a difference in thermal expansion coefficient between the fixed layer and the convex portion, or an external force acts on the Fabry-Perot interference filter, the convex portion is prevented from falling off from the fixed surface. Moreover, when the convex portion is disposed on the fixed surface, the outer edge of the second reflective film is located inside the bonding region between the movable layer and the fixed layer, so that deterioration, peeling, etc. of the second reflective film is prevented, and as a result, the effect of preventing the convex portion from falling off from the fixed surface is maintained.As described above, according to the Fabry-Perot interference filter described in [1] above, it is possible to stably suppress the occurrence of sticking between the first reflective film and the second reflective film.

[0009] The Fabry-Perot interference filter of the present invention may be [2] "the Fabry-Perot interference filter according to the above [1], in which the convex portion is disposed on the fixed surface." According to the Fabry-Perot interference filter according to [2], the manufacturing process can be simplified compared to the case in which the convex portion is disposed on the movable surface of the movable part.

[0010] The Fabry-Perot interference filter of the present invention may be [3] "the Fabry-Perot interference filter according to the above [1] or [2], in which the outer edge of the first reflection film and the outer edge of the second reflection film are located outside the convex portion when viewed from the first direction." According to the Fabry-Perot interference filter according to [3], a portion in which the film thickness of both the first reflection film and the second reflection film is uniform can be secured widely in the region inside the convex portion. In other words, a wide light transmission region can be secured in the Fabry-Perot interference filter.

[0011] The Fabry-Perot interference filter of the present invention may be [4] "the Fabry-Perot interference filter according to [3] above, in which each of the first and second reflection films includes a metal film." In the Fabry-Perot interference filter according to [4], it is assumed that the outer edge of the first reflection film and the outer edge of the second reflection film are located outside the convex portion, so that a portion of one of the first and second reflection films located on the convex portion contacts the other of the first and second reflection films. Therefore, according to the Fabry-Perot interference filter according to [4], for example, by bringing the metal film of the first reflection film and the metal film of the second reflection film into contact with each other, the metal films can be made to have the same potential, and unnecessary electrostatic force can be suppressed from being generated between the first reflection film and the second reflection film.

[0012] The Fabry-Perot interference filter of the present invention may be [5] "a Fabry-Perot interference filter according to any one of the above [1] to [4], in which, when the convex portion is disposed on the movable surface, the top surface area of ​​the portion of the first reflecting film located on the convex portion is smaller than the top surface area of ​​the convex portion, and when the convex portion is disposed on the fixed surface, the top surface area of ​​the portion of the second reflecting film located on the convex portion is smaller than the top surface area of ​​the convex portion." In the Fabry-Perot interference filter according to [5], when the convex portion is disposed on the movable surface, when the portion of the first reflecting film located on the convex portion comes into contact with the fixed layer or the second reflecting film, the intermolecular force generated between the portion of the first reflecting film located on the convex portion and the fixed layer or the second reflecting film is reduced. In addition, when the convex portion is disposed on the fixed surface, when the movable portion or the first reflecting film comes into contact with the portion of the second reflecting film located on the convex portion, the intermolecular force generated between the portion of the second reflecting film located on the convex portion and the movable portion or the first reflecting film is reduced. Therefore, according to the Fabry-Perot interference filter described in [5], the movable part can be moved smoothly.

[0013] The Fabry-Perot interference filter of the present invention may be [6] "a Fabry-Perot interference filter according to any one of the above [1] to [5], in which, when the convex portion is disposed on the movable surface, the first reflection film is thinner in an outer edge region along the outer edge of the first reflection film as it approaches the outer edge of the first reflection film, and when the convex portion is disposed on the fixed surface, the second reflection film is thinner in an outer edge region along the outer edge of the second reflection film as it approaches the outer edge of the second reflection film." In the Fabry-Perot interference filter described in [6], when the convex portion is disposed on the movable surface, the outer edge region of the first reflection film becomes even less likely to peel off from the movable surface, and when the convex portion is disposed on the fixed surface, the outer edge region of the second reflection film becomes even more unlikely to peel off from the fixed surface. Thus, according to the Fabry-Perot interference filter described in [6], it is possible to more stably suppress the falling off of the convex portion from the movable surface or the fixed surface.

[0014] The Fabry-Perot interference filter of the present invention may be [7] "a Fabry-Perot interference filter according to any one of the above [1] to [6], in which each of the first reflective film and the second reflective film is a film formed by physical vapor deposition using a shadow mask." Since a film formed by physical vapor deposition using a shadow mask becomes thinner in an outer edge region along the outer edge of the film as it approaches the outer edge of the film, in the Fabry-Perot interference filter according to [7], the outer edge region of the first reflective film becomes more difficult to peel off from the movable surface, and the outer edge region of the second reflective film becomes more difficult to peel off from the fixed surface. Therefore, according to the Fabry-Perot interference filter according to [7], it is possible to more stably suppress the detachment of the convex portion from the movable surface or the fixed surface.

[0015] The Fabry-Perot interference filter of the present invention may be [8] "the Fabry-Perot interference filter according to any one of the above [1] to [7], in which the outer edge of the first reflection film and the outer edge of the second reflection film are located inside the bonding region when viewed from the first direction, and each of the first reflection film and the second reflection film includes a film made of Ag or an Ag alloy." Although a film made of Ag or an Ag alloy is easily deteriorated, in the Fabry-Perot interference filter according to [8], the outer edge of the first reflection film and the outer edge of the second reflection film are located inside the bonding region between the movable layer and the fixed layer. Therefore, according to the Fabry-Perot interference filter according to [8], deterioration, peeling, etc. of the first reflection film and the second reflection film including a film made of Ag or an Ag alloy can be suppressed.

[0016] The Fabry-Perot interference filter of the present invention may be [9] "the Fabry-Perot interference filter according to any one of the above [1] to [8], wherein the convex portions are a plurality of convex portions surrounding the light transmitting region when viewed from the first direction." According to the Fabry-Perot interference filter according to [9], the volume of each convex portion can be reduced, and therefore, during the manufacture of the Fabry-Perot interference filter, it is possible to prevent each convex portion from falling off from the movable surface due to a difference in thermal expansion coefficient between the movable portion and each convex portion, or each convex portion from falling off from the fixed surface due to a difference in thermal expansion coefficient between the fixed layer and each convex portion.

[0017] The Fabry-Perot interference filter of the present invention may be

[10] "a Fabry-Perot interference filter according to any one of the above [1] to [9], in which, when the convex portion is disposed on the movable surface, in a state where no potential difference is generated between the first electrode and the second electrode, a portion of the first reflection film located on the convex portion is in contact with the fixed surface or the second reflection film, and when the convex portion is disposed on the fixed surface, in a state where no potential difference is generated between the first electrode and the second electrode, a portion of the second reflection film located on the convex portion is in contact with the movable surface or the first reflection film." According to the Fabry-Perot interference filter described in

[10] , a load is applied to the convex portion in a state where no potential difference is generated between the first electrode and the second electrode, but even in such a configuration, the occurrence of sticking of the first reflection film and the second reflection film can be stably suppressed.

[0018] The Fabry-Perot interference filter of the present invention may be

[11] "the Fabry-Perot interference filter according to any one of the above [1] to

[10] , further comprising a wiring layer stacked on the movable layer on the opposite side to the fixed layer in the first direction, and the second electrode is disposed on the movable layer side surface of the wiring layer." According to the Fabry-Perot interference filter according to

[11] , the second electrode can be reliably supported to face the first electrode via a space, and an electrostatic force can be appropriately generated between the first electrode and the second electrode. Effect of the Invention

[0019] According to the present invention, it is possible to provide a Fabry-Perot interference filter that can stably suppress the occurrence of sticking between the first reflective film and the second reflective film. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a perspective view of an embodiment of a Fabry-Perot interference filter. [Diagram 2] FIG. 2 is an exploded perspective view of the Fabry-Perot interference filter shown in FIG. [Diagram 3] FIG. 2 is an exploded perspective view of the Fabry-Perot interference filter shown in FIG. [Figure 4] 2 is a longitudinal sectional view of the Fabry-Perot interference filter shown in FIG. 1. [Diagram 5] 2A and 2B are top and bottom views of the first layer shown in FIG. 1. [Figure 6] 2A and 2B are top and bottom views of the second layer shown in FIG. 1. [Figure 7] 2A and 2B are top and bottom views of the third layer shown in FIG. 1. [Figure 8] 2 is a longitudinal cross-sectional view of a portion of the absorbent membrane shown in FIG. 1. [Figure 9] FIG. 5 is a longitudinal cross-sectional view of a portion of the Fabry-Perot interference filter shown in FIG. 4. [Figure 10] FIG. 11 is a longitudinal sectional view of a modified Fabry-Perot interference filter. [Figure 11] FIG. 11 is a longitudinal sectional view of a modified Fabry-Perot interference filter. [Figure 12] FIG. 11 is a longitudinal sectional view of a portion of a modified Fabry-Perot interference filter. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals, and duplicated explanations will be omitted. [Fabry-Perot interference filter configuration]

[0022] As shown in FIG. 1, FIG. 2, FIG. 3, and FIG. 4, the Fabry-Perot interference filter 1 includes a first layer (movable layer) 10, a second layer (wiring layer) 20, a third layer (fixed layer) 30, a first reflection film 50, a second reflection film 60, an absorption film 70, and a plurality of convex portions 80. The first reflection film 50 and the second reflection film 60 face each other through a space. In the following description, the direction in which the first reflection film 50 and the second reflection film 60 face each other (first direction) is referred to as the "Z-axis direction", one direction perpendicular to the Z-axis direction (second direction intersecting with the first direction) is referred to as the "X-axis direction", and a direction perpendicular to both the Z-axis direction and the X-axis direction (third direction intersecting with both the first direction and the second direction) is referred to as the "Y-axis direction". Note that when "one side" is simply referred to, it means one side in the Z-axis direction, and when "the other side" is simply referred to, it means the other side in the Z-axis direction. Furthermore, when the term "thickness" is simply mentioned, it means the thickness in the Z-axis direction.

[0023] In the Fabry-Perot interference filter 1, the area overlapping both the first reflection film 50 and the second reflection film 60 when viewed from the Z-axis direction functions as the light-transmitting area 1a. The light-transmitting area 1a is an area in which the first reflection film 50 and the second reflection film 60 function as mirrors and transmit light according to the distance between the first reflection film 50 and the second reflection film 60. As an example, the light-transmitting area 1a is a cylindrical area with a straight line L parallel to the Z-axis direction as its center line. In the following description, the radial direction of a circle centered on the straight line L when viewed from the Z-axis direction is simply referred to as the "radial direction", and the circumferential direction of the circle is simply referred to as the "circumferential direction". Note that the vertical cross-sectional view of FIG. 4 is a schematic diagram of the Fabry-Perot interference filter 1, and the aspect ratio in FIG. 4 does not match the actual one.

[0024] 4 and 5, the first layer 10 includes a first substrate 11, a semiconductor layer 12, and a metal pad 13. Note that (a) of Fig. 5 is a plan view of the first layer 10, and (b) of Fig. 5 is a bottom view of the first layer 10.

[0025] The first substrate 11 includes a light-transmitting member 14 and a supporting member 15. The light-transmitting member 14 and the supporting member 15 are each made of a light-transmitting material such as glass or silicon. As an example, the light-transmitting member 14 and the supporting member 15 are formed separately by etching a glass substrate bonded to a silicon substrate that will become the semiconductor layer 12. The glass substrate and the silicon substrate are bonded together by airtight bonding such as room temperature bonding, plasma activated bonding, and anodic bonding. In the Fabry-Perot interference filter 1, the light-transmitting member 14 and the supporting member 15 made of the same light-transmitting material constitute the first substrate 11. However, as long as at least the light-transmitting member 14 is made of a light-transmitting material, the light-transmitting member 14 and the supporting member 15 may be made of different materials.

[0026] The light transmitting member 14 constitutes a part of the light transmitting region 1a. When viewed from the Z-axis direction, the outer edge of the light transmitting member 14 is located outside the outer edge of the light transmitting region 1a. As an example, the light transmitting member 14 is formed in a circular plate shape with the straight line L as the center line. The outer diameter of the light transmitting member 14 is, for example, about 4 to 6 mm. The thickness of the light transmitting member 14 is, for example, about 0.2 to 0.5 mm.

[0027] The support member 15 surrounds the light transmitting member 14 when viewed from the Z-axis direction. A space is formed between the light transmitting member 14 and the support member 15. The thickness of the support member 15 is approximately equal to the thickness of the light transmitting member 14. As an example, the support member 15 is formed in a rectangular frame shape so as to have a pair of side surfaces perpendicular to the X-axis direction and a pair of side surfaces perpendicular to the Y-axis direction. The width of the support member 15 in each of the X-axis direction and the Y-axis direction is, for example, about 11 mm. The thickness of the support member 15 is, for example, about 0.2 to 0.5 mm. The width of the space between the light transmitting member 14 and the support member 15 is, for example, about 0.5 to 1.5 mm.

[0028] The semiconductor layer 12 includes an electrode portion 16, a support portion 17, and a plurality of elastic deformation portions 18. The electrode portion 16, the support portion 17, and the plurality of elastic deformation portions 18 are conductive. The material of each of the electrode portion 16, the support portion 17, and the plurality of elastic deformation portions 18 is, for example, a semiconductor material such as p-type silicon having a low resistance (1 Ωcm or less). As an example, the electrode portion 16, the support portion 17, and the plurality of elastic deformation portions 18 are integrally formed by etching a silicon substrate bonded to a glass substrate that becomes the first substrate 11.

[0029] The electrode portion 16 surrounds the light transmitting region 1a when viewed from the Z-axis direction. The electrode portion 16 extends along the outer edge of the light transmitting member 14 when viewed from the Z-axis direction, and is joined to the surface 14a on one side of the light transmitting member 14. When viewed from the Z-axis direction, the outer edge of the electrode portion 16 is located outside the outer edge of the light transmitting member 14. When viewed from the Z-axis direction, the inner edge of the electrode portion 16 is located inside the outer edge of the light transmitting member 14 and approximately coincides with the outer edge of the light transmitting region 1a. As an example, the electrode portion 16 is formed in a circular frame shape with the straight line L as the center line. The inner diameter of the electrode portion 16 is, for example, about 3 to 5 mm. The outer diameter of the electrode portion 16 is, for example, about 4 to 6 mm. The thickness of the electrode portion 16 is, for example, about 30 μm. In the Fabry-Perot interference filter 1, the electrode portion 16 functions as a first electrode 19. That is, the first layer 10 includes the first electrode 19.

[0030] The support 17 surrounds the electrode 16 when viewed from the Z-axis direction. A space is formed between the electrode 16 and the support 17. The support 17 is joined to the surface 15a on one side of the support member 15. In the Fabry-Perot interference filter 1, the outer edge of the support 17 approximately coincides with the outer edge of the support member 15 when viewed from the Z-axis direction. The inner edge of the support 17 is located inside the inner edge of the support member 15 when viewed from the Z-axis direction. As an example, the support 17 is formed in a rectangular frame shape so as to have a pair of side surfaces perpendicular to the X-axis direction and a pair of side surfaces perpendicular to the Y-axis direction. The width of the support 17 in each of the X-axis direction and the Y-axis direction is, for example, about 11 mm. The thickness of the support 17 is, for example, about 34 μm. The width of the space between the electrode 16 and the support 17 is, for example, about 0.5 to 1.5 mm.

[0031] The multiple elastic deformation parts 18 are located between the electrode part 16 and the support part 17, and surround the electrode part 16 when viewed from the Z-axis direction. A space is formed between a pair of adjacent elastic deformation parts 18. Each elastic deformation part 18 connects the electrode part 16 and the support part 17. That is, one end of each elastic deformation part 18 is connected to the electrode part 16, and the other end of each elastic deformation part 18 is connected to the support part 17. As an example, the multiple elastic deformation parts 18 are arranged in the circumferential direction at equal angular intervals. As an example, each elastic deformation part 18 is formed in a rectangular plate shape so as to extend in the radial direction. In the Fabry-Perot interference filter 1, the multiple elastic deformation parts 18 are a pair of elastic deformation parts 18 located on both sides of the electrode part 16 in the X-axis direction, and a pair of elastic deformation parts 18 located on both sides of the electrode part 16 in the Y-axis direction. The width of each elastic deformation part 18 in the radial direction is, for example, about 0.5 to 1.5 mm. The width of each of the elastic deformation portions 18 in the direction perpendicular to the radial direction is, for example, about 50 μm to 1 mm, and the thickness of each of the elastic deformation portions 18 is, for example, about 30 μm.

[0032] The thickness of each elastic deformation portion 18 is approximately equal to the thickness of the electrode portion 16. The thickness of the support portion 17 is greater than the thickness of the electrode portion 16 and the thickness of each elastic deformation portion 18, except for the inner edge region along the inner edge of the support portion 17 when viewed from the Z-axis direction. The thickness of the inner edge region of the support portion 17 is approximately equal to the thickness of the electrode portion 16 and the thickness of each elastic deformation portion 18. The surface 16a on one side of the electrode portion 16, the surface 18a on one side of each elastic deformation portion 18, and the surface 17c on one side of the inner edge region of the support portion 17 are continuous. The surface 16a of the electrode portion 16, the surface 18a of each elastic deformation portion 18, and the surface 17c of the inner edge region of the support portion 17 are lower than the surface 17a on one side of the support portion 17. The surface 16b on the other side of the electrode portion 16, the surface 18b on the other side of each elastic deformation portion 18, and the surface 17b on the other side of the support portion 17 are continuous. The electrode portion 16 has a plurality of notches 16c formed on both sides (both sides in the circumferential direction) of one end of each elastic deformation portion 18, the notches 16c opening outward.

[0033] The metal pad 13 is formed on the surface 17a of the support portion 17. The metal pad 13 is electrically connected to the electrode portion 16, which is the first electrode 19, via the semiconductor layer 12 as wiring. That is, the semiconductor layer 12 functions as a wiring layer that electrically connects the first electrode 19 and the metal pad 13. As an example, the metal pad 13 is formed in a rectangular film shape so as to extend along one side of the outer edge of the surface 17a that is parallel to the Y-axis direction. The material of the metal pad 13 is, for example, a metal material such as Al. The width of the metal pad 13 in the X-axis direction is, for example, about 0.1 to 1 mm. The width of the metal pad 13 in the Y-axis direction is, for example, about 0.1 to 8 mm. The thickness of the metal pad 13 is, for example, about 1 μm.

[0034] In the first substrate 11 and the semiconductor layer 12 configured as described above, the movable portion 10a is configured by the light transmitting member 14 and the electrode portion 16. The movable portion 10a is a portion that overlaps with the light transmitting region 1a, and is movable in the Z-axis direction by deformation of the multiple elastic deformation portions 18. In other words, the first layer 10 is a movable layer in which the portion that overlaps with the light transmitting region 1a is configured as the movable portion 10a that is movable in the Z-axis direction.

[0035] The first reflection film 50 is disposed on the surface 14b on the other side of the light transmitting member 14. That is, the first layer 10 supports the first reflection film 50 at the movable portion 10a. The first reflection film 50 is movable in the Z-axis direction together with the movable portion 10a. As an example, the first reflection film 50 is formed in a circular film shape with the straight line L as the center line. In the Fabry-Perot interference filter 1, the first reflection film 50 includes a film made of Ag or an Ag alloy. That is, the first reflection film 50 includes a metal film. As an example, the first reflection film 50 is configured by forming a dielectric film made of aluminum oxide or the like on the surface opposite to the surface 14b of the metal film made of Ag or an Ag alloy. The outer diameter of the first reflection film 50 is, for example, about 4 to 6 mm. The thickness of the first reflection film 50 is, for example, about 210 nm.

[0036] 4 and 6, the second layer 20 is laminated on one side of the first layer 10. The second layer 20 includes a second substrate (substrate) 21, a plurality of second electrodes 22, a light-shielding film 23, a plurality of third electrodes 24, a plurality of electrode pads 25, and a plurality of through electrodes 26. Note that (a) of FIG. 6 is a plan view of the second layer 20, and (b) of FIG. 6 is a bottom view of the second layer 20.

[0037] The second substrate 21 constitutes a part of the light transmission region 1a. The second substrate 21 has a surface 21a on one side and a surface 21b on the other side. The surface 21a is the surface opposite to the first layer 10, and the surface 21b is the surface on the first layer 10 side. The surface 21b of the second substrate 21 is joined to the surface 17a of the support portion 17 and is separated from the surface 16a of the electrode portion 16, the surface 18a of each elastic deformation portion 18, and the surface 17c of the inner edge region of the support portion 17. The thickness of the second substrate 21 is greater than the thickness of the semiconductor layer 12. As an example, the second substrate 21 is formed in a rectangular plate shape so as to have a pair of side surfaces perpendicular to the X-axis direction and a pair of side surfaces perpendicular to the Y-axis direction. In the Fabry-Perot interference filter 1, when viewed from the Z-axis direction, the outer edge of the second substrate 21 approximately coincides with the outer edge of the support portion 17, except for the cutout portion 210 described later. The material of the second substrate 21 is, for example, a light-transmitting material such as glass or silicon. The width of the second substrate 21 in each of the X-axis direction and the Y-axis direction is, for example, about 11 mm. The thickness of the second substrate 21 is, for example, about 0.5 mm. The support portion 17 and the second substrate 21 are bonded together by airtight bonding such as room temperature bonding, plasma activated bonding, or anodic bonding.

[0038] The second substrate 21 has a notch 210. The notch 210 opens on the opposite side to the light transmitting region 1a in the X-axis direction, exposing the metal pad 13 to the outside. The notch 210 has a first side 210a and a pair of second side surfaces 210b. The first side surface 210a faces outward in the X-axis direction. The pair of second side surfaces 210b face each other in the Y-axis direction. A rounded chamfered surface 210c is formed at the corner between the first side surface 210a and each of the second side surfaces 210b. The width of the notch 210 in the X-axis direction is, for example, about 1 mm. The width of the notch 210 in the Y-axis direction is, for example, about 1 to 10 mm.

[0039] The second electrodes 22 are disposed on a surface 21b of the second substrate 21. The surface 21b is a surface of the second layer 20 on the first layer 10 side. The second electrodes 22 surround the light transmitting region 1a when viewed from the Z-axis direction, and face the electrode portion 16 (i.e., the first electrode 19) via a space in the Z-axis direction. As an example, the second electrodes 22 are arranged in the circumferential direction at equal angular intervals, and a slit-like gap extending in the radial direction is formed between a pair of adjacent second electrodes 22. As an example, each second electrode 22 is formed in a film shape so as to extend in the circumferential direction. The material of each second electrode 22 is, for example, a metal material such as Au. The width of each second electrode 22 in the radial direction is, for example, about 1 mm. The width of each second electrode 22 in the circumferential direction is, for example, a value obtained by dividing the length of the circumference by the number of second electrodes 22 when a plurality of second electrodes 22 are arranged along the circumference, and is, for example, about 4 mm when four second electrodes 22 are arranged along a circumference having a diameter of 5 mm. The thickness of each second electrode 22 is, for example, about 1 to 5 μm. The width of the gap between a pair of adjacent second electrodes 22 is, for example, about 0.1 mm. The initial distance between the electrode portion 16 (i.e., the first electrode 19) and each second electrode 22 (the distance between the first electrode 19 and each second electrode 22 in a state where no potential difference is generated between the first electrode 19 and each second electrode 22) is, for example, about 3 μm.

[0040] In the Fabry-Perot interference filter 1, the second electrodes 22 are a pair of second electrodes 22 located on both sides of the light transmission region 1a in the X-axis direction, and a pair of second electrodes 22 located on both sides of the light transmission region 1a in the Y-axis direction. Each second electrode 22 includes a main body 22a and a pair of protruding parts 22b. The main body 22a is a part extending in the circumferential direction, and faces the first electrode 19 via a space in the Z-axis direction. The pair of protruding parts 22b are parts protruding outward in the radial direction from the main body 22a, and are located on both sides of the elastic deformation part 18 in the circumferential direction when viewed from the Z-axis direction (see FIG. 5). The main body 22a has a notch 22c that opens outward between the pair of protruding parts 22b. When viewed from the Z-axis direction, the notch 22c overlaps one end of the elastic deformation part 18 and the pair of notches 16c on both sides thereof (see FIG. 5).

[0041] The light-shielding film 23 is disposed on the surface 21a of the second substrate 21. That is, the light-shielding film 23 is formed on one side of the second layer 20 on the second layer 20. The light-shielding film 23 is a first metal film 27 surrounding the light-transmitting region 1a when viewed from the Z-axis direction. The light-shielding film 23 extends along the outer edge of the light-transmitting region 1a when viewed from the Z-axis direction. In the Fabry-Perot interference filter 1, the light-shielding film 23 extends in an annular shape along the outer edge of the light-transmitting region 1a when viewed from the Z-axis direction. The light-shielding film 23 has an opening 23a that overlaps with the light-transmitting region 1a when viewed from the Z-axis direction. The material of the light-shielding film 23 is, for example, a metal material such as Au. The inner diameter of the light-shielding film 23 (i.e., the diameter of the opening 23a) is, for example, about 3 to 5 mm. The outer diameter of the light-shielding film 23 is, for example, about 5 to 7 mm. The thickness of the light-shielding film 23 is, for example, about 1 to 5 μm. Note that the light-shielding film 23 (that is, the first metal film 27) does not function as an electrode or wiring.

[0042] The third electrodes 24 are disposed on the surface 21a of the second substrate 21. The third electrodes 24 are the second metal films 28 surrounding the first metal film 27 when viewed from the Z-axis direction. That is, the third electrodes 24 surround the light-transmitting region 1a when viewed from the Z-axis direction. As an example, the third electrodes 24 are arranged in the circumferential direction at equal angular intervals, and a slit-shaped gap extending in the radial direction is formed between a pair of adjacent third electrodes 24. As an example, each third electrode 24 is formed in a film shape extending in the circumferential direction, and a slit-shaped gap extending in the circumferential direction is formed between the light-shielding film 23 and each third electrode 24. The material of each third electrode 24 is, for example, a metal material such as Au. The width of each third electrode 24 in the radial direction is, for example, about 1 mm. The width of each third electrode 24 in the circumferential direction is, for example, a value obtained by dividing the length of the circumference by the number of third electrodes 24 when a plurality of third electrodes 24 are arranged along the circumference, and is, for example, about 4 mm when four third electrodes 24 are arranged along a circumference having a diameter of 5 mm. The thickness of each third electrode 24 is, for example, about 1 to 5 μm. The width of the gap between a pair of adjacent third electrodes 24 is, for example, about 0.1 mm. The width of the gap between the light-shielding film 23 and each third electrode 24 is, for example, about 0.1 mm.

[0043] In the Fabry-Perot interference filter 1, the multiple third electrodes 24 are a pair of third electrodes 24 located on both sides of the light-shielding film 23 in the X-axis direction, and a pair of third electrodes 24 located on both sides of the light-shielding film 23 in the Y-axis direction. When viewed from the Z-axis direction, each third electrode 24 is located radially outward from the main body 22a of each second electrode 22. When viewed from the Z-axis direction, each third electrode 24 overlaps with a pair of protrusions 22b of each second electrode 22.

[0044] The electrode pads 25 are arranged on the surface 21a of the second substrate 21 together with the wirings 25a. Each of the third electrodes 24 is electrically connected to each of the electrode pads 25 via each of the wirings 25a. In the Fabry-Perot interference filter 1, each of the electrode pads 25 is arranged at each of the four corners of the rectangular surface 21a and is formed in a circular film shape. Each of the wirings 25a connects one end of the third electrode 24 in the circumferential direction to the electrode pad 25 in the corresponding third electrode 24 and electrode pad 25. The material of each of the electrode pads 25 and each of the wirings 25a is, for example, a metal material such as Au. The outer diameter of each of the electrode pads 25 is, for example, about 0.5 to 1 mm. The width of each of the wirings 25a is, for example, about 0.1 to 0.5 mm. The thickness of each of the electrode pads 25 and each of the wirings 25a is, for example, about 1 to 5 μm.

[0045] In the Fabry-Perot interference filter 1, the light-shielding film 23 and the multiple third electrodes 24 are made of the same material. That is, the first metal film 27 and the multiple second metal films 28 are made of the same material. The multiple electrode pads 25 and the multiple wirings 25a are made of the same material as the first metal film 27 and the second metal film 28 and are integral with the multiple third electrodes 24.

[0046] The plurality of through electrodes 26 are provided on the second substrate 21. The plurality of through electrodes 26 are disposed in a plurality of through holes formed in the second substrate 21 so as to extend in the Z-axis direction and open to the surface 21a and the surface 21b, and the plurality of through holes are airtightly sealed. Each second electrode 22 is electrically connected to each third electrode 24 through at least two of the plurality of through electrodes 26. In the Fabry-Perot interference filter 1, each through electrode 26 connects each protrusion 22b of the second electrode 22 to the third electrode 24 in the second electrode 22 and the third electrode 24 corresponding to each other. That is, in the second electrode 22 and the third electrode 24 corresponding to each other, the second electrode 22 is electrically connected to the third electrode 24 through two through electrodes 26. The material of each through electrode 26 is, for example, a metal material such as Au. The length of each through electrode 26 in the Z-axis direction is, for example, about 0.5 mm. The width of each of the through electrodes 26 in the direction perpendicular to the Z-axis direction is, for example, about 0.1 mm. Note that the through electrodes 26 do not necessarily need to airtightly close the through holes formed in the second substrate 21.

[0047] 4 and 7, the third layer 30 is laminated on the other side of the first layer 10. The third layer 30 includes a third substrate 31. Note that (a) of FIG. 7 is a plan view of the third layer 30, and (b) of FIG. 7 is a bottom view of the third layer 30.

[0048] The third substrate 31 constitutes a part of the light transmitting region 1a. The third substrate 31 has a surface 31a on one side and a surface 31b on the other side. The surface 31a is the surface on the first layer 10 side, and the surface 31b is the surface opposite to the first layer 10. The surface 31a of the third substrate 31 is bonded to the surface 15b on the other side of the support member 15. That is, the third layer 30 is bonded to the first layer 10 in a bonding region R (a region between the surface 31a of the third substrate 31 and the surface 15b of the support member 15) that surrounds the light transmitting region 1a when viewed from the Z-axis direction. The thickness of the third substrate 31 is greater than the thickness of the semiconductor layer 12. As an example, the third substrate 31 is formed in a rectangular plate shape so as to have a pair of side surfaces perpendicular to the X-axis direction and a pair of side surfaces perpendicular to the Y-axis direction. In the Fabry-Perot interference filter 1, the outer edge of the third substrate 31 approximately coincides with the outer edge of the support member 15 when viewed from the Z-axis direction. The material of the third substrate 31 is, for example, a light-transmitting material such as glass or silicon. The width of the third substrate 31 in each of the X-axis direction and the Y-axis direction is, for example, about 11 mm. The thickness of the third substrate 31 is, for example, about 0.5 mm. The support member 15 and the third substrate 31 are joined together by airtight bonding such as room temperature bonding, plasma activation bonding, metal diffusion bonding, or the like.

[0049] The plurality of protrusions 80 are disposed on the surface 31a of the third substrate 31. The plurality of protrusions 80 are located outside the light-transmitting region 1a when viewed from the Z-axis direction. The plurality of protrusions 80 surround the light-transmitting region 1a when viewed from the Z-axis direction, and face the region of the first reflective film 50 located outside the light-transmitting region 1a in the Z-axis direction. As an example, each protrusion 80 is formed in a cylindrical shape. The material of each protrusion 80 is, for example, silicon oxide, silicon nitride, or the like. The outer diameter of each protrusion 80 is, for example, about 0.1 mm. The height of each protrusion 80 in the Z-axis direction is, for example, about 50 nm.

[0050] The second reflection film 60 is disposed on the surface 31a of the third substrate 31. That is, the third layer 30 supports the second reflection film 60. The area of ​​the second reflection film 60 located outside the light transmission region 1a covers the multiple convex portions 80. As an example, the second reflection film 60 is formed in a circular film shape with the straight line L as the center line. In the Fabry-Perot interference filter 1, in a state where no potential difference is generated between the first electrode 19 and each second electrode 22, the part of the second reflection film 60 located on each convex portion 80 contacts the area of ​​the first reflection film 50 located outside the light transmission region 1a. As a result, in the light transmission region 1a, a space is formed between the first reflection film 50 and the second reflection film 60, and surface contact between the first reflection film 50 and the second reflection film 60 is prevented. In the Fabry-Perot interference filter 1, the second reflection film 60 includes a film made of Ag or an Ag alloy. That is, the second reflection film 60 includes a metal film. As an example, the second reflective film 60 is formed by forming a dielectric film made of aluminum oxide or the like on the surface opposite to the surface 14b of a metal film made of Ag or an Ag alloy. The outer diameter of the second reflective film 60 is, for example, about 5 to 8 mm. The thickness of the second reflective film 60 is, for example, about 210 nm. In a state where no potential difference is generated between the first electrode 19 and each second electrode 22, the distance between the first reflective film 50 and the second reflective film 60 in the light transmitting region 1a is, for example, about 50 nm.

[0051] The absorbing film 70 is disposed on the surface 31b of the third substrate 31. That is, the absorbing film 70 is located on the other side of the first reflecting film 50 and the second reflecting film 60. One side surface 70a of the absorbing film 70 has light absorbing properties, and the other side surface 70b of the absorbing film 70 has light reflecting properties. The absorbing film 70 surrounds the light transmitting region 1a when viewed from the Z-axis direction. The absorbing film 70 has an opening 70c that overlaps with the light transmitting region 1a when viewed from the Z-axis direction. In the Fabry-Perot interference filter 1, the outer edge of the absorbing film 70 approximately coincides with the outer edge of the third substrate 31 when viewed from the Z-axis direction. The diameter of the opening 70c is, for example, about 3 to 5 mm.

[0052] As shown in FIG. 8, the absorption film 70 has a multilayer structure including a reflective layer 71, a resonant layer 72, and an absorbing layer 73. The reflective layer 71, the resonant layer 72, and the absorbing layer 73 are laminated in this order from the side opposite to the third substrate 31. That is, the resonant layer 72 is disposed between the reflective layer 71 and the third substrate 31, and the absorbing layer 73 is disposed between the resonant layer 72 and the third substrate 31. The reflective layer 71 is a metal layer that does not transmit light incident on the surface 70a on one side (at least light in a wavelength band that transmits through the first reflective film 50 and the second reflective film 60 whose distance from each other is variable). At the wavelength of light incident on the surface 70a on one side, the optical transmittance inside the resonant layer 72 is greater than the optical transmittance inside the absorbing layer 73. At the wavelength of light incident on the surface 70a on one side, the optical reflectance of the surface of the reflective layer 71 is greater than the optical reflectance of the surface of the resonant layer 72. The absorbing film 70 thus configured has a surface 70a on one side that is light absorbing and a surface 70b on the other side that is light reflective. The material of the reflective layer 71 is, for example, a metal material such as Cr, Ti, or Al. The thickness of the reflective layer 71 is, for example, 100 nm or more. The material of the resonant layer 72 is, for example, a dielectric material such as SiO2. The thickness of the resonant layer 72 is, for example, within a range of ±20% centered on an integral multiple of a quarter of the wavelength (reference wavelength such as a central wavelength) of the light incident on the surface 70a on one side. The material of the absorbing layer 73 is, for example, a metal material such as Cr or Ti, or a silicide. The thickness of the absorbing layer 73 is, for example, about 1 to 10 nm.

[0053] In the Fabry-Perot interference filter 1 configured as above, when a voltage is applied to the first electrode 19 and the second electrodes 22 via the metal pad 13 and the electrode pads 25, a potential difference occurs between the first electrode 19 and the second electrodes 22, and an electrostatic force corresponding to the potential difference occurs between the first electrode 19 and the second electrodes 22. When an electrostatic force occurs between the first electrode 19 and the second electrodes 22, the movable part 10a moves to one side, and the distance between the first reflection film 50 and the second reflection film 60 changes. Here, the wavelength of light passing through the light transmission region 1a of the Fabry-Perot interference filter 1 depends on the distance between the first reflection film 50 and the second reflection film 60. Therefore, by adjusting the voltage applied to the first electrode 19 and the second electrodes 22 (i.e., the potential difference occurring between the first electrode 19 and the second electrodes 22), the wavelength of light passing through the Fabry-Perot interference filter 1 can be selected. In the Fabry-Perot interference filter 1, the first substrate 11, the semiconductor layer 12, the second substrate 21 and the third substrate 31 are hermetically bonded to one another, and the multiple through holes formed in the second substrate 21 are hermetically blocked by multiple through electrodes 26, so that the movable part 10a moves in the Z-axis direction in the airtight space. [Configuration of the first reflective film, the second reflective film, and the plurality of convex portions]

[0054] As shown in FIG. 4 and FIG. 9, the first reflection film 50 is disposed on the surface 14b of the light transmitting member 14. The second reflection film 60 and the plurality of convex portions 80 are disposed on the surface 31a of the third substrate 31. The second reflection film 60 covers the entirety of each convex portion 80 on the surface 31a of the third substrate 31. That is, the second reflection film 60 covers each convex portion 80 on the surface 31a of the third substrate 31 so that the surface of each convex portion 80 is not exposed to the outside. The portion 62 of the second reflection film 60 located on each convex portion 80 faces the first reflection film 50 in the Z-axis direction. In the Fabry-Perot interference filter 1, the surface 14b of the light transmitting member 14 is the movable surface of the movable portion 10a on the third layer 30 side, and the surface 31a of the third substrate 31 is the fixed surface of the movable portion 10a on the third layer 30 side.

[0055] The outer edge 50a of the first reflection film 50 is located outside the multiple convex parts 80 surrounding the light transmission region 1a when viewed from the Z-axis direction, and is located inside the junction region R extending in a frame shape (the side from the outer edge of the Fabry-Perot interference filter 1 toward the center of the Fabry-Perot interference filter 1 when viewed from the Z-axis direction, i.e., the inner side in the radial direction in the Fabry-Perot interference filter 1). In the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 is located on the surface 14b of the light transmission member 14 in the airtight space defined by the first substrate 11, the semiconductor layer 12, the second substrate 21, and the third substrate 31. The outer edge 60a of the second reflection film 60 is located outside the multiple convex parts 80 surrounding the light transmission region 1a when viewed from the Z-axis direction, and is located inside the junction region R extending in a frame shape. In the Fabry-Perot interference filter 1, the outer edge 60a of the second reflective film 60 is located on the surface 31a of the third substrate 31 within the airtight space defined by the first substrate 11, the semiconductor layer 12, the second substrate 21 and the third substrate 31.

[0056] The first reflection film 50 becomes thinner in an outer edge region 51 along the outer edge 50a as it approaches the outer edge 50a. The outer edge region 51 is a region located outside the multiple convex parts 80 surrounding the light transmission region 1a when viewed from the Z-axis direction. The second reflection film 60 becomes thinner in an outer edge region 61 along the outer edge 60a as it approaches the outer edge 60a. The outer edge region 61 is a region located outside the multiple convex parts 80 surrounding the light transmission region 1a when viewed from the Z-axis direction. In the Fabry-Perot interference filter 1, each of the first reflection film 50 and the second reflection film 60 is a film formed by a physical vapor deposition method (PVD method) using a shadow mask.

[0057] The physical vapor deposition method using a shadow mask includes vacuum vapor deposition using a shadow mask, sputtering using a shadow mask, and ion plating using a shadow mask. As an example, the first reflective film 50 is formed as follows. First, a glass substrate that becomes the first substrate 11 and a silicon substrate that becomes the semiconductor layer 12 are bonded to each other. Then, the glass substrate and the silicon substrate are etched to form the light transmitting member 14 and the support member 15, as well as the electrode portion 16, the support portion 17, and the multiple elastic deformation portions 18. Then, the first reflective film 50 is formed on the surface 14b of the light transmitting member 14 by the physical vapor deposition method using a shadow mask. Note that the outer edge 50a of the first reflective film 50 formed by the physical vapor deposition method using a shadow mask may reach the side surface of the light transmitting member 14 or the surface 18b of each elastic deformation portion 18. As an example, the second reflective film 60 is formed as follows. First, a multiple protrusion portion 80 is formed on the surface 31a of the third substrate 31 by film formation and patterning. Next, the second reflective film 60 is formed on the surface 31a of the third substrate 31 by physical vapor deposition using a shadow mask, and the second reflective film 60 covers each of the protrusions 80 in its entirety.

[0058] The area of ​​the top surface 62a of the portion 62 located on each convex portion 80 of the second reflection film 60 is smaller than the area of ​​the top surface 80a of each convex portion 80. In the corresponding convex portion 80 and portion 62, when viewed from the Z-axis direction, the outer edge of the top surface 62a of the portion 62 is located inside the outer edge of the top surface 80a of the convex portion 80. Each top surface 80a, 62a is a flat surface. As an example, for each convex portion 80 formed in a cylindrical shape, each portion 62 is formed in a truncated cone shape including each convex portion 80. In a state where no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 62 located on each convex portion 80 of the second reflection film 60 is in contact with the first reflection film 50. More specifically, when no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 62 of the second reflective film 60 located on each convex portion 80 is in contact with a region of the first reflective film 50 located outside the light-transmitting region 1a and having a uniform film thickness.

[0059] In the Fabry-Perot interference filter 1, the first reflection film 50 and the second reflection film 60 each contain a film made of Ag or an Ag alloy, and therefore can selectively transmit light in a wide wavelength range (for example, about 400 to 700 nm) in the visible range. Examples of Ag alloys (alloys mainly composed of Ag) include AgSmCu (silver samarium copper alloy), AgC (silver carbon alloy), AgBiNd (silver bismuth neodymium alloy), AgPdCu (silver palladium copper alloy), AgAu (silver gold alloy), AgCu (silver copper alloy), and AgCuAu (silver copper gold alloy). Compared to a film made of an Ag alloy, a film made of an Ag alloy has the advantage of being less susceptible to deterioration (high corrosion resistance). [Action and Effects]

[0060] In the Fabry-Perot interference filter 1, a plurality of convex portions 80 are disposed on the surface 31a of the third layer 30. The second reflective film 60 covers the entirety of each convex portion 80 on the surface 31a, and a portion 62 of the second reflective film 60 located on each convex portion 80 faces the first reflective film 50 in the Z-axis direction. As a result, when the first reflective film 50 approaches the second reflective film 60, the portion 62 of the second reflective film 60 located on each convex portion 80 comes into contact with the first reflective film 50 before the first reflective film 50 comes into surface contact with the second reflective film 60 in the light transmission region 1a, and the occurrence of sticking between the first reflective film 50 and the second reflective film 60 is suppressed. Furthermore, since the second reflective film 60 covers the entirety of each of the convex portions 80 on the surface 31a, even if there is a difference in thermal expansion coefficient between the third substrate 31 of the third layer 30 and each of the convex portions 80, or an external force acts on the Fabry-Perot interference filter 1, the falling off of each of the convex portions 80 from the surface 31a is suppressed. Moreover, since the outer edge 60a of the second reflective film 60 is located inside the bonding region R between the first layer 10 and the third layer 30, deterioration, peeling, etc. of the second reflective film 60 is suppressed, and as a result, the effect of suppressing the falling off of each of the convex portions 80 from the surface 31a is maintained. As described above, according to the Fabry-Perot interference filter 1, the occurrence of sticking of the first reflective film 50 and the second reflective film 60 can be stably suppressed.

[0061] In the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located outside the multiple convex parts 80 when viewed from the Z-axis direction. This allows the first reflection film 50 and the second reflection film 60 to have a uniform thickness in a wide area inside the multiple convex parts 80. That is, the light transmission region 1a can be widely secured in the Fabry-Perot interference filter 1. More specifically, it is as follows. If the outer edge 50a of the first reflection film 50 is located inside the multiple convex parts 80 when viewed from the Z-axis direction, the outer edge 50a of the first reflection film 50, which is prone to film thickness variation, may be located near the light transmission region 1a. Similarly, if the outer edge 60a of the second reflection film 60 is located inside the multiple convex parts 80 when viewed from the Z-axis direction, the outer edge 60a of the second reflection film 60, which is prone to film thickness variation, may be located near the light transmission region 1a. Therefore, if at least one of the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 is located inside the multiple protrusions 80 when viewed from the Z-axis direction, there is a risk that desired characteristics will not be obtained for the light transmitted through the light transmission region 1a. In the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located outside the multiple protrusions 80 when viewed from the Z-axis direction, so that such a situation can be avoided.

[0062] In the Fabry-Perot interference filter 1, the area of ​​the top surface 62a of the portion 62 of the second reflection film 60 located on each convex portion 80 is smaller than the area of ​​the top surface 80a of each convex portion 80. As a result, when the first reflection film 50 comes into contact with the portion 62 of the second reflection film 60 located on each convex portion 80, the intermolecular force generated between the portion 62 of the second reflection film 60 located on each convex portion 80 and the first reflection film 50 becomes smaller, so that the movable part 10a can be moved smoothly.

[0063] In the Fabry-Perot interference filter 1, the second reflective film 60 becomes thinner in an outer edge region 61 along the outer edge 60a as it approaches the outer edge 60a. This makes it even more difficult for the outer edge region 61 of the second reflective film 60 to peel off from the surface 31a, so that it is possible to more stably suppress the falling off of each convex portion 80 from the surface 31a.

[0064] In the Fabry-Perot interference filter 1, each of the first reflective film 50 and the second reflective film 60 is a film formed by physical vapor deposition using a shadow mask. In a film formed by physical vapor deposition using a shadow mask, the film becomes thinner in an outer edge region along the outer edge of the film as it approaches the outer edge of the film, so that the outer edge region 51 of the first reflective film 50 becomes more difficult to peel off from the surface 14b, and the outer edge region 61 of the second reflective film 60 becomes more difficult to peel off from the surface 31a. Therefore, it is possible to more stably suppress the falling off of each protrusion 80 from the surface 31a.

[0065] In particular, in the Fabry-Perot interference filter 1, after the multiple convex portions 80 are formed on the surface 31a of the third substrate 31, the second reflective film 60 is formed on the surface 31a of the third substrate 31 by physical vapor deposition using a shadow mask, so that the second reflective film 60 is not affected by etching for patterning the multiple convex portions 80. In addition, in a manufacturing method in which the second reflective film 60 is obtained by performing additional processing (such as removing unnecessary parts of the film) on a film that becomes the second reflective film 60 after the film is formed, for example, when the second reflective film 60 includes a film made of Ag or an Ag alloy, the second reflective film 60 may be deteriorated by the additional processing. However, in a manufacturing method in which the second reflective film 60 is obtained by physical vapor deposition using a shadow mask, it is not necessary to perform additional processing on the second reflective film 60 after physical vapor deposition using a shadow mask, so that deterioration of the second reflective film 60 due to the additional processing can be avoided.

[0066] In the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located inside the junction region R when viewed from the Z-axis direction, and each of the first reflection film 50 and the second reflection film 60 includes a film made of Ag or an Ag alloy. Although a film made of Ag or an Ag alloy is easily deteriorated, in the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located inside the junction region R between the first layer 10 and the third layer 30, so that deterioration, peeling, etc. of the first reflection film 50 and the second reflection film 60 including a film made of Ag or an Ag alloy can be suppressed.

[0067] In particular, in the Fabry-Perot interference filter 1, the second reflective film 60 contains a "film made of Ag or an Ag alloy," which is a film that is easily deteriorated, and therefore the method of "forming the second reflective film 60 on the surface 31a of the third substrate 31 by physical vapor deposition using a shadow mask after forming the multiple protrusions 80 on the surface 31a of the third substrate 31," in which the second reflective film 60 is not affected by the etching used to pattern the multiple protrusions 80, is extremely effective.

[0068] In the Fabry-Perot interference filter 1, in a state where no potential difference is generated between the first electrode 19 and each second electrode 22, a portion 62 of the second reflective film 60 located on each convex portion 80 is in contact with the first reflective film 50. This results in a configuration in which a load is applied to each convex portion 80 in a state where no potential difference is generated between the first electrode 19 and each second electrode 22. However, even in such a configuration, the occurrence of sticking of the first reflective film 50 and the second reflective film 60 can be stably suppressed.

[0069] In the Fabry-Perot interference filter 1, the second layer 20 is laminated on the first layer 10 on the opposite side to the third layer 30 in the Z-axis direction, and the multiple second electrodes 22 are disposed on the surface 21b of the second layer 20. This makes it possible to reliably support the multiple second electrodes 22 so as to face the first electrode 19 across a space, and makes it possible to appropriately generate an electrostatic force between the first electrode 19 and each second electrode 22. [Variations]

[0070] The present invention is not limited to the above embodiment. In the above embodiment (hereinafter referred to as "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 31a of the third layer 30"), the portion 62 of the second reflection film 60 located on each convex portion 80 faces the first reflection film 50 in the Z-axis direction, but the portion 62 of the second reflection film 60 located on each convex portion 80 may face the surface 14b of the movable portion 10a in the Z-axis direction. That is, in the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 31a of the third layer 30", the outer edge 50a of the first reflection film 50 may be located inside the plurality of convex portions 80 when viewed from the Z-axis direction. In that case, in a state in which no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 62 of the second reflection film 60 located on each convex portion 80 comes into contact with the surface 14b of the movable portion 10a.

[0071] In the "Fabry-Perot interference filter 1 in which multiple convex portions 80 are arranged on the surface 31a of the third layer 30," when no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 62 of the second reflective film 60 located on each convex portion 80 may be separated from the surface 14b of the movable part 10a or the first reflective film 50.

[0072] 12, the multiple convex portions 80 located outside the light transmitting region 1a when viewed from the Z-axis direction may be arranged on the surface 14b of the movable portion 10a (hereinafter referred to as "Fabry-Perot interference filter 1 with multiple convex portions 80 arranged on the surface 14b of the movable portion 10a"). In the "Fabry-Perot interference filter 1 with multiple convex portions 80 arranged on the surface 14b of the movable portion 10a", the first reflection film 50 covers the entirety of each convex portion 80 on the surface 14b, the outer edge 50a of the first reflection film 50 is located inside the bonding region R when viewed from the Z-axis direction, and the portion 52 of the first reflection film 50 located on the convex portion 80 faces the second reflection film 60 in the Z-axis direction.

[0073] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a," a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a so as to be located outside the light transmission region 1a. The first reflection film 50 covers the entirety of each convex portion 80 on the surface 14b, and a portion 52 of the first reflection film 50 located on the convex portion 80 faces the second reflection film 60 in the Z-axis direction. As a result, when the first reflection film 50 approaches the second reflection film 60, the portion 52 of the first reflection film 50 located on each convex portion 80 comes into contact with the second reflection film 60 before the first reflection film 50 comes into surface contact with the second reflection film 60 in the light transmission region 1a, and the occurrence of sticking between the first reflection film 50 and the second reflection film 60 is suppressed. Furthermore, since the first reflection film 50 covers the entirety of each of the convex portions 80 on the surface 14b, even if there is a difference in thermal expansion coefficient between the light transmitting member 14 of the movable portion 10a and each of the convex portions 80, or an external force acts on the Fabry-Perot interference filter 1, the falling off of each of the convex portions 80 from the surface 14b is suppressed. Moreover, since the outer edge 50a of the first reflection film 50 is located inside the bonding region R between the first layer 10 and the third layer 30, deterioration, peeling, etc. of the first reflection film 50 is suppressed, and as a result, the effect of suppressing the falling off of each of the convex portions 80 from the surface 14b is maintained. As described above, according to the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the occurrence of sticking of the first reflection film 50 and the second reflection film 60 can be stably suppressed.

[0074] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 may be located outside the plurality of convex portions 80 when viewed from the Z-axis direction. This allows the first reflection film 50 and the second reflection film 60 to have a uniform thickness in a wide area inside the plurality of convex portions 80. In other words, the light transmission region 1a can be widely secured in the Fabry-Perot interference filter 1. More specifically, it is as follows. If the outer edge 50a of the first reflection film 50 is located inside the plurality of convex portions 80 when viewed from the Z-axis direction, the outer edge 50a of the first reflection film 50, which is prone to variation in thickness, may be located near the light transmission region 1a. Similarly, if the outer edge 60a of the second reflection film 60 is located inside the multiple convex parts 80 when viewed from the Z-axis direction, the outer edge 60a of the second reflection film 60, which is prone to film thickness variation, may be located near the light transmission region 1a. Therefore, if at least one of the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 is located inside the multiple convex parts 80 when viewed from the Z-axis direction, the desired characteristics may not be obtained for the light transmitted through the light transmission region 1a. In the "Fabry-Perot interference filter 1 in which the multiple convex parts 80 are arranged on the surface 14b of the movable part 10a," such a situation can be avoided if the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located outside the multiple convex parts 80 when viewed from the Z-axis direction.

[0075] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the area of ​​the top surface 52a of the portion 52 of the first reflective film 50 located on each convex portion 80 may be smaller than the area of ​​the top surface 80a of each convex portion 80. According to this, when the portion 52 of the first reflective film 50 located on each convex portion 80 comes into contact with the second reflective film 60, the intermolecular force generated between the portion 52 of the first reflective film 50 located on each convex portion 80 and the second reflective film 60 becomes smaller, so that the movable portion 10a can be moved smoothly.

[0076] In the "Fabry-Perot interference filter 1 in which a plurality of protrusions 80 are arranged on the surface 14b of the movable part 10a", the first reflective film 50 may become thinner in the outer edge region 51 along the outer edge 50a as it approaches the outer edge 50a. This makes it even more difficult for the outer edge region 51 of the first reflective film 50 to peel off from the surface 14b, so that it is possible to more stably suppress the falling off of each protrusion 80 from the surface 14b.

[0077] In the "Fabry-Perot interference filter 1 in which a plurality of protrusions 80 are arranged on the surface 14b of the movable part 10a," each of the first reflection film 50 and the second reflection film 60 may be a film formed by physical vapor deposition using a shadow mask. A film formed by physical vapor deposition using a shadow mask becomes thinner in an outer edge region along the outer edge of the film as it approaches the outer edge of the film, so that the outer edge region 51 of the first reflection film 50 becomes more difficult to peel off from the surface 14b, and the outer edge region 61 of the second reflection film 60 becomes more difficult to peel off from the surface 31a. Therefore, it is possible to more stably suppress the falling off of each protrusion 80 from the surface 14b.

[0078] In particular, in the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the first reflective film 50 is formed on the surface 14b of the movable portion 10a by physical vapor deposition using a shadow mask after the plurality of convex portions 80 are formed on the surface 14b of the movable portion 10a, so that the first reflective film 50 is not affected by etching for patterning the plurality of convex portions 80. In addition, in a manufacturing method in which the first reflective film 50 is obtained by forming a film that becomes the first reflective film 50 and then performing additional processing (such as removing unnecessary parts of the film) on the film, for example, when the first reflective film 50 includes a film made of Ag or an Ag alloy, the first reflective film 50 may be deteriorated by the additional processing. However, in a manufacturing method in which the first reflective film 50 is obtained by physical vapor deposition using a shadow mask, it is not necessary to perform additional processing on the first reflective film 50 after physical vapor deposition using a shadow mask, so that deterioration of the first reflective film 50 due to the additional processing can be avoided.

[0079] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located inside the bonding region R when viewed from the Z-axis direction, and each of the first reflection film 50 and the second reflection film 60 may include a film made of Ag or an Ag alloy. Although a film made of Ag or an Ag alloy is easily deteriorated, since the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located inside the bonding region R between the first layer 10 and the third layer 30, deterioration, peeling, etc. of the first reflection film 50 and the second reflection film 60 including a film made of Ag or an Ag alloy can be suppressed.

[0080] In particular, in the "Fabry-Perot interference filter 1 having a plurality of protrusions 80 arranged on the surface 14b of the movable part 10a," the first reflective film 50 contains a "film made of Ag or an Ag alloy," which is a film that is easily deteriorated. Therefore, the "method of forming a plurality of protrusions 80 on the surface 14b of the movable part 10a, and then forming the first reflective film 50 on the surface 14b of the movable part 10a by physical vapor deposition using a shadow mask," in which the first reflective film 50 is not affected by the etching used to pattern the plurality of protrusions 80, is extremely effective.

[0081] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", in a state in which no potential difference is generated between the first electrode 19 and each of the second electrodes 22, the portion 52 of the first reflection film 50 located on each of the convex portions 80 may be in contact with the second reflection film 60. This results in a configuration in which a load is applied to each of the convex portions 80 in a state in which no potential difference is generated between the first electrode 19 and each of the second electrodes 22. However, even in such a configuration, the occurrence of sticking of the first reflection film 50 and the second reflection film 60 can be stably suppressed.

[0082] In the "Fabry-Perot interference filter 1 in which a plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a," the second layer 20 may be laminated on the first layer 10 on the side opposite to the third layer 30 in the Z-axis direction, and a plurality of second electrodes 22 may be arranged on the surface 21b of the second layer 20. This makes it possible to reliably support the plurality of second electrodes 22 so as to face the first electrode 19 via a space, and to appropriately generate an electrostatic force between the first electrode 19 and each second electrode 22.

[0083] In the "Fabry-Perot interference filter 1 in which the plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the portion 52 of the first reflection film 50 located on each convex portion 80 may face the surface 31a of the third layer 30 in the Z-axis direction. That is, in the "Fabry-Perot interference filter 1 in which the plurality of convex portions 80 are arranged on the surface 14b of the movable portion 10a", the outer edge 60a of the second reflection film 60 may be located inside the plurality of convex portions 80 when viewed from the Z-axis direction. In that case, in a state in which no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 52 of the first reflection film 50 located on each convex portion 80 comes into contact with the surface 31a of the third layer 30.

[0084] In the "Fabry-Perot interference filter 1 in which multiple convex portions 80 are arranged on the surface 14b of the movable part 10a," when no potential difference is generated between the first electrode 19 and each second electrode 22, the portion 52 of the first reflective film 50 located on the convex portion 80 may be separated from the surface 31a of the third layer 30 or the second reflective film 60.

[0085] Comparing the above-mentioned "Fabry-Perot interference filter 1 having a plurality of convex portions 80 arranged on surface 31a of third layer 30" with the "Fabry-Perot interference filter 1 having a plurality of convex portions 80 arranged on surface 14b of movable part 10a", the "Fabry-Perot interference filter 1 having a plurality of convex portions 80 arranged on surface 31a of third layer 30" is advantageous in that the manufacturing process can be simplified compared to the "Fabry-Perot interference filter 1 having a plurality of convex portions 80 arranged on surface 14b of movable part 10a".

[0086] The Fabry-Perot interference filter 1 (including all the Fabry-Perot interference filters 1 described in this specification. The same applies below.) may have one convex portion 80 located outside the light transmission region 1a when viewed from the Z-axis direction, instead of the multiple convex portions 80 located outside the light transmission region 1a when viewed from the Z-axis direction. As an example, the single convex portion 80 is an annular wall portion extending along the outer edge of the light transmission region 1a when viewed from the Z-axis direction, and surrounds the light transmission region 1a when viewed from the Z-axis direction. However, when the Fabry-Perot interference filter 1 has multiple convex portions 80, the volume of each convex portion 80 can be reduced, so that during the manufacture of the Fabry-Perot interference filter 1, it is possible to suppress the falling off of each convex portion 80 from the surface 14b due to the difference in thermal expansion coefficient between the light transmission member 14 of the movable portion 10a and each convex portion 80, or the falling off of each convex portion 80 from the surface 31a due to the difference in thermal expansion coefficient between the third substrate 31 of the third layer 30 and each convex portion 80. In the Fabry-Perot interference filter 1, for example, if at least one of the convex portions 80 has optical transparency or is of a size such that its effect can be ignored, the at least one of the convex portions 80 may be located within the optically transparent region 1a when viewed from the Z-axis direction.

[0087] In the Fabry-Perot interference filter 1, the outer edge 50a of the first reflection film 50 and the outer edge 60a of the second reflection film 60 are located outside the multiple protrusions 80 when viewed from the Z-axis direction, and the first reflection film 50 and the second reflection film 60 may be configured so that the metal film of the first reflection film 50 and the metal film of the second reflection film 60 are in contact with each other at least in the portions corresponding to the respective protrusions 80. In this case, when the metal films are in contact with each other, the metal films can be made to have the same potential, and the generation of unnecessary electrostatic force between the first reflection film 50 and the second reflection film 60 can be suppressed.

[0088] In the Fabry-Perot interference filter 1, each of the first reflective film 50 and the second reflective film 60 may be composed only of a film made of Ag, an Ag alloy or other metal material, or may be composed only of a dielectric film made of silicon oxide, titanium oxide, aluminum oxide, etc., or may be composed of a plurality of such dielectric films stacked together.

[0089] In the Fabry-Perot interference filter 1, the second layer 20 may include one second electrode 22 facing the first electrode 19 via a space in the Z-axis direction, and one second metal film 28 surrounding the first metal film 27 when viewed from the Z-axis direction. In this case, one second electrode 22 may be electrically connected to one second metal film 28 via at least one through electrode 26. In other words, the second layer 20 may include one third electrode 24 surrounding the light-shielding film 23 when viewed from the Z-axis direction.

[0090] In the Fabry-Perot interference filter 1, the second layer 20 may include a plurality of first metal films 27 surrounding the light-transmitting region 1a when viewed from the Z-axis direction. In that case, each second electrode 22 may be electrically connected to each first metal film 27 via at least one through electrode 26. The second layer 20 may also include one second electrode 22 facing the first electrode 19 via a space in the Z-axis direction, and one first metal film 27 surrounding the light-transmitting region 1a when viewed from the Z-axis direction. In that case, one second electrode 22 may be electrically connected to one first metal film 27 via at least one through electrode 26. As described above, in the second layer 20, the first metal film 27 may be configured as the third electrode 24, and the second metal film 28 may be configured as the light-shielding film 23.

[0091] In the Fabry-Perot interference filter 1, the first electrode 19 may be provided in the electrode section 16. As an example, as shown in Fig. 10, the first electrode 19 may be disposed on one side surface of the electrode section 16. In the example shown in Fig. 10, the first electrode 19 is a single electrode surrounding the light transmitting region 1a when viewed from the Z-axis direction, and faces a plurality of second electrodes 22 via spaces in the Z-axis direction.

[0092] In the Fabry-Perot interference filter 1, the second layer 20 may further include a fourth electrode disposed on the surface 21a of the second substrate 21. In that case, the fourth electrode may be electrically connected to the first electrode 19 via at least one through electrode 26.

[0093] In the Fabry-Perot interference filter 1, the first layer 10 includes a plurality of first electrodes 19 surrounding the light-transmitting region 1a when viewed from the Z-axis direction, and the second layer 20 may further include a plurality of fourth electrodes surrounding the light-transmitting region 1a when viewed from the Z-axis direction. In this case, each of the first electrodes 19 may be electrically connected to each of the fourth electrodes via at least one through electrode 26. This allows, for example, fine adjustment of the potential applied to each of the first electrodes 19 and fine adjustment of the potential applied to each of the second electrodes 22 so that the first reflection film 50 and the second reflection film 60 are parallel to each other.

[0094] In the Fabry-Perot interference filter 1, at least one third metal film surrounding the second metal film 28 may be disposed on the surface 21a of the second substrate 21. In that case, similar to the light-shielding film 23, the at least one third metal film can function as a light-shielding film.

[0095] In the Fabry-Perot interference filter 1, the third layer 30 may not be laminated on the first layer 10 on the other side of the first layer 10, and the second layer 20 may support the second reflection film 60. As an example, as shown in FIG. 11, the third layer 30 may not be laminated on the first layer 10 on the other side of the first layer 10, and the second reflection film 60 may be disposed on the surface 21b of the second substrate 21 of the second layer 20. In the example shown in FIG. 11, a recess that opens to the first layer 10 side is formed in the second substrate 21, and the bottom surface of the recess is the surface 21b. The first reflection film 50 is disposed on the surface 11a of the first substrate 11 of the first layer 10 on the second layer 20 side. In the first substrate 11, a groove 11c is formed that opens on the surface 11b opposite to the second layer 20 and surrounds the first reflective film 50 and the first electrode 19 when viewed from the Z-axis direction, and the inner part of the groove 11c is configured as the movable part 10a. In this case, the bottom part of the groove 11c functions as an elastic deformation part. Note that even when the third layer 30 is laminated on the first layer 10, the second layer 20 may support the second reflective film 60 instead of the third layer 30.

[0096] In the example shown in FIG. 11, the first layer 10 is a "movable layer including the first electrode 19 and supporting the first reflective film 50 at the movable portion 10a," and the second layer 20 is a "fixed layer supporting the second reflective film 60." In the example shown in FIG. 11, the second electrode 22 facing the first electrode 19 across a space in the Z-axis direction is disposed on the surface 21b of the second substrate 21. That is, in the example shown in FIG. 11, the second electrode 22 is supported by the second layer 20, which is a fixed layer. Note that, in the example shown in FIG. 11, the illustration of the convex portion 80 is omitted, but at least one convex portion 80 located outside the light transmitting region 1a when viewed from the Z-axis direction is disposed on the surface 11a of the first substrate 11 or the surface 21b of the second substrate 21, and the first reflective film 50 or the second reflective film 60 covers the entirety of at least one convex portion 80. [Explanation of symbols]

[0097] 1...Fabry-Perot interference filter, 1a...light transmitting region, 10...first layer (movable layer), 10a...movable part, 14b...surface (movable surface), 19...first electrode, 20...second layer (wiring layer), 21b...surface, 22...second electrode, 30...third layer (fixed layer), 31a...surface (fixed surface), 50...first reflective film, 50a...outer edge, 51...outer edge region, 52...portion, 52a...top surface, 60...second reflective film, 60a...outer edge, 61...outer edge region, 62...portion, 62a...top surface, 80...convex portion, 80a...top surface, R...junction region.

Claims

1. A first reflective film; a second reflective film facing the first reflective film across a space in the light transmitting region; a movable layer including a first electrode and supporting the first reflective film at a movable portion movable in a first direction in which the first reflective film and the second reflective film face each other; a fixed layer that is bonded to the movable layer in a bonding region that surrounds the light transmitting region when viewed from the first direction and supports the second reflective film; a second electrode facing the first electrode across a space in the first direction; a convex portion disposed on a movable surface of the movable portion facing the fixed layer or on a fixed surface of the fixed layer facing the movable portion, when the convex portion is disposed on the movable surface, the first reflection film covers the entire convex portion on the movable surface, an outer edge of the first reflection film is located inside the bonding area when viewed from the first direction, and a portion of the first reflection film located on the convex portion faces the fixed surface or the second reflection film in the first direction, A Fabry-Perot interference filter, wherein when the convex portion is arranged on the fixed surface, the second reflective film covers the entire convex portion on the fixed surface, the outer edge of the second reflective film is located inside the bonding area when viewed from the first direction, and the portion of the second reflective film located on the convex portion faces the movable surface or the first reflective film in the first direction.

2. The Fabry-Perot interference filter according to claim 1 , wherein the convex portion is disposed on the fixing surface.

3. 2 . The Fabry-Perot interference filter according to claim 1 , wherein the outer edge of the first reflecting film and the outer edge of the second reflecting film are positioned outside the convex portion when viewed from the first direction.

4. The Fabry-Perot interference filter of claim 3 , wherein each of the first and second reflective films includes a metal film.

5. when the convex portion is disposed on the movable surface, an area of ​​a top surface of the first reflective film located on the convex portion is smaller than an area of ​​a top surface of the convex portion, 2. The Fabry-Perot interference filter according to claim 1, wherein when the convex portion is disposed on the fixing surface, an area of ​​a top surface of the portion of the second reflective film located on the convex portion is smaller than an area of ​​a top surface of the convex portion.

6. when the convex portion is disposed on the movable surface, the first reflection film becomes thinner in an outer edge region along the outer edge of the first reflection film as it approaches the outer edge of the first reflection film, 2. The Fabry-Perot interference filter according to claim 1, wherein, when the convex portion is disposed on the fixing surface, the second reflection film becomes thinner in an outer edge region along the outer edge of the second reflection film as it approaches the outer edge of the second reflection film.

7. 2. The Fabry-Perot interference filter according to claim 1, wherein each of the first reflective film and the second reflective film is a film formed by physical vapor deposition using a shadow mask.

8. the outer edge of the first reflective film and the outer edge of the second reflective film are located inside the bonding area when viewed from the first direction, The Fabry-Perot interference filter according to claim 1 , wherein each of the first reflective film and the second reflective film includes a film made of Ag or an Ag alloy.

9. The Fabry-Perot interference filter according to claim 1 , wherein the convex portion is a plurality of convex portions surrounding the light transmitting region when viewed from the first direction.

10. when the convex portion is disposed on the movable surface, in a state in which no potential difference is generated between the first electrode and the second electrode, a portion of the first reflective film located on the convex portion is in contact with the fixed surface or the second reflective film, 2. The Fabry-Perot interference filter according to claim 1, wherein when the convex portion is disposed on the fixed surface, in a state in which no potential difference is generated between the first electrode and the second electrode, a portion of the second reflective film located on the convex portion is in contact with the movable surface or the first reflective film.

11. a wiring layer laminated on the movable layer on a side opposite to the fixed layer in the first direction, The Fabry-Perot interference filter according to claim 1 , wherein the second electrode is disposed on a surface of the wiring layer on a side facing the movable layer.

Images