Noise distribution visualization method, noise distribution visualization program, and noise distribution visualization system

Abstract

A noise distribution visualization method is provided that is capable of acquiring the distribution of electromagnetic field noise radiated from a measurement object, regardless of the dimensions or shape of the measurement object. [Solution] The noise distribution visualization method involves continuously imaging an imaging area 2 in which a measurement object 1 is visible through a manually scanned second probe 18, generating electromagnetic field noise 15 during imaging of the imaging area, detecting the electromagnetic field noise 15 entering the measurement object with the first probe, measuring the waveform of the magnetic field or electric field emitted from the measurement object 1 with the second probe 18 at the time the electromagnetic field noise 15 is detected, continuously identifying a first position of the second probe 18 in the imaging area 2 based on the image of the imaging area 2 captured, matching the identified first position to one of a plurality of sections set in the imaging area 2, setting an index corresponding to the measured waveform in the corresponding section, and generating an image of the imaging area 2 in which the index is set in the corresponding section.

Description

[Technical field]

[0001] The present disclosure relates to a noise distribution visualization method, a noise distribution visualization program, and a noise distribution visualization system. [Background technology]

[0002] Patent Document 1 discloses an electrostatic discharge evaluation device. This device includes a discharge gun that discharges to a sample to be measured, a first probe that is arranged near the discharge gun and detects voltage, a second probe that is movable in the direction in which the sample to be measured is placed and detects voltage at each measurement point, an oscilloscope that is connected to the first and second probes and measures the output voltages from the first and second probes after discharge by the discharge gun, and a control machine that evaluates the effect of static electricity on the sample to be measured using the measured value of the output voltage of the second probe when the measured value of the output voltage of the first probe becomes equal to or greater than a predetermined value and the peak detection timing of the output voltage of the first probe. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-10984 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the device of Patent Document 1, the probe movement unit holds the second probe and automatically scans the second probe. This makes it possible to accurately control the scanning direction and position of the second probe. However, it can also be said that the scanning direction and scanning range of the second probe are limited to the direction and range that can be set by the probe movement unit. In other words, the device of Patent Document 1 is prone to restrictions on the dimensions and shape of the measurement target.

[0005] The present disclosure has been made in consideration of the above-mentioned circumstances, and aims to provide a noise distribution visualization method, a noise distribution visualization program, and a noise distribution visualization system that are capable of acquiring the spatial distribution of electromagnetic field noise radiated from a measurement object, regardless of the dimensions or shape of the measurement object. [Means for solving the problem]

[0006] A noise distribution visualization method according to a first aspect of the present disclosure includes continuously imaging an imaging area in which a measurement object is visible through a manually scanned second probe, generating electromagnetic field noise during imaging of the imaging area, detecting the electromagnetic field noise entering the measurement object with a first probe, measuring a waveform of a magnetic field or electric field emitted from the measurement object with the second probe at the time the electromagnetic field noise is detected, continuously identifying a first position of the second probe in the imaging area based on an image of the imaging area captured, matching the identified first position to one of a plurality of sections set in the imaging area, setting an index corresponding to the measured waveform to the corresponding section, and generating an image of the imaging area in which the index is set to the corresponding section.

[0007] A noise distribution visualization program according to a second aspect of the present disclosure causes a computer to execute the steps of continuously acquiring a first image of an imaging area in which a measurement object is visible through a second probe, identifying a first position of the second probe in the imaging area, associating the identified first position with any one of a plurality of sections set in the imaging area, acquiring measurement data of a waveform of a magnetic field or electric field radiated from the measurement object measured by the second probe at the time when electromagnetic field noise entering the measurement object is detected by the first probe, setting an index corresponding to the measured waveform in the associated section, and generating a second image of the imaging area in which the index is set.

[0008] A noise distribution visualization system according to a third aspect of the present disclosure includes a noise generator that generates electromagnetic field noise that invades a measurement object, an imaging device that images an imaging area in which the measurement object is visible through a manually scanned second probe, an oscilloscope that detects the electromagnetic field noise with a first probe and measures the waveform of a magnetic field or electric field emitted from the measurement object at the timing when the electromagnetic field noise is detected by the second probe, and a control device that continuously identifies a first position of the second probe in the imaging area, associates the identified first position with one of a plurality of sections set in the imaging area, sets an index corresponding to the intensity of the measured waveform for the associated section, and generates an image of the imaging area in which the index is set. Effect of the Invention

[0009] According to the present disclosure, it is possible to provide a noise distribution visualization method, a noise distribution visualization program, and a noise distribution visualization system that are capable of acquiring the spatial distribution of electromagnetic field noise radiated from a measurement object, regardless of the dimensions or shape of the measurement object. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a diagram illustrating an example of a configuration of a noise distribution visualization system according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a diagram illustrating an example of a configuration of a control device according to the embodiment. [Diagram 3] FIG. 13 is a diagram showing an example of scanning of a second probe in an imaging region. [Figure 4A] 1 is a flowchart illustrating an example of a noise distribution visualization method according to an embodiment. [Figure 4B] 1 is a flowchart illustrating an example of a noise distribution visualization method according to an embodiment. [Figure 5A] 5 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 4. [Figure 5B] 5 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 4. [Figure 5C] 5 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 4. [Figure 6] 13 is a flowchart showing a first modified example of the noise distribution visualization method according to the embodiment. [Figure 7A] 7 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 6. [Figure 7B] 7 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 6. [Figure 7C] 7 is a diagram showing an example of the relative positions of a second probe and a partition in the process shown in FIG. 6. [Figure 8A] 11A to 11C are diagrams for explaining a second modified example of the noise distribution visualization method according to the embodiment. [Figure 8B] 11A to 11C are diagrams for explaining a second modified example of the noise distribution visualization method according to the embodiment. [Figure 9A] 13A to 13C are diagrams for explaining a third modified example of the noise distribution visualization method according to the embodiment. [Figure 9B] 13A to 13C are diagrams for explaining a third modified example of the noise distribution visualization method according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, several embodiments of the present disclosure will be described. In addition, common parts in each figure are given the same reference numerals, and duplicated explanations will be omitted. For convenience of explanation, an X direction and a Y direction that are perpendicular to each other are defined. The X direction and the Y direction are, for example, the scanning directions of the second probe 18.

[0012] For ease of explanation, the noise distribution visualization system according to this embodiment will be simply referred to as the system below. Furthermore, the electromagnetic field noise radiated from the measurement target 1 will be referred to as the radiation noise. FIG. 1 is a diagram showing an example of the configuration of a system 10 according to this embodiment. The system 10 generates electromagnetic field noise 15 that penetrates the measurement target 1, and measures radiation noise 16 radiated from the measurement target 1. The detection of the electromagnetic field noise 15 is used as a trigger to measure the radiation noise 16. That is, the measurement timing of the radiation noise 16 is synchronized with the detection timing of the electromagnetic field noise 15. Therefore, the radiation noise 16 including a component caused by the electromagnetic field noise 15 can be acquired.

[0013] A first probe 17 is used to detect the electromagnetic field noise 15, and a second probe 18 is used to measure the radiation noise 16. Both the first probe 17 and the second probe 18 are probes of known configurations for detecting a magnetic field or an electric field. The second probe 18 is manually scanned in the vicinity of the measurement target 1, and its position is identified each time by processing an image of the measurement target 1 captured through the second probe 18. As long as all desired positions are measured, the scanning direction of the second probe 18 is arbitrary, and the start and end positions of the measurement are also arbitrary. By performing such measurements, the spatial distribution of various components (e.g., intensity) of the radiation noise 16 in the vicinity of the measurement target 1 can be measured.

[0014] In addition, in the system according to the present embodiment, the second probe 18 is scanned by the hand of a user or the like, eliminating the need for a configuration for mechanically scanning the second probe 18. Therefore, restrictions on the shape and dimensions of the measurement target 1 are relatively loose, and the system has a high degree of freedom in application.

[0015] 1, a system 10 includes an imaging device 11, a noise generator 12, an oscilloscope 13, and a control device 14. The above-mentioned first probe 17 and second probe 18 are connected to the oscilloscope 13. For ease of explanation, the following description will be given taking a circuit built on a substrate as an example of the measurement target 1.

[0016] The imaging device 11 is a so-called video camera that captures moving images. When measuring the radiation noise 16, the imaging device 11 captures an image of an imaging region 2 in which the measurement target 1 is visible through the second probe 18. That is, the imaging device 11 captures an image of the imaging region 2 in a state in which the second probe 18 is positioned between the imaging device 11 and the measurement target 1. The imaging device 11 outputs image data of the captured imaging region 2 to the control device 14.

[0017] The noise generator 12 generates electromagnetic field noise 15 that invades the measurement object 1 while the imaging device 11 is imaging the imaging area 2. The generation of the electromagnetic field noise 15 may be repeated at a predetermined period that is not limited to a constant value. The noise generator 12 generates the electromagnetic field noise 15. For example, as shown in FIG. 1, the noise generator 12 is connected to the measurement object 1 and periodically outputs an impulse waveform, which is an example of the electromagnetic field noise 15, to the measurement object 1. The noise generator 12 may generate a discharge (electromagnetic impulse) via a discharge gun (not shown).

[0018] The oscilloscope 13 measures the electromagnetic field noise 15 using a first probe 17. Specifically, the oscilloscope 13 acquires the waveform of the magnetic field or electric field of the electromagnetic field noise 15, which changes over time. Furthermore, the oscilloscope 13 measures the radiation noise 16 using a second probe 18, triggered by the detection of the electromagnetic field noise 15 (i.e., at the timing when the electromagnetic field noise 15 is detected). That is, the oscilloscope 13 acquires the waveform of the magnetic field or electric field of the radiation noise 16, which changes over time. The oscilloscope 13 outputs waveform data of the measured electromagnetic field noise 15 and radiation noise 16 to the control device 14.

[0019] The control device 14 controls several devices in the system 10 and executes arithmetic processing based on data obtained from the devices. The control device 14 is, for example, a general-purpose computer as shown in FIG. 2, and includes a CPU (Central Processing Unit, processor) 19, a memory 20, a storage (HDD: Hard Disk Drive, SSD: Solid State Drive) 21, a communication device 22, an input / output unit (I / O) 23, and a display unit 24 such as a monitor. The memory 20 and the storage 21 are storage devices. In this computer, the CPU 19 executes various programs including the program according to this embodiment loaded on the memory 20, thereby executing various arithmetic operations such as image processing and waveform processing. The control device 14 may output a signal to an external monitor 25 for displaying on the display unit 24. In this case, the display unit 24 can be omitted.

[0020] 3 is a diagram showing an example of scanning of the second probe 18 in the imaging region 2. In order to evaluate the location where the radiation noise 16 occurs and its intensity distribution, the second probe 18 scans a predetermined region in the imaging region 2. For example, as shown in FIG. 3, the second probe 18 is moved in the Y direction while meandering in the X direction. At this time, the imaging device 11 images the imaging region 2, and the noise generator 12 inputs the electromagnetic field noise 15 to the measurement target 1. In addition, the oscilloscope 13 measures waveform data of the radiation noise 16 via the second probe 18.

[0021] The control device 14 at least (a) continuously identifies a first position of the second probe 18 in the imaging region 2 based on images continuously captured by the imaging device 11, (b) associates the identified first position with one of the multiple sections 3 (see FIG. 3) set in the imaging region 2, (c) records data of the measured waveform and sets an index corresponding to the waveform in the associated section A, and (d) generates an image of the imaging region 2 in which the index is set in section A. The multiple sections 3 are defined, for example, at equal intervals in the X and Y directions.

[0022] The index according to this embodiment is a color that changes according to the components of the acquired waveform, a shade of a single color, a numerical value of the components, etc. The components of the waveform are, for example, the maximum amplitude of the acquired waveform, or the maximum value of a specific frequency component of the waveform calculated by an analysis method such as FFT. However, the components of the waveform are not limited to these. The image with the index generated by the process (d) is displayed on the display unit 24 or the monitor 25 (see FIG. 9A).

[0023] The range of the scale of the index, i.e., the range from the minimum value to the maximum value of the component displayed by the index, may be set in advance, or a value obtained during measurement may be set. Similarly, the number of indexes set in the scale is also set in advance. However, as described below, the range of the scale may change when one or more areas are specified in the imaging area 2.

[0024] In this embodiment, by repeating the above processes (a) to (d), the waveform of the radiation noise 16 in each section 3 can be acquired and its indicator can be displayed. The process (a) can be executed using well-known image processing. For example, by adopting the technology disclosed in Japanese Patent No. 5589226 and Japanese Patent No. 5205547, a predetermined shape of the second probe 18 is identified, its center of gravity is calculated, and the three-dimensional coordinates of the center of gravity are calculated. The three-dimensional coordinates of the center of gravity are set as the detection position of the radiation noise 16.

[0025] The calculated position of the second probe 18 may be a two-dimensional coordinate. For example, when the second probe 18 is scanned in the X and Y directions while keeping a constant distance from the measurement target 1 in the Z direction, or when the second probe 18 is scanned on substantially the same plane, the calculation of the Z coordinate of the second probe 18 may be omitted if the Z coordinate is not necessary.

[0026] Next, a noise distribution visualization method according to this embodiment will be described. Fig. 4A and Fig. 4B are flowcharts showing a first example of the noise distribution visualization method. Fig. 5A to Fig. 5C are diagrams showing the relative positions of the second probe 18 and the section 3 in the process shown in Fig. 4A and Fig. 4B. In the following description, for convenience, an example is assumed in which the second probe 18 scans in the X direction. Also, it is assumed that a plurality of sections 3 are set in advance in the imaging region 2, and each section is associated with two-dimensional coordinates and stored in advance in the control device 14.

[0027] 4A, the imaging device 11 starts continuous imaging of the imaging region 2 where the measurement target 1 is visible through the second probe 18 (step S11). Meanwhile, the noise generator 12 repeatedly generates electromagnetic field noise 15 (step S12). The generation of the electromagnetic field noise 15 may start before or after the imaging device 11 starts imaging. After it is determined that the position of the second probe 18 is located in any one of the multiple sections 3, the oscilloscope 13 operates in a single mode.

[0028] 4B, the control device 14 continuously acquires the image of the imaging area 2 acquired in step S11 from the imaging device 11 as a first image (step S14). The first image acquired by the control device 14 is displayed on the display unit 24 or the monitor 25.

[0029] Next, the control device 14 continuously identifies the position of the second probe 18 (hereinafter, the first position) using the first image (step S15). The position of the second probe 18 refers to the position of the antenna section 18a (see FIG. 3) that detects the magnetic field or electric field of the radiation noise 16. In step S15, the above-mentioned image processing is performed to identify the shape of the second probe 18 (antenna section 18a), calculate its center of gravity, and calculate the three-dimensional coordinates or two-dimensional coordinates of the center of gravity. The shape used to identify the position of the second probe 18 (antenna section 18a) is not limited to the shape (outer shape) of the antenna section 18a, and may be, for example, a mark (marker) attached to the second probe 18 (antenna section 18a).

[0030] Next, the control device 14 judges whether the first position identified in step S15 is located in any of the multiple sections 3 set in the imaging region 2 (step S16). As shown in FIG. 5A, if the first position is not located in any of the multiple sections 3 (NO in step S16), the process returns to step S15. On the other hand, as shown in FIG. 5B, if the first position is located in any of the multiple sections 3 (YES in step S16), the control device 14 sets the section in which the second probe 18 is located as section A (step S17). That is, the control device 14 associates the section in which the second probe 18 is located with any of the multiple sections 3, and sets the associated section as section A.

[0031] Next, the control device 14 instructs the oscilloscope 13 to start waveform measurement in single mode (step S18). In response to this instruction, the oscilloscope 13 starts a new waveform measurement using the first probe 17 and the second probe 18. The oscilloscope 13 also discards the previous waveform data that was stored. Then, as shown in FIG. 4A, after the noise generator 12 generates the electromagnetic field noise 15, when the first probe 17 detects the electromagnetic field noise 15 (step S19), the oscilloscope 13 uses the detection of the electromagnetic field noise 15 as a trigger to measure the waveform of the magnetic field or electric field using the second probe 18 (step S20). For convenience of explanation, it is assumed that the radiation noise 16 (see FIG. 1) from the measurement target 1 is measured at this time. The oscilloscope 13 then digitizes the measured waveform to complete the waveform measurement, and temporarily stops the waveform measurement (step S21).

[0032] 4B, the control device 14 determines whether or not the waveform measurement by the oscilloscope 13 is complete (step S22). Whether or not the waveform measurement is complete can be confirmed, for example, by communication between the control device 14 and the oscilloscope 13. If the waveform measurement is not complete (NO in step S22), the process of step S21 is continued until the waveform measurement of the radiated noise 16 is complete.

[0033] If the waveform measurement of the radiated noise 16 has been completed (YES in step S22), the control device 14 acquires the waveform data of the measured radiated noise 16 from the oscilloscope 13 (step S23) and stores the acquired waveform data in association with section A (step S24).

[0034] 5C, the control device 14 uses the acquired waveform data to set an index corresponding to the waveform (waveform components) of the radiation noise 16 in the section A (step S25). Thereafter, the control device 14 generates a captured image (i.e., a second image) in which the index is set in the section A (step S26). The generated captured image is displayed on the display unit 24 or the monitor 25.

[0035] By repeating this series of processes while moving the second probe 18 in a predetermined section within the imaging region 2, an index is set over the entire area of ​​the predetermined section. In other words, the spatial distribution of the components (intensity, etc.) of the radiation noise 16 in the predetermined section can be obtained.

[0036] In addition, when the above noise distribution visualization method is executed by the control device 14, which is a computer, the control device 14 can be made to execute a program that includes at least the following steps: step S14 of continuously acquiring a first image of the imaging area 2 in which the measurement object 1 is seen through the second probe 18; step S15 of identifying a first position of the second probe 18 in the imaging area 2; step S17 of associating the identified first position with any one of the multiple sections 3 set in the imaging area 2; step S23 of acquiring waveform data of the magnetic field or electric field of the radiation noise 16 radiated from the measurement object 1 measured by the second probe 18 at the timing when the electromagnetic field noise 15 entering the measurement object 1 is detected by the first probe 17; step S25 of setting an index corresponding to the measured waveform in the associated section A; and step S26 of generating a second image of the imaging area 2 in which the index is set.

[0037] Fig. 6 is a flowchart showing a first modified example of the noise distribution visualization method according to the present embodiment. Figs. 7A to 7C are diagrams showing the relative positions of the second probe 18 and the section 3 in the process shown in Fig. 6. Several modified examples will be described below, and the process shown in Fig. 4A is executed in all of them. In the flowchart shown in Fig. 6, the process after step S22 is changed. That is, when the waveform measurement is completed (YES in step S22), the control device 14 specifies the position of the second probe 18 (hereinafter, the second position) from the acquired first image (step S27), and judges whether the second probe 18 is located in section A (step S28).

[0038] When the second probe 18 is located in section A (YES in step S28), the control device 14 executes the processes of steps S23 to S26 described above. That is, the control device 14 sets an index in the section A, generates a captured image (second image) in which the index is set in section A, and causes the display unit 24 or monitor 25 to display the generated captured image.

[0039] On the other hand, if the second probe 18 is not located in the section A (NO in step S28), the control device 14 releases the waiting state of the trigger signal in the oscilloscope 13 and temporarily stops the waveform measurement (step S29). After that, the process returns to step S15. That is, the control device 14 determines that the second probe 18 is not located in the section A, and does not acquire the measured waveform data from the oscilloscope 13. Therefore, the waveform data corresponding to the section A is not recorded, and its index is not set or displayed. In addition, the process returns to step S15, and the position of the second probe 18 in the imaging area 2 is identified again, and the waveform measurement is resumed. Therefore, for example, even if the second probe 18 is out of the imaging area 2 at the time of the determination in step S28, the waveform measurement in the imaging area 2 can be reliably resumed.

[0040] For example, as shown in Figs. 7A to 7C, assume that the second probe 18 enters section A and then moves to section B. The second probe 18 is constantly monitored by imaging, and its position is constantly identified. Therefore, as shown in Fig. 7A, if the second probe 18 moves from section A to the adjacent section B before the waveform measurement of the radiated noise 16 by the oscilloscope 13 is completed, no index is set in section A, and the index is not displayed. Also, if the second probe 18 is located in section B after the waveform measurement of the radiated noise 16 in section A is completed, no index is set in section A, and the index is not displayed.

[0041] Next, as shown in FIG. 7B, when the waveform measurement of the radiated noise 16 is completed with the second probe 18 positioned within section B, and thereafter the second probe 18 remains within section B, an index based on the waveform of the radiated noise 16 is set for section B, as shown in FIG. 7C.

[0042] In this way, in the noise distribution visualization method according to the first modification, the position of the second probe 18 is continuously identified at least during the period until the radiation noise 16 is measured, and the identity between the section in which the second probe 18 is located and the section in which the radiation noise 16 is measured is continuously evaluated. Therefore, an index related to the radiation noise 16 can be appropriately displayed for each section.

[0043] Moreover, if the identity of the above-mentioned two sections cannot be obtained, no indicator is displayed in the section where the second probe 18 was located. Therefore, the section where the measurement of the radiation noise 16 could not be performed can be clearly identified, and measurement can be resumed only in that section. Therefore, the time required to measure the spatial distribution of the components of the radiation noise 16 can be shortened.

[0044] In the first modified example, the processes of steps S27 to S29 may be omitted if the condition that the position identification of the second probe 18 and the waveform measurement of the radiation noise 16 are performed in the same section is satisfied. Such a condition is likely to be met, for example, when the processing time by the oscilloscope is shorter than the movement time of the second probe passing through one section. Also, the processes of steps S30 and S31 may be performed after the process of step S18 and before the process of step S22. In this case, if the result of step S22 is NO, the process proceeds to step S30.

[0045] 8A and 8B are diagrams for explaining a second modified example of the noise distribution visualization method according to the present embodiment. As shown in these figures, when one or more predetermined regions 4 of the imaging region 2 are specified, the control device 14 may change the range of the scale of the index according to the waveform measured in the section 3 in the one or more regions 4. However, the number of indexes in the scale is maintained. Therefore, the range of components set to one index is narrowed, and the component distribution in the specified region can be displayed in a more detailed manner. Note that, in response to a change in the index in the region 4, the indexes set (displayed) in each section 3 outside the region 4 may also be changed according to the changed scale.

[0046] In the example shown in Fig. 8A, the minimum and maximum values ​​of the scale are set to 0V and 20V, respectively. The scale is also divided into 16 indices with gradually changing shading. As shown in Fig. 8A, each section 3 in the imaging area 2 is set to one of these 16 indices.

[0047] When an area 4 including multiple sections 3 is specified using a mouse pointer (not shown) on the display unit 24 or monitor 25 for the component distribution shown in Fig. 8A, the control device 14 calculates (specifies) the minimum and maximum values ​​of the intensity of the radiation noise 16 from each waveform of the radiation noise 16 measured in the sections 3 within the area 4. Next, the control device 14 changes the minimum and maximum values ​​of the scale so that the number of indexes set between the minimum and maximum values ​​of the calculated (specified) intensity increases. For example, the component distribution of area 4 shown in Fig. 8A is shown using the indexes from the index including the minimum value to the fifth index on the scale shown in the same figure.

[0048] On the other hand, when region 4 is specified, as shown in Fig. 8B, the maximum value of the scale is changed from 20 V to 10 V while the number of indices in the scale is maintained. As a result, the component distribution of region 4 is shown using the indices from the index including the minimum value to the eleventh index in the scale shown in Fig. 8B, and the component distribution of region 4 is shown in more detail.

[0049] By performing such an operation, it is possible to show (highlight) the details of the change in the index in an area where the change in the index is difficult to distinguish. Note that, as long as the number of indexes set between the minimum and maximum values ​​of the component is increased, the index including the maximum value of the component may be set between the index including the minimum value of the scale and the index including the maximum value of the scale, as shown in FIG. 8B, or may be set to the index including the maximum value of the scale. In the former case, it is possible to increase the number of indexes indicating the change in distribution of the component that is larger in the area outside the area 4 than in the latter case.

[0050] 9A and 9B are diagrams for explaining a third modified example of the noise distribution visualization method according to the present embodiment. When any one of the multiple sections 3 is designated, the control device 14 may set an index corresponding to the waveform measured by the second probe 18 for the designated section. For example, as shown by the dotted line in Fig. 9A, the second probe 18 is placed behind the measurement target 1 with respect to the imaging device 11 (see Fig. 1) and at a position overlapping with section A when viewed from the imaging device 11.

[0051] Thereafter, the user designates section A with the mouse pointer 26 or the like. The control device 14 detects this designation and executes detection of the electromagnetic field noise 15 and measurement of the radiation noise 16. Furthermore, the control device 14 sets an index for section A based on the waveform data of the measured radiation noise 16. As a result, the index for the set section A is displayed on the display unit 24 or monitor 25, as shown in Fig. 9B.

[0052] According to the third modified example, it is possible to measure the radiation noise 16 even when it is difficult to arrange the second probe 18 in front of and near the measurement target 1. Such measurement is applicable, for example, to a case (not shown) or other object that houses the measurement target 1 that prevents the second probe 18 from capturing an image. [Explanation of symbols]

[0053] 1. Measurement target 2. Imaging area 3 Plots 10. Noise distribution visualization system 11 Imaging device 12 Noise Generator 13 Oscilloscope 14 Control device 15 Electromagnetic noise 16 Radiated noise 17 First Probe 18 Second Probe

Claims

1. Continuously capturing an image of an imaging area in which the measurement target is visible through a second probe that is manually scanned; starting measurement of a waveform of a magnetic field or an electric field radiated from the measurement target by the second probe; generating electromagnetic field noise during imaging of the imaging region after the start of the measurement; Detecting the electromagnetic noise entering the measurement target with a first probe; continuously identifying a first position of the second probe in the imaging region based on the captured image of the imaging region; Corresponding the specified first position to any one of a plurality of sections set in the imaging area; identifying a second position of the second probe after the start of the measurement based on the captured image of the imaging region; when the specified second position is located within the section associated with the first position, an index corresponding to the waveform measured at a timing when the electromagnetic field noise entering the measurement object is detected by a first probe is set in the associated section, and an image of the imaging area in which the index is set in the associated section is generated; when the specified second position is not located within the section associated with the first position, the indicator is not set in the section; Noise distribution visualization method.

2. when one or more predetermined regions of the imaging region are designated, a scale range of the index is changed according to components of the waveform measured in the section within the one or more predetermined regions. The noise distribution visualization method according to claim 1 .

3. A step of continuously acquiring a first image of an imaging area in which a measurement target is visible through a second probe that is manually scanned; starting acquisition of waveform data of a magnetic field or an electric field radiated from the measurement object by the second probe; continuously identifying a first position of the second probe in the imaging region; Corresponding the identified first position to any one of a plurality of sections set in the imaging area; determining a second position of the second probe after starting acquisition of the waveform data based on an image of the imaging area; a step of setting, when the specified second position is located within the section associated with the first position, an index corresponding to the waveform acquired at a timing when the electromagnetic field noise entering the measurement object is detected by a first probe, for the section associated with the first position; generating a second image of the imaging area in which the index is set; when the specified second position is not located within the section associated with the first position, not setting the indicator in the section; A noise distribution visualization program that runs the above on a computer.

4. a noise generator that generates electromagnetic noise that intrudes into a measurement target; an imaging device that images an imaging area in which the measurement target is visible through a second probe that is manually scanned; an oscilloscope that starts measuring a waveform of a magnetic field or an electric field radiated from the measurement target by the second probe and detects the electromagnetic field noise by the first probe; continuously identifying a first position of the second probe in the imaging region; Corresponding the specified first position to any one of a plurality of sections set in the imaging area; determining a second position of the second probe after the measurement is initiated; when the specified second position is located within the section associated with the first position, an index corresponding to the intensity of the waveform measured at a timing when the electromagnetic field noise is detected by the first probe is set for the corresponding section, and an image of the imaging region in which the index is set is generated; a control device that, when the specified second position is not located within the section associated with the first position, does not set the indicator in the section; and A noise distribution visualization system comprising:

Images