Anti-attachment object

Abstract

To provide an adhesive preventive object.SOLUTION: The adhesion preventive object includes a main body structure, and a fluorine coating layer. The fluorine coating layer covers at least one face of the main body structure. The adhesion preventive object is in contact with a certain substance in a certain environment, and the fluorine coating layer has a higher water drop contact angle against the substance than a surface of the main body structure. The fluorine coating layer hardness almost the same as or higher than the surface of the main body structure. The fluorine coating layer has lower roughness than the surface of the main body structure. The adhesion preventive object according to the present invention can prevent scratches due to collision of substances such as particles, and obtain a self-cleaning effect and an easy-to-clean effect. Thereby, costs and manpower for frequent maintenance can be reduced.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an object, and particularly to an anti-deposition object.

Background Art

[0002] In recent years, due to the continuous and energetic development of semiconductor technology, technological products have made great progress. In the process of semiconductor chips, semiconductor chips are generally placed in a process device, related processes are carried out, and a vacuum pump is used to evacuate the air and gas in the process device to keep the process device in a negative pressure state, that is, to reach a certain degree of vacuum. However, in semiconductor processes, process materials such as process gases and process exhaust gases are likely to deposit in fluid passages, and as a result, the repair cycle becomes shorter and shorter. This affects the manufacturing cost and schedule. In addition, the air contains a lot of dust of various sizes and moisture with various degrees of dirt. Therefore, for objects that come into contact with air (for example, commonly seen ceramics, glass, other structures and materials), all of these are likely to have dust, scale, and dirt deposited, so fairly frequent cleaning, maintenance, or replacement is required. Similarly, seawater and fresh water contain many organisms, microorganisms, and substances. Therefore, objects that often come into contact with seawater (for example, commonly seen ships) will have various deposits (or called adhesion).

Summary of the Invention

Problems to be Solved by the Invention

[0003] The main object of the present invention is to provide an anti-deposition object that can prevent scratches caused by the collision of process materials such as particles of a vacuum member by applying a fluorine coating layer having high hardness to a vacuum member or a non-vacuum member.

Means for Solving the Problems

[0004] The anti-adhesion object according to the present invention is characterized by comprising: a main structure having at least one surface; and a fluorine coating layer covering the surface of the main structure, which comes into contact with a substance in a certain environment, and which has a larger water droplet contact angle with respect to the substance than the surface of the main structure, has substantially the same or higher hardness, and has lower roughness.

[0005] The anti-adhesion object according to the present invention is characterized in that the main structure is an outlet tube of a process apparatus, or a tube or component of peripheral equipment of the process apparatus.

[0006] The anti-adhesion object according to the present invention is characterized in that the fluorine coating layer is located on the surface of a certain portion of the main structure, and the portion is a certain inclined portion, a certain planar portion, or a certain bent portion of the main structure.

[0007] The anti-adhesion object according to the present invention is characterized in that the fluorine coating layer has higher acid corrosion resistance and plasma etching resistance compared to the surface of the main structure.

[0008] The anti-adhesion object according to the present invention is characterized in that, after roughening treatment, the surface of the main structure forms a rough surface with a rough structure, and the surface roughness increases.

[0009] The anti-adhesion object according to the present invention is characterized in that the surface of the main structure undergoes roughening by pickling, laser, or sandblasting, after which the surface roughness increases.

[0010] The anti-adhesion object according to the present invention is characterized in that the fluorine coating layer is composed of 0.01 to 20% wt of fluorocarbons, 5 to 50% wt of alkoxysilane, 0.01 to 20% wt of a catalyst additive, and 10 to 90% wt of a solvent.

[0011] The anti-adhesion object according to the present invention is characterized in that the fluorocarbon is selected from the group consisting of perfluoroalkane substances (PFAS), chlorofluorocarbons (CFCs), semifluorocarbons (HFCs), hydrofluorochlorocarbons (HCFCs), polytetrafluoroethylene (PTFE), and fluorinated ethylene propylene (FEP).

[0012] The anti-adhesion object according to the present invention is characterized in that the fluorocarbon is a fluorine-containing monomer or polymer containing 1 to 20 carbon atoms.

[0013] The anti-adhesion object according to the present invention is characterized in that the alkoxysilane is selected from the group consisting of alkoxysilane oligomer, alkoxysilane compound, alkoxysilane polymer, alkoxylsiloxane oligomer, alkoxylsiloxane compound, alkoxylsiloxane polymer, alkoxylaminosiloxane oligomer, alkoxylaminosiloxane compound, and alkoxylaminosiloxane polymer.

[0014] The anti-adhesion object according to the present invention is characterized in that the catalyst additive is selected from the group consisting of metals such as platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, ruthenium, tantalum, tungsten, and zirconium, metal oxides, zirconium phosphate salts, and carboxylate salts.

[0015] The anti-adhesion object according to the present invention is characterized in that the solvent is selected from the group consisting of alcohols, ketones, esters, fluoroalcohols, fluoroethers, and ethers.

[0016] The anti-adhesion object according to the present invention is characterized in that the alkoxysilane has a reactive functional group, and the reactive functional group undergoes a self-condensation reaction at room temperature in 1 to 7 days, or at a temperature of 40 to 60 degrees Celsius in 1 to 24 hours.

[0017] The anti-adhesion object according to the present invention is characterized in that the environment is a vacuum environment, the substance is a process material, the anti-adhesion object is the process material used or discharged when a process is carried out in contact with a process apparatus in the vacuum environment, the process carried out by the process apparatus is an atomic layer stacking (ALD) process, and the process material is titanium tetrachloride (TiCl4).

[0018] The anti-adhesion object according to the present invention is characterized in that the environment is a vacuum environment, the substance is a process material, the anti-adhesion object is the process material used or discharged when a process is carried out in contact with a process apparatus in the vacuum environment, the process carried out by the process apparatus is an organometallic vapor deposition (MOCVD) process, and the process material is a process gas or process exhaust gas.

[0019] The anti-deposition object according to the present invention is such that the environment is a vacuum environment, the substance is a process material, the anti-deposition object is the process material that is used or discharged when contacting a process device to perform a process in the vacuum environment, the process performed by the process device is an aluminum pad (Al-pad) process, and the process material is a process gas reactant or a process exhaust gas.

[0020] The anti-deposition object according to the present invention is characterized in that the range of the water droplet contact angle of the fluorine coating layer is 100 degrees to 120 degrees.

[0021] The anti-deposition object according to the present invention is characterized in that the temperature resistance of the fluorine coating layer reaches 600 degrees Celsius.

[0022] The anti-deposition object according to the present invention is characterized in that the range of the hardness of the fluorine coating layer is 8H to 9H.

[0023] The anti-deposition object according to the present invention is characterized in that the adhesion force between the fluorine coating layer and the surface of the main structure, and the numerical range obtained by the cross-cut test is 4B to 5B.

[0024] The anti-deposition object according to the present invention is characterized in that the environment is a vacuum environment, a gas phase environment, a liquid phase environment, or a gas-liquid mixed environment.

[0025] The anti-deposition object according to the present invention is characterized in that the main structure is a main structure, component, member, or material such as a building structure, a power generation device, or a means of transportation.

[0026] The anti-deposition object according to the present invention is such that the environment is an ozone water environment, and the fluorine coating layer increases the stability against ozone water in the ozone water environment by increasing the fluorine content according to the ozone water environment.

Effect of the Invention

[0027] According to the anti-adhesion object of the present invention, the following effects are achieved. (1) By applying a fluorine coating layer having high hardness to the vacuum member, scratches caused by the collision of process materials such as particles of the vacuum member can be prevented. (2) By applying a fluorine coating layer having a larger water droplet contact angle to the vacuum member, the occurrence of deposition on the vacuum member can be prevented, and a self-cleaning effect and an easy cleaning effect can be realized. (3) Since the adhesion to the main structure of the fluorine coating layer is good, the occurrence of peeling can be avoided in the process. (4) The anti-adhesion object having a fluorine coating layer can save the cost and labor required for frequent maintenance. (5) By coating main structures, components, and members such as building structures, electrical equipment, and transportation means with a high-hardness fluorine coating layer, deposition due to contact with substances in the environment can be avoided, a self-cleaning effect and an easy cleaning effect can be realized, and scratches caused by the collision of substances in the environment can also be avoided.

[0028] In order to deepen the understanding of the technical features of the present invention and the achievable technical effects, better embodiments and detailed descriptions are shown below.

Brief Description of the Drawings

[0029] [Figure 1] It is a view showing a partial structure of the anti-adhesion object according to the present invention. [Figure 2] It is a view showing the application of the anti-adhesion object according to the present invention to a process device. [Figure 3] It is a cross-sectional structure view showing a first embodiment of the anti-adhesion object according to the present invention. [Figure 4] It is a cross-sectional structure view showing a second embodiment of the anti-adhesion object according to the present invention. [Figure 5]This is a cross-sectional structural diagram showing a third embodiment of the anti-adhesion object according to the present invention. [Figure 6] This is a perspective view showing the structure of a fourth embodiment of the anti-adhesion object according to the present invention. [Modes for carrying out the invention]

[0030] Embodiments of the present invention will be described below with reference to the drawings. The proportions of each component in the drawings of embodiments of the present invention are shown for the purpose of facilitating understanding of the explanation and are not actual proportions. Furthermore, the proportions of the dimensions of the assemblies shown in the figures are for the purpose of explaining each component and its structure, and of course, the present invention is not limited thereto. On the other hand, for the sake of ease of understanding, the same components in the following embodiments will be denoted by the same reference numerals.

[0031] Furthermore, unless otherwise specified, terms used throughout this specification and in the claims have the ordinary meanings of each term used in the art, in the content disclosed herein, and in special contexts. Some terms used to describe the invention are described below or elsewhere in this specification to provide additional guidance to those skilled in the art regarding the description of the invention.

[0032] The use of terms such as "first," "second," and "third" in this description does not indicate a specific order or sequence, nor is it used to limit the present invention. It is used solely to distinguish components or operations described using the same technical terminology.

[0033] Next, where terms such as "include," "equip," "possess," and "contain" are used in this explanation, they are all open terms. In other words, they mean "include" but not "not limited to."

[0034] Refer to Figures 1 to 6. Figure 1 is a diagram showing a partial structure of the anti-adhesion object according to the present invention. Figure 2 is a diagram showing that the anti-adhesion object according to the present invention is applied to a process apparatus. Figure 3 is a cross-sectional structural diagram showing a first embodiment of the anti-adhesion object according to the present invention. Figure 4 is a cross-sectional structural diagram showing a second embodiment of the anti-adhesion object according to the present invention. Figure 5 is a cross-sectional structural diagram showing a third embodiment of the anti-adhesion object according to the present invention. Figure 6 is a perspective view showing the structure of a fourth embodiment of the anti-adhesion object according to the present invention.

[0035] The anti-deposition object according to the present invention has a fluorine coating layer covering the surface of the main structure, thereby preventing the phenomenon of deposition occurring when the surface comes into contact with substances in the environment, and also provides a self-cleaning effect and an easy-to-clean effect, as well as preventing scratches caused by collisions with substances in the environment. The above-mentioned environment is, for example, a vacuum environment, a gas phase environment, a liquid phase environment, or a gas-liquid mixed environment. In other words, the application of the anti-deposition object according to the present invention is not limited to a vacuum environment, but can also be applied to environments other than a vacuum environment, and as long as an effect of preventing deposition can be obtained, all fall within the scope of the claims of the present invention.

[0036] Refer to Figures 1 to 6. The anti-adhesion object 10 according to the present invention includes a main structure 20 and a fluorine coating layer 30. The fluorine coating layer 30 covers the main structure 20. The anti-adhesion object 10 according to the present invention is applicable, for example, to a vacuum environment or a non-vacuum environment. Taking application to a vacuum environment as an example, the anti-adhesion object 10 is a substance 110 (sometimes referred to as a process material) that is used or discharged when a process is carried out in contact with a process apparatus 100, for example, in a vacuum environment. The vacuum environment is not limited to a specific degree of vacuum and may be determined according to the needs of the process apparatus 100. The environment may be a non-vacuum environment such as a gas phase environment, a liquid phase environment, or a gas-liquid mixed environment. The anti-adhesion object 10 according to the present invention comes into contact with the substance 110 in the environment. The fluorine coating layer 30 covers at least one surface 22 of the main structure 20. The fluorine coating layer 30 of the anti-adhesion object 10 according to the present invention covers, for example, all or part of the surface of the main structure 20, for example, covering the surface 22 of a part 24 of the main structure 20. Furthermore, this portion 24 may be a location where process material deposition frequently occurs, such as a bent or inclined portion, which is not a flat surface, and is not limited to, for example, the back wall surface. For this reason, in the present invention, the above portion 24 is, for example, the bent portion of the main structure 20 shown in Figure 3, or the inclined portion shown in Figure 4, but the present invention is not limited to these. The fluorine coating layer 30 according to the present invention may cover the flat portion of the main structure 20 shown in Figure 5. Also, the main structure 20 of the anti-deposition object 10 according to the present invention may be, for example, the outlet pipe of a process apparatus 100 as shown in Figures 3 to 5, or the tube of peripheral equipment (e.g., a vacuum pump) of the process apparatus 100 as shown in Figures 3 to 5, or a component such as a part of a Holweck pump having a spiral flow diversion trough 26 as shown in Figure 6. Although many types of embodiments of the main structure 20 of the anti-deposition object 10 have been given as examples above, the present invention is not limited to these, and all embodiments of objects applicable to a vacuum environment fall within the scope of the claims of the present invention.For example, the anti-adhesion object 10 and its main structure 20 according to the present invention may be, for example, a chamber or component of a vacuum pump, such as the rotor blades and / or stator blades of a turbomolecular vacuum pump (TMP). For example, the anti-adhesion object 10 and its main structure 20 according to the present invention may be, for example, a chamber or component of a valve structure. Briefly speaking, in the present invention, a fluorine coating layer 30 may be selectively formed on the surface of all objects that can come into contact with the substance 110.

[0037] One of the features of the anti-adhesion object according to the present invention is that by covering the surface 22 of the main structure 20 with a fluorine coating layer 30, the fluorine coating layer 30 comes into contact with the substances 110 used or discharged when the process apparatus 100 performs a process, instead of the surface 22 of the main structure 20. The fluorine coating layer 30 covers the surface 22 of the main structure 20 by, for example, application. The application method may be, but is not limited to, spraying, brushing, dipping, or wiping. The present invention increases the surface roughness by, for example, directly applying the liquid phase fluorine coating layer 30 to the surface 22 of the main structure 20, or by first roughening the surface 22 of the main structure 20 before applying the liquid phase fluorine coating layer 30 to the surface 22 of the main structure 20. The roughening process may be, but is not limited to, pickling, laser, or sandblasting. By forming many rough surfaces such as grooves and notches on the surface 22 of the main structure 20, the adhesion between the fluorine coating layer 30 and the surface 22 of the main structure 20 can be increased. The present invention is not limited to specific processes such as pickling, laser, or sandblasting; in other words, any roughening process that can increase the surface roughness of the main structure 20 is included in the claims of the present invention, and therefore, a detailed explanation has been omitted.

[0038] On the other hand, since air contains a lot of dust and water, and seawater and freshwater contain many organisms, microorganisms, and substances, objects that come into contact with air, seawater, or freshwater are prone to various deposits (or adhesions), requiring fairly frequent cleaning, maintenance, or replacement. According to the anti-adhesion object 10 of the present invention, as shown in Figure 1, the fluorine coating layer 30 covers the surface 22 of the main structure 20, so that the surface 22 can avoid various deposits from coming into contact with substances in the environment, thus providing a self-cleaning effect and an easy-to-clean effect, as well as avoiding scratches caused by collisions with substances in the environment. For example, the above environment is a vacuum environment, a gas phase environment, a liquid phase environment, or a gas-liquid mixed environment, but is not limited to these. The above substances vary depending on the environment in which the anti-adhesion object 10 is placed, so their description has been omitted. For example, the main structure 20 of the anti-adhesion object 10 of the present invention is, for example, an indoor or outdoor building structure, a major structure, part, component, or material of power generation equipment or means of transportation. This allows the main structure 20 to perform its original functions and effects, while the fluorine coating layer 30 can provide additional functions and effects, such as preventing deposits or scratches, thereby reducing the frequency of cleaning and repairs and extending the maintenance cycle. To illustrate with an example of a building structure, the main structure 20 of the anti-adhesion object 10 according to the present invention is, but is not limited to, the main structure, component, member or material of an indoor or outdoor building structure, such as structural materials, decorative materials and specialized materials. For example, the structural material of a building structure is, but is not limited to, the main structure, component, member or material of an indoor or outdoor building structure, such as metal, wood, stone, cement, concrete, ceramics, glass, engineering plastics, composite materials or combinations thereof. Also, the glass mentioned above is, for example, indoor glass (e.g., bathroom glass) or outdoor glass (e.g., windows). This prevents the adhesion of scale and dust.Decorative materials for building structures include, but are not limited to, major structural elements, components, members, or materials for indoor or outdoor building structures, such as coatings, paints, boards, ceramic tiles, glass, composite materials, or combinations thereof. Specialized materials for building structures include, but are not limited to, major structural elements, components, members, or materials for indoor or outdoor building structures that have functions such as waterproofing, moisture resistance, corrosion resistance, fire resistance, flame retardancy, sound insulation, heat insulation, heat retention, sealing, or combinations thereof. The aforementioned composite materials, such as foamed plastic (e.g., polyethylene, PET) sandwich panels, composite panels combining a wood core with a lightweight, rigid surface material (e.g., balsa), or aluminum composite panels (e.g., aluminum-plastic panels), are gradually becoming more widely used in buildings and are materials used as building composite materials in the decorative and furniture fields, but are not limited to these. This allows them to exert their effects; for example, using composite materials in a building can reduce the overall weight of the building and effectively improve its seismic resistance. To illustrate with an example of power generation equipment, the main structure 20 of the anti-adhesion object 10 according to the present invention is, for example, the main structure, parts, components, or materials of power generation equipment such as wind power generation equipment, hydroelectric power generation equipment, wave power generation equipment, or solar power generation equipment. For example, the main structure 20 is the blades of the power generation equipment, but is not limited to this. To illustrate with an example of means of transportation, the main structure 20 of the anti-adhesion object 10 according to the present invention is, for example, the main structure, parts, components, or materials of each type of means of transportation (e.g., ships, vehicles, aircraft, etc.). The main structure is, for example, the hull of a ship, the fuselage of a vehicle, the fuselage of an aircraft, etc., but is not limited to this. The parts, components, or materials are, for example, each type of component or material of a ship, vehicle, or airplane, but is not limited to this. For example, if the main structure 20 of the anti-adhesion object 10 according to the present invention is the main structure, parts, components, or materials of a ship, it can be used to prevent the attachment of organisms and microorganisms such as barnacles on or under the water surface, and to prevent the corrosion of seawater.In short, the anti-adhesion object 10 according to the present invention can avoid physical reactions (e.g., scratches) or chemical reactions (e.g., deposits or rust) occurring when in contact with various types of materials in the environment in which it is placed (e.g., a vacuum environment, a gaseous environment, a liquid-phase environment, or a gas-liquid mixed environment). While the present invention has made every effort to list possible application examples, the anti-adhesion object according to the present invention can be used to replace major structures, parts, components, or materials of existing building structures, power generation equipment, and means of transportation, and the above uses are merely examples and are not intended to limit the scope of protection claimed in this specification. All embodiments of the object usable in a vacuum environment, a gaseous environment, a liquid-phase environment, or a gas-liquid mixed environment are all within the scope of the claims of the present invention.

[0039] In this invention, a liquid-phase fluorine coating layer 30 is applied to the surface 22 of the main structure 20, and then a self-condensation reaction is carried out at room temperature for approximately 1 to 7 days, or at a temperature of 40 to 60 degrees Celsius for approximately 1 to 24 hours. That is, the fluorine coating layer 30 is solidified on the surface 22 of the main structure 20 to form a hardened fluorine coating layer 30. The thickness range of the fluorine coating layer 30 may be 1 μm to 3,000 μm, or any numerical interval within this range, or upper and lower endpoint values, for example, 10 μm to 300 μm. The physical and chemical properties of the fluorine coating layer 30 are better than the original physical and chemical properties of the surface 22 of the main structure 20. For example, in a vacuum environment, the fluorine coating layer 30 has a larger water droplet contact angle θ with respect to the substance 110 compared to the surface 22 of the main structure 20. That is, the water droplet contact angle between the fluorine coating layer 30 and the substance 110 (the range may be approximately 100 to 140 degrees, or any numerical interval within this range, or upper and lower endpoint values, for example, 106.5 degrees) is greater than the water droplet contact angle between the surface 22 and the substance 110 (the range is approximately 89 to 95 degrees). The present invention makes it possible to prevent deposition on a vacuum member by applying a fluorine coating layer 30 having a larger water droplet contact angle to the vacuum member, and to obtain a self-cleaning effect and an effect of easy cleaning. The hardness of the fluorine coating layer 30 is approximately the same as, or higher than, the hardness of the surface 22 of the main structure 20. In other words, the hardness of the fluorine coating layer 30 (the range may be approximately 8H to 9H, or any numerical interval within this range, or upper and lower endpoint values) is approximately the same as, or higher than, the hardness of the surface 22 of the main structure 20 (the range is approximately 4H to 6.5H). The present invention makes it possible to prevent the vacuum member from being scratched by collisions with process materials such as particles by applying a fluorine coating layer 30 having high hardness to the vacuum member. The adhesion force between the fluorine coating layer 30 and the surface 22 of the main structure 20 (cross-cut test range) is approximately 4B to 5B.The contact force applied by the substance 110 to the fluorine coating layer 30 is greater than the external force or adsorption force that causes the substance 110 to collide with the fluorine coating layer 30 when it is discharged. As a result, the adhesion of the fluorine coating layer 30 to the main structure 20 according to the present invention is good, and peeling can be avoided during the process. The fluorine coating layer 30 has higher resistance to acid corrosion and plasma etching than the surface 22 of the main structure 20, so the fluorine coating layer 30 according to the present invention can protect the vacuum member from acid etching and free radical erosion. The fluorine coating layer 30 has a lower roughness than the surface 22 of the main structure 20, that is, the roughness of the fluorine coating layer 30 (approximately 0.2) is lower than the roughness of the surface 22 of the main structure 20. Furthermore, the fluorine coating layer 30 can fill or penetrate rough structures 120 such as grooves or notches on the surface 22 of the main structure 20, thereby achieving a smoothing effect. On the other hand, the fluorine coating layer 30 according to the present invention can withstand considerably high temperatures, has a wide operating temperature range, and its temperature tolerance range reaches approximately 600 degrees Celsius. The operating temperature range of the fluorine coating layer 30 is, for example, lower than or at approximately 600 degrees Celsius, preferably at approximately 260 degrees Celsius to 600 degrees Celsius, and may be any numerical range or upper and lower endpoint values ​​that are lower than or at 600 degrees Celsius. Conversely, conventional water-repellent and antifouling coatings usually cannot withstand high temperatures; for example, the operating temperature of conventional Teflon® is lower than 260 degrees Celsius. Furthermore, the hardness of conventional water-repellent and antifouling coatings is only about 1H to 3H, for example, the hardness of conventional Teflon is 1H to 2H. For this reason, conventional water-repellent and antifouling coatings cannot withstand the high temperature, high vacuum, high corrosiveness, high impact, and high deposition environment when performing semiconductor processes in the process apparatus 100. In other words, the anti-adhesion object 10 according to the present invention saves costs and personnel associated with frequent maintenance by combining the fluorine coating layer 30 with the main structure 20.

[0040] The components of the fluorine coating layer 30 according to the present invention consist, for example, of about 0.01 to 20% wt of fluorocarbons, about 5 to 50% wt of alkoxysilane, about 0.01 to 20% wt of a catalyst additive, and about 10 to 90% wt of a solvent. Fluorocarbons are, for example, fluorine-containing monomers or polymers containing 1 to 20 carbon atoms. Fluorocarbons are, for example, fluorine-containing monomers containing about 3 to 20 carbon atoms and at least one terminal trifluoromethyl group. Fluorocarbons are selected from the group consisting of, for example, perfluoroalkanes (PFAS), chlorofluorocarbons (CFCs), semifluorocarbons (HFCs), fluoropolymers (such as PTFE), and hydrofluorochlorocarbons (HCFCs). Alkoxylsilanes are selected from the group consisting of, for example, alkoxysilane oligomers, alkoxysilane compounds, alkoxysilane polymers, alkoxylsiloxane oligomers, alkoxylsiloxane compounds, alkoxylsiloxane polymers, alkoxylaminosiloxane oligomers, alkoxylaminosiloxane compounds, and alkoxylaminosiloxane polymers. The catalyst additive is selected from a group consisting of metals such as platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, ruthenium, tantalum, tungsten, and zirconium, as well as metal oxides, zirconium phosphate salts, and carboxylate salts.The catalyst additive is selected from the group consisting of, for example, silicon dioxide, aluminum oxide, titanium dioxide, iron oxide, magnesium oxide, molybdenum oxide, calcium oxide, and calcium chloride, and is, for example, nanometer in size, but the present invention is not limited thereto. Micro-nanometer, and even micron-sized catalyst additives or components are also included in the claims of the present invention. The solvent is, for example, an alcohol such as ethanol, propanol, or butanol, but the present invention is not limited thereto, and the solvent according to the present invention is selected from the group consisting of alcohols, ketones, esters, fluoroalcohols, fluoroethers, and ethers. The alkoxysilane according to the present invention has a reactive functional group, which undergoes a self-condensation reaction at room temperature for 1 to 7 days (e.g., 7 days), or at a temperature of 40 to 60 degrees Celsius for 1 to 24 hours (e.g., 24 hours). Furthermore, the above-mentioned reactive functional groups include, for example, silicone hydrogenation reactive functional groups (alkenyl, acrylic, hydrogen atoms bonded to silicon atoms, etc.), condensation reactive functional groups (hydroxyl, alkoxy, acyloxy, etc.), or peracid curing reactive functional groups (alkyl, alkenyl, acrylic, hydroxyl, etc.). In addition, in some embodiments, the components of the fluorine coating layer 30 according to the present invention are, for example, an organic-inorganic polymer copolymer consisting of fluorine, nanotitanium, silicon, and silicone elastomer. A person with ordinary skill in the art to which the present invention belongs should know how to select and prepare an anti-adhesion object 10 having a fluorine coating layer 30 that can obtain the effects of the present invention based on the above-mentioned contents of this disclosure, so such a description has been omitted.On the other hand, the fluorine coating layer 30 of the anti-adhesion object 10 according to the present invention can also have its degree of fluorination increased depending on the environment in which the anti-adhesion object 10 is placed (for example, an ozonated water environment such as a vapor ozone peeling (VOS) process or its application), for example by adding per / poly fluoroalkyl substances (PFAS) (for example, perfluorooctanoic acid (PFOA) or perfluorooctanesulfonic acid (PFOS)), polytetrafluoroethylene (PTFE), or fluorinated ethylene propylene (FEP). The present invention can improve the stability of ozonated water in the environment by increasing the degree of fluorination of the anti-adhesion object 10 in various application embodiments.

[0041] The surface hardness test method of the present invention tests the surface hardness of the fluorine coating layer 30 with a hard pencil. For example, a hard pencil (Mitsubishi Standard Pencil) is placed on a cart with a constant load at a 45-degree angle, and the cart is pushed by hand so that it slides along the surface of the fluorine coating layer 30 of the anti-adhesion object 10, thereby confirming the surface hardness when scratches are made by the pencil. In the anti-adhesion object 10 according to the present invention, the test results for the surface hardness of the fluorine coating layer 30 covering the surface 22 of the main structure 20 are all in the range of 8H with a load of 1 kg to 9H with a load of 500 g.

[0042] The cross-cut test of the present invention is performed according to ASTM D3359 Method B (cross-cut method) by drawing 10 x 10 (100) small 1 mm x 1 mm grid lines on the surface of a test book using a grid knife. Each line is deep enough to reach the bottom layer of the fluorine coating layer 30 of the anti-adhesion object 10. After removing debris from the test area using a brush, a standard tape (3M 600 tape) or a tape with the same effect is applied to the tested grid lines. The contact area and force between the tape and the test area are increased by wiping the tape with force using an eraser. Grasping one end of the tape by hand, the tape is quickly peeled off at a 180-degree angle within 1.5 minutes ± 30 seconds, and the peeling state of the fluorine coating layer 30 is observed. In the anti-adhesion object 10 according to the present invention, the cross-cut test results of the fluorine coating layer 30 according to the present invention covering the surface 22 of the main structure 20 are all in the range of 5B (the edges of the cuts are perfectly smooth, and there is no peeling at the edges of the grid) to 4B (small fragments peel off at the intersections of the cuts, and the actual damage in the cross-hatch area is ≤5%). Therefore, it can be seen that the adhesion (tightness) of the fluorine coating layer 30 according to the present invention to the surface 22 of the main structure 20 is extremely high.

[0043] In the acid corrosion resistance test of the present invention, 0.05 ml of 5% HCl (hydrochloric acid) is dropped onto the test sample and left for 24 hours until the HCl solution evaporates. During the evaporation process, the concentration of the HCl area increases, enhancing the corrosion diffusion effect. The corrosion diffusion area after 24 hours is observed. The test results are measured as the corrosion area (mm²) of the surface 22 of the main structure 20 without the fluorine coating layer 30 applied. 2 The surface area (mm²) of the main structure 20 coated with the fluorine coating layer 30 is approximately 45.13 mm. 2 ) is only about 19.4 mm.

[0044] Furthermore, the present invention was also subjected to plasma etching tests. The results showed that, under the same etching conditions (CHF3:Ar ratio 1:1, duration 60 minutes, and oxide etching rate 750 nm / 30 min), the fluorine coating layer 30 according to the present invention was indeed more resistant to plasma etching than the surface 22 of the main structure 20 (anodized aluminum material). As far as thermal stability tests (Thermogravimetric Analyzer, TGA tests), in a test environment with a temperature rise rate of 5 degrees Celsius / minute and a test atmosphere of N2, the weight of the fluorine coating layer 30 according to the present invention steadily and gradually decreased within the test temperature range (600 degrees Celsius), without any sudden changes in weight. This indicates that the fluorine coating layer 30 of the anti-adhesion object 10 according to the present invention did not crack.

[0045] The process performed in the process apparatus 100 is, for example, a semiconductor process. For example, the process performed in the process apparatus 100 is an atomic layer lamination (ALD) process, the process material is titanium tetrachloride (TiCl4), and the main structure 20 of the anti-deposition object 10 is, for example, a fluid transport pipe, but is not limited to these. For example, the process performed in the process apparatus 100 is an organometallic vapor deposition (MOCVD) process, the process material is a process gas or process exhaust gas, and the main structure 20 of the anti-deposition object 10 is, for example, an outlet pipe of a vacuum pump, but is not limited to these. For example, the process performed in the process apparatus 100 is an aluminum pad (Al-pad) process, the process material is a process gas reactant or process exhaust gas, selected from the group consisting of, for example, N2, O2, Ar, SF6, He, HBr, CF4, CH4, Cl2, BCl3 and CHF3. The main structure 20 of the anti-deposition object 10 is, for example, a pump component with a flow guide spiral groove and an outlet pipe, but is not limited to these. The anti-adhesion object according to the present invention has been tested and, as a result, has shown good performance in all of the above processes. For example, in the aluminum pad (Al-pad) process, the anti-adhesion object according to the present invention can extend the maintenance cycle by approximately 20%, thereby reducing the costs and personnel required for frequent maintenance.

[0046] The anti-adhesion object according to the present invention has the following effects. (1) By applying a fluorine coating layer with high hardness to the vacuum component, scratches caused by collisions of process materials such as particles on the vacuum component can be prevented. (2) By applying a fluorine coating layer having a larger water droplet contact angle to the vacuum component, it is possible to prevent the formation of deposits on the vacuum component and to achieve a self-cleaning effect and an effect that makes cleaning easier. (3) Because the fluorine coating layer has good adhesion to the main structure, peeling can be avoided during the process. (4) Anti-adhesion objects with a fluorine coating layer can save on the costs and effort associated with frequent maintenance. (5) By coating major structures, parts, and components such as building structures, electrical equipment, and means of transportation with a high-hardness fluorine coating layer, it is possible to avoid deposition due to contact with substances in the environment, achieve a self-cleaning effect and an easy-to-clean effect, and also avoid scratches caused by collisions with substances in the environment.

[0047] The above description is merely illustrative and not limiting. Any equivalent modifications or changes made thereto, which do not depart from the spirit and scope of the present invention, are also included in the claims. [Explanation of Symbols]

[0048] 10 Anti-deposition objects 20 Main structure 22 Surface 24 parts 26 Spiral Diversion Trough 30 Fluorine coating layer 100 process equipment 110 Substance 120 Rough structure θ Water droplet contact angle

Claims

1. A main structure having at least one surface, A fluorine coating layer covering the surface of the main structure, which comes into contact with a substance in a certain environment, and which has a larger water droplet contact angle with respect to the substance than the surface of the main structure, has approximately the same or higher hardness, and has lower roughness, Includes, The surface of the main structure, after roughening treatment, forms a rough surface with a rough structure, and the surface roughness is increased. The fluorine coating layer is composed of 0.01 to 20% wt of fluorocarbons, 5 to 50% wt of alkoxysilane, 0.01 to 20% wt of a catalyst additive, and 10 to 90% wt of a solvent. The fluorocarbon is selected from the group consisting of perfluoroalkane substances (PFAS), chlorofluorocarbons (CFCs), semifluorocarbons (HFCs), hydrofluorochlorocarbons (HCFCs), polytetrafluoroethylene (PTFE), and fluorinated ethylene propylene copolymers (FEP). The aforementioned alkoxysilanes include alkoxysilane oligomers, alkoxysilane compounds, alkoxysilane polymers, alkoxylsiloxane oligomers, alkoxylsiloxane compounds, alkoxylsiloxane polymers, alkoxylaminosiloxane oligomers, and alkoxylaminosiloxane compounds. Selected from the group consisting of compounds, alkoxylaminosiloxane polymers, The catalyst additive is selected from the group consisting of metals, metal oxides, zirconium phosphate salts and carboxylate salts of platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, ruthenium, tantalum, tungsten, and zirconium. The solvent is selected from the group consisting of alcohols, ketones, esters, fluoroalcohols, fluoroethers, and ethers. The anti-adhesion object is characterized in that the alkoxysilane has a reactive functional group, and the reactive functional group undergoes a self-condensation reaction at room temperature for 1 to 7 days, or at a temperature of 40 to 60 degrees Celsius for 1 to 24 hours.

2. A main structure having at least one surface, A fluorine coating layer covering the surface of the main structure, which comes into contact with a substance in a certain environment, and which has a larger water droplet contact angle with respect to the substance than the surface of the main structure, has approximately the same or higher hardness, and has lower roughness, Includes, The surface of the main structure has undergone roughening by pickling, laser, or sandblasting, after which the surface roughness has increased. The fluorine coating layer is composed of 0.01 to 20% wt of fluorocarbons, 5 to 50% wt of alkoxysilane, 0.01 to 20% wt of a catalyst additive, and 10 to 90% wt of a solvent. The fluorocarbon is selected from the group consisting of perfluoroalkane substances (PFAS), chlorofluorocarbons (CFCs), semifluorocarbons (HFCs), hydrofluorochlorocarbons (HCFCs), polytetrafluoroethylene (PTFE), and fluorinated ethylene propylene copolymers (FEP). The aforementioned alkoxysilanes include alkoxysilane oligomers, alkoxysilane compounds, alkoxysilane polymers, alkoxylsiloxane oligomers, alkoxylsiloxane compounds, alkoxylsiloxane polymers, alkoxylaminosiloxane oligomers, and alkoxylaminosiloxane compounds. Selected from the group consisting of compounds, alkoxylaminosiloxane polymers, The catalyst additive is selected from the group consisting of metals, metal oxides, zirconium phosphate salts and carboxylate salts of platinum, titanium, tin, zinc, aluminum, silver, calcium, magnesium, potassium, sodium, nickel, chromium, molybdenum, vanadium, copper, iron, cobalt, germanium, hafnium, lanthanum, lead, ruthenium, tantalum, tungsten, and zirconium. The solvent is selected from the group consisting of alcohols, ketones, esters, fluoroalcohols, fluoroethers, and ethers. The anti-adhesion object is characterized in that the alkoxysilane has a reactive functional group, and the reactive functional group undergoes a self-condensation reaction at room temperature for 1 to 7 days, or at a temperature of 40 to 60 degrees Celsius for 1 to 24 hours.

3. The anti-adhesion object according to claim 1 or 2, characterized in that the main structure is an outlet tube of a process apparatus, or a tube or component of peripheral equipment of the process apparatus.

4. The anti-adhesion object according to claim 1 or 2, characterized in that the fluorine coating layer is located on the surface of a portion of the main structure, and the portion is an inclined portion, a planar portion, or a curved portion of the main structure.

5. The anti-adhesion object according to claim 1 or 2, characterized in that the fluorine coating layer has higher acid corrosion resistance and plasma etching resistance compared to the surface of the main structure.

6. The anti-adhesion object according to claim 1 or 2, characterized in that the fluorocarbon is a fluorine-containing monomer or polymer containing 1 to 20 carbon atoms.

7. The environment is a vacuum environment, the substance is a process material, the anti-adhesion object is the process material used or discharged when a process is carried out in contact with a process apparatus in the vacuum environment, the process carried out by the process apparatus is an atomic layer stacking (ALD) process, and the process material is titanium tetrachloride (TiCl ４ The anti-adhesion object according to claim 1 or 2, characterized in that it is the same as the object described in claim 1 or 2.

8. The anti-adhesion object according to claim 1 or 2, characterized in that the environment is a vacuum environment, the substance is a process material, the anti-adhesion object is the process material used or discharged when a process is carried out in contact with a process apparatus in the vacuum environment, the process carried out by the process apparatus is an organometallic vapor deposition (MOCVD) process, and the process material is a process gas or process exhaust gas.

9. The anti-adhesion object according to claim 1 or 2, characterized in that the environment is a vacuum environment, the substance is a process material, the anti-adhesion object is the process material used or discharged when a process is carried out in contact with a process apparatus in the vacuum environment, the process carried out by the process apparatus is an aluminum pad (Al-pad) process, and the process material is a process gas reactant or process exhaust gas.

10. The anti-adhesion object according to claim 1 or 2, characterized in that the water droplet contact angle range of the fluorine coating layer is 100 degrees to 120 degrees.

11. The anti-adhesion object according to claim 1 or 2, characterized in that the temperature resistance of the fluorine coating layer reaches 600 degrees Celsius.

12. The anti-adhesion object according to claim 1 or 2, characterized in that the hardness range of the fluorine coating layer is 8H to 9H.

13. The anti-adhesion object according to claim 1 or 2, characterized in that the adhesion force between the fluorine coating layer and the surface of the main structure is in the numerical range of 4B to 5B obtained by a cross-cut test.

14. The anti-adhesion object according to claim 1 or 2, characterized in that the environment is a vacuum environment, a gas phase environment, a liquid phase environment, or a gas-liquid mixed environment.

15. The anti-adhesion object according to claim 1 or 2, characterized in that the main structure is a major structure, component, member, or material of a building structure, power generation equipment, or means of transportation.

16. The anti-adhesion object according to claim 1 or 2, wherein the environment is an ozonated water environment, and the fluorine coating layer increases its stability to ozonated water in the ozonated water environment by increasing its fluorine content in response to the ozonated water environment.

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