Driving device, exposure apparatus, and article manufacturing method

Abstract

To provide a technique advantageous in realizing a wider movable area in a direction for driving a drive object, while realizing high rigidity in other directions.SOLUTION: A drive device includes: a holding member configured to hold a drive object; a bearing member configured to bear the holding member interposing an elastic member; a plurality of actuators configured to drive the holding member holding the drive object; and a restraining part configured to restrain, in a non-contact manner, a position of the holding member to the bearing member, with regard to a non-driving direction different from a driving-possible direction in which the plurality of actuators can drive the holding member.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a drive device, an exposure apparatus, and an article manufacturing method. [Background technology]

[0002] An exposure apparatus used in a lithography process in the manufacture of microdevices such as semiconductor devices can be used to transfer an original having a large number of fine patterns onto a substrate. In order to accurately form the fine patterns, it is important to reduce aberrations (e.g., distortion) in the projection optical system that transfers the patterns in the exposure apparatus.

[0003] The aberration of a projection optical system depends on the refractive index, surface shape, position, etc. of each of the multiple optical elements that make up the projection optical system, and therefore, during the assembly stage, it is necessary to accurately assemble the positions of the multiple optical elements. After assembly, the performance of the projection optical system is measured, and the positions of the optical elements can be adjusted based on the measurement results. After the projection optical system is assembled, the positions of all or some of the multiple optical elements can be adjusted to correct for fluctuations caused by external disturbances such as shocks to the projection optical system during transportation and temperature changes in the exposure apparatus.

[0004] Patent Document 1 describes an optical system barrel that includes a holding mechanism for an optical element and a shape adjustment mechanism that adjusts the shape of the optical element. The shape adjustment mechanism corrects shape errors in the optical element by applying a moment to the held portion of the optical element. The holding mechanism includes a holding member that holds the end of the optical element and an elastic support member that supports the holding member. The elastic support member supports the holding member with high rigidity in the direction of gravity and flexibly in the horizontal direction. The shape adjustment mechanism has an actuator that applies horizontal displacement to the elastic support member. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-31491 Summary of the Invention [Problem to be solved by the invention]

[0006] In a driving device that supports a driven object using only an elastic member, reducing the rigidity in the driving direction allows the driven object to be driven over a longer stroke without increasing the thrust. However, at the same time, the rigidity in the non-driving direction also decreases, which can increase the driving error in the non-driving direction. The increase in the driving error in the non-driving direction can be caused by the actuator generating force in the non-driving direction in addition to the driving direction, or by an error in the installation of the elastic member.

[0007] Even if the parameters of the width, length, and thickness of the elastic deformation part of the elastic member are changed, it is not possible to individually adjust the rigidity in each of multiple directions. Therefore, in a drive device that supports a driven object using only elastic members, it is difficult to achieve a wide range of motion in the drive direction while achieving high rigidity in directions other than the drive direction.

[0008] The present invention aims to provide an advantageous technique for realizing a wide range of motion in the direction in which an object to be driven is driven, while realizing high rigidity in other directions. [Means for solving the problem]

[0009] One aspect of the present invention relates to a drive device, the drive device including: a holding member that holds an object to be driven; a support member that supports the holding member via an elastic member; a plurality of actuators that drive the holding member that holds the object to be driven; and a restraining unit that restrains, in a non-driving direction that is different from a drivable direction in which the holding member can be driven by the plurality of actuators, a position of the holding member relative to the support member in a non-driving direction. The restraining portion restrains the holding member by using magnetic force and gas. do. [Effects of the Invention]

[0010] According to the present invention, an advantageous technique is provided for realizing a wide range of motion in the direction in which the driven object is driven, while realizing high rigidity in other directions. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is a diagram showing the configuration of a drive device according to the first embodiment. [Figure 2] FIG. 10 is a diagram showing the configuration of a drive device according to a second embodiment. [Figure 3] FIG. 10 is a diagram showing the configuration of a drive device according to a third embodiment. [Figure 4] FIG. 1 is a diagram showing the configuration of an exposure apparatus according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0013] FIG. 1(a) is a perspective view of a driving device DA of the first embodiment, and FIG. 1(b) is a cross-sectional view taken along line AA in FIG. 1(a). The driving device DA can be configured to support and drive an object to be driven 1. The object to be driven 1 can be, for example, an optical element. The optical element can be, for example, any of a lens, a parallel plate glass, a prism, a mirror, a reticle, and a diffractive optical element (for example, binary optics). The object to be driven 1 can have, for example, a circular or polygonal (for example, rectangular) shape.

[0014] The driving device DA may include a holding member 2 that holds the object to be driven 1, a support member 3 that supports the holding member 2 via an elastic member 4, and a plurality of actuators 5 that drive the holding member 2 that holds the object to be driven 1. The driving device DA may also include a non-contact restraining unit 6 that restrains the position of the holding member 2 relative to the support member 3 in a non-driving direction that is different from a driving direction in which the holding member 2 can be driven by the plurality of actuators 5. The holding member 2 and the support member 3 may have, for example, a shape that is inscribed in a figure similar to the outer shape of the object to be driven 1.

[0015] The drivable direction, which is a direction in which the holding member 2 can be driven by the multiple actuators 5, can be the direction of displacement of the holding member 2 when the holding member 2 is driven by the multiple actuators 5. The displacement of the driven object 1 follows the displacement of the holding member 2 that holds the driven object 1. The displacement can include parallel movement (translational movement) and rotation. The direction of displacement of the holding member 2 when the holding member 2 is driven by the multiple actuators 5 can be determined by the resultant force of the forces that each of the multiple actuators 5 applies to the holding member 2. Therefore, the drivable direction, which is a direction in which the holding member 2 can be driven by the multiple actuators 5, can include multiple directions. The non-driving direction is a direction different from any of the multiple directions.

[0016] For example, the drivable direction may be any direction along a predetermined plane, and the non-drivable direction may be a direction perpendicular to the predetermined plane. The drivable direction may include at least one of a translation direction along the predetermined plane and a rotation direction around an axis perpendicular to the predetermined plane. An individual drive direction, which is a direction in which each of the multiple actuators 5 applies a thrust force to the holding member 2, may be included in the drivable direction (or multiple directions included in the individual drive direction).

[0017] The elastic member 4 may have characteristics, structure, or shape that make it easy to deform in the drive direction or a specific direction within the drive direction, but difficult to deform in the non-drive direction. The elastic member 4 may be, for example, a leaf spring, but may have other structures. In the first embodiment, the holding member 2 holding the drive target 1 is supported by the support member 3 via multiple elastic members 4 in the non-drive direction, and is restrained or supported by the non-contact restraint portion 6. The elastic member 4 may have multiple deformation points within the elastic member 4 so that the direction of the force acting on the holding member 2 can be changed and / or the force can be magnified. In the example shown in FIG. 1, the drive device DA is equipped with three elastic members 4, but it is sufficient to have at least one elastic member 4 that can deform in multiple directions within the drive direction. In one example, multiple elastic members 4 may be provided so that one elastic member 4 corresponds to one actuator 5.

[0018] 1, each actuator 5 is configured to apply a force to the holding member 2 via the elastic member 4. However, each actuator 5 may be arranged to apply a force to the holding member 2 without via the elastic member 4, or each actuator 5 may be arranged to apply a force directly to the holding member 2. In this case, the driven object 1 is driven so that the force applied to the driven object 1 by each of the multiple actuators 5 and the restoring force applied to the driven object 1 by each of the multiple elastic members 4 are balanced. Some of the multiple actuators 5 may be arranged to apply a force to the holding member 2 via the elastic member 4, and other parts of the multiple actuators 5 may be arranged to apply a force to the holding member 2 without via the elastic member 4.

[0019] In the example shown in Fig. 1, the thrust direction of each of the multiple actuators 5 is directed toward the center of the driven object 1, thereby configuring a multi-axis drive mechanism capable of driving the driven object 1 within one plane. In the example shown in Fig. 1, three actuators 5 are provided, but in order to displace the holding member 2 (driven object 1) in multiple directions, it is sufficient to provide at least the same number of actuators 5 as the driving degrees of freedom. The mounting locations, number, and thrust direction of the actuators 5 can be determined according to the specifications required for the multi-axis drive mechanism.

[0020] In the non-driving direction, the non-contact constraint unit 6 can constrain or support the holding member 2 in a non-contact manner. From another perspective, in the non-driving direction, the support member 3 can constrain or support the holding member 2 via the non-contact constraint unit 6 in a non-contact manner. The non-contact constraint unit 6 is supported by the support member 3. The non-contact constraint unit 6 can be configured so that a portion of the object to be driven 1 is sandwiched via a gap in the non-driving direction. In the example of FIG. 1, the non-contact constraint unit 6 is configured so that the object to be driven 1 is constrained within a single plane, but the degree of freedom of the posture of the object to be driven 1 constrained by the non-contact constraint unit 6 can be determined arbitrarily. For example, the non-contact constraint unit 6 may be a multi-axis drive mechanism that constrains an end of the object to be driven 1 in a non-driving direction in a non-contact manner.

[0021] The non-contact restraint unit 6 may include, for example, a gas-type restraint unit that restrains or supports the holding member 2 using compressed air pressure. Alternatively, the non-contact restraint unit 6 may include a magnetic-type restraint unit that restrains or supports the holding member 2 using magnetic force. The gas-type restraint unit may be a static pressure type that injects compressed air through an orifice or porous flow path on the fixed side, or a dynamic pressure type that compresses air by driving a movable body. A static pressure type is suitable for configurations in which the drive amount is regulated by the elastic member 4. The holding member 2 may be restrained or supported by a liquid instead of a gas, but this may increase the effects of friction and reduce positioning accuracy. Furthermore, using a liquid requires a sealing structure and a liquid recovery structure. Note that when using rolling elements instead of a fluid, repeated small movements on a portion of the rolling surface may cause problems such as uneven lubrication.

[0022] According to the structure in which the non-contact restraining portion 6 restrains or supports the holding member 2 in a non-contact manner in the non-driving direction, the rigidity in the non-driving direction can be increased without deteriorating the driving accuracy due to friction.

[0023] As described above, according to the first embodiment, the ratio of the rigidity in the non-driving direction to the rigidity in the driving direction can be increased. This can suppress drive errors in the non-driving direction that may occur due to errors in the thrust direction of the actuator or manufacturing and assembly errors of the elastic member. In addition, it can suppress a decrease in positional stability in the non-driving direction due to vibrations from the surroundings. Furthermore, by ensuring rigidity in the non-driving direction using the non-contact constraint portion 6, the rigidity of the elastic member 4 can be reduced. This makes it possible to increase the amount of displacement without increasing the thrust and to alleviate stress in the deformed portion of the elastic member, thereby extending the drive stroke. Furthermore, because position repeatability is achieved when no force is applied to the elastic member, a state in which no force is applied to the elastic member can be used as a quasi-position of the drive device.

[0024] FIG. 2(a) is a perspective view of a driving device DA according to a second embodiment, and FIG. 2(b) is a cross-sectional view taken along the line B-B of FIG. 2(a). Details not mentioned in the second embodiment may conform to those of the first embodiment. The driving device DA may be configured to support and drive an optical element 7 as a driven object. The optical element 7 may be, for example, a lens, a parallel plate glass, a prism, a mirror, a reticle, or a diffractive optical element (e.g., binary optics). The optical element 7 has an optical axis 8. In the example shown in FIG. 2, the optical element 7 has a disk shape centered on the optical axis 8, but the position of the optical axis 8 and the shape of the optical element 7 vary depending on the application. For example, if the optical element 7 is a reticle, it generally has a rectangular shape.

[0025] The driving device DA may include a holding member 2 that holds an optical element 7, a support member 3 that supports the holding member 2 via an elastic member 4, and a plurality of actuators 5 that drive the holding member 2 that holds the optical element 7. The driving device DA may also include a non-contact restraining unit 6 that non-contactly restrains the position of the holding member 2 relative to the support member 3 in a non-driving direction that is different from a drivable direction in which the holding member 2 can be driven by the plurality of actuators 5. The driveable direction in which the holding member 2 can be driven by the plurality of actuators 5 may be the direction of displacement of the holding member 2 when the holding member 2 is driven by the plurality of actuators 5. The displacement of the optical element 7 follows the displacement of the holding member 2 that holds the optical element 7.

[0026] 2, the thrust direction of each of the multiple actuators 5 is directed toward the center of the optical element 7, and the holding member 2 (optical element 7) can be driven about two translational axes in a plane perpendicular to the optical axis 8. If the thrust direction of each of the multiple actuators 5 is parallel to the tangent direction of the optical element 7, the optical element 7 can be driven about two translational axes in a plane perpendicular to the optical axis 8 and about rotation about the optical axis 8. In the example shown in FIG. 2, the multi-axis drive mechanism is made up of three elastic members 4 and three actuators 5, but the number of elastic members 4 and the number of actuators 5 can be determined according to the specifications required for the multi-axis drive mechanism.

[0027] The non-contact constraint unit 6 can be configured to constrain or support the holding member 2 in a direction parallel to the optical axis 8. The non-contact constraint unit 6 can have a first portion 6a and a second portion 6b that apply forces to the holding member 2 in the same direction (parallel to the optical axis 8). The first portion 6a and the second portion 6b can be arranged so as to be aligned in a direction perpendicular to the optical axis 8 or in the radial direction of the optical element 7. One of the first portion 6a and the second portion 6b can exert a repulsive force on the holding member 2, while the other can exert an attractive force on the holding member 2. Such a configuration is advantageous for reducing the thickness of the non-contact constraint unit 6 or the drive device DA.

[0028] In an optical system incorporating the drive device DA, multiple optical elements may be arranged in the space from the object plane to the image plane. In the case of a projection optical system of an exposure apparatus, for example, approximately 10 to 30 optical elements may be arranged, and the pattern of a reticle arranged on the object plane may be projected onto the image plane. In an optical system incorporating such a large number of optical elements, it is desirable to reduce the thickness of the drive device DA in the direction parallel to the optical axis 8.

[0029] When a disturbance parallel to the optical axis 8 is applied to the drive device DA, the first portion 6a and the second portion 6b constituting the non-contact restraint unit 6 must maintain the restrained state of the holding member 2 by balancing repulsive and attractive forces. One of the first portion 6a and the second portion 6b may use gas to generate a force for restraining the holding member 2, while the other of the first portion 6a and the second portion 6b may use magnetic force to generate a force for restraining the holding member 2. For example, one of the first portion 6a and the second portion 6b may be configured as a repulsive force generating portion that generates a force in a direction that increases the gap between the non-contact restraint unit 6 and the holding member 2, i.e., a repulsive force, by supplying compressed air to the gap. The other of the first portion 6a and the second portion 6b may be configured as an attractive force generating portion that generates a force in a direction that decreases the gap between the non-contact restraint unit 6 and the holding member 2, i.e., an attractive force, by magnetic force. The repulsive force generating portion and the attractive force generating portion may each be configured to have a ring shape. The repulsive force generating portion is preferably disposed inside the attractive force generating portion.

[0030] In one example, the first portion 6a and the second portion 6b have a ring shape, with the first portion 6a disposed inside the second portion 6b. The first portion 6a is configured as a repulsive force generating portion that generates a repulsive force using gas, and the second portion 6b is configured as an attractive force generating portion that generates an attractive force using magnetic force. The first portion 6a and the second portion 6b may be arranged concentrically. This configuration can limit the distortion (deformation) that the non-contact constraint portion 6 can impart to the optical element 7 via the holding member 2 to a component that is axially symmetric with respect to the optical axis 8. In an optical system incorporating the optical element 7 or the drive device DA, aberrations of the optical system that may occur due to the axially symmetric distortion (deformation) of the optical element 7 can be easily corrected. This can be achieved by adjusting the position of at least one of the optical elements constituting the optical system in the optical axis direction, or by driving an optical element for correcting image plane or spherical aberration.

[0031] The elastic member 4 has high position repeatability when no force is applied thereto. When the actuator 5 is not operating (when the force generated by the actuator 5 is zero), the optical element 7 is located at a position determined by the balanced position of the displacement of the elastic member 4. The position of the optical element 7 determined by the balanced position of the displacement of the elastic member 4 can be used as a reference position. If the reference position of the optical element 7 exists, the assembly of the optical system can proceed in that state. Then, after the optical system is mounted in an apparatus, for example, an exposure apparatus, the reference position can be used as the position origin of the drive device DA when restoring the performance of the apparatus.

[0032] To accurately reproduce the reference position, it is desirable for the actuator 5 to have no resistance that impairs the position repeatability of the elastic member 4 when the power supply to the actuator 5 is cut off to eliminate the force generated by the actuator 5. Resistance that impairs the position repeatability of the elastic member 4 can be, for example, the holding force when the power supply to the actuator 5 is cut off. Examples include harmonic gears and linear screws that are held in place by friction, or worm gears that exhibit a self-locking effect. A linear motor is suitable because it is composed of a non-contact coil and magnets and uses the force generated by the supply of current as thrust. A multilayer piezoelectric element generates a thrust that expands in response to the supply of voltage and has no internal resistance, so it can be used while taking into consideration its inherent hysteresis. Other actuators can also be used as long as their internal resistance when the power supply is cut off does not prevent the elastic member 4 from returning the optical element 7 to the reference position.

[0033] 2, both the elastic member 4 and the non-contact constraint unit 6 are responsible for restraining or supporting the holding member 2 in the direction parallel to the optical axis 8, and the overall support rigidity of the driving device DA can be considered to be the parallel support rigidity of the elastic member 4 and the non-contact constraint unit 6. Therefore, it is preferable that the rigidity of the elastic member 4 in the non-driving direction is smaller than the rigidity of the non-contact constraint unit 6 in the non-driving direction. For example, a configuration in which the holding member 2 is supported by the support member 3 in a state in which it is in contact with at least one of the support member 3 and the non-contact constraint unit 6 due to the attractive force generated by the attractive force generating unit when the repulsive force generating unit is not in operation is advantageous for assembly, transportation, and storage.

[0034] In the second embodiment, while the rigidity in the non-drive direction is increased by the non-contact constraint unit 6, increasing the drive stroke of the optical element 7 by the actuator 5 can correspondingly reduce the rigidity in the drive direction. As a result, when the power supply to the actuator 5, which has a position-maintaining function, is cut off—for example, during assembly, transportation, or storage of the optical system—the optical element 7 may vibrate significantly due to external disturbances. In particular, when applied to an exposure apparatus, the shocks experienced during transportation of the projection optical system are significantly greater than those experienced by the projection optical system during normal use, and the holding member 2 may collide multiple times with the limiting components that restrict the range of motion. However, because the drive unit DA is built into the projection optical system, it is difficult to attach or detach the parts used to secure the holding member 2. Therefore, the above-described configuration, in which the repulsive force generating unit is not activated during assembly, transportation, or storage, and the holding member 2 is secured by the attractive force generating unit, is advantageous for assembling, transporting, and storing the projection optical system.

[0035] FIG. 3 is a perspective view of a driving device DA of a third embodiment. Matters not mentioned in the third embodiment may follow the second embodiment. The driving device DA of the third embodiment has a configuration in which one or more sensors 9 and a controller 10 are added to the driving device DA of the second embodiment. The one or more sensors 9 may be configured to detect the amount of change in the relative position of the optical element 7 or the holding member 2 with respect to the support member 3, or the relative position of the optical element 7 or the holding member 2 with respect to the support member 3. The sensor 9 may be, for example, a displacement sensor.

[0036] The controller 10 can be configured to perform feedback control of the multiple actuators 5 so that the optical element 7 or the holding member 2 coincides with a target state (target position and / or target rotation angle) based on the output of one or more sensors 9. This makes it possible to maintain the performance of an optical system, such as a projection optical system incorporating the optical element 7 or the driving device DA, at the target performance.

[0037] 4 shows an exemplary configuration of an exposure apparatus 100 having a projection optical system 15 incorporating a drive device DA representative of the second or third embodiment. Exposure apparatus 100 is configured to expose substrate 19 by projecting the pattern of original (reticle) 12 onto substrate (wafer) 19 using projection optical system 15.

[0038] In addition to the projection optical system 15, the exposure apparatus 100 may also include, for example, an illumination optical system 11, an original stage 13, a substrate stage 16, an original position measurement instrument 14, a substrate position measurement instrument 17, and a focus measurement instrument 20. The illumination optical system 11 illuminates the original 12 held by the original stage 13, and the projection optical system 15 projects the pattern of the illuminated original 12 onto a substrate 19 held by a substrate chuck 18 of the substrate stage 16. The original position measurement instrument 14 measures the position of the original stage 13. The substrate position measurement instrument 17 measures the position of the substrate stage 16. The focus measurement instrument 20 measures the height of the substrate 19.

[0039] At least one drive device DA can be incorporated into the projection optical system 15 together with the optical element 7. The drive device DA is advantageous for adjusting the position of the optical element 7 with high precision. It takes a long time to disassemble the projection optical system 15 when transporting it, and then to reassemble it after transporting it. By incorporating the drive device DA into the projection optical system 15, it is possible to eliminate the need to disassemble and reassemble the projection optical system 15.

[0040] Below, an article manufacturing method for manufacturing an article using the exposure apparatus 100 will be described. The article may be, for example, a semiconductor device or a display device, but may also be other devices. The article manufacturing method may include a preparation step of preparing the exposure apparatus 100, an exposure step of exposing a substrate using the exposure apparatus 100, a development step of developing the substrate exposed in the exposure step, and a processing step of processing the substrate that has undergone the development step to obtain an article. The substrate provided for the exposure step includes a photosensitive material, and in the exposure step, a latent image is formed in the photosensitive material by exposure. The latent image is converted into a physical pattern in the development step. The processing step may include, for example, an etching step, a film formation step, a dicing step, etc. Typically, the exposure step and the development step are performed repeatedly. This article manufacturing method is advantageous because the exposure apparatus 100 can be prepared and adjusted in a short period of time, thereby manufacturing articles in a short period of time.

[0041] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0042] 1: object to be driven, 2: holding member, 3: support member, 4: elastic member, 5: actuator, 6: non-contact restraint portion, 7: optical element

Claims

1. a holding member that holds an object to be driven; a support member that supports the holding member via an elastic member; a plurality of actuators that drive the holding member that holds the object to be driven; a restraining unit that restrains, in a non-drive direction different from a drive direction in which the holding member can be driven by the plurality of actuators, a position of the holding member relative to the support member in a non-drive direction; Equipped with The drive device, wherein the restraining portion restrains the holding member by using magnetic force and gas.

2. the plurality of actuators apply forces to the holding member in a direction along a predetermined plane, and the non-driving direction is a direction perpendicular to the predetermined plane.

2. The drive device according to claim 1.

3. the drivable direction includes a translation direction along the predetermined plane; 3. The drive device according to claim 2.

4. The drivable direction includes a rotation direction around an axis perpendicular to the predetermined plane.

3. The drive device according to claim 2.

5. The drivable direction includes a translation direction along the predetermined plane and a rotation direction around an axis perpendicular to the predetermined plane.

3. The drive device according to claim 2.

6. the support member supports the holding member via a plurality of elastic members including the elastic member, each of the plurality of actuators drives the holding member via at least one of the plurality of elastic members; 6. The drive device according to claim 1, wherein the drive device is a drive unit.

7. the support member supports the holding member via a plurality of elastic members including the elastic member, the plurality of actuators and the plurality of elastic members are provided such that each actuator corresponds to one elastic member, and each actuator drives the holding member via the corresponding elastic member; 6. The drive device according to claim 1, wherein the drive device is a drive unit.

8. the support member supports the holding member via a plurality of elastic members including the elastic member, each of the plurality of actuators drives the holding member without interposing any of the plurality of elastic members therebetween; 6. The drive device according to claim 1, wherein the drive device is a drive unit.

9. When the plurality of actuators are not in operation, the driven object is disposed at a position determined by a balanced position of the displacements of the elastic members.

9. The drive device according to claim 1, wherein the drive device is a drive unit.

10. The restraint unit includes a repulsive force generating unit that generates a repulsive force by gas and an attractive force generating unit that generates an attractive force by magnetic force.

10. The drive device according to claim 1.

11. the repulsive force generating unit and the attractive force generating unit each have a ring shape; 11. The drive device according to claim 10.

12. The repulsive force generating unit is disposed inside the attractive force generating unit.

12. The drive device according to claim 11.

13. When the repulsive force generating unit is not operating, the holding member is supported by the support member in a state of contact with at least one of the support member and the restraint unit.

13. The drive device according to claim 11 or 12.

14. The retaining member has a first surface, and the support member has a second surface opposite the first surface, the repulsive force generating unit and the attractive force generating unit are disposed on the second surface so as to face the first surface, 14. The drive device according to claim 11, wherein the drive device is a drive unit.

15. The plurality of actuators are disposed on the second surface.

15. The drive device according to claim 14.

16. The rigidity of the elastic member in the non-drive direction is smaller than the rigidity of the restraint portion in the non-drive direction.

16. The drive device according to claim 1, wherein the drive device is a drive unit.

17. a sensor for detecting a relative position of the holding member with respect to the support member; The plurality of actuators are controlled based on the output of the sensor.

17. A drive device according to any one of claims 1 to 16.

18. An exposure apparatus having a projection optical system that projects a pattern of an original onto a substrate, The projection optical system includes a drive device according to any one of claims 1 to 17, the driving device is configured to drive an optical element of the projection optical system as the driving object; An exposure apparatus characterized by:

19. a preparation step of preparing the exposure apparatus according to claim 18; an exposure step of exposing a substrate using the exposure apparatus; a developing step of developing the substrate that has been subjected to the exposure step; a processing step of obtaining an article by processing the substrate that has undergone the developing step; A method for manufacturing an article, comprising:

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