Positioning and clamping device

Abstract

To provide an apparatus for positioning and clamped curing.SOLUTION: An apparatus (200) includes: a first gripping member (202) that has a first magnetic element (204) and is moveable between a first position and a second position; a first biasing member (210) configured to bias the first gripping member toward the first position; and a second magnetic element (214) selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member so that the first gripping member rests in the first position.SELECTED DRAWING: Figure 2a

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0001] This application claims priority to EP Application No. 18181606.7 filed July 4, 2018, EP Application No. 18208040.8 filed November 23, 2018, EP Application No. 18214483.2 filed December 20, 2018, and EP Application No. 19153678.8 filed January 25, 2019, all of which are incorporated herein by reference in their entireties.

[0002]

[0002] The present invention relates to a positioning and clamping apparatus, particularly one that can be used in conjunction with a pellicle assembly tool. [Background technology]

[0003] A lithographic apparatus is a machine constructed to apply a desired pattern onto a substrate. Lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus can, for example, project a pattern in a patterning device (e.g. a mask) onto a layer of radiation-sensitive material (resist) provided on the substrate.

[0004]

[0004] To project a pattern onto a substrate, a lithographic apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of features that can be formed on the substrate. Lithographic apparatus using extreme ultraviolet (EUV) radiation, having a wavelength in the range of 4 to 20 nm, for example 6.7 nm or 13.5 nm, can be used to form smaller features on a substrate than lithographic apparatus using radiation with a wavelength of, for example, 193 nm.

[0005]

[0005] A patterning device (e.g. a mask) used to impart a pattern to a radiation beam in a lithographic apparatus may form part of a mask assembly. The mask assembly may include a pellicle that protects the patterning device from particle contamination. The pellicle may be supported by a pellicle frame. The pellicle and pellicle frame may be attached to form a pellicle assembly. An apparatus for manufacturing a pellicle assembly is described in International Patent Application WO2016 / 079052A2. A method for manufacturing a pellicle assembly may include a gripping apparatus.

[0006] It would be desirable to provide a gripping device that avoids or alleviates one or more problems associated with the prior art. Summary of the Invention

[0007] According to a first aspect, an apparatus is provided, comprising: a first gripping member including a first magnetic element and movable between a first position and a second position, the first biasing member configured to bias the first gripping member toward the first position, and a second magnetic element selectively operable between a first mode in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode in which the second magnetic element does not overcome the first biasing member and the first gripping member remains in the first position.

[0008] In this manner, the first gripping member can be used to selectively grip an object. For example, the first gripping member can not interact with the object in a first position and can function to grip the object in a second position. By operating the second magnetic element in a first mode, the biasing force of the first biasing member acting to hold the first gripping member in the first position can be overcome, causing the first gripping member to move from the first position to a second position. In the second position, the first gripping member can apply a force to the object, for example, to grip the object between the first gripping member and another surface. The gripping force applied by the first gripping member can be at least partially determined by the magnetic field strength of the first and / or second magnetic elements. By operating the second magnetic element in the second mode, magnetic interaction between the first and second magnetic elements is at least partially stopped, and the biasing force applied by the first biasing element can hold the first gripping member in the first position. The apparatus can switch between gripping and releasing without surfaces rubbing against each other, potentially generating particles that could contaminate the object. Specifically, the gripping apparatus can be configured so that none of the surfaces of the first gripping member, first magnetic element, first biasing member, and second magnetic element rub against each other during operation. Additionally or alternatively, the gripping apparatus can be configured so that none of the surfaces of the second gripping member, third magnetic element, second biasing member, and fourth magnetic element rub against each other during operation. In this way, the potential for loose particles to be generated by friction between surfaces of mechanical parts that slide or rub against each other is minimized. This may be particularly desirable in pellicle assembly tools for lithography systems or in other "clean room" environments, such as manufacturing facilities and laboratory environments.

[0009] The device can include a plurality of first gripping members, each of which can include a first magnetic element. The second magnetic element can be appropriately sized to interact with each of the first magnetic elements of each of the first gripping members. Alternatively, a plurality of second magnetic elements can be provided. In some embodiments, one second magnetic element can be provided for each first gripping member (or each first magnetic element). In other embodiments, fewer second magnetic elements than first magnetic elements can be provided. For example, one second magnetic element can be configured to interact with two, three, or more first magnetic elements.

[0010] In one embodiment, the device may further include a second gripping member including a third magnetic element and movable between a first position and a second position, the second biasing member configured to bias the second gripping member toward the first position, and a fourth magnetic element selectively operable between a first mode in which the fourth magnetic element interacts with the third magnetic element to overcome the second biasing member and move the second gripping member to the second position, and a second mode in which the fourth magnetic element does not overcome the second biasing member and the second gripping member remains in the first position. The first and second gripping members may be configured to cooperate in a pincer motion.

[0011]

[0011] That is, the first and second gripping members can be positioned on either side of the object to be gripped such that when moved from a first position to a second position, the first and second gripping members grip the object between them. The magnetic field strengths of the various magnetic elements can be calibrated so that equal relative amounts of force are exerted by each of the first and second gripping members. Alternatively, it may be desirable to calibrate each of the magnetic field strengths of the various magnetic elements so that each of the first and second gripping members exerts a different relative amount of force.

[0012] The device can include a plurality of second gripping members, each of which can include a third magnetic element. The fourth magnetic element can be appropriately sized to interact with each of the third magnetic elements of each of the second gripping members. Alternatively, a plurality of fourth magnetic elements can be provided. In some embodiments, one fourth magnetic element can be provided for each second gripping member (or each third magnetic element). In other embodiments, fewer fourth magnetic elements than third magnetic elements can be provided. For example, one fourth magnetic element can be configured to interact with two, three, or more third magnetic elements.

[0013]

[0013] A plurality of first and / or second gripping members can be provided. For example, two, three, or more first gripping members can be provided. Additionally or alternatively, two, three, or more second gripping members can be provided. In particular, it may be desirable to provide more gripping members when the object to be gripped and / or handled is large or when it is desirable to distribute the gripping force among various contact points on the object. The first and second gripping members can be positioned opposite each other. Alternatively or additionally, some or all of the first and second gripping members can be positioned offset from each other.

[0014] In one embodiment, the first gripping member may include an arm.

[0015] In one embodiment, one or both of the first and second magnetic elements may include a permanent magnet, an electromagnet, or an electropermanent magnet, and one or both of the third and fourth magnetic elements may include a permanent magnet, an electromagnet, or an electropermanent magnet.

[0016]

[0016] As an example, the first magnetic element and / or the third magnetic element can include permanent magnets, and the second magnetic element and / or the fourth magnetic element can include electromagnets or electro-permanent magnets. Electro-permanent magnets may be preferable because they maintain their magnetization even in the absence of an active power supply. In contrast, electromagnets require an active power supply to maintain their magnetization. The second and / or fourth magnetic elements can also include permanent magnets that can be moved within the housing toward or away from the first and / or third magnetic elements to interact with the first and / or third magnetic elements in response to their proximity to each other. For example, the second and / or fourth magnetic elements can include permanent magnets mounted on mechanical or electrical actuators that reciprocate between a first position closer to the first or third magnetic element and a second position farther from the first or third magnetic element than the first position. The housing may ensure that particles generated by movement of the second and / or fourth magnetic elements cannot reach the object being gripped and / or handled, i.e., the first and second modes of the second and / or fourth magnetic elements may be selectively operable depending on the presence (and / or direction) of a power supply or based on the respective proximity of the second and / or fourth magnetic elements to the first and / or third magnetic elements.

[0017] The first and second magnetic elements may be selectively operable to repel each other. Alternatively or additionally, the first and second magnetic elements may be selectively operable to attract each other.

[0018] The third and fourth magnetic elements may be selectively operable to repel each other. Alternatively or additionally, the third and fourth magnetic elements may be selectively operable to attract each other.

[0019] In some embodiments, the polarity of any of the first, second, third, and / or fourth magnetic elements may be selectively reversible.

[0020]

[0020] The first and / or second biasing members may be leaf springs.

[0021] The second magnetic element may include a housing. In such an embodiment, the device is configured such that the first gripping member does not engage the housing of the second magnetic element in the first position. Additionally or alternatively, the fourth magnetic element may include a housing. In such an embodiment, the device is configured such that the second gripping member does not engage the housing of the fourth magnetic element in the first position.

[0022] According to a second aspect, there is provided a pellicle assembly tool comprising an apparatus according to the first aspect, the pellicle assembly tool being configured to selectively grip a component using the apparatus.

[0023] According to a third aspect, there is provided a lithography system comprising a pellicle assembly tool according to the second aspect.

[0024]

[0024] According to a fourth aspect, there is provided a cassette for use in a pellicle assembly. The cassette comprises a pressure plate comprising at least one device according to the first aspect, a base member for supporting a pellicle frame, a hood, and a clamp. The pressure plate is arranged to rest on the base member, the hood covers the pressure plate and is arranged to rest on the base member, and the clamp is configured to clamp the hood to the base member. The pressure plate may include a plurality of devices according to the first aspect. The base member may include a heater.

[0025] According to a fifth aspect, there is provided a pellicle cassette assembly apparatus comprising a pressure plate lift and a kinematic mount configured to move to be positioned below the pressure plate lift, the pressure plate lift configured to lower a pressure plate onto a stiffening carrier positioned on the kinematic mount, and thereafter release the pressure plate.

[0026] According to a sixth aspect, there is provided a computer-implemented method for curing a pellicle. The method includes having a pellicle cassette assembly tool remove a pellicle fixture from a fixture carrier, position a pellicle frame on a base member of a pellicle cassette, attach the pellicle fixture and pellicle film to the pellicle frame using an adhesive, apply pressure to the pellicle fixture and pellicle film using a pressure plate positioned to rest on the base member, and position a hood over the pressure plate to rest on the pressure plate and the base member. The method may further include clamping the hood to the base member. Removing the pellicle fixture from the fixture carrier may include gripping the fixture with an apparatus according to the first aspect so that the fixture can be lifted from the fixture carrier and moved to the pellicle frame.

[0027] According to a seventh aspect, there is provided a pellicle assembly tool comprising a pellicle cassette assembly tool configured to assemble a pellicle cassette and deliver the cassette to a turntable configured to hold a plurality of pellicle cassettes for storage during assembly of another pellicle cassette. The pellicle cassette assembly tool may be configured to perform the method of the sixth aspect.

[0028] According to an eighth aspect, there is provided a cassette for use in a pellicle assembly, the cassette comprising: a base member; an intermediate member for supporting a pellicle fixture in a predetermined position within the cassette; and a pressure plate including at least one pressure finger configured to apply pressure to the pellicle film and / or the pellicle fixture, wherein in use the intermediate member is disposed between the base member and the pressure plate.

[0029] The base member may include at least one clamp for clamping the intermediate member and / or the pressure plate.

[0030]

[0030] At least one clamp may include a magnetic element configured to provide a clamping magnetic field.

[0031]

[0031] The magnetic element may be rotatable to vary the strength of the clamping magnetic field.

[0032]

[0032] The magnetic element may include a plurality of permanent magnets. For example, the magnetic element may include a plurality of neodymium magnets.

[0033] The base member may include at least one opening to allow detection of the intermediate member, pellicle frame, and / or pellicle film by a positioning sensor of a positioning device. The positioning device may include a positioning sensor located "below" the base member, i.e., on the side of the base member opposite the side facing the intermediate member and pressure plate. It will be appreciated that the positioning sensor may take any suitable form, as will be apparent to those skilled in the art. Specifically, the sensor may be an optical sensor, an acoustic sensor, a magnetic sensor, or the like.

[0034] The base member may include at least one support stud configured to support the pellicle frame, and further may include at least one retention stud configured to prevent the pellicle frame from moving relative to the support stud.

[0035]

[0035] At least one pressure finger may include a leaf spring.

[0036]

[0036] The cassette may further comprise a closure member. The closure member functions to seal the cassette and prevent damage to the pellicle. For example, the closure member ensures that particles and / or debris from the external environment cannot reach the pellicle. The closure member may be a hood arranged to cover the pressure plate, optionally the intermediate member, and optionally the base member. Alternatively, the closure member may be, for example, a closure plate configured to block an opening in the pressure plate.

[0037] A ninth aspect relates to a computer-implemented method of assembling a cassette for curing a pellicle, the method including having a cassette assembly apparatus perform the following: positioning a base member within a field of view of at least one imaging device; aligning a pellicle frame with the field of view and positioning the pellicle frame on the base member; aligning a pellicle film with the pellicle frame and positioning the pellicle film on the pellicle frame.

[0038]

[0038] The method may further include having the cassette assembly device align the pellicle film and the intermediate member and position the intermediate member on the base plate.

[0039]

[0039] The method may further include causing the cassette assembly apparatus to clamp the intermediate member to the base plate.

[0040] The method may further include having the cassette assembly apparatus determine a desired position of the pressure plate relative to the position of the pellicle film, position the pressure plate at the desired position, and clamp the pressure plate to the base plate. The clamping may include actuating a magnetic element to provide a clamping field.

[0041] A tenth aspect relates to an apparatus for carrying out the method according to the ninth aspect, the apparatus comprising an imaging device, positioning means for positioning the frame, and positioning means for positioning the film.

[0042]

[0042] The apparatus may further include positioning means for positioning the intermediate member. The apparatus may further include positioning means for positioning the pressure plate.

[0043] Although the following detailed description focuses on the use of the described apparatus and methods in lithography systems, the apparatus and methods disclosed herein may also be used in other applications, for example, the apparatus and methods may be used in laboratories, manufacturing plants, automated warehouses, etc. [Brief explanation of the drawings]

[0044]

[0044] Embodiments of the present invention will now be described, by way of example only, with reference to the accompanying drawings, in which:

[0045] [Figure 1] 1 depicts a schematic diagram of a lithography system including a lithographic apparatus and a radiation source; [Figure 2a] 1 is a schematic view of a gripping device with a gripping member in a first position. [Figure 2b] 2b is a schematic view of the gripping device of FIG. 2a with the gripping members in a second position; [Figure 3a] 1 is a schematic diagram of the steps involved in assembling a pellicle. FIG. [Figure 3b] 1 is a schematic diagram of the steps involved in assembling a pellicle. FIG. [Figure 3c] 1 is a schematic diagram of the steps involved in assembling a pellicle. [Figure 3d] 1 is a schematic diagram of the steps involved in assembling a pellicle. FIG. [Figure 3e] 1 is a schematic diagram of a method for assembling a pellicle. [Figure 4a]It is a schematic diagram of a part of a pellicle assembly tool. [Figure 4b] It is a schematic diagram of a part of an alternative pellicle assembly tool. [Figure 5a] It is a schematic diagram of a device for assembling a pellicle. [Figure 5b] It is a schematic diagram of a device for assembling a pellicle. [Figure 6a] The pellicle frame is schematically shown. [Figure 6b] An alternative pellicle frame is schematically shown. [Figure 7] An exploded view of an embodiment of a pellicle cassette is schematically shown. [Figure 8a] One of two modes of operation of a magnetic clamp is schematically shown. [Figure 8b] One of two modes of operation of a magnetic clamp is schematically shown. [Figure 9a] The alignment of a pellicle frame and a fixture load carrier is schematically shown. [Figure 9b] The details of FIG. 9a are schematically shown. [Figure 10] A device for processing a pellicle cassette is schematically shown.

Embodiments for Carrying Out the Invention

[0046] 1 shows a lithography system including a mask assembly 15 as described herein. The lithography system comprises a radiation source SO and a lithography apparatus LA. The radiation source SO is configured to generate an EUV radiation beam B and to provide the EUV radiation beam B to the lithography apparatus LA. The lithography apparatus LA comprises an illumination system IL, a support structure MT configured to support a patterning device MA (e.g., a mask), a projection system PS, and a substrate table WT configured to support a substrate W. The illumination system IL is configured to condition the EUV radiation beam B before it is incident on the patterning device MA. The projection system PS is configured to project a patterned EUV radiation beam B′ onto the substrate W. The substrate W may include a previously formed pattern. If this is the case, the lithography apparatus LA aligns the previously formed pattern on the substrate W with an image formed by the patterned EUV radiation beam B′.

[0047]

[0046] The source SO, the illumination system IL and the projection system PS may all be constructed and arranged so as to be isolated from the external environment. A gas (e.g. hydrogen) at a pressure well below atmospheric pressure may be provided within the source SO, the illumination system IL and / or the projection system PS.

[0048]

[0047] The radiation source SO may be a laser produced plasma (LPP) source, a discharge produced plasma (DPP) source, a free electron laser (FEL), or any other radiation source capable of generating EUV radiation.

[0049] The radiation source SO shown in Figure 1 is of the LPP type. A laser 1, which may be a CO2 laser, is arranged to deposit energy via a laser beam 2 into a fuel, such as tin (Sn), provided by a fuel emitter 3. Although the following description refers to tin, any suitable fuel may be used. The fuel may be, for example, in liquid form or may be, for example, a metal or alloy. The fuel emitter 3 may comprise a nozzle configured to direct the tin, for example in the form of droplets, along a trajectory towards a plasma formation region 4. The deposition of the laser energy onto the tin generates a plasma 7 in the plasma formation region 4. During de-excitation and recombination of the plasma ions, radiation including EUV radiation is emitted from the plasma.

[0050] The EUV radiation is collected and focused by a near-normal incidence radiation collector 5 (sometimes more commonly referred to as a normal incidence radiation collector). Collector 5 may have a multi-layer structure arranged to reflect EUV radiation (e.g., EUV radiation having a desired wavelength such as 13.5 nm). Collector 5 may have an elliptical configuration with two elliptical foci. The first focus may be at the plasma formation region 4 and the second focus may be at an intermediate focus 6, as discussed below.

[0051]

[0050] In another embodiment of the laser-produced plasma (LPP) source, the collector 5 may be a so-called grazing incidence collector configured to receive the EUV radiation at a grazing incidence angle and to focus the EUV radiation to an intermediate focus. The grazing incidence collector may, for example, be a nested collector including multiple grazing incidence reflectors. The grazing incidence reflectors may be arranged axially symmetrically about the optical axis O.

[0052]

[0051] The radiation source SO may include one or more contamination traps (not shown). For example, the contamination traps may be located between the plasma formation region 4 and the radiation collector 5. The contamination traps may, for example, be rotating foil traps or any other suitable form of contamination trap.

[0053]

[0052] The laser 1 may be separate from the radiation source SO. If this is the case, the laser beam 2 may be passed from the laser 1 to the radiation source SO by a beam delivery system (not shown), which may include, for example, suitable directing mirrors and / or beam expanders and / or other optics. The laser 1 and the radiation source SO together may be considered as a radiation system.

[0054]

[0053] The radiation reflected by the collector 5 forms a radiation beam B. The radiation beam B is focused at a point 6 to form an image of the plasma formation region 4, which acts as a virtual radiation source for the illumination system IL. The point 6 at which the radiation beam B is focused may be referred to as the intermediate focus. The radiation source SO is arranged such that the intermediate focus 6 is located at or near an opening 8 in a closing structure 9 of the radiation source SO.

[0055]

[0054] The radiation beam B travels from the radiation source SO into an illumination system IL that is configured to condition the radiation beam B. The illumination system IL may include a facetted field mirror device 10 and a facetted pupil mirror device 11. Together, the facetted field mirror device 10 and the facetted pupil mirror device 11 impart a desired cross-sectional shape and a desired angular distribution to the radiation beam B. The radiation beam B exits the illumination system IL and is incident on a mask assembly 15 that is held by a support structure MT. The mask assembly 15 includes a patterning device MA and a pellicle 19 that is held in place by a pellicle frame 17. The patterning device MA reflects and patterns the radiation beam B. The illumination system IL may include other mirrors or devices in addition to or instead of the facetted field mirror device 10 and the facetted pupil mirror device 11.

[0056] After reflecting from the patterning device MA, the patterned radiation beam B is incident on a projection system PS. The projection system PS comprises a number of mirrors that are configured to project the radiation beam B onto a substrate W held by a substrate table WT. The projection system PS can apply a demagnification factor to the radiation beam to form images of features that are smaller than corresponding features on the patterning device MA. For example, a demagnification factor of 4 can be applied. Although in Figure 1 the projection system PS has two mirrors, the projection system can include any number of mirrors (for example 6 mirrors).

[0057] The lithographic apparatus can, for example, be used in a scan mode in which the support structure (e.g. mask table) MT and the substrate table WT are scanned synchronously while a pattern imparted to the radiation beam is projected onto the substrate W (i.e. dynamic exposure). The velocity and direction of the substrate table WT relative to the support structure (e.g. mask table) MT may be determined by the de-magnification and image reversal characteristics of the projection system PS. The patterned radiation beam that is incident on the substrate W may comprise a band of radiation. This band of radiation is sometimes referred to as the exposure slit. During a scanning exposure, the substrate table WT and the support structure MT may be moved such that the exposure slit is progressed across an exposure field of the substrate W.

[0058]

[0057] The source SO and / or the lithographic apparatus shown in Figure 1 may include components that are not shown. For example, a spectral filter may be provided in the source SO. The spectral filter may be substantially transparent to EUV radiation but may substantially block radiation of other wavelengths, such as infrared radiation.

[0059] In other embodiments of the lithography system, the radiation source SO may take other forms. For example, in alternative embodiments, the radiation source SO may include one or more free electron lasers. The one or more free electron lasers may be configured to emit EUV radiation that may be provided to one or more lithography apparatuses.

[0060] As briefly mentioned above, mask assembly 15 includes a pellicle 19 provided adjacent to patterning device MA. Pellicle 19 is provided in the path of radiation beam B such that radiation beam B passes through pellicle 19 both as it approaches patterning device MA from illumination system IL and as it is reflected by patterning device MA towards projection system PS. Pellicle 19 comprises a thin film that is substantially transparent to EUV radiation (but absorbs small amounts of EUV radiation). In this specification, an EUV-transparent pellicle or a film that is substantially transparent to EUV radiation means that pellicle 19 is transmissive to at least 65% of EUV radiation, preferably at least 80%, and more preferably at least 90% of EUV radiation. Pellicle 19 functions to protect patterning device MA from particle contamination.

[0061] Despite efforts to maintain a clean environment inside the lithographic apparatus LA, particles may be present inside the lithographic apparatus LA. In the absence of a pellicle 19, particles may deposit on the patterning device MA. Particles on the patterning device MA may adversely affect the pattern imparted to the radiation beam B and the pattern transferred onto the substrate W. The pellicle 19 advantageously provides a barrier between the patterning device MA and the environment within the lithographic apparatus LA, preventing particles from depositing on the patterning device MA.

[0062] The pellicle 19 is positioned a sufficient distance from the patterning device MA so that particles incident on the surface of the pellicle 19 are not in the focal plane of the radiation beam B. This separation between the pellicle 19 and the patterning device MA serves to reduce the extent to which particles on the surface of the pellicle 19 impart a pattern to the radiation beam B. It will be appreciated that if a particle is present in the radiation beam B but is not in the focal plane of the radiation beam B (i.e., not at the surface of the patterning device MA), the image of the particle will not be focused at the surface of the substrate W. Absent other considerations, it may be desirable to position the pellicle 19 a significant distance from the patterning device MA. In practice, however, the space available to accommodate the pellicle 19 within the lithographic apparatus LA is limited by the presence of other components. In some embodiments, the separation between the pellicle 19 and the patterning device MA may be, for example, between approximately 1 mm and 10 mm, such as between 1 mm and 5 mm, or more preferably between 2 mm and 2.5 mm.

[0063] A mask assembly can be prepared for use in a lithographic apparatus by attaching a pellicle to a pellicle frame and then attaching the pellicle frame to a patterning device. A mask assembly including a patterning device MA and a pellicle supported by a pellicle frame adjacent to the patterning device can be prepared remotely from the lithographic apparatus LA, and the mask assembly can be transported to the lithographic apparatus LA for use in the lithographic apparatus LA. For example, at a location where a pattern is to be imparted to the patterning device, the pellicle frame supporting the pellicle can be attached to the patterning device to form a mask assembly. The mask assembly can then be transported to another location where the lithographic apparatus LA is located and provided to the lithographic apparatus LA for use in the lithographic apparatus LA.

[0064] A mask assembly in which a pellicle is held in place by a pellicle frame is fragile, and transporting the mask assembly risks damaging the pellicle. Furthermore, assembling the mask assembly in an environment separate from the lithography apparatus LA can expose the mask assembly to various pressure conditions. For example, the mask assembly may be transported to the lithography apparatus under ambient pressure conditions. The mask assembly may then be loaded into the lithography apparatus LA via a load lock that is pumped to vacuum pressure conditions. Changes in the pressure conditions to which the mask assembly is exposed can cause pressure differences in the pellicle, which can cause the pellicle to bend and risk damaging the pellicle. In one embodiment, the lithography system may include a lithography apparatus LA connected to a pellicle frame mounting apparatus (or pellicle assembly tool). If this is the case, the mask assembly, including the mask and pellicle, can be transferred directly from the pellicle frame mounting apparatus to the lithography apparatus while being maintained in a controlled environment (e.g., a vacuum environment).

[0065] 2a and 2b illustrate a gripping device 200 according to one embodiment. The gripping device can be used, for example, in a process for assembling or transporting a mask assembly. The gripping device 200 comprises a first gripping member 202 and a second gripping member 206 arranged substantially parallel to one another. The first and second gripping members 202, 206 can selectively cooperate in a pinching action to grip an object 222 positioned between the two gripping members 202, 206 (as shown in FIG. 2b). In other words, the first and second gripping members 202, 206 can each move between a first position (shown in FIG. 2a) and a second position (shown in FIG. 2b) to grip or release the object 222. In this embodiment, the gripping members 202, 206 each comprise an arm. However, it will be appreciated that the gripping members may take any suitable form. The first gripping member 202 includes a first magnetic element 204 disposed at one end of the first gripping member 202. However, it will be appreciated that other locations for the first magnetic element 204 may be suitable. The first magnetic element 204 may include, for example, an electromagnet, a permanent magnet, or an electro-permanent magnet. In the illustrated embodiment, a first biasing member 210 is provided at the other end of the first gripping member 202 opposite the first magnetic element 204. The first biasing member 210 may be a leaf spring, but may take any other suitable form. The first biasing member 210 functions to bias the first gripping member 202 toward the first position. It will be appreciated that the first biasing member 210 may be disposed in any suitable location capable of biasing the first gripping member 202. The gripping device 200 also includes a second magnetic element 214, which is positioned near the first magnetic element 204 such that the magnetic fields of the first and second magnetic elements 204, 214 are in sufficient proximity to interact. The second magnetic element 214 may include, for example, an electromagnet, a permanent magnet, or an electro-permanent magnet. The second magnetic element 214 may be provided within a housing 216. The housing 216 may include, for example, aluminum.The second magnetic element 214 is selectively operable in a first mode in which it interacts with the first magnetic element 204 to overcome the first biasing member 210 and move the first gripping member 202 to the second position, and in a second mode in which it does not overcome the first biasing member 210 and causes the first gripping member 202 to remain in or return to the first position. In the embodiment described herein, the second magnetic element 214 is configured to repel the first magnetic element 204 when operating in the first mode of operation. The magnetic field strengths of the first and second magnetic elements 204, 214 at least partially determine the strength of the gripping force with which the first gripping member 202 can grip the object 222.

[0066] The second gripping member 206 includes a third magnetic element 208 disposed at one end of the second gripping member 206. However, it will be appreciated that other suitable locations for the third magnetic element 208 are possible. The third magnetic element 208 may include, for example, an electromagnet, a permanent magnet, or an electro-permanent magnet. In the illustrated embodiment, a second biasing member 212 is provided at the other end of the second gripping member 206 opposite the third magnetic element 208. The second biasing member 212 may be a leaf spring. The second biasing member 212 functions to bias the second gripping member 206 toward the first position. It will be appreciated that the first biasing member 212 may be disposed in any suitable location capable of biasing the second gripping member 206. The gripping device 200 also includes a fourth magnetic element 218, which is positioned near the third magnetic element 208 such that the magnetic fields of the third and fourth magnetic elements 208, 218 are sufficiently close to interact with each other. The fourth magnetic element 218 may include, for example, an electromagnet, a permanent magnet, or an electro-permanent magnet. The fourth magnetic element 218 may be provided within a housing 220. The housing 220 may include, for example, aluminum. The fourth magnetic element 218 is selectively operable between a first mode in which it interacts with the third magnetic element 208 to overcome the second biasing member 212 and move the second gripping member 206 to the second position, and a second mode in which it does not overcome the second biasing member 212 and cause the second gripping member 206 to remain in or return to the first position.

[0067] In the illustrated example, the gripping members 202, 206 do not engage the housings 216, 220 when in the first position. In this manner, particle generation can be minimized. The biasing members 210, 212 can be adjusted to ensure that the gripping members 202, 206 cannot contact the housings 216, 220.

[0068] The first and second modes of the second and / or fourth magnetic elements 214, 218 can be configured depending on the presence (and / or direction) of a power supply or based on the proximity of the second and / or fourth magnetic elements 214, 218 to the first and / or third magnetic elements 204, 208, respectively. For example, if the second magnetic element 214 is an electromagnet, the first mode can be configured by connecting the power supply to magnetize the second magnetic element 214. If the opposing magnetic poles of the first and second magnetic elements 204, 214 are identical, the first and second magnetic elements 204, 214 repel each other. The second mode can be selected by disconnecting the power supply, thereby demagnetizing the second magnetic element. Alternatively, if the second magnetic element 218 is a permanent magnet, it can be configured to move toward or away from the first magnetic element 204 within the housing 216. For example, the second magnetic element can include a permanent magnet mounted on a mechanical or electrical actuator that reciprocates between a first position relatively close to the first magnetic element and a second position farther from the first magnetic element than the first position. The strength of the magnetic fields of the first and second magnetic elements 204, 214 can be configured such that the magnetic elements repel each other when the second magnetic element 214 is closer to the first magnetic element 204 within the housing 216, and such that the magnetic interaction between the first and second magnetic elements 204, 214 is reduced, i.e., the repulsion at least partially ceases, when the second magnetic element 214 is moved away from the first magnetic element 204 within the housing 216. The housing 216 can be configured to surround the second magnetic element 214 such that particles released by movement of the second magnetic element 214 within the housing 216 cannot reach the object 222. The above applies equally to the third and fourth magnetic elements 208, 218. The use of electro-permanent magnets can reduce operating power requirements and allow for continued gripping in the event of a power outage. If the second magnetic element 218 is an electro-permanent magnet, the poles of the second magnetic element 218 can be switched to move the gripping member 202 between the first and second positions.Specifically, to move the gripping member 202 from the first position to the second position, the second magnetic element 218 can be operated to repel the first magnetic element 204, and to move the gripping member 202 from the second position to the first position, the second magnetic element 218 can be operated to attract the first magnetic element 204.

[0069] 2a and 2b, the first position of the first and second gripping members 202, 206 is a position in which the first and second gripping members 202, 206 do not engage the object 222 (as shown in FIG. 2a), and the second position is a position in which the first and second gripping members 202, 206 engage the object 222 to grip the object 222 (as shown in FIG. 2b). However, it will be appreciated that the first position can be a position in which the first and second gripping members 202, 206 engage the object 222 to grip the object 222, and the second position can be a position in which the first and second gripping members 202, 206 do not engage the object 222.

[0070] 2a-b show two gripping members 202, 206, it will be appreciated that any number of gripping members may be provided. Similarly, each gripping member 202, 206 and each of the first and third magnetic elements 204, 208 has a corresponding second and fourth magnetic element 214, 218, respectively, although it will be appreciated that other configurations may be provided.

[0071] 3a through 3d are schematic diagrams of the steps involved in assembling a pellicle. The pellicle includes a frame 320, one or more fixtures 316 attached to the frame 320, and a film 322 attached to the frame. The pellicle can be assembled using a pellicle assembly tool. During pellicle assembly, the fixtures 316 and the film 322 are attached to the frame 320 using an adhesive. The adhesive can then be cured. The pellicle may need to comply with stringent requirements regarding, for example, the flatness of the pellicle, the accuracy of alignment between the various components of the pellicle, the strength of the adhesive connections, and the cleanliness of the pellicle. Specifically, the pellicle may need to have a flatness tolerance of less than 50 μm and a positioning tolerance of less than 35 μm.

[0072] The pellicle assembly tool includes a pressure plate 310 having a plurality of film pressure fingers 312 that apply pressure to the film during adhesive curing. The pressure plate 310 also includes two gripping devices 300 that can be used to grip and / or manipulate the pellicle by gripping fixtures 316. It will be appreciated that the illustrations are for illustrative purposes only, and that more or fewer fixtures 316 and / or gripping devices 300 may be provided. For example, four fixtures 316 and four gripping devices 300 may be provided. Each gripping device 300 includes a first gripping member 302 and a second gripping member 304 that are arranged substantially parallel. The first and second gripping members 302, 304 of the gripping device 300 can selectively cooperate in a clamping action to grip the fixtures 316. The gripping devices 300 shown in FIGS. 3a-3d are normally closed. Each gripping device 300 includes a gripper actuator 308 that operates to open (i.e., move apart) the gripping members 302, 304 and reclose them. The gripper actuator 308 may be implemented as one or more magnetic elements, as described above with respect to FIGS. 2a and 2b. The gripping device 300 also includes at least one fixture pressure finger 306 that applies pressure to the fixtures 316 while attaching them to the frame 320. During pellicle construction, the frame 320 is placed on a curing carrier 324 that supports the frame 320. The curing carrier 324 may also be referred to as a base member. To protect the pellicle during adhesive curing, a hood 328 is provided over the pressure plate 310 and the pellicle. The hood 328 may be fastened to the curing carrier 324 with fasteners. It will be appreciated that any suitable fastener may be used. In one embodiment, the hood 328 may be fastened to the curing carrier 324 using a clamp 326, as described in more detail below. To ensure a tight seal between the pressure plate 310 and the stiffening carrier 324, and between the pressure plate 310 and the hood 328, seal members 314, 315 (eg, O-rings) are provided.As shown in FIG. 3d, the entire assembly including the pellicle disposed on the curing carrier 324, pressure plate 310, and hood 328 can be referred to as a pellicle cassette 330. Pellicle cassette 330 ensures pellicle flatness within a desired tolerance (e.g., 50 μm), allows for precise positioning of the pellicle components, and clamps the pellicle so that relative movement of the components cannot occur during adhesive curing. Additionally, hood 328 ensures that particles do not adhere to the pellicle during curing, thereby preventing contamination-related defects from occurring in the pellicle during curing.

[0073] 3a to 3e, the steps for forming the pellicle cassette 330 will now be described in more detail. In a first step 30, a gripping device 300 on a pressure plate 310 is used to collect fixtures 316 from a fixture carrier 318. Specifically, the pressure plate 310 is moved to a position above the fixture carrier 318 and lowered onto the fixtures 316 positioned on the fixture carrier 318. The fixtures 316 are positioned on the fixture carrier 318 in a defined position and orientation. The alignment of the pressure plate 310, specifically the gripping device 300 of the pressure plate 310, with the fixtures 316 is established and verified using a vision measurement system (e.g., using a camera / other image sensor and appropriate image recognition techniques). The gripping members 302, 304 of the gripping device 300 are normally closed. The gripping members 302, 304 are opened (i.e., moved apart) by the gripper actuator 308, and the pressure plate is lowered until the gripping device 300 is able to grip individual fixtures 316. The gripper actuator 308 is then operated to close the gripping members 302, 304 again, such that each fixture 316 is held by the gripping device 300, as shown in Figure 3a.

[0074] Then, in a subsequent step 32, the pressure plate 310, with the gripping device 300 holding the fixture 316, can be moved to position it above the curing carrier 324. A pellicle can be constructed on the curing carrier 324. As described above, the pellicle includes a frame 320 to which the fixture 316 and film 322 are attached using an adhesive. In some embodiments, the same adhesive can be used to attach the fixture 316 and film 322 to the frame 320. In other embodiments, the fixture 316 can be attached to the frame 320 using a different adhesive than that used to attach the film 322 to the frame 320.

[0075] After applying the fixture 316 and film 322 to the frame 320, in step 34, as shown in FIG. 3b, the gripper actuator 308 is operated to open the gripping members 302, 304 and engage the fixture pressure fingers 306, which apply pressure to the fixture 316 to press the fixture 316 against the frame 320. After the fixture 316 is pressed against the frame 320, in step 36, as shown in FIG. 3c, the gripper actuator 308 is operated to reclose the gripping members 302, 304 of the gripping apparatus 300 and remove the fixture pressure fingers 306 from the surface of the fixture 316 (i.e., remove pressure on the fixture 316). While the adhesive cures, the film pressure fingers 312, attached to a pressure plate, apply pressure to clamp the film 322 in place on the frame 320 (as shown, for example, in FIGS. 3b and 3c).

[0076] The final step 38 in assembling the pellicle cassette 330 is to place the hood 328 on the pressure plate 310 and hold it in place using clamps 326. As a result of clamping the hood 328 on the pressure plate 310 and clamping the pellicle film 322 in place on the pellicle frame 320 with the film pressure fingers 312, the pellicle cassette 330 can be moved freely without risking damage to the fragile pellicle. The time required to build the pellicle cassette 330 is significantly less than the time required for the adhesive used to attach the film 322 and / or fixtures 316 to the frame 320 to cure. Because the cassette can be moved freely without risking damage to the pellicle, this means that the cassette 330 can be built in a pellicle assembly tool and then moved to a storage area while the adhesive cure process is completed. This allows for increased throughput of pellicle assembly time since another pellicle cassette 330 can be constructed while the adhesive in the first pellicle cassette 330 is curing. Once the adhesive in the first pellicle has cured, the first pellicle cassette 330 can be removed from the storage area and further processed according to requirements. It will be appreciated that construction of pellicle cassette 330 can include other steps that will be apparent to one skilled in the art.

[0077] FIG. 4a shows a schematic layout of a portion of a pellicle assembly tool. The pellicle assembly tool includes a preparation station 400, a turntable 402 with storage areas 404, 406, 408, and 410 for storing pellicle cassettes while the adhesive cures, and a post-prep area 412 for transferring components from preparation station 400 to other stations along the assembly line. The pellicle assembly tool includes various other stations 414, 416, 418, and 420 where process steps for assembling a pellicle cassette can be performed. For example, a first station 414 can collect fixtures from a fixture carrier, a second station 416 can attach the fixtures to a frame, a third station 416 can adhere the pellicle film to the frame, and finally a fourth station 420 can fully assemble the pellicle cassette. It will be appreciated that some of the above tasks can be performed at the same station and / or other tasks can be performed during cassette assembly.

[0078]

[0077] Once a completed pellicle cassette has been constructed, for example as described above with reference to Figures 3a-3d, the cassette is returned to the storage carousel 402 for storage while the adhesive cures. New pellicle cassettes can then be processed on the assembly line. While the carousel 402 shown in Figure 4a has four storage areas, it will be appreciated that any number of storage areas is contemplated.

[0079]

[0078] Figure 4b shows a schematic layout of a portion of another pellicle assembly tool. The only difference between the pellicle assembly tool shown in Figure 4b and that shown in Figure 4a is that the turntable 402 is located after the cassette assembly stage 420 rather than after the preparation stage 400. This means that there is no need to go back through the pellicle assembly tool to store the cassette on the turntable 402 during the adhesive curing time. The turntable 402 shown in Figure 4b also has four storage areas 404, 406, 408, 410. It will be appreciated that the turntable of the pellicle assembly tool may be provided with more or fewer storage areas according to requirements.

[0080]

[0079] Figures 5a and 5b show an apparatus 500 for assembling a pellicle cassette. The apparatus 500 includes a dynamic mount 502 configured to support a curing carrier on which a pellicle can be constructed, as described with reference to Figures 3a to 3d. To avoid repetition, features of the curing carrier, pressure plate, and pellicle assembly already described with reference to Figures 3a to 3d will not be further described here. The apparatus 500 also includes a pressure plate lift having at least two posts 504, each of which includes at least one arm 506 for supporting a pressure plate. The dynamic mount 502 is configured to move the curing carrier disposed thereon so that it can be positioned below a pressure plate supported by the pressure plate lift. The pressure plate lift is configured to lower the pressure plate onto the curing carrier and then separate it from the pressure plate to load the pressure plate onto the curing carrier. Film pressure fingers of the pressure plate then contact the pellicle film, pressing the film against the pellicle frame. The alignment of the stiffening carrier with the pressure plate can be defined and / or verified using a camera measurement system to ensure as accurate an alignment as possible.

[0081] In some embodiments, a mount for a pellicle frame, such as dynamic mount 502, can include a heater configured to heat the pellicle frame. Heating the frame can reduce the amount of time required for the adhesive to cure. FIG. 6a shows a pellicle frame 600 positioned on a mount 602 having a thermal center TC. The mount 602 has three branches extending outward from a central point. FIG. 6b shows an alternative configuration in which the frame 600 is positioned on a mount 604 having a grid-like configuration. This configuration can facilitate expansion of the frame 600 when heated.

[0082] In some configurations, the turntable 402 of the pellicle assembly tool shown in FIGS. 4a, 4b may be provided with a heater as described in connection with FIG.

[0083] 7 shows an exploded view of another exemplary configuration of a pellicle cassette 700. The pellicle cassette 700 includes a pressure plate 702, an intermediate member 704, and a base member 706. The intermediate member 704 may be, for example, a fixture load carrier configured to support the fixtures 316 of the pellicle. The intermediate member 704 is disposed between the base member 706 and the pressure plate 702. The pellicle, including the pellicle frame 320, the pellicle film 322, and the fixtures 316, may be supported by the intermediate member 704 and / or the base member 706.

[0084] The pressure plate 702 shown in FIG. 7 is generally in the form of a hollow rectangle. That is, the pressure plate 702 forms a frame-like shape with a rectangular opening. It will be appreciated that the pressure plate 702 may have any suitable shape. A plurality of pressure fingers 712 project from the inner edge of the pressure plate 702 (these edges facing the opening) toward the opposite edge. The pressure fingers 712 are configured to apply pressure to the pellicle film 322 and fixtures 316 during curing of the adhesive used to attach the film 322 and fixtures 316 to the frame 320. Applying pressure to the film 322 and fixtures 316 during pellicle curing ensures that the film 322 and fixtures 316 remain in place relative to the frame 320. It also ensures that the pellicle is held in place within the cassette 700. As a result, the pellicle cassette 700 can be moved during curing without risk of misalignment of the pellicle components relative to one another. In some embodiments, the pressure fingers 712 include leaf springs. In some embodiments, each pressure finger 712 includes a contact point at its free end (i.e., the end distal from the pressure plate 702). The contact point may include a soft plastic material, such as polyether ether ketone (PEEK). Additionally, the contact point may have a spherical shape and / or a substantially rounded tip. Round or spherical contact points may reduce the likelihood of the contact point slipping on the surface of the film and / or fixture. In the embodiment shown in FIG. 7, the pressure plate 702 includes 22 pressure fingers. It will be appreciated that a greater or lesser number of pressure fingers 712 may be provided according to requirements. In some embodiments, the pressure plate 702 may be provided with a carrier handler interface that a carrier handler can engage to position the pressure plate 702.

[0085] The intermediate member 704 shown in FIG. 7 is also generally hollow and rectangular in shape. However, it will be appreciated that the intermediate member 704 may have any suitable shape. Projecting from an inner edge of the intermediate member 704 are support lips 724 configured to support the pellicle fixture 316. In the embodiment shown in FIG. 7, two support lips 724 are provided on each of the two long sides of the intermediate member. It will be appreciated that any suitable number of support lips 724 may be provided. In particular, a support lip 724 may be provided for each fixture 316 attached to the pellicle frame 320. The support lips 724 may include one or more structures or features (not shown) configured to mate with corresponding structures or features (not shown) on the pellicle fixture 316 to facilitate proper alignment of the pellicle with the intermediate member 704.

[0086] The intermediate member 704 also includes at least one marker 726 for use with a positioning system used to align the pellicle and components of the pellicle cassette 700. The marker 726 is configured to be detected by a positioning sensor of the positioning system (not shown) to properly align the intermediate member 704 (and fixture 316) with the pellicle frame 320 and / or film 322. This is discussed in more detail below with reference to FIGS. 9a and 9b. The marker may be, for example, a segment of the intermediate member 704 that is opaque or reflective to light (e.g., visible light or infrared radiation) in the case of an optical sensor. However, one skilled in the art will recognize that any marker that can be detected by an appropriate sensor of the positioning system may be used. In some embodiments, the intermediate member 704 may be provided with a carrier handler interface that can be engaged by a carrier handler to position the intermediate member 704.

[0087]

[0086] The base member 706 is configured to support the pellicle, the intermediate member 704, and the pressure plate 702. The base member 706 includes studs 720 that protrude from the surface of the base member 706 and support and / or retain the pellicle. Specifically, the studs 720 may include support studs upon which the pellicle frame 320 can be positioned. The studs 720 may also include retention studs configured to prevent the pellicle from moving relative to the support studs. For example, the retention studs may protrude further from the surface of the base member 706 than the support studs and be positioned near the edge of the base member 706 so that when the pellicle is placed on the support studs, the retention studs surround the pellicle and prevent movement of the pellicle within the plane of the pellicle. Vertical movement of the pellicle may be prevented by one or more pressure fingers 712 of the pressure plate 702.

[0088] The base member 706 also includes at least one opening 722 configured to allow a positioning sensor of a positioning system to detect the intermediate member 704 and / or the pellicle frame 320 and / or the pellicle film 322. Specifically, the positioning sensor may be located on a side of the base member 706 opposite the side of the base member 706 facing the intermediate member 704 and pellicle. In the embodiment shown in FIG. 7, the base member 706 includes two openings 722 at diagonally opposite corners. By providing openings at the corners, the positioning of the pellicle and / or components of the intermediate member 704 can be verified in two dimensions at once. This is discussed in more detail below with reference to FIGS. 9a and 9b. In some embodiments, the base member 706 may be provided with a carrier handler interface that can be engaged by a carrier handler to position the base member 706.

[0089]

[0088] The base member 706 also includes at least one clamp. In the embodiment shown in Figure 7, the base member 706 includes two magnetic clamps 708. It will be appreciated that any suitable number of clamps may be provided. It will further be appreciated that mechanical clamps may be provided instead of or in addition to the magnetic clamps 708.

[0090] Each magnetic clamp 708 includes a flux guide 710, a rotatable magnetic element 714, and an actuator 716 that generates rotation of the rotatable magnetic element 714. In the embodiment shown in FIG. 7, a panel 718 is disposed on the base member 706 to hold the magnetic clamp 708 in place. The panel 718 is slotted to allow the actuator 716, which in this embodiment is in the form of an arm, to extend through the panel 718 to allow mechanical actuation of the actuator 716. It will be appreciated that the actuator 716 may take any suitable form. For example, the actuator 716 may be configured to be electrically actuated to generate rotation of the magnetic element 714. It will also be appreciated that in some embodiments, the magnetic element 714 may include a permanent magnet, while in other embodiments, the magnetic element 714 may be in the form of an electromagnet. Specifically, the magnetic element 714 may include a plurality of neodymium magnets. The clamping force exerted by each magnetic clamp 708 may be in the range of 100 N to 2000 N. It will be appreciated that a higher clamping force reduces the likelihood of relative component movement during clamping, thereby allowing for a more robust cassette 700. In some applications, a minimum clamping force may be specified depending on requirements. For example, a minimum total clamping force of at least 750 N may be desirable to meet robustness requirements.

[0091] 8a and 8b show the magnetic clamp 708 in cross section. The magnetic clamp 708 has a generally rectangular cross section with the V-shaped notch removed. The magnetic clamp 710 is oriented on the base member 706 with the notch facing away from the panel 718. The flux guide 710 includes two elongated portions comprising ferrous material, referred to herein as a first iron portion 710a and a second iron portion 710b. The flux guide 710 also includes a non-ferrous material disposed between the first and second iron portions 710a and 710b to prevent the first and second iron portions 710a and 710b from contacting each other. The magnetic clamp 708 also includes a hollow center portion in which the magnetic element 714 is housed so that it can rotate 90 degrees between a first position and a second position. To provide optimal clamping force, the magnetic element 714 contacts the flux guide 710. It will be appreciated that if the magnetic element 714 is spaced apart from the flux guide 710 (ie, not in direct contact with the flux guide 710), the clamping force may be reduced.

[0092]

[0091] Magnetic element 714 includes a north pole N and a south pole S. As shown in Figure 8a, when magnetic element 714 is oriented so that each of the north pole N and south pole N contacts both iron portions 710a, 710b of flux guide 710, magnetic field 802 is contained entirely within flux guide 710. As a result, magnetic flux does not act outside of flux guide 710, so the magnetic clamp is effectively "off." As shown in Figure 8b, when magnetic element 714 is rotated 90 degrees so that one pole of magnetic element 714 only contacts first iron portion 710a of flux guide 710 and the other pole of magnetic element 714 only contacts second iron portion 710b of flux guide 710, magnetic flux guide 710 acts as part of magnetic element 714, and magnetic field 802 extends outside of flux guide 710. It will be appreciated that the magnetic element 714 does not need to rotate a full 90 degrees for the magnetic field 802 to be active outside the flux guide 710. However, the strongest outer magnetic field occurs when the north pole N and south pole S, respectively, are perfectly aligned with the first and second iron portions 710 a, 710 b of the flux guide 710.

[0093] FIG. 9a illustrates a plan view of the components of a partially assembled cassette. Specifically, the components illustrated in FIG. 9a include a base member (not shown), an intermediate member 704, a pellicle frame 320, and a pellicle fixture 316. The relative positioning of the base member, intermediate member 704, and pellicle frame 320 can be determined using a positioning system. The positioning system includes at least one sensor for detecting the position of the components. The positioning sensor may be an optical sensor. In the embodiment illustrated in FIG. 9a, two sensors are provided. However, it will be appreciated that more or fewer sensors may be provided. For example, one sensor may be provided. Alternatively, four sensors may be provided. Each sensor has a detection area 900, which may also be referred to as a field of view, within which the presence of a component can be detected. It will be appreciated that the term "field of view" is not intended to limit the sensors to optical sensors. Indeed, the sensors may be optical, acoustic, magnetic, or any other suitable sensors known to those skilled in the art. The sensor can be located on the side of the base member opposite the intermediate member. In this case, one or more openings (e.g., opening 722 shown in FIG. 7) can be provided through the base member to enable the sensor to detect components located on the side of the base member opposite the sensor. In the embodiment shown in FIG. 9a, detection areas 900 are positioned to coincide with diagonally opposite corners of pellicle frame 320 and intermediate member 704. By positioning sensor detection areas 900 to detect corners of frame 320, a single sensor can be used to measure the alignment of the frame and / or intermediate member in two dimensions (shown as the x and y directions in FIG. 9a). This is because the relative positioning in a first dimension (e.g., the x direction shown in FIG. 9a) and a second dimension perpendicular to the first dimension (e.g., the y direction shown in FIG. 9a) can be detected relative to edges of frame 320 that extend in both the x and y directions.

[0094] FIG. 9b shows a detail of FIG. 9a (indicated by a dashed rectangle in FIG. 9a). The detection area 900 is illustrated as a rectangle having dimensions dx and dy. However, it will be appreciated that this is merely an approximation and that the detection area 900 may have any suitable shape. During assembly of the pellicle cassette, the frame 320 is initially positioned within the detection area 900. Specifically, the controller causes a positioning device to move the frame so that it overlaps the detection area 900. The controller can determine that the frame 320 is in the correct position when a specific amount of the detection area 900 is covered by the frame 320. Alternatively, the frame 320 can be determined to be in the correct position when the distance d1 of the first edge of the frame from the first edge of the detection area 900 matches a first setpoint distance and, further, the distance d2 of the second edge of the frame from the second edge (perpendicular to the first edge) of the detection frame 900 matches a second setpoint distance. Specifically, if the determined distances d1 and / or d2 are found to be different from the first or second set point distances, the controller can be configured to move frame 320 until one or more set point distances are reached. If frame 320 is determined to be in the correct position, the controller causes the positioning device to place frame 320 on the base member.

[0095] Next, the positioned pellicle frame 320 and the pellicle film 322 are aligned. The film can be positioned using the same method used to position the frame. That is, the film 322 can be aligned with respect to the detection area 900. Alternatively, the film can be positioned based on the previously positioned frame 320. Once the correct alignment of the film has been determined, the positioning device places the film on the frame via the controller.

[0096] Thereafter, the intermediate member 704 (i.e., the fixture load carrier holding the pellicle fixture) can be aligned with the frame 320, using the previously positioned frame as a reference position. Specifically, the sensor can detect a third distance d3 of the first edge of the intermediate member from the first edge of the frame 320 and a fourth distance d4 of the second edge of the intermediate member 704 from the second edge of the frame 320, and the controller can compare the detected distances with respective setpoint values. If the determined distances d3 and / or d4 are found to be different from the third or fourth setpoint distances, the controller can be configured to move the intermediate member 704 until one or more setpoint distances are reached. If the intermediate member 704 is determined to be in the correct position, the controller can cause the positioning device to place the intermediate member 704 on the base member.

[0097] FIG. 10 schematically illustrates a system for assembling pellicles using cassettes in accordance with the embodiment shown in FIG. 7. The system includes a load station 1000 and a processing station 1010. Specifically, the system can include a film load station 1002, a frame load station 1004, a fixture load station 1006, and a park station 1008. The processing station 1010 can include an unload station 1012, an adhesive application station 1014, a declamping station 1016, and an assembly station 1018. The system further includes a handling device 1020 for moving components of the pellicle and / or pellicle cassette, and a positioning system 1022 for determining the correct positioning of the components relative to one another.

[0098] Each pellicle component (film 322, frame 320, and fixture 316) is loaded into a load station 1000. Specifically, the film load carrier holding the film 322 is loaded into the film load station 1002, and the frame load carrier holding the frame 320 is loaded into the frame load station 1004. The fixture 316 is placed on a fixture load carrier forming the middle member 704 of the cassette 700, and this fixture load carrier and fixture are loaded into the fixture load station 1006. Of course, it will be appreciated that a single load station 1000 may perform the functions of the separately described film load station 1002, frame load station 1004, and fixture load station 1006.

[0099] The base member 706 and pressure plate 702 are loaded into the park station 1008. The base member 706 is moved from the park station 1008 to the assembly station 1018 by the handling device 1020, and the pressure plate 702 is stored in the park station 1008. Simultaneously or thereafter, the frame load carrier holding the frame 320 is moved by the handling device 1020 to the adhesive application station 1014 to apply adhesive to the frame 320. The frame load carrier and frame 320 are then moved by the handling device 1020 to the unload station 1012, where the frame load carrier is unloaded from the system, while the frame 320 remains at the unload station 1012. The frame 320 is then moved by the handling device 1022 to the assembly station 1018 and placed on the base member 706. A positioning system 1022 can be used to ensure accurate positioning of the frame 320 relative to the base member 706, for example, as described with reference to FIGS. 9a and 9b.

[0100] The film load carrier and film 322 are moved to an unload station 1012 where the film load carrier is unloaded from the system while the film 322 remains at the unload station 1012. The film 322 is then moved to an assembly station 1018 and placed on a frame 320. A positioning system can be used to ensure accurate positioning of the film 322 relative to the frame 320, for example as described with reference to Figures 9a and 9b.

[0101] [000100] The fixture load carrier and fixture 316 are then moved to assembly station 1018 and aligned with frame 320 on base member 706. The fixture load carrier is not unloaded like the film load carrier and frame load carrier, but remains in the assembly system to form intermediate member 704 of cassette 700. The fixture load carrier is then placed on base member 706.

[0102] [000101] Finally, the pressure plate 702 is removed from the park station 1008 and moved to the assembly station 1018. The pressure plate 702 is aligned with the film 322 and placed on the intermediate member 704 (i.e., fixture load carrier) to complete the cassette 700. The magnetic clamps 708 on the base member 706 are activated to provide a clamping force that clamps the pressure plate, intermediate member, and base plate together to prevent relative movement between these components.

[0103] [000102] The present invention can also be described by the following clauses. 1. A first gripping member including a first magnetic element and movable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; a second magnetic element selectively operable between a first mode in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode in which the second magnetic element does not overcome the first biasing member and the first gripping member remains in the first position; An apparatus comprising: 2. A second gripping member including a third magnetic element and movable between a first position and a second position; a second biasing member configured to apply a biasing force to the second gripping member toward the first position; a fourth magnetic element selectively operable between a first mode in which the fourth magnetic element interacts with the third magnetic element to overcome the second biasing member and move the second gripping member to the second position, and a second mode in which the fourth magnetic element does not overcome the second biasing member and the second gripping member remains in the first position; 10. The apparatus of claim 1, further comprising: 3. An apparatus described in any of clauses 1 to 2, wherein the apparatus is configured so that none of the surfaces of the first gripping member, the first magnetic element, the first biasing member, and the second magnetic element rub against each other during operation. 4. The device of clause 2 or 3, wherein the device is configured so that none of the surfaces of the second gripping member, the third magnetic element, the second biasing member, and the fourth magnetic element rub against each other during operation. 5. The apparatus of clause 2, wherein the first and second gripping members are configured to cooperate in a pinching action. 6. The apparatus of any of clauses 1 to 5, wherein the first gripping member comprises an arm. 7. The apparatus of any of clauses 1 to 6, wherein one or both of the first and second magnetic elements comprises a permanent magnet, an electromagnet, or an electro-permanent magnet. 8. The apparatus of clause 2 or any clause dependent thereon, wherein one or both of the third and fourth magnetic elements comprises a permanent magnet, an electromagnet, or an electro-permanent magnet. 9. An apparatus according to any of clauses 1 to 8, wherein the first magnetic element and the second magnetic element are selectively operable to repel each other. 10. An apparatus according to any of clauses 1 to 9, wherein the first magnetic element and the second magnetic element are selectively operable to attract each other. 11. An apparatus according to any of clauses 1 to 10, wherein the polarity of any of the magnetic elements is selectively reversible. 12. The device of any of clauses 1 to 11, wherein the first biasing member is a leaf spring. 13. A device according to any one of clauses 1 to 12, wherein the second magnetic element is provided with a housing, and the first gripping member does not engage with the housing in the first position. 14. A pellicle assembly tool comprising an apparatus according to any one of clauses 1 to 13, the pellicle assembly tool being configured to selectively grip a component using the apparatus. 15. A lithography system comprising a pellicle assembly tool according to clause 14. 16. A cassette for use in a pellicle assembly, comprising: a pressure plate having at least one gripping device for gripping the pellicle; a base member for supporting the pellicle frame; Food and the pressure plate is disposed to rest on the base member, and the hood covers the pressure plate and is disposed to rest on the base member. 17. The cassette of clause 16, wherein the at least one gripping device comprises a plurality of gripping devices. 18. A cassette according to clause 16 or 17, wherein at least one gripping device comprises at least one device according to any of clauses 1 to 13. 19. The cassette of any one of clauses 16 to 18, further comprising a fastener configured to fasten the hood to the base member. 20. A cassette as described in clause 19, wherein the fastener comprises a clamp. 21. A cassette according to any one of clauses 16 to 20, further comprising at least one sealing member disposed between the hood and the base member and / or between the base member and the pressure plate. 22. A cassette according to any one of clauses 16 to 21, wherein the base member includes a heater. 23. A pellicle cassette assembly apparatus comprising a pressure plate lift and a dynamic mount, the dynamic mount configured to move to be positioned below the pressure plate lift, the pressure plate lift configured to lower the pressure plate onto a base member positioned on the dynamic mount, and thereafter release the pressure plate. 24. A computer-implemented method for curing a pellicle, comprising: Removing the pellicle fixture from the fixture carrier; placing a pellicle frame on a base member of a pellicle cassette; Attaching the pellicle fixture and the pellicle film to the pellicle frame using an adhesive; applying pressure to the pellicle fixture and the pellicle film using a pressure plate disposed to rest on the base member; placing a hood over the pressure plate so that the hood rests on the pressure plate and on the base member; a pellicle cassette assembly tool performing the steps of: 25. The method of clause 24, further comprising attaching a hood to the base member. 26. The method of clause 24 or 25, wherein alignment of the pressure plate and the pellicle fixture is established using a visual measurement system. 27. The method of any one of clauses 24 to 21, wherein removing the pellicle fixture from the fixture carrier includes grasping the fixture with an apparatus described in any one of clauses 1 to 13 so that the fixture can be lifted from the fixture carrier and moved to the pellicle frame. 28. A pellicle assembly tool comprising: a pellicle cassette assembly tool configured to assemble a pellicle cassette and feed the cassette to a turntable configured to hold multiple pellicle cassettes for storage during assembly of another pellicle cassette. 29. A pellicle cassette assembly tool configured to perform the method of any one of clauses 24 to 27. 30. A cassette for use in a pellicle assembly, comprising: A base member; an intermediate member for supporting the pellicle fixture in a predetermined position within the cassette; a pressure plate including at least one pressure finger configured to apply pressure to the pellicle film and / or the pellicle fixture; wherein in use the intermediate member is disposed between the base member and the pressure plate. 31. The cassette of clause 30, wherein the base plate includes at least one clamp for clamping the intermediate member and / or the pressure plate. 32. The cassette of clause 31, wherein at least one clamp includes a magnetic element configured to provide a clamping magnetic field. 33. A cassette as described in clause 32, wherein the magnetic element is rotatable to vary the strength of the clamping magnetic field. 34. A cassette according to clause 32 or 33, wherein the magnetic element comprises a plurality of permanent magnets. 35. A cassette according to any of clauses 30 to 34, wherein the base plate includes at least one opening for allowing detection of the intermediate member, pellicle frame, and / or pellicle film by a positioning sensor of the positioning device. 36. The cassette of any of clauses 30 to 35, wherein at least one pressure finger includes a leaf spring. 37. A cassette according to clauses 30 to 36, further comprising a closure member. 38. A computer-implemented method for assembling a cassette for curing a pellicle, comprising: positioning a base member within a field of view of at least one imaging device; aligning the field of view with a pellicle frame and positioning the pellicle frame on a base member; Aligning the pellicle frame and the pellicle film and positioning the pellicle film on the pellicle frame; a cassette assembly device performing the steps of: 39. Aligning the pellicle film and the intermediate member and positioning the intermediate member on the base plate; 39. The method of clause 38, further comprising causing the cassette assembly apparatus to perform: 40. Clamping the intermediate member to the base plate; 40. The method of clause 39, further comprising causing the cassette assembly apparatus to perform: 41. Determining a desired position of the pressure plate relative to the position of the pellicle film; Positioning a pressure plate at a desired location; clamping a pressure plate to a base plate; 41. The method of any of clauses 38 to 40, further comprising causing a cassette assembly apparatus to perform: 42. The method of clause 40 or 41, wherein clamping includes actuating a magnetic element to provide a clamping magnetic field.

[0104] [000103] Although specific reference is made herein to embodiments of the invention in connection with lithography apparatus, embodiments of the invention may also be used in other apparatus. Embodiments of the invention may form part of a mask inspection apparatus, a metrology apparatus, or any apparatus that measures or processes objects, such as wafers (or other substrates) or masks (or other patterning devices). These apparatuses are sometimes referred to generically as lithography tools. Such lithography tools may use vacuum or ambient (non-vacuum) conditions. Furthermore, the apparatus may be used with pellicles or membranes that are not intended for use in or in connection with lithography tools or lithography processes. Indeed, the apparatus described herein may be used with pellicles for any purpose.

[0105] [000104] The term "EUV radiation" may be considered to encompass electromagnetic radiation having a wavelength in the range of 4 to 20 nm, for example in the range of 13 to 14 nm. EUV radiation may have a wavelength of less than 10 nm, for example 6.7 nm or 6.8 nm.

[0106] [000105] Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it will be appreciated that the lithographic apparatus described herein have other applications, such as in the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads, etc.

[0107] [000106] While specific embodiments of the invention have been described above, it will be understood that the invention may be practiced otherwise than as described. The above description is intended to be illustrative and not limiting. Thus, it will be apparent to one skilled in the art that modifications may be made to the invention as described without departing from the scope of the claims set forth below.

Claims

1. 1. A cassette for use in a pellicle assembly, comprising: a pressure plate having at least one gripping device for gripping the pellicle; a base member for supporting the pellicle frame; Food and Equipped with the pressure plate is disposed to rest on the base member, the hood covers the pressure plate and is disposed to rest on the base member; The base member includes a heater.

2. The cassette of claim 1 , wherein the at least one gripping device comprises a plurality of gripping devices.

3. The cassette of claim 1 or 2, further comprising a fastener configured to fasten the hood to the base member.

4. 4. The cassette of claim 1, further comprising at least one seal member disposed between the hood and the base member and / or between the base member and the pressure plate.

5. A pellicle cassette assembly apparatus comprising a pressure plate lift and a dynamic mount, the dynamic mount configured to move to be positioned below the pressure plate lift, the pressure plate lift configured to lower a pressure plate onto a base member positioned on the dynamic mount and then release the pressure plate, the base member including a heater.

6. 1. A computer-implemented method for curing a pellicle, comprising: Removing the pellicle fixture from the fixture carrier; placing a pellicle frame on a base member of a pellicle cassette; attaching the pellicle fixture and pellicle film to the pellicle frame using an adhesive; applying pressure to the pellicle fixture and the pellicle film using a pressure plate disposed to rest on the base member; placing a hood over the pressure plate so that it rests on the pressure plate and on the base member; on a pellicle cassette assembly tool, The method, wherein the base member includes a heater.

7. 1. A cassette for use in a pellicle assembly, comprising: A base member; an intermediate member for supporting the pellicle fixture at a predetermined position within the cassette; a pressure plate including at least one pressure finger configured to apply pressure to the pellicle film and / or the pellicle fixture; Equipped with In use, the intermediate member is disposed between the base member and the pressure plate; The base member includes a heater.

8. The cassette of claim 7 , wherein the base plate includes at least one clamp for clamping the intermediate member and / or the pressure plate.

9. 9. The cassette of claim 8, wherein the at least one clamp includes a magnetic element configured to provide a clamping field.

10. 10. A cassette as described in any one of claims 7 to 9, wherein the base plate includes at least one opening to enable detection of the intermediate member, the pellicle frame, and / or the pellicle film by a positioning sensor of a positioning device.

11. 1. A computer-implemented method for assembling a cassette for curing a pellicle, comprising: positioning a base member within a field of view of at least one imaging device; aligning the field of view with a pellicle frame and positioning the pellicle frame on the base member; Aligning the pellicle frame and the pellicle film and positioning the pellicle film on the pellicle frame; causing the cassette assembly device to perform The method, wherein the base member includes a heater.

12. aligning the pellicle film and an intermediate member and positioning the intermediate member on the base plate; The method of claim 11 , further comprising causing the cassette assembly device to perform the following:

13. clamping the intermediate member to the base plate; 13. The method of claim 12, further comprising causing the cassette assembly device to perform:

14. determining a desired position of a pressure plate relative to the position of the pellicle film; positioning the pressure plate at the desired position; clamping the pressure plate to the base plate; The method of claim 11 , further comprising causing the cassette assembly device to perform the following:

15. 15. The method of claim 13 or 14, wherein clamping comprises actuating a magnetic element to provide a clamping magnetic field.

Images