Pusher device for inspection

Abstract

The present invention relates to a pusher device for inspection and, more specifically, to an pusher device for inspection that is for pushing an inspection object requiring an electrical inspection toward an inspection device, the pusher device for inspection comprising: a base, which is fixedly provided at the inspection device, has, at the center thereof, an accommodation part in which the inspection object is accommodated, and has a step provided at the edge thereof; a cover member, which has an accommodation space therein, is open downward, and is detachably coupled to the base; a pusher member which passes through the opening of the cover member in the accommodation space of the cover member so as to be vertically movable, and of which the lower surface is in contact with the inspection object disposed in the accommodation part so that the inspection object can be pushed to the inspection device; a latch member which is rotatably coupled to the cover member, and of which the lower end is caught on the step of the base so that a closed state of the cover member is maintained; and a position adjustment means, which is provided on the cover member and moves the relative position of the latch member with respect to the cover member.

Description

Inspection pusher device

[0001] The present invention relates to an inspection pusher device, and more particularly, to an inspection pusher device that enables inspection of test objects of various thicknesses.

[0002] In the semiconductor device inspection process, a test socket is used to electrically connect the semiconductor device to the inspection device. The test socket is mounted on the inspection device and accommodates the semiconductor device, which is the object under test. The test socket contacts the semiconductor device and the inspection device. The test socket transmits test signals from the inspection device to the semiconductor device and transmits response signals from the semiconductor device to the inspection device.

[0003] For these electrical tests, it is necessary to pressurize the semiconductor device into contact with the test socket, and for this purpose, a test pusher device is used.

[0004] This inspection pusher device is configured to apply a strong force by pulling and turning the handle using the principle of a lever so that a strong force can be applied to press the semiconductor device into the inspection device, thereby allowing the strength of an ordinary person to apply a strong force.

[0005] This inspection pusher device comprises a base disposed on the inspection device side, a cover member detachably installed on the base, a handle member hingedly connected to the cover member and functioning as a lever, a pusher member that rises and falls in conjunction with the rotation of the handle member, and a latch member that secures the cover member to the base.

[0006] The existing pusher device has a disadvantage in that it is difficult to apply to anything other than semiconductor devices with a fixed thickness because the height of the pusher member is fixed for high loads and the latch member is precisely interlocked and fixed to the base.

[0007] In particular, if a height deviation occurs in the inspection target (semiconductor package) without adjusting the height of the pusher member, there is a problem of reduced contact between the inspection target semiconductor package and the inspection device.

[0008] The technical object of the present invention is to provide an inspection pusher device that can easily perform pressurization on inspection objects of various thicknesses by providing a position adjustment means to enable the height of a pusher member to be easily adjusted in order to solve the above-described problems.

[0009] The inspection pusher device of the present invention for solving the above-described technical problem is an inspection pusher device for pressing an inspection object requiring electrical inspection toward the inspection device,

[0010] A base having a receiving portion in the center for receiving a test object and fixedly installed on a test device, and having a step at the edge;

[0011] A cover member having an internal storage space, opening downward, and detachably connected to the base;

[0012] A pusher member that can move up and down through the opening of the cover member in the receiving space of the cover member and has a lower surface that contacts the test object placed in the receiving portion to press the test object against the test device;

[0013] A latch member rotatably coupled to the cover member and having a lower end that catches on a step of the base to maintain the cover member in a closed state; and

[0014] It includes a position adjustment means provided on the above cover member and moving the relative position of the latch member with respect to the above cover member.

[0015] In the above inspection pusher device,

[0016] The above latch member,

[0017] A latch body with a catch formed at the bottom,

[0018] Including a latch pin that protrudes outward from the latch body and is rotatably coupled to the cover member,

[0019] The above position adjustment means can move the relative position of the latch pin with respect to the cover member.

[0020] In the above inspection pusher device,

[0021] The above position adjustment means,

[0022] Including an adjustment block that is rotatably coupled to the above cover member and includes a plurality of contact portions that contact the latch pin according to rotation,

[0023] The distance from the center of rotation of the above control block to each contact part may be different.

[0024] In the above inspection pusher device,

[0025]

[0026] The distance from the center of rotation to each contact point can be sequentially increased or decreased along the circumferential direction.

[0027] In the above inspection pusher device,

[0028] The above contact portion is a concave groove concave inward, and may be any one of a dish-shaped groove, a triangular groove, or a square groove.

[0029] In the above inspection pusher device,

[0030] Since the above contact portion is formed as a plane, at least a portion of the control block can have a polyhedral shape.

[0031] In the above inspection pusher device,

[0032] The above position adjustment means,

[0033] It may further include a pin pressing portion that brings the above latch pin into contact with the contact portion of the adjustment block.

[0034] In the above inspection pusher device,

[0035] The above pin pressurizing part,

[0036] It may be composed of an elastic member placed on the opposite side of the adjustment block with a latch pin in between, and a fixing body fixed to the cover member to support the elastic member on the opposite side of the latch pin.

[0037] In the above inspection pusher device,

[0038] An inspection pusher device characterized in that the elastic member is rubber or a spring.

[0039] In the above inspection pusher device,

[0040] The above-mentioned fixture may be a screw member that is screw-connected to the cover member to support the elastic member.

[0041] In the above inspection pusher device,

[0042] The above pin pressurizing part,

[0043] It may be a pogo pin composed of a cylindrical body, a spring inserted into the cylindrical body, and a pressure ball inserted into the cylindrical body and supported by the spring.

[0044] In the above inspection pusher device,

[0045] The above control block is,

[0046] A tool insertion groove having a shape corresponding to the tip of the rotating tool can be formed so that the rotating tool can be inserted into the center.

[0047] In the above inspection pusher device,

[0048] The above control block is,

[0049] It has a disc shape in which the above contact portion is formed on the outer surface, and a ring-shaped groove is formed along the circumference, and a separation prevention pin that is detachably installed in the cover member can be fitted into the ring-shaped groove.

[0050] In the above inspection pusher device,

[0051] A handle portion rotatably connected to the cover member and rotatable between a pressurized position and a release position;

[0052] It includes an interposer operably connected to the handle portion and raised or lowered in conjunction with the movement of the handle portion,

[0053] The above pusher member is positioned on the lower side of the interposer and can rise or fall together with the interposer.

[0054] In the above inspection pusher device,

[0055] A pusher spring that elastically presses the pusher member downward when the interposer is lowered may be placed between the interposer and the pusher member.

[0056] The inspection pusher device of the present invention having the above-described purpose is an inspection pusher device for pressing a test object requiring electrical inspection toward the inspection device.

[0057] A base that is fixedly installed on a test device and has a receiving portion formed in the center to receive the test subject;

[0058] A cover member having an internal storage space, being opened downward, detachably connected to the base, and having a step formed on the edge;

[0059] A pusher member that can move up and down through the opening of the cover member in the receiving space of the cover member and has a lower surface that contacts the test object placed in the receiving portion to press the test object against the test device;

[0060] A latch member rotatably coupled to the base and having an upper end that catches on a step of the cover member to maintain the cover member in a closed state; and

[0061] It includes a position adjusting means provided on the above base and changing the relative position of the latch member with respect to the above base.

[0062] The inspection pusher device according to the present invention has the advantage of enabling the height of the pusher member to be easily adjusted by a position adjustment means, thereby easily performing pressure on inspection objects of various thicknesses with a single device.

[0063] The inspection pusher device according to the present invention uses an adjustment block connected to a latch member as a position adjustment means, and can easily adjust the height of the pusher member by operating the adjustment block, so it has the advantage of being able to easily and precisely adjust the desired height of the pusher member.

[0064] Figure 1 is a perspective view of an inspection pusher device according to one embodiment of the present invention.

[0065] Figure 2 is an exploded perspective view of Figure 1.

[0066] Fig. 3 is a perspective view of the inspection pusher device of Fig. 1 viewed from below.

[0067] Fig. 4 is a plan view of the inspection pusher device of Fig. 1.

[0068] Fig. 5 is a front view of the inspection pusher device of Fig. 1.

[0069] Fig. 6 is a rear view of the inspection pusher device of Fig. 1.

[0070] Fig. 7 is an exploded perspective view of a position adjustment means, which is a component of the inspection pusher device of Fig. 1.

[0071] Fig. 8 is a cross-sectional view taken along line Ⅷ-Ⅷ of Fig. 4, and Fig. 9 is a cross-sectional view taken along line Ⅸ-Ⅸ of Fig. 4.

[0072] Fig. 10 is a perspective view of the inspection pusher device in an open state.

[0073] Fig. 11 is a front view of the inspection pusher device of Fig. 10.

[0074] Fig. 12 is an operating diagram of a position adjustment means, which is one component of the inspection pusher device disclosed in Fig. 10.

[0075] Fig. 13 is a cross-sectional view taken along line XI-XI of Fig. 4, and Fig. 14 is a cross-sectional view taken along line XII-XII of Fig. 4.

[0076] Fig. 15 is a modified example of an adjustment block, which is one component of the inspection pusher device of the present invention.

[0077] Fig. 16 is another modified example of the adjustment block, which is one component of the inspection pusher device of the present invention.

[0078] Fig. 17 is a modified example of a pin pressurizing part, which is one component of the inspection pusher device of the present invention.

[0079] Fig. 18 is a diagram illustrating a combination example of a latch pin and an adjustment block, which are one component of the inspection pusher device of the present invention.

[0080] Fig. 19 is a perspective view of an inspection pusher device according to another embodiment of the present invention.

[0081] The embodiments of this disclosure are provided for the purpose of illustrating the technical concepts of this disclosure. The scope of rights under this disclosure is not limited to the embodiments presented below or the specific descriptions of these embodiments.

[0082] All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by those of ordinary skill in the art to which this disclosure pertains. All terms used in this disclosure have been selected for the purpose of more clearly explaining this disclosure and are not intended to limit the scope of rights under this disclosure.

[0083] Expressions such as “including,” “comprising,” “having,” and the like used in this disclosure should be understood as open-ended terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included.

[0084] The singular forms described in this disclosure may include plural meanings unless otherwise stated, and the same applies to the singular forms described in the claims.

[0085] The expressions “first,” “second,” etc. used in this disclosure are used to distinguish between multiple components, and do not limit the order or importance of the components.

[0086] In this disclosure, when a component is referred to as being "connected" or "connected" to another component, it should be understood that the component can be directly connected or connected to the other component, or can be connected or connected via a new other component.

[0087] The directional term "upward" used in this disclosure refers to the direction in which the pusher device is positioned relative to the inspection device, and the directional term "downward" refers to the opposite direction of upward. It should be understood that the directional terms "upward / downward" or "vertical" used in this disclosure include the upward and downward directions, but do not refer to a specific direction among the upward and downward directions.

[0088] Embodiments are described with reference to examples illustrated in the attached drawings. In the attached drawings, identical or corresponding components are assigned the same reference numerals. Furthermore, in the description of the embodiments below, redundant descriptions of identical or corresponding components may be omitted. However, even if a description of a component is omitted, it is not intended that such component is not included in any embodiment.

[0089] The embodiments described below and examples illustrated in the attached drawings relate to an inspection pusher device for pressurizing an inspection object for electrical connection between the inspection device and the inspection device.

[0090] The inspection pusher device of the embodiments can be used to electrically connect the inspection device and the inspection device during inspection of an inspection object, such as the inspection device. For example, the inspection pusher device of the embodiments can be used for a burn-in test of the inspection device during a post-process during the manufacturing process of the inspection device. According to the burn-in test, the inspection device is subjected to thermal stress at a high temperature of about 80°C to 125°C. During the burn-in test, the inspection device operates under high temperatures and high electric fields, so a inspection device that cannot withstand the burn-in test conditions will cause a defect. Accordingly, a inspection device that may cause an initial defect can be inspected through the burn-in test. Examples of inspections to which the inspection pusher device of the embodiments is applied are not limited to the aforementioned burn-in test.

[0091] According to one embodiment, a test pusher device (10) is mounted on a test device (95) and is configured to accommodate a test device inside and press the test device toward the test device (95). Specifically, the test pusher device (10) accommodates the test device inside and positions it on the test device (95). Test of the test device is performed by the test device (95) via a test socket mounted on the test device (95).

[0092] The device to be tested may be, but is not limited to, a semiconductor package. The semiconductor package is a semiconductor device that is packaged in a hexahedral shape using a resin material, including a semiconductor IC chip, a plurality of lead frames, and a plurality of terminals (941). The semiconductor IC chip may be a memory IC chip or a non-memory IC chip. Pins, solder balls, or the like may be used as the terminals (941). The device to be tested has a plurality of hemispherical terminals (941) on its lower side.

[0093] The test device (95) can be configured to perform a burn-in test of a device under test. The test device (95) has a test board on which a test socket is mounted. The test board can have a plurality of pads (951) that can output an electrical test signal and receive a response signal. A terminal (941) of the device under test is electrically connected to a corresponding pad (951) of the test board through the test socket. That is, the test socket electrically connects the terminal (941) of the device under test and the corresponding pad (951) of the test board in a vertical direction (VD), thereby transmitting an electrical test signal and a response signal between the terminal (941) and the pad (951).

[0094] The inspection pusher device (10) is configured to include a base (20), a cover member (30), a handle member (40), an interposer (50), a pusher member (60), a latch member (70), and a position adjustment means (80).

[0095] The base (20) is fixedly installed to the inspection device (95) and has a receiving portion (21) formed in the center to receive the test subject (94), and a step (22) provided at the edge. Specifically, the base (20) has a receiving portion (21) in the shape of a square hole formed in the center and is formed in a square frame shape. The receiving portion (21) of the base (20) has a size that roughly corresponds to the test subject (94), and is configured such that the test subject (94) and the inspection connector (90) are inserted together into the receiving portion (21).

[0096] The above base (20) is configured such that a step (22) is formed in the second horizontal direction (HD2) to which a latch member (70) is hooked and fixed. Specifically, the step (22) has a concave shape inward, and a hook (711), which is an end of the latch member (70), is hooked and connected to the step (22), thereby preventing the cover member (30) from being detached from the base (20).

[0097] The above cover member (30) has a receiving space provided inside, is opened downward, and is detachably connected to the base (20). Specifically, the cover member (30) is formed in a hexahedral square frame shape and is configured so that the lower portion is open.

[0098] The above cover member (30) has handle coupling portions (31) spaced apart from each other in the second horizontal direction (HD2). The handle coupling portions (31) include handle insertion portions (311) that penetrate vertically and into which the handle portions (40) are inserted. A pair of handle coupling portions (31) protruding upward and spaced apart in the second horizontal direction (HD2) are provided on both edges of the handle insertion portions (311). The handle coupling portions (31) are configured to be formed on one side and the other side of the cover member (30) respectively along the second horizontal direction (HD2).

[0099] A handle coupling hole (312) through which a second hinge pin (43) passes is formed in the middle of the handle coupling portion (31). The second hinge pin (43) is configured to pass through the second hinge hole (411) of the handle portion (40) and the first connecting hole (441) of the connecting link (44) while being inserted into the handle coupling hole (312) and supported by the handle coupling portion (31). The handle portion (40) is hinge-connected to the handle coupling portion (31) by the second hinge pin (43).

[0100] A block hole (32) into which an adjustment block (81) is inserted is formed on the side extending in the second horizontal direction (HD2) of the above cover member (30).

[0101] The above block hole (32) has a shape corresponding to the control block (81) and is configured to have a circular cross-section. A pin receiving hole (33) extending in a first horizontal direction (HD1) is formed around the block hole (32). Specifically, a pin receiving hole (33) is formed on the upper portion of the block hole (32) so as to be connected to the block hole (32) and to be cut long in the vertical direction. The pin receiving hole (33) has a width corresponding to the left and right of the latch pin (72) and a vertical width slightly larger than that of the latch pin (72), so that when the latch pin (72) is inserted into the pin receiving hole (33), the latch pin (72) is configured to be able to move in the vertical direction.

[0102] The cover member (30) is configured such that a communication hole (34) extending downward from the upper surface of the cover member (30) is formed in a vertical direction (VD) perpendicular to the extension direction of the pin receiving hole (33) as an edge of the cover member (30). The communication hole (34) is configured to communicate with the pin receiving hole (33). A screw thread is formed on the inner circumferential surface of the communication hole (34), so that the fixing body (822) is screw-connected to the communication hole (34). The fixing body (822) is configured such that the elastic member (821) is first inserted into the communication hole (34) and then screw-connected.

[0103] The elastic member (821) inserted into the communication hole (34) is supported by a fixing member (822) screwed into the communication hole (34) and presses the latch pin (72) so that it comes into contact with the outer surface of the adjustment block (81).

[0104] The cover member (30) is provided with a pair of latch receiving portions (35) facing each other in the second horizontal direction (HD2). The latch receiving portions (35) have a shape corresponding to the latch body (71) so that the latch body (71) can be inserted therein, are concave toward the inside of the cover member (30), and extend from the bottom to the top in the vertical direction (VD). The stopper (351) protrudes outward from the bottom of the latch receiving portion (35), and the stopper (351) is inserted into the regulation portion (712) of the latch member (70) to regulate the height at which the cover member (30) rises or falls.

[0105] A plurality of through holes (36) extending in the second horizontal direction (HD2) are formed at the edge of the cover member (30). A guide pin (37) having a lower end coupled to an interposer (50) is configured to be inserted into the plurality of through holes (36). The guide pin (37) guides the direction of movement so that the interposer (50) moves up and down within the receiving space of the cover member (30).

[0106] The above handle portion (40) is rotatably connected to the cover member (30) and rotates between a pressurized position and a release position. The handle portion (40) has an overall “ㄷ” shape so that the operator can grip it. A bent portion (41) is formed at a right angle to the free end of the handle portion (40) to act as a lever.

[0107] The free end of the handle portion (40) is configured to have an inwardly concave slit formed and a connecting link (44) fitted into the slit. The end of the handle portion (40) is configured to have a first hinge hole (401) extending in a second horizontal direction (HD2), and the bent portion (41) is configured to have a second hinge hole (411) extending in a second horizontal direction (HD2). A first hinge pin (42) coupled to a handle coupling hole (312) of a handle coupling portion (31) is inserted into the first hinge hole (401), so that the handle portion (40) can rotate about the first hinge pin (42). A second hinge pin (43) passing through the first connecting hole (441) of the connecting link (44) is inserted into the second hinge hole (411) so that when the handle part (40) rotates around the first hinge pin (42) as the center of rotation, the connecting link (44) can rotate around the second hinge pin (43).

[0108] The above connecting link (44) is formed in a bar shape and is configured so that a first connecting hole (441) is formed in the upper part and a second connecting hole (442) is formed in the lower part. The upper part of the connecting link (44) is hinge-connected to the bending part (41) of the handle part (40), and the lower part of the connecting link (44) is configured so as to be connected to the interposer (50).

[0109] Specifically, the first connecting hole (441) on the upper part of the connecting link (44) is inserted and positioned corresponding to the second hinge hole (411) of the handle part (40). The second hinge pin (43) is configured to pass through the second hinge hole (411) and the first connecting hole (441).

[0110] The second connecting hole (442) at the bottom of the above connecting link (44) is positioned corresponding to the fastening hole (53) of the interposer (50), and the connecting pin (54) is configured to interconnect the second connecting hole (442) and the fastening hole (53) in the second horizontal direction (HD2). When the handle part (40) rotates around the first hinge pin (42), the connecting link (44) moves in an inclined direction, and in this process, the interposer (50) is configured to rise or fall.

[0111] The interposer (50) is operatively connected to the handle portion (40) and rises or falls in conjunction with the movement of the handle portion (40). Specifically, the interposer (50) is configured to be operatively connected to the handle portion (40) in a receiving space within the cover portion (30) and rise or fall by the handle portion (40). The interposer (50) is arranged between the handle portion (40) and the pusher portion (60), and is configured to rise or fall in conjunction with the rise or fall of the interposer (50).

[0112] This interposer (50) is formed in the form of a frame with a square central hole (51) formed in the center. Specifically, the interposer (50) is formed in the form of a square frame as a whole and is formed in the form of a rectangle in which the length extended in the second horizontal direction (HD2) is longer than the length extended in the first horizontal direction (HD1).

[0113] A pair of link insertion holes (52) are formed around the central hole (51) and are opposed to each other in the second horizontal direction (HD2). Specifically, a pair of link insertion holes (52) are formed around the central hole (51) in the interposer (50) and are spaced apart from each other with the central hole (51) therebetween. A fastening hole (53) is formed in the inner wall of the link insertion hole (52) in the second horizontal direction, and a connecting pin (54) is configured to be inserted into the fastening hole (53). The connecting pin (54) is inserted into the second connecting hole (442) of the connecting link (44) inserted into the link insertion hole (52), thereby allowing the connecting link (44) to be rotatably coupled to the interposer (50).

[0114] The pusher member (60) is arranged on the lower side of the interposer (50) and rises or falls together with the interposer. The pusher member (60) can move up and down by passing through the opening of the cover member (30) in the receiving space of the cover member (30). The lower surface of the pusher member (60) can contact the test object (94) arranged in the receiving portion (21) and press the test object (94) against the test device (95). Specifically, the pusher member (60) is for pressing the test device inserted into the base (20), and the pusher member (60) is elastically connected to the interposer (50).

[0115] The pusher member (60) is formed in an overall rectangular shape and has a mounting groove formed on the edge into which a pusher spring (61) is mounted. A pusher screw (62) that is screw-coupled to the interposer (50) is inserted into the mounting groove. The pusher screw (62) is configured so that only the screw portion protrudes upward while the head is positioned on the pusher member (60) and is coupled to the edge of the interposer (50).

[0116] The pusher member (60) coupled to the interposer (50) by the pusher screw (62) is not separated from the interposer (50). In addition, the pusher spring (61) is arranged between the interposer (50) and the pusher member (60), so that when the interposer (50) is lowered, the pusher member (60) is elastically pressed downward. Accordingly, the pusher member (60) elastically presses the test object (94). When the interposer (50) is raised, the pusher member (60) is also raised together with the interposer (50) by the pusher screw (62) in a state where the gap between the interposer (50) and the pusher member (60) is widened, and at this time, the pusher spring (61) is elastically restored.

[0117] The latch member (70) is rotatably coupled to the cover member (30) and has a lower end that is caught on a step (22) of the base (20) to keep the cover member (30) closed. The latch member (70) includes a latch body (71) having a catch formed on a lower end, and a latch pin (72) that is inserted into the latch body (71), protrudes from both sides of the latch body (71), and is rotatably coupled to the cover member (30).

[0118] Specifically, the latch body (71) is formed in an overall square plate shape. The upper part of the latch body (71) has a shape that can be gripped by hand by a worker. A hook (711) is formed on the lower part of the latch body (71) so that the step (22) of the base (20) is caught. In addition, a regulation part (712) extending in the first horizontal direction (HD1) and concave inward is formed on the lower inner surface of the latch body (71). A stopper (351) of the cover member (30) is inserted into the regulation part (712) to regulate the height of the rise or fall of the cover member (30).

[0119] The above latch pin (72) penetrates the center of the latch body (71) in the first horizontal direction (HD1). The latch pin (72) penetrates the inside of the latch body (71) and protrudes from both sides of the latch body (71) in the first horizontal direction (HD1). The latch pin (72) is inserted into the pin receiving hole (33) and is configured to be rotatable within the pin receiving hole (33). The latch pin (72) changes its height relative to the cover member (30) according to the rotation of the adjustment block (81), thereby adjusting the overall height of the pusher member (60).

[0120] The above position adjusting means (80) is provided on the cover member (30) and moves the relative position of the latch member (70) with respect to the cover member (30) to adjust the pressing force of the pusher member (60). The above position adjusting means (80) is used before the cover member (30) is coupled to the base (20) or before the pusher member (60) is operated after being coupled to the base (20). When the position adjusting means (80) is operated, the clearance between the hook (711) of the latch member (70) and the step (220) of the base (20) can be changed.

[0121] This position adjustment means (80) moves the relative position of the latch pin (72) with respect to the cover member (30), and includes an adjustment block (81) and a pin pressurizing portion (82).

[0122] The above adjustment block (81) is rotatably coupled to the cover member (30) and includes a plurality of contact portions (811) that contact the latch pin (72) as it rotates. The adjustment block (81) is configured to be inserted into the block hole (32) of the cover member (30) and is configured to be rotatable in a clockwise or counterclockwise direction when inserted into the adjustment block (81).

[0123] Specifically, the control block (81) is formed in an overall circular shape, and is configured such that a plurality of contact portions (811) in a protruding shape are formed on the outer surface. The contact portions (811) are rotatably coupled to the cover member (30), and contact the latch pin (72) as the contact portions rotate. The plurality of contact portions (811) are configured such that the distances from the rotation center of the control block (81) to each contact portion (811) are different. The latch pin (72) is in contact with the contact portion (811) of the control block (81), and as the control block (81) rotates, the latch pin (72) contacts the contact portions (811) having different heights. Accordingly, the latch pin (72) can move relative to or away from the rotation axis of the control block (81).

[0124] At this time, each contact portion (811) of the adjustment block (81) is configured to sequentially increase or decrease along the circumferential direction. Accordingly, when the adjustment block (81) rotates, the height of the latch pin (72) gradually moves away from or closer to the rotation axis of the adjustment block (81).

[0125] The contact portion (811) is a concave groove having a radius of curvature corresponding to the outer shape of the latch pin (72), and is configured so that the latch pin (72) is seated in the concave groove.

[0126] The front surface of the above adjustment block (81) is configured to have a tool insertion groove (812) having a shape corresponding to the tip of a rotary tool so that a rotary tool can be inserted. The worker can adjust the height of the latch pin (72) and the pusher member (60) by rotating the adjustment block (81) using the rotary tool according to the thickness of the test object (94).

[0127] A ring-shaped groove (813) is formed along the circumferential direction on the outer surface of the above-mentioned adjustment block (81), and a separation prevention pin (83) that is detachably installed in the cover member (30) is fitted into the ring-shaped groove (813). Accordingly, even if the adjustment block (81) rotates while inserted into the block hole (32), the adjustment block (81) does not come off from the block hole (32).

[0128] The above pin pressurizing part (82) is for pressing the latch pin (72) to the adjustment block (81). This pin pressurizing part (82) is composed of an elastic member (821) arranged on the opposite side of the adjustment block (81) with the latch pin (72) in between, and a fixing body (822) fixedly installed on the cover member (30) to support the elastic member (821) on the opposite side of the latch pin (72).

[0129] The above elastic member (821) is configured to elastically press the latch pin (72) toward the adjustment block (81) while being supported by the fixed body (822). Specifically, the elastic member (821) is configured to contact the latch pin (72) so that the latch pin (72) elastically presses the adjustment block (81). The elastic member (821) may be a coil spring, but is not limited thereto, and rubber or other various elastic means may be used.

[0130] The above-mentioned fixture (822) is inserted into the communication hole (34) of the cover member (30) to support the elastic member (821). This fixture (822) is a screw member having screw threads formed on the outer circumference thereof, and when the elastic member (821) is pre-inserted into the communication hole (34), the fixture (822) is screw-coupled to the communication hole (34) to push the elastic member (821) against the latch pin (72) so that the latch pin (72) can come into close contact with the adjustment block (81).

[0131] In the present invention, drawing number 90 is a connector for inspection, which is inserted into the receiving portion (21) of the base (20) and mounted on the inspection device (95) to achieve electrical connection between the subject to be inspected (94) and the inspection device (95). A pogo pin or an elastic conductive sheet (91) may be used in various ways as the inspection connector (90), but in the present disclosure, an elastic conductive sheet (91) is illustrated.

[0132] Most of the elastic conductive sheet (91) may be made of an elastic polymer material, and the elastic conductive sheet (91) may have elasticity in the vertical direction (VD) and the horizontal direction (HD). When an external force is applied downward in the vertical direction (VD) to the elastic conductive sheet (91), the elastic conductive sheet (91) may be elastically deformed in the downward direction and the horizontal direction (HD). The external force may be generated when the pusher member (60) presses the test object (94) toward the elastic conductive sheet (91). By this external force, the terminal (941) of the test object (94) and the elastic conductive sheet (91) may be brought into contact in the vertical direction (VD), and the elastic conductive sheet (91) and the pad (951) of the test device (95) may be brought into contact in the vertical direction (VD). When the external force is removed, the elastic conductive sheet (91) may be restored to its original shape.

[0133] The elastic conductive sheet (91) has a plurality of elastic conductive portions (92), and the elastic conductive portions (92) are brought into contact with the terminals (941) of the test object (94) and the corresponding pads (951) in the vertical direction (VD) to electrically connect them. The elastic conductive portions (92) are brought into contact with the terminals (941) of the test object (94) at their upper ends and are brought into contact with the upper ends of the pads (951) of the test device (95) at their lower ends. Accordingly, the elastic conductive portions (92) conduct electricity in the vertical direction between the corresponding pads (951) and the terminals (941). Accordingly, the test signal of the inspection device (95) can be transmitted from the pad (951) of the inspection device (95) to the test object (94) through the elastic conductive portion (92), and the response signal of the test object (94) can be transmitted from the terminal (941) to the inspection device (95) through the elastic conductive portion (92) and the pad (951). The elastic conductive portion (92) can have a cylindrical shape extending in the vertical direction (VD). In this cylindrical shape, the diameter at the middle can be smaller than the diameters at the top and bottom. The planar arrangement of the elastic conductive portions (92) can vary depending on the planar arrangement of the terminals (941) of the test object (94). In one embodiment, the elastic conductive portions (92) can be arranged in a pair of matrix forms, but are not limited to this arrangement form.

[0134] In one embodiment, the elastic conductive sheet (91) has an elastic insulating portion (93) that horizontally (HD) separates and insulates a plurality of elastic conductive portions (92). In addition, the elastic conductive sheet (91) may have a frame member (1330) that is joined to the elastic insulating portion (93) along the periphery of the elastic insulating portion (93) to support the elastic insulating portion (93).

[0135] The elastic insulating portion (93) can form a rectangular elastic region of the elastic conductive sheet (91). A plurality of elastic conductive portions (92) are spaced apart from each other at equal or unequal intervals in the horizontal direction (HD) and insulated by the elastic insulating portion (93). The elastic insulating portion (93) is formed as a single elastic body, and the plurality of elastic conductive portions (92) are embedded in the elastic insulating portion (93) in the thickness direction (vertical direction (VD)) of the elastic insulating portion (93). The elastic insulating portion (93) made of an elastic body maintains the elastic conductive portion (92) in its original cylindrical shape. The elastic insulating portion (93) is made of an elastic polymer material and has elasticity in the vertical direction (VD) and the horizontal direction (HD).

[0136] In detail, the elastic insulating portion (93) may be formed of a cured silicone rubber material. For example, the elastic insulating portion (93) may be formed by injecting and curing liquid silicone rubber into a mold for forming the inspection connector (90). As the liquid silicone rubber material for forming the elastic insulating portion (93), addition-type liquid silicone rubber, condensation-type liquid silicone rubber, liquid silicone rubber containing a vinyl group or a hydroxyl group, etc. may be used. As a specific example, the liquid silicone rubber material may include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, etc. In addition, as the silicone rubber material constituting the elastic insulating portion (93), a silicone rubber material having excellent heat resistance characteristics may be used so that the test socket of one embodiment can be applied to a burn-in test.

[0137] The elastic conductive portion (92) includes a plurality of conductive metal particles that are conductively contacted in a vertical direction (VD). The conductive metal particles may be formed by covering the surface of a core particle with a highly conductive metal. The core particle may be formed of a metal material such as iron, nickel, or cobalt, or may be formed of an elastic resin material. Examples of the highly conductive metal that may be coated on the surface of the core particle include gold, silver, rhodium, platinum, and chromium. The conductive metal particles that are conductively contacted in a vertical direction form a conductive path of the elastic conductive portion (92). For example, the conductive metal particles may be maintained in the shape of the elastic conductive portion (92) by an elastic polymer material forming the elastic insulating portion (93).

[0138] The inspection pusher device (10) according to the present invention has the following effects.

[0139] The inspection pusher device (10) is configured to pressurize the test object (94) by causing the pusher device (10) to rise or fall according to the rotation of the handle portion (40). Specifically, when the handle portion (40) is upright (not shown), the interposer (50) and the pusher member (60) rise and do not pressurize the test object (94), and when the handle portion (40) is laid down (Fig. 1), the interposer (50) and the pusher member (60) descend and pressurize the test object (94) placed on the base (20). When the handle portion (40) rotates in this way, only the pressurization or depressurization of the test object (94) is possible.

[0140] Meanwhile, the position adjustment means (80) is operated to inspect test specimens (94) of various thicknesses.

[0141] Specifically, depending on the thickness of the test object (94), the adjustment block (81) may be rotated in advance before the cover member (30) is fastened to the base (20), or the adjustment block (81) may be rotated before the pusher member (60) is pressed (in the open state) after the cover member (30) is fastened to the base (20). When the adjustment block (81) is rotated, the upper and lower positions of the latch pin (72) and the latch body (71) change depending on the groove depth of the contact portion (811). Accordingly, the clearance between the upper surface of the hook (711) of the latch member (70) and the lower surface of the step (22) of the base (20) changes.

[0142] When the latch pin (72) comes into contact with the contact portion (811) having a deep concave groove, the latch pin (72) and the latch body (71) are positioned relatively downwards on the side of the cover member (30), and when the adjustment block (81) is rotated so that the latch pin (72) comes into contact with the contact portion (811) having a shallow concave groove, the latch pin (72) and the latch body (71) move relatively upwards. Fig. 12 illustrates the position of the latch member (70) when the latch body (71) is rotated before the pusher member presses the test object (open state). When the latch pin (72) is in contact with the contact portion (811) having the deepest depth of the concave groove, the clearance (S1) between the upper surface of the hook (711) of the latch body (71) and the lower surface of the step (22) of the base (20) becomes large (Fig. 12(a)). Thereafter, when the latch body (71) is rotated in one direction, the latch pin (72) sequentially comes into contact with the contact portion (811) having the increasingly shallower depth of the concave groove, and in this process, the clearance between the upper surface of the hook (711) of the latch body (71) and the lower surface of the step (22) of the base (20) gradually decreases (S2 > S3 > S4). (Fig. 12(b) to (d))

[0143] Specifically, when testing a thick specimen (94), the adjustment block (81) is rotated so that the latch pin (72) comes into contact with the deep contact portion (811) of the concave groove. In this case, the latch member (72) is positioned relatively lower than the default value on the side of the cover member (30). In addition, when opened, the gap between the hook (711) of the latch member (70) and the step (22) of the base (20) increases.

[0144] In addition, when the handle part is lowered to perform an inspection in an open state, the pusher part (60) is lowered. Before the pusher part (60) is completely lowered, the upper surface of the thick test object (94) comes into contact with the pusher part (60), and when the handle part (40) is further pressed and the pusher part (60) is completely lowered, the latch part (70) and the cover part (30) rise as much as the pusher part (60) presses the test object (94), so that the gap between the hook (711) and the step (22) narrows, and when the handle part (40) is completely pressed, the hook (711) comes into contact with the step (22) and is caught.

[0145] Therefore, the gap between the hook and the jaw offsets the difference in thickness of the test specimen (94) compared to the existing one.

[0146] Conversely, when testing a test object (94) having a thinner thickness than the previous test subject, the adjustment block (81) is rotated so that the latch pin (72) comes into contact with the contact portion (811) having a shallow groove.

[0147] In this case, the positions of the latch pin (72) and the latch member (70) are relatively higher than before, and the gap between the hook (711) and the step (22) is also narrowed.

[0148] Even if the handle part (40) is lowered for testing and the pusher member (60) is lowered, the pusher member (60) does not come into direct contact with the relatively thin test object (94), and must be lowered close to the completely lowered position so that the pusher member (60) touches the upper surface of the test object (94). Therefore, even if it is completely lowered, the latch member (70) or the cover member (30) does not rise or rises only slightly. Accordingly, the gap between the hook (711) and the step (22) must be narrowed by the amount of the difference in the thickness of the thinned test object (94), so that the test object (94) can be pressed with an appropriate pressure when the pusher member (60) is completely lowered, and the fastening between the cover member (30) and the base (20) can be stably maintained in the test state.

[0149] In this way, by adjusting the height difference of the latch member (70) as a position adjustment means according to the thickness of the test object (94), the clearance between the hook (711) and the step (22) is adjusted, thereby enabling testing of various packages, and by preventing the pusher member (60) from pressurizing the test object (94) excessively beyond the design value, damage to the test object (94) or the test socket can be prevented.

[0150] In this way, the present invention can adjust the relative height of the latch member (70) using one or more adjustment blocks (81), thereby enabling overall play adjustment. In addition, the portion of the cover member (30) into which the latch pin (72) is inserted is formed in the form of a long hole, so that when the height is adjusted, the latch pin (72) can move up and down and be fixed at the desired position.

[0151] The inspection pusher device (10) according to the present invention is not limited thereto and can be modified in various ways.

[0152] In the above-described embodiment, the tool insertion groove (812) is exemplified as being formed in the shape of a hexagonal hole, but it is not limited thereto, and as illustrated in FIG. 15, it is possible for the tool insertion groove to be in the shape of a straight line (FIG. 15(a)) or a cross (FIG. 15(b)). In addition, if it is possible to combine with a tool, it is possible for a protrusion (812'; FIG. 13(c)) protruding outward to be formed on the adjustment block (81).

[0153] In addition, in the above-described embodiment, the contact portion (811) is exemplified as a concave groove having a gentle slope in a curved shape, but as shown in FIG. 16, various modifications are possible, such as a plane existing between the concave grooves (FIG. 16(a)), the concave groove being formed as an inclined surface (FIG. 16(b)), the contact portion (811) being formed in a flat shape (FIG. 16(c)), or the contact portion (811) being a square groove (FIG. 16(d)).

[0154] In addition, in the above-described embodiment, the elastic member (821) is made of a coil spring and the fixing member (822) is made of a screw member, but it is not limited thereto, and the elastic member (821) is made of a rubber material and the fixing member (822) is a square block that is screw-connected to the cover member (30) (Fig. 17(a)), the fixing member (822) is a pin that is inserted horizontally into the cover member (30) (Fig. 17(b)), or a pogo pin (82') that is formed of a cylindrical body (823'), a spring (not shown) inserted into the cylindrical body (823'), and a pressure ball (824') inserted into the cylindrical body (823') and supported by the spring (Fig. 17(c)).

[0155] In addition, in the above-described embodiment, the control block (81) is exemplified as being positioned directly below the latch pin (72), but as shown in FIG. 18, it is possible for it to be positioned in various positions, such as on the side or above.

[0156] In addition, in the above-described embodiment, the latch member (70) is rotatably coupled to the cover member (30), but, as shown in FIG. 19, the latch member (70') may be rotatably coupled to the base (20') and coupled to a step (not shown) formed in the cover member (30').

[0157] At this time, the adjustment block (81') may be inserted into the base (20'), and when the adjustment block (81') inserted into the base (20') rotates, the latch member (70') can be raised or lowered relative to the base (20') to provide an appropriate pressure according to the thickness of the test object.

[0158] Additionally, a heat sink, heat pipe, and fan for dissipating heat generated from the test object during inspection may be additionally arranged in various structures according to the design of the inspection pusher device (10).

[0159] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will appreciate that various modifications and variations of the embodiments are possible. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the appended claims.

Claims

1. In a test pusher device for pressing a test object requiring electrical inspection toward a test device, A base having a receiving portion in the center for receiving a test object and fixedly installed on a test device, and having a step at the edge; A cover member having an internal storage space, opening downward, and detachably connected to the base; A pusher member that can move up and down through the opening of the cover member in the receiving space of the cover member and has a lower surface that contacts the test object placed in the receiving portion to press the test object against the test device; A latch member rotatably coupled to the cover member and having a lower end that catches on a step of the base to maintain the cover member in a closed state; and An inspection pusher device characterized in that it includes a position adjustment means provided on the cover member and moving the relative position of the latch member with respect to the cover member.

2. In paragraph 1, The above latch member, A latch body with a catch formed at the bottom, Including a latch pin that protrudes outward from the latch body and is rotatably coupled to the cover member, An inspection pusher device characterized in that the above position adjustment means moves the relative position of the latch pin with respect to the cover member.

3. In paragraph 2, The above position adjustment means, Including an adjustment block that is rotatably coupled to the above cover member and includes a plurality of contact portions that contact the latch pin according to rotation, An inspection pusher device characterized in that the distances from the center of rotation of the above-mentioned adjustment block to each contact part are different.

4. In paragraph 3, An inspection pusher device characterized in that the distance from the center of rotation to each contact part is sequentially increased or decreased along the circumferential direction.

5. In paragraph 3, An inspection pusher device characterized in that the above contact portion is a concave groove concave inward, and is one of a dish-shaped groove, a triangular groove, or a square groove.

6. In paragraph 3, An inspection pusher device characterized in that the above contact portion is formed as a plane and at least a portion of the adjustment block has a polyhedral shape.

7. In paragraph 3, The above position adjustment means, An inspection pusher device characterized by further including a pin pressurizing portion that brings the latch pin into contact with a contact portion of the adjustment block.

8. In paragraph 7, The above pin pressurization part, An inspection pusher device characterized by comprising an elastic member positioned on the opposite side of an adjustment block with a latch pin in between, and a fixture fixed to a cover member to support the elastic member on the opposite side of the latch pin.

9. In paragraph 8, An inspection pusher device characterized in that the elastic member is rubber or a spring.

10. In paragraph 8, An inspection pusher device characterized in that the above-mentioned fixture is a screw member that is screw-connected to the cover member to support the above-mentioned elastic member.

11. In paragraph 7, The above pin pressurization part, An inspection pusher device characterized by a pogo pin comprising a cylindrical body, a spring inserted into the cylindrical body, and a pressure ball inserted into the cylindrical body and supported by the spring.

12. In paragraph 3, The above control block is, An inspection pusher device characterized in that a tool insertion groove having a shape corresponding to the tip of a rotating tool is formed so that a rotating tool can be inserted into the center.

13. In paragraph 3, The above control block is, An inspection pusher device having a disc shape in which the contact portion is formed on the outer surface thereof, a ring-shaped groove is formed along the circumference thereof, and a separation prevention pin that is detachably installed in a cover member is fitted into the ring-shaped groove.

14. In paragraph 1, A handle portion rotatably connected to the cover member and rotatable between a pressurized position and a release position; and It includes an interposer operably connected to the handle portion and raised or lowered in conjunction with the movement of the handle portion, An inspection pusher device characterized in that the pusher member is positioned on the lower side of the interposer and rises or falls together with the interposer.

15. In paragraph 14, An inspection pusher device characterized in that a pusher spring is arranged between the interposer and the pusher member to elastically press the pusher member downward when the interposer is lowered.

16. In a test pusher device for pressing a test object requiring electrical inspection toward the test device, A base that is fixedly installed on a test device and has a receiving portion formed in the center to receive the test subject; A cover member having an internal storage space, being opened downward, detachably connected to the base, and having a step formed on the edge; A pusher member that can move up and down through the opening of the cover member in the receiving space of the cover member and has a lower surface that contacts the test object placed in the receiving portion to press the test object against the test device; A latch member rotatably coupled to the base and having an upper end that catches on a step of the cover member to maintain the cover member in a closed state; and An inspection pusher device characterized in that it is provided on the base and includes a position adjusting means for changing the relative position of a latch member with respect to the base.

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