Magnet module and sputtering device including same

Abstract

To provide a magnet module capable of improving variance of a magnetic field, and also to provide a sputtering device capable of improving corrosion unevenness of a sputtering target.SOLUTION: A magnet module includes at least one magnet unit including a first magnet member which extends in a first direction and has a center region and an end part region, and a second magnet member which is in a shape surrounding the first magnet member, wherein the first magnet member includes a first part arranged in the center region and extending in the first direction, a second part arranged in the end part region and having a larger width than the first part, and a third part adjoining the second part and in a shape decreasing in width in the first direction toward the second magnet member, and the second magnet member includes a first part elongated from the first magnet member in a second direction crossing the first direction and a second part elongated from the first magnet member in the first direction.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a magnet module, and more particularly to a magnet module and a sputtering apparatus including the same. [Background technology]

[0002] Sputtering is a deposition method in which electrical energy is applied to ions in a plasma to cause them to collide with a target, causing target atoms or molecules to fly off from the target and deposit on the surface of a substrate, forming a thin film.

[0003] Magnetron sputtering, which uses a magnetic field to increase the deposition rate, is used as a sputtering method. The magnetic field formed by a magnet module arranged adjacent to the target captures electrons and generates high-density plasma, thereby increasing the deposition rate.

[0004] However, variations in the magnetic field distribution can cause variations in the plasma density, resulting in variations in target erosion. Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide a magnet module that can improve the variation in the magnetic field.

[0006] Another object of the present invention is to provide a sputtering apparatus capable of improving uneven erosion of a sputtering target.

[0007] However, the present invention is not limited to the above-mentioned objects, and can be expanded in various ways without departing from the spirit and scope of the present invention. [Means for solving the problem]

[0008] To achieve the above-mentioned object of the present invention, a magnet module according to an exemplary embodiment of the present invention includes at least one magnet unit including a first magnet member extending in a first direction and having a central region and end regions, and a second magnet member having a shape surrounding the first magnet member in a plan view. The first magnet member includes at least a first portion disposed in the central region and extending in the first direction, and a second portion disposed in the end region and having a width greater than that of the first portion. The second magnet member includes a first portion spaced apart from the first magnet member in a second direction intersecting the first direction, and a second portion spaced apart from the first magnet member in the first direction. The width of the first magnet member increases along the first direction in a region where Y1 is greater than or equal to L1*0.5 and less than or equal to L1*1.2. The distance between the first magnet member and the second magnet member along the second direction is greater than or equal to L2*0.5 at the point where Y1=L1*0.5, and is less than or equal to G1*0.75.

[0009] Y1 may be the distance along the first direction from any position on the first magnet member to the outer edge of the second magnet member along the first direction, L1 may be the width of the magnet unit in the second direction, L2 may be the width of a first portion of the second magnet member, and G1 may be the spacing between the first portion of the first magnet member and the opposing first portion of the second magnet member.

[0010] According to one embodiment, the first magnet member may further include a third portion adjacent to the second portion and having a shape that narrows in width toward the second magnet member along the first direction.

[0011] According to one embodiment, the first magnet member may further include a fourth portion disposed between the second portion and the first portion, and the width of the fourth portion may be smaller than the width of the second portion and larger than the width of the first portion.

[0012] According to one embodiment, in the first magnet member, the width of the fourth portion may gradually decrease from the second portion toward the first portion.

[0013] According to one embodiment, in the first magnet member, the width of the third portion in at least a partial region may be greater than the width of the second portion.

[0014] According to one embodiment, the first magnet member may further include a third portion that is closer to the second magnet member than the second portion and has an overall width greater than that of the second portion.

[0015] According to one embodiment, the second magnet member may further include a corner portion connecting the first portion and the second portion, and the corner portion may have an interface that intersects the first direction and the second direction in a plan view.

[0016] According to one embodiment, the plurality of magnet units may be arranged in the second direction. In a first magnet unit arranged in the inner region, a center line of the first magnet member and a center line of the second magnet member may overlap. In a second magnet unit arranged in the outer region, a center line of the first magnet member and a center line of the second magnet member may be spaced apart.

[0017] According to one embodiment, the height of the first magnet member and the height of the second magnet member may be different.

[0018] According to one embodiment, the first magnet member may be a south pole magnet and the second magnet member may be a north pole magnet.

[0019] According to one embodiment, the first magnet member may be an north pole magnet and the second magnet member may be an south pole magnet.

[0020] According to one embodiment, the device may further include a shielding member that partially covers the magnet unit.

[0021] A magnet module according to an exemplary embodiment of the present invention includes at least one magnet unit including a first magnet member extending in a first direction and having a central region and end regions, and a second magnet member having a shape surrounding the first magnet member in a plan view. The first magnet member includes a first portion disposed in the central region and extending in the first direction, a second portion disposed in the end regions and having a width greater than that of the first portion, and a third portion adjacent to the second portion and having a shape whose width decreases toward the second magnet member along the first direction. The second magnet member includes a first portion spaced apart from the first magnet member in a second direction intersecting the first direction, and a second portion spaced apart from the first magnet member in the first direction.

[0022] A sputtering apparatus according to an exemplary embodiment of the present invention includes a back plate connected to a power supply unit and for supporting a target, and a magnet module disposed below the back plate.

[0023] The magnet module includes at least one magnet unit including a first magnet member extending in a first direction and having a central region and end regions, and a second magnet member having a shape surrounding the first magnet member in a plan view. The first magnet member includes at least a first portion disposed in the central region and extending in the first direction, and a second portion disposed in the end region and having a width greater than that of the first portion. The second magnet member includes a first portion spaced apart from the first magnet member in a second direction intersecting the first direction, and a second portion spaced apart from the first magnet member in the first direction. The width of the first magnet member increases along the first direction in a region where Y1 is greater than or equal to L1*0.5 and less than or equal to L1*1.2. The spacing between the first magnet member and the second magnet member along the second direction is greater than or equal to L2*0.5 at the point where Y1=L1*0.5 and less than or equal to G1*0.75. [Effects of the Invention]

[0024] According to one embodiment of the present invention, in a sputtering apparatus using a magnet module, it is possible to improve the unevenness of the magnetic field distribution, thereby reducing uneven erosion of the sputtering target, thereby improving the quality of the thin film formed by sputtering and extending the service life of the target. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a schematic diagram showing the structure of a sputtering apparatus according to an embodiment of the present invention; [Figure 2] FIG. 2 is a plan view showing a magnet module according to an embodiment of the present invention. [Figure 3] FIG. 3 is an enlarged plan view of region A in FIG. 2. [Figure 4] FIG. 2 is an enlarged plan view showing a magnet module according to an embodiment of the present invention. [Figure 5]FIG. 2 is an enlarged plan view showing a magnet module according to an embodiment of the present invention. [Figure 6] FIG. 2 is an enlarged plan view showing a magnet module according to an embodiment of the present invention. [Figure 7] FIG. 2 is a plan view showing a magnet module according to an embodiment of the present invention. [Figure 8] 1 is a cross-sectional view showing a magnet unit of a magnet module according to an embodiment of the present invention. [Figure 9] 1 is a cross-sectional view showing a magnet unit of a magnet module according to an embodiment of the present invention. [Figure 10] 1 is a cross-sectional view showing a magnet unit of a magnet module according to an embodiment of the present invention. [Figure 11] FIG. 2 is a plan view showing a magnet module according to an embodiment of the present invention. [Figure 12] 1 is a conceptual diagram showing the structure of a sputtering apparatus according to an embodiment of the present invention. [Figure 13] 1 is a conceptual diagram showing the structure of a sputtering apparatus according to an embodiment of the present invention. [Figure 14] FIG. 10 is an enlarged plan view showing a magnet module of a comparative example used in an experiment to demonstrate the effects of the present invention. [Figure 15] 10 is a graph showing the strength of a magnetic field measured according to a position in an example of the present invention and a comparative example; DETAILED DESCRIPTION OF THE INVENTION

[0026] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnet module and a sputtering apparatus according to exemplary embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] FIG. 1 is a conceptual diagram showing the structure of a sputtering apparatus according to one embodiment of the present invention.

[0028] As shown in FIG. 1, a sputtering apparatus according to one embodiment includes a back plate 40 that supports a target 80, is applied with a voltage, and acts as a cathode for generating plasma, and a magnet module 10 disposed below the back plate 40.

[0029] The sputtering apparatus further includes a chamber 30 that contains an inert gas for generating plasma and provides a discharge space. The chamber 30 is supplied with the inert gas through a gas supply unit 70. For example, the inert gas includes argon (Ar), neon (Ne), etc.

[0030] A deposition substrate 100 is disposed in the chamber 30. The deposition substrate 100 is spaced apart from the target 80 and disposed facing the target 80. For example, the sputtering apparatus may include a substrate fixing unit 110, and the deposition substrate 100 is fixed in the chamber 30 by the substrate fixing unit 110.

[0031] The back plate 40 is electrically connected to a power supply 60. The power supply 60 can provide RF or DC power to the back plate 40.

[0032] When a voltage is applied to the back plate 40, a plasma discharge occurs in the chamber 30, which ionizes the inert gas. The ionized particles are accelerated toward the target 80 and collide with the target 80, releasing atoms that make up the target 80. The released atoms then travel to the deposition substrate 100 and are deposited on the deposition substrate 100 to form a thin film.

[0033] The target 80 can include a variety of materials depending on the desired thin film. For example, the target can include a metal or a metal oxide. For example, the metal can include metals such as aluminum, titanium, copper, molybdenum, gold, silver, indium, zinc, tin, silicon, etc. For example, the metal oxide can include indium oxide, zinc oxide, tin oxide, indium zinc oxide, indium tin oxide, indium zinc tin oxide, indium zinc gallium oxide, etc.

[0034] The magnet module 10 forms a magnetic field when plasma is generated, increasing the density of the plasma and the deposition rate.

[0035] A protective sheet 50 is disposed between the back plate 40 and the magnet module 10. For example, the protective sheet 50 includes a fluorine-based resin such as polytetrafluoroethylene (PTFE).

[0036] The magnet module 10 and the back plate 40 may constitute a single cathode module. For example, the cathode module may be disposed within the chamber 30, or may be inserted into the chamber 30 so that a portion of the cathode module is disposed within the chamber 30. However, embodiments of the present invention are not limited thereto, and the magnet module 10 and the back plate 40 may be combined in various known configurations.

[0037] FIG. 2 is a plan view showing a magnet module according to an embodiment of the present invention.

[0038] 1 and 2, the magnet module 10 includes a first magnet member 12 extending along a first direction (D1) and a second magnet member 14 surrounding the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 are fixed on a support plate 16.

[0039] The first magnet member 12 and the second magnet member 14 have opposite poles. For example, the first magnet member 12 may be an south-pole magnet and the second magnet member 14 may be an north-pole magnet. However, embodiments of the present invention are not limited thereto, and the first magnet member 12 may be an north-pole magnet and the second magnet member 14 may be an south-pole magnet.

[0040] According to one embodiment, the height (height of the upper surface) of the first magnet member 12 and the height of the second magnet member 14 are substantially the same. However, the present invention is not limited thereto, and the first magnet member 12 and the second magnet member 14 may have different heights as needed.

[0041] A magnet unit (MU) is defined as including one first magnet member 12 and one second magnet member 14, and multiple magnet units are arranged along a second direction (D2) that intersects the first direction (D1).

[0042] According to one embodiment, the first magnet member 12 has a greater width in the end regions than in the central region. The specific shapes of the first magnet member 12 and the second magnet member 14 will be described below.

[0043] FIG. 3 is an enlarged plan view of region A in FIG.

[0044] 3, the first magnet member 12 includes a first portion 12a extending along a first direction (D1) and a second portion 12b having a width (W2) larger than that of the first portion 12a. The second portion 12b is adjacent to or spaced apart from the first portion 12a along the first direction (D1). For example, the second portion 12b has a rectangular shape in a plan view.

[0045] The first magnet member 12 may include a third portion 12c adjacent to the second portion 12b. The width (average width) of the third portion 12c may be smaller than the width of the second portion 12b. For example, the width of the third portion 12c decreases from the side adjacent to the second portion 12b toward the opposite direction from the second portion 12b along the first direction (D1).

[0046] According to one embodiment, the third portion 12c has a tapered shape in which the width gradually decreases, but the embodiment of the present invention is not limited thereto, and the third portion 12c may also have a shape in which the width gradually decreases.

[0047] A fourth portion 12d may be disposed between the second portion 12b and the first portion 12a. The width of the fourth portion 12d may be greater than the width (W1) of the first portion 12a and less than the width (W2) of the second portion 12b. The fourth portion 12d can mitigate the abrupt change in width at the boundary between the first portion 12a and the second portion 12b, thereby improving the reduction in magnetic field at the boundary between the first portion 12a and the second portion 12b.

[0048] For example, the first portion 12a of the first magnet member 12 is referred to as a central region, and the second portion 12b, the third portion 12c, and the fourth portion 12d of the first magnet member 12 are referred to as end regions.

[0049] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 in the second direction (D2) and a second portion 14b spaced apart from the first magnet member 12 in the first direction (D1). For example, the first portion 14a extends along the first direction (D1), and the second portion 14b extends along the second direction (D2). According to one embodiment, the second portion 14b of the second magnet member 14 can be adjacent to the third portion 12c of the first magnet member 12.

[0050] According to one embodiment, the second magnet member 14 includes a corner 14c connecting the first portion 14a and the second portion 14b. According to one embodiment, the corner 14c has a surface that is inclined so as to intersect with the first direction (D1) and the second direction (D2) in a plan view. This can improve the magnetic field reduction in the area adjacent to the corner 14c. The corner 14c can be substantially included in the first portion 14a or the second portion 14b.

[0051] According to one embodiment, the design of the first magnet member 12 complies with the following conditions:

[0052] (1) In the region where Y1 is greater than or equal to L1*0.5 and smaller than or equal to L1*1.2, the width of the first magnet member increases stepwise or gradually. (2) At the point where Y1=L1*0.5, G2 is greater than or equal to L2*0.5 and smaller than or equal to G1*0.75. Y1: distance from any position on the first magnet member to the outer edge of the second magnet member along the first direction L1: Width of the magnet unit in the second direction (total width of the second magnet member) L2: Width of the first portion of the second magnet member G1: The distance between the first portion of the first magnet member and the first portion of the opposing second magnet member G2: The distance between an arbitrary position on the surface of the first magnet member and the opposing second magnet member along the second direction. If G2 is smaller than L2*0.5, magnetic field distortion occurs and the magnet components are damaged, and if G2 is larger than G1*0.75, the effect of magnetic field homogenization decreases.

[0053] 3, L1 is approximately 120 mm, L2 is approximately 17 mm, G1 is approximately 31 mm, the distance between the third portion 12c of the first magnet member 12 and the second portion 14b of the second magnet member 14 along the first direction (D1) is approximately 22 mm, and the minimum value of Y1 is approximately 39 mm. The width of the first portion 12a of the first magnet member 12 is approximately 24 mm, the width of the second portion 12b of the first magnet member 12 is approximately 40 mm, the minimum width of the third portion 12c of the first magnet member 12 is approximately 30 mm, and the width of the fourth portion 12d of the first magnet member 12 is approximately 30 mm. The length of the second portion 12b of the first magnet member 12 is approximately 52 mm, the length of the third portion 12c of the first magnet member 12 is approximately 9 mm, and the length of the fourth portion 12d of the first magnet member 12 is approximately 50 mm. G2 of the second portion 12b of the first magnet member 12 is approximately 23 mm, and G2 of the fourth portion 12 of the first magnet member 12 is approximately 28 mm. In the above description, "length" can be defined along the first direction (D1), and "width" can be defined along the second direction (D2).

[0054] 4 to 6 are enlarged plan views showing a magnet module according to an embodiment of the present invention.

[0055] 4, the first magnet member 12 includes a first portion 12a extending along a first direction (D1), a second portion 12b having a width (W2) larger than the width (W1) of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d connecting the second portion 12b and the first portion 12a and disposed between the second portion 12b and the first portion 12a. The first portion 12a is disposed in a central region, and the second portion 12b, the third portion 12c, and the fourth portion 12d are disposed in end regions.

[0056] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 in a second direction (D2), a second portion 14b spaced apart from the first magnet member 12 in the first direction (D1), and a corner portion 14c connecting the first portion 14a and the second portion 14b.

[0057] According to one embodiment, in the first magnet member 12, the width (average width) of the third portion 12c is smaller than the width (W2) of the second portion 12b. For example, the width of the third portion 12c gradually decreases from the side adjacent to the second portion 12b toward the opposite side from the second portion 12b along the first direction (D1). Also, in the first magnet member 12, the width of the fourth portion 12d gradually decreases from the side adjacent to the second portion 12b toward the first portion 12a along the first direction (D1).

[0058] According to one embodiment, the first magnet member 12 has a continuous boundary as a whole, which can further improve the effect of uniforming the magnetic field.

[0059] 5, the first magnet member 12 includes a first portion 12a extending along a first direction (D1), a second portion 12b having a width (W2) larger than the width (W1) of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d connecting the second portion 12b and the first portion 12a and disposed between the second portion 12b and the first portion 12a. The first portion 12a is disposed in a central region, and the second portion 12b, the third portion 12c, and the fourth portion 12d are disposed in end regions.

[0060] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 in a second direction (D2), a second portion 14b spaced apart from the first magnet member 12 in the first direction (D1), and a corner portion 14c connecting the first portion 14a and the second portion 14b.

[0061] According to one embodiment, the width of at least a portion of the third portion 12c is larger than the width (W2) of the second portion 12b in the first magnet member 12. For example, the third portion 12c has a width (W3) larger than that of the second portion 12b in the region adjacent to the second portion 12b, and the width gradually decreases as it moves from the side adjacent to the second portion 12b toward the opposite direction from the second portion 12b.

[0062] 6, the first magnet member 12 includes a first portion 12a extending along a first direction (D1), a second portion 12b having a width (W2) greater than the width (W1) of the first portion 12a, a third portion 12c disposed between the second portion 12b and the second magnet member 14, and a fourth portion 12d connecting the second portion 12b and the first portion 12a and disposed between the second portion 12b and the first portion 12a. The first portion 12a is disposed in a central region, and the second portion 12b, the third portion 12c, and the fourth portion 12d are disposed in end regions.

[0063] The second magnet member 14 includes a first portion 14a spaced apart from the first magnet member 12 in a second direction (D2), a second portion 14b spaced apart from the first magnet member 12 in the first direction (D1), and a corner portion 14c connecting the first portion 14a and the second portion 14b.

[0064] According to one embodiment, the width (W3) of the third portion 12c is larger than the width (W2) of the second portion 12b in the first magnet member 12. For example, the third portion 12c has a rectangular shape with a width larger than that of the second portion 12b.

[0065] FIG. 7 is a plan view showing a magnet module according to an embodiment of the present invention.

[0066] 1 and 7, the magnet module includes a first magnet member 12 extending along a first direction (D1) and a second magnet member 14 surrounding the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 are fixed on a support plate 16.

[0067] According to one embodiment, the first magnet member 12 has a greater width in the end regions than in the central region. The specific shapes of the first magnet member 12 and the second magnet member 14 are similar to those described above.

[0068] A magnet unit is defined as including one first magnet member 12 and one second magnet member 14, and multiple magnet units are arranged along a second direction (D2) that intersects the first direction (D1).

[0069] According to one embodiment, the magnet module includes a first magnet unit (MU1) disposed in the inner region, a second magnet unit (MU2) disposed in the outer region adjacent to the inner region, and a third magnet unit (MU3) disposed in the outer region opposite the second magnet unit (MU2).

[0070] In the first magnet unit (MU1), the first magnet member 12 is arranged to have a symmetrical shape with respect to the center line extending along the first direction (D1) of the second magnet member 14. For example, the center line of the first magnet member 12 and the center line of the second magnet member 14 can overlap at substantially the same position.

[0071] On the other hand, in the second magnet unit (MU2) and the third magnet unit (MU3), the first magnet member 12 is arranged to have an asymmetric shape with respect to the center line (CL2) of the second magnet member 14. For example, in the second magnet unit (MU2), the center line (CL1) of the first magnet member 12 is spaced a predetermined distance in the second direction (D2) from the center line (CL2) of the second magnet member 14, and in the third magnet unit (MU3), the center line (CL1) of the first magnet member 12 is spaced a predetermined distance in the opposite direction to the second direction (D2) from the center line (CL2) of the second magnet member 14. In one embodiment, the distance between the center line (CL1) of the first magnet member 12 and the center line (CL2) of the second magnet member 14 is approximately 5 mm to 10 mm. If the separation distance is too large, the first magnet member 12 and the second magnet member 14 may come into contact with each other.

[0072] According to one embodiment, the above-described configuration can improve the uniformity of the magnetic field in the outer region of the magnet module.

[0073] 8 to 10 are cross-sectional views showing magnet units of magnet modules according to embodiments of the present invention. The magnet units shown in Figs. 8 to 10 can be applied to the magnet units of the magnet modules shown in Figs. 2 to 7.

[0074] 8, the magnet module includes a first magnet member 12 and a second magnet member 14. The second magnet member 14 has a shape that surrounds the first magnet member 12 and is spaced apart from the first magnet member 12.

[0075] According to one embodiment, the height of the first magnet member 12 (the distance from the surface of the support plate 16 on which the first magnet member 12 is arranged to the surface of the first magnet member 12 opposite to the surface that contacts the support plate 16) may be greater than the height of the second magnet member 14 (the distance from the surface of the support plate 16 on which the second magnet member 14 is arranged to the surface of the second magnet member 14 opposite to the surface that contacts the support plate 16).

[0076] Conversely, as shown in FIG. 9, the height of the first magnet member 12 may be less than the height of the second magnet member 14.

[0077] 1, the first magnet member 12 is a south pole magnet and the second magnet member 14 is a north pole magnet, but embodiments of the present invention are not limited thereto.

[0078] For example, as shown in FIG. 10, the first magnet member 12 may be an north pole magnet and the second magnet member 14 may be an south pole magnet.

[0079] As shown, the first magnet member 12 and the second magnet member 14 can be reshaped or combined in various ways to adjust the shape of the magnetic field.

[0080] Fig. 11 is a plan view showing a magnet module according to an embodiment of the present invention, and Figs. 12 and 13 are conceptual diagrams showing the structure of a sputtering apparatus according to an embodiment of the present invention.

[0081] As shown in Figures 11 and 12, a sputtering apparatus according to one embodiment of the present invention includes a back plate 40 that supports a target 80 and acts as a cathode when a voltage is applied to generate plasma, and a magnet module 10 that is disposed below the back plate 40.

[0082] The magnet module 10 includes a first magnet member 12 extending along a first direction (D1) and a second magnet member 14 surrounding the first magnet member 12 in a plan view. The first magnet member 12 and the second magnet member 14 are fixed on a support plate 16.

[0083] A magnet unit is defined as including one first magnet member 12 and one second magnet member 14, and multiple magnet units are arranged along a second direction (D2) that intersects the first direction (D1).

[0084] According to one embodiment, the magnet module 10 further includes a shielding member 18 that covers at least a portion of the magnet unit.

[0085] The shielding member 18 can shield the magnetic field and reduce the magnetic field in the area where the shielding member 18 is disposed. Therefore, the shielding member 18 is disposed in a portion of the magnet module 10 where the magnetic field is relatively strong, thereby improving the overall uniformity of the magnetic field.

[0086] 11, the shielding member 18 is arranged to selectively cover the central region of the first magnet unit (MU1) arranged in the inner region. However, the embodiment of the present invention is not limited thereto, and the shielding member 18 can be arranged in various positions taking into consideration the actual magnetic field distribution of the magnet module 10.

[0087] The shielding member 18 includes a material with high magnetic permeability, such as stainless steel, amorphous sheet, permalloy, silicon steel plate, thick iron plate, or a combination thereof.

[0088] 13, the shielding member 42 may be disposed on the lower surface of the back plate 40. For example, the shielding member 42 is disposed between the back plate 40 and the protective sheet 50.

[0089] As described above, the magnet module according to the embodiment of the present invention can be combined with other means for improving the uniformity of the magnetic field distribution. Furthermore, to further improve the uniformity of the target erosion, the position of the magnet module can be moved, and the magnet module or the sputtering apparatus can further include a moving means for moving the magnet module.

[0090] According to an embodiment of the present invention, it is possible to improve the unevenness of the magnetic field distribution in a sputtering apparatus, thereby improving the unevenness of the erosion of the sputtering target, thereby improving the quality of the thin film formed by sputtering and extending the service life of the target.

[0091] FIG. 14 is an enlarged plan view of a magnet module of a comparative example used in an experiment to demonstrate the effects of the present invention.

[0092] FIG. 15 is a graph showing the measured magnetic field strength at different positions in an example of the present invention and a comparative example.

[0093] As shown in Figure 14, the magnet module of the comparative example includes a first magnet member 12 extending along a first direction (D1) and a second magnet member 14 surrounding the first magnet member 12 in a planar view.

[0094] The first magnet member 12 has the same width along the first direction (D1). Specifically, the width of the first magnet member 12 is the same as the width of the central region of the first magnet member of the magnet module according to the embodiment of the present invention. The second magnet member 14 has the same shape and size as the second magnet member of the magnet module according to the embodiment of the present invention.

[0095] The magnetic field strength was measured for the magnet module of the comparative example, Example 1 (the magnet module shown in FIG. 3), and Example 2 (the magnet module shown in FIG. 5). Specifically, the magnetic field strength was measured along the measurement position indicated by the dotted box in the region between the first magnet member 12 and the second magnet member 14 in FIG. 14. In Examples 1 and 2, the magnetic field strength was also measured at a position corresponding to the measurement position indicated by the dotted line in FIG.

[0096] 15, comparing Example 1 and Example 2 with the comparative example, it can be confirmed that Example 1 and Example 2 of the present invention can improve the sudden decrease in magnetic field at the end region (CP) (measurement position 10) of the magnet module. Furthermore, comparing Example 1 and Example 2, it can be confirmed that, as shown in FIG. 3, when the protruding region is removed at the boundary between the tapered third portion 12c and the rectangular second portion 12b to form a continuous boundary, the effect of homogenizing the magnetic field is further improved.

[0097] Although the present invention has been described above with reference to exemplary embodiments, those skilled in the art will recognize that various modifications and variations can be made thereto without departing from the spirit and scope of the invention as set forth in the following claims. [Industrial Applicability]

[0098] The present invention can be applied to deposition apparatuses and deposition processes, for example, to form various thin films, such as thin film transistors, wiring, and active layers, in the manufacture of display devices, semiconductor devices, and the like.

Claims

1. at least one magnet unit including a first magnet member extending in a first direction and having a central region and an end region, and a second magnet member having a shape surrounding the first magnet member in a plan view; the first magnet member includes at least a first portion disposed in the central region and extending in the first direction, and a second portion disposed in the end region and having a width greater than that of the first portion; the second magnet member includes a first portion spaced apart from the first magnet member in a second direction intersecting the first direction, and a second portion spaced apart from the first magnet member in the first direction; The width of the first magnet member increases along the first direction in a region where Y1 is greater than or equal to L1*0.5 and less than or equal to L1*1.2; A magnet module characterized in that the spacing between the first magnet member and the second magnet member along the second direction is greater than or equal to L2*0.5 at the point where Y1 = L1*0.5 and is smaller than or equal to G1*0.

75. (Y1 is the distance from any position on the first magnet member to the outer edge of the second magnet member along the first direction, L1 is the width of the magnet unit in the second direction, L2 is the width of the first portion of the second magnet member, and G1 is the gap between the first portion of the first magnet member and the opposing first portion of the second magnet member.)

2. 2. The magnet module according to claim 1, wherein the first magnet member further includes a third portion adjacent to the second portion and having a shape whose width decreases toward the second magnet member along the first direction.

3. 3. The magnet module of claim 2, wherein the first magnet member further includes a fourth portion disposed between the second portion and the first portion, and the width of the fourth portion is smaller than the width of the second portion and larger than the width of the first portion.

4. 4. The magnet module according to claim 3, wherein in the first magnet member, the width of the fourth portion gradually decreases from the second portion toward the first portion.

5. The magnet module according to claim 2 , wherein the width of the third portion in at least a partial region of the first magnet member is greater than the width of the second portion.

6. The magnet module according to claim 1, wherein the first magnet member further includes a third portion that is closer to the second magnet member than the second portion and has an overall width greater than that of the second portion.

7. The magnet module described in claim 1, characterized in that the second magnet member includes a corner portion connecting the first portion and the second portion, and the corner portion has a surface that intersects the first direction and the second direction in a planar view.

8. The magnet module according to claim 1 , further comprising a shielding member that partially covers the magnet unit.

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