Circuit inspection device

Abstract

Provided is a circuit inspection device according to an embodiment of the present invention, the circuit inspection device comprising: a plurality of needle units disposed toward a first surface of a substrate including a plurality of circuits and coming in contact with the plurality of circuits; a plurality of panel units spaced apart from a second surface of the substrate opposite to the first surface, wherein one of the needle units or the panel units applies a voltage to the circuits; and a determination unit for determining whether the circuits are abnormal through the voltage applied to the circuits, wherein the plurality of needle units are moved in an inspection direction in different areas of the first surface and are in contact with the circuits, the plurality of panel units are disposed to face different areas of the second surface, at least one of the plurality of needle units is disposed in an area adjacent to an end portion of the first surface, and at least one of the plurality of panel units is disposed in an area adjacent to an end portion of the second surface.

Description

Circuit tester

[0001] The present invention relates to a circuit inspection device.

[0002] Many electronic products can be equipped with various control devices, electronic components, etc.

[0003] Among them, COF (Chip on Film) is a type of TAB (Tape Automated Bounding) created as an alternative to wire bonding, and it plays a role in connecting chips and films to exchange signals with external electronic components. It is mainly used in TVs, monitors, laptops, etc., and recently, it has been widely applied to high-performance display products such as automotive and smartphones.

[0004] At this time, in order to prevent the shipment of defective products, the circuit of the board is inspected, and generally, the presence of abnormalities in the circuit can be checked by contacting the circuit through the tip, applying voltage, and receiving the applied voltage on the opposite side.

[0005] However, in order to detect the voltage applied to the circuit and check for abnormalities in the circuit, high precision and prevention of judgment errors due to noise are necessary, and a means to solve this is required.

[0006] The present invention is an invention devised to solve the problems of the above-described prior art, and has as its object the improvement of the accuracy of detecting abnormalities in a circuit.

[0007] The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned herein will be clearly understood by those skilled in the art from the description below.

[0008] According to an embodiment of the present invention for achieving the above-described object, a circuit inspection device includes a plurality of needle portions arranged toward a first surface of a substrate including a plurality of circuits and in contact with the plurality of circuits, a plurality of panel portions spaced apart from a second surface of the substrate opposite to the first surface, and a determination portion for applying a voltage to the circuits at one of the needle portions or the panel portions and determining whether the circuits are abnormal based on the voltage applied to the circuits, wherein the plurality of needle portions are moved in an inspection direction in different regions of the first surface and come into contact with the circuits, the plurality of panel portions are arranged to face different regions of the second surface, at least one of the plurality of needle portions is arranged in a region adjacent to an end of the first surface, and at least one of the plurality of panel portions is arranged in a region adjacent to an end of the second surface.

[0009] The plurality of panel portions are formed long along the inspection direction, and at least one of the plurality of panel portions has a different width in a first direction, and the first direction may be perpendicular to the inspection direction and a second direction from the first surface toward the second surface or from the second surface toward the first surface.

[0010] The plurality of needle portions may include a first probe disposed in an area adjacent to one end of the first surface, a second probe disposed in an area adjacent to the other end of the first surface, and a third probe disposed between the first probe and the second probe in the first direction.

[0011] The third probe may include a 3-1 probe positioned adjacent to the first probe in the first direction and a 3-2 probe positioned adjacent to the second probe in the first direction.

[0012] The first probe and the third-second probe can be moved together in the inspection direction, and the second probe and the third-first probe can be moved together in the inspection direction.

[0013] The plurality of panel portions may include a first board arranged in an area adjacent to one end of the second surface, a second board arranged in an area adjacent to the other end of the second surface, and a third board arranged between the first board and the second board in the first direction.

[0014] The above plurality of panel sections may further include a fourth board arranged between the first board and the third board or between the second board and the third board in the first direction.

[0015] At least one of the plurality of needle portions may overlap at least a portion of one of the plurality of panel portions in the second direction.

[0016] At least one of the plurality of panel portions may not overlap with the plurality of needle portions in the second direction.

[0017] The above needle part may include a contact part that comes into contact with the circuit, a driving part that moves the contact part in the inspection direction, and an elastic part that is arranged between the contact part and the driving part.

[0018] The diameter of the end of the contact portion in the direction facing the substrate may be 16 μm or less.

[0019] The elastic member provides elasticity to the contact member from the driving member toward the substrate, and the contact member can sequentially come into contact with the circuit or the substrate during the process of being moved by the driving member.

[0020] The plurality of needle portions can move in the inspection direction on the first surface and apply voltage to the circuit, and the plurality of panel portions can sense the voltage applied to the circuit on the second surface.

[0021] The plurality of panel portions apply voltage to the plurality of circuits arranged on the second surface in a direction from the second surface toward the first surface, and the plurality of needle portions can move in the inspection direction on the first surface and sense the voltage of the circuits that come into contact with them.

[0022] A circuit inspection device according to an embodiment of the present invention for solving the above problem can have the effect of improving the accuracy of inspection for abnormalities in a circuit.

[0023] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0024] In addition, the effects of the present invention may be described in more detail in the detailed description of the present invention, and may not necessarily be limited to what is presented above.

[0025] The summary set forth above, as well as the detailed description of preferred embodiments of the present application described below, will be better understood when read in conjunction with the accompanying drawings.

[0026] For the purpose of illustrating the present invention, preferred embodiments are shown in the drawings.

[0027] However, it should be understood that the present application is not limited to the precise arrangements and means illustrated.

[0028] FIG. 1 is a drawing illustrating an overall description of a circuit inspection device according to one embodiment of the present invention;

[0029] FIG. 2 is a drawing illustrating a needle portion of a circuit inspection device according to one embodiment of the present invention;

[0030] FIG. 3 is a drawing illustrating a panel portion of a circuit inspection device according to one embodiment of the present invention;

[0031] FIG. 4 is a drawing illustrating a first operation of a circuit inspection device according to one embodiment of the present invention;

[0032] FIG. 5 is a drawing illustrating a second operation of a circuit inspection device according to one embodiment of the present invention;

[0033] FIG. 6 is a drawing illustrating a situation of a first side of a circuit inspection device according to one embodiment of the present invention;

[0034] FIG. 7 is a drawing illustrating a situation of a second side of a circuit inspection device according to one embodiment of the present invention;

[0035] FIG. 8 is a drawing illustrating the movement of a needle portion of a circuit inspection device according to one embodiment of the present invention;

[0036] FIG. 9 is a drawing illustrating a needle portion and a panel portion of a circuit inspection device according to another embodiment of the present invention;

[0037] FIG. 10 is a drawing illustrating an elastic part of a circuit inspection device according to one embodiment of the present invention;

[0038] FIG. 11 is a drawing illustrating an elastic part in the inspection process of a circuit inspection device according to one embodiment of the present invention;

[0039] FIG. 12 is a drawing illustrating circuit overlapping of a circuit inspection device according to one embodiment of the present invention;

[0040] FIG. 13 is a drawing illustrating a circuit disconnection of a circuit inspection device according to one embodiment of the present invention;

[0041] FIG. 14 is a drawing illustrating an example of applying another type of substrate to a circuit inspection device according to one embodiment of the present invention;

[0042] FIG. 15 is a diagram illustrating circuit inspection of another type of substrate of a circuit inspection device according to one embodiment of the present invention; and

[0043] FIG. 16 is a drawing illustrating a circuit inspection device according to another embodiment of the present invention.

[0044] The present invention is susceptible to various modifications and embodiments, and specific embodiments are illustrated and described in detail in the drawings. However, this is not intended to limit the present invention to specific embodiments, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention. In describing the present invention, detailed descriptions of related known technologies will be omitted if they are deemed to obscure the gist of the present invention.

[0045] Terms such as first, second, etc. may be used to describe various components, but these components should not be limited by these terms. These terms are used solely to distinguish one component from another.

[0046] The terminology used in this application is only used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, it should be understood that the terms "comprises" or "has" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not preclude the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0047] Additionally, throughout the specification, when we say "connected," this does not only mean that two or more components are directly connected, but also that two or more components are indirectly connected through other components, that they are electrically connected as well as physically connected, or that they are referred to by different names depending on location or function but are one.

[0048] Additionally, when described as being formed or arranged "above or below" each component, "above" or "below" includes not only cases where the two components are in direct contact with each other, but also cases where one or more other components are formed or arranged between the two components. Furthermore, when expressed as "above" or "below," it can include the meaning of a downward direction as well as an upward direction based on one component.

[0049] Hereinafter, preferred embodiments of the present invention, in which the purpose of the present invention can be specifically realized, will be described with reference to the attached drawings.

[0050] First, before explaining the circuit inspection device according to an embodiment of the present invention, the background of the circuit inspection device according to an embodiment of the present invention will be explained. A first board for transmitting a plurality of micro LEDs or a screen to drive a display, a second board for supplying power to the first board, and a third board connecting the first board and the second board are provided so that power transmitted from the second board can be transmitted to the first board.

[0051] To this end, the third board connecting the first board and the second board, in the description of the circuit inspection device according to the embodiment of the present invention, the circuit board (10) for connecting the first board and the second board must have no abnormalities in the circuit (11) so that power can be supplied smoothly, and since the circuit (11) has a micro or nano-level fine circuit (11) due to its characteristics, inspection of this must be performed.

[0052] In addition, in the case of the substrate (10), as will be explained through the drawings to be described later, the circuit (11) of the first surface (12), which is the upper surface of the substrate (10), and the second surface (13), which is the lower surface of the substrate (10), are connected to each other through a via hole (14), and it is necessary to check whether there is an abnormality in both connected circuits (11).

[0053] In addition, although the explanation is based on the third board connecting the first board and the second board, there are cases where only the first board is used and a circuit (11) for supplying power is mounted on the first board and driven, and during the inspection process, there may be a disadvantage in that accurate inspection cannot be performed due to the voltage sensed by the circuit (11) being weak.

[0054] The circuit inspection device according to an embodiment of the present invention can effectively solve the above-described background and problems, and this will be described in more detail in the following description.

[0055] First, as illustrated in FIG. 1, a circuit inspection device according to an embodiment of the present invention is arranged toward a first surface (12) of a substrate (10) including a plurality of circuits (11), and includes a plurality of needle portions (100) that come into contact with the plurality of circuits (11), and a plurality of panel portions (200) that are spaced apart from a second surface (13) of the substrate (10) opposite to the first surface (12). In the description of the present invention, either the needle portions (100) or the panel portions (200) applies voltage to the circuits (11).

[0056] For example, the needle part (100) may be a power supply part that applies voltage to the circuit (11), and the panel part (200) may be a power receiving part that receives the voltage applied to the circuit (11). In this case, the needle part (100) may be connected to a power supply device for applying voltage, and the panel part (200) may be a sensor for receiving voltage. Alternatively, the panel part (200) may be a power supply part that applies voltage to the circuit (11), and the needle part (100) may be a power receiving part that receives voltage applied to the circuit (11). In this case, the panel part (200) may be connected to a power supply device for applying voltage, and the needle part (100) may be a sensor for receiving voltage.

[0057] However, in order to prevent misunderstanding of the circuit inspection device according to the embodiment of the present invention in explaining the invention, the needle part (100) is explained as a power supply part and the panel part (200) is a power receiving part, and a case in which the needle part (100) is a power receiving part and the panel part (200) is a power supply part will be explained separately through the drawings described later.

[0058] Based on this, if the needle part (100) is a power supply part and the panel part (200) is a power receiving part, the circuit inspection device according to the embodiment of the present invention further includes a judgment part that senses current according to the voltage transmitted through the plurality of needle parts (100) to determine whether there is an abnormality in the plurality of circuits (11) by sensing the current according to the transmitted voltage in the plurality of panel parts (200) when the voltage applied through the plurality of needle parts (100) is transmitted to the plurality of circuits (11). Here, it is described that what the judgment part senses is current according to voltage, but it can also sense voltage, sense a change in electrostatic capacity, and determine whether there is an abnormality in the circuit (11) through various values ​​for determining whether there is an abnormality in the circuit (11).

[0059] This can be understood to include that the voltage applied by the plurality of needle portions (100) also applies current according to the voltage. However, in order to prevent confusion in the explanation, the plurality of panel portions (200) are explained as sensing the voltage and the plurality of needle portions (100) apply the voltage, but the interpretation is not necessarily limited thereto, and can be understood and implemented in various ways to check whether the circuit (11) is abnormal.

[0060] Meanwhile, a plurality of needle parts (100) are moved in the inspection direction in different areas of the first surface (12), and the plurality of needle parts (100) are moved in the inspection direction and come into contact with a plurality of circuits (11) to apply voltage. In addition, a plurality of panel parts (200) are arranged spaced apart from the second surface (13) in the first direction and are arranged to face different areas of the second surface (13).

[0061] Additionally, at least one of the plurality of needle portions (100) may be placed in an area adjacent to an end of the first surface (12), and at least one of the plurality of panel portions (200) may be placed in an area adjacent to an end of the second surface (13).

[0062] More specifically, with reference to FIG. 1, one of the plurality of needle portions (100) may be arranged adjacent to the left or right side of the substrate (10), and one of the plurality of panel portions (200) may be arranged adjacent to the left or right side of the substrate (10).

[0063] Here, the plurality of needle portions (100) include a first probe (101) positioned adjacent to one side area of ​​the first surface (12), a second probe (102) positioned adjacent to the other side area of ​​the first surface (12), and a third probe (103, 104) positioned between the first probe (101) and the second probe (102) in the first direction, and the third probe (103, 104) may include a 3-1 probe (103) positioned adjacent to the first probe (101) and a 3-2 probe (104) positioned adjacent to the second probe (102).

[0064] At this time, one side region of the first surface (12) may be an area adjacent to the left end of the substrate (10) based on Fig. 1, and the other side region of the first surface (12) may be an area adjacent to the right end of the substrate (10) based on Fig. 1. That is, the first probe (101), the second probe (102), the 3-1 probe (103), and the 3-2 probe (104) may be arranged to face different areas of the first surface (12) and may be arranged to be spaced apart from each other in the first direction.

[0065] Here, the first direction may mean a bidirectional direction including both a direction from the first probe (101) toward the second probe (102) and a direction from the second probe (102) toward the first probe (101). Alternatively, it may mean a bidirectional direction including both a direction from the first board (201) toward the second board (202) and a direction from the second board (202) toward the first board (201). In addition, the first direction may be perpendicular to the inspection direction.

[0066] In addition, as described above, the first probe (101), the second probe (102), the third-first probe (103), and the third-second probe (104) may be power supply units that apply voltage.

[0067] In addition, the plurality of panel portions (200) may include a first board (201) positioned adjacent to one side area of ​​the second surface (13), a second board (202) positioned adjacent to the other side area of ​​the second surface (13), and a third board (203) positioned between the first board (201) and the second board (202) in the first direction.

[0068] In addition, as illustrated in FIG. 1, at least one panel portion (200) may overlap at least a portion of at least one needle portion (100) in the second direction, and at least one panel portion (200) may not overlap a plurality of needle portions (100) in the second direction. With reference to FIG. 1, the first board (201) may overlap at least a portion of the first probe (101) in the second direction, the second board (202) may overlap at least a portion of the second probe (102) in the second direction, and the third board (203) may not overlap the needle portion (100) in the third direction. This may be because the patterns of the circuits (11) arranged on the first surface (12) and the second surface (13) are different.

[0069] Here, the second direction may mean both directions including the direction from the first side (12) toward the second side (13) and the direction from the second side (13) toward the first side (12), and the second direction may be perpendicular to the inspection direction and the first direction.

[0070] In addition, the first board (201), the second board (202), and the third board (203) may be a sensing unit, i.e., a sensor, that senses the voltage applied to the circuit (11).

[0071] In addition, in the circuit inspection device according to the embodiment of the present invention, a plurality of needle portions (100) arranged to face the first surface (12) may be in contact with the first surface (12) or the plurality of circuits (11), but a plurality of panel portions (200) arranged to face the second surface (13) may be arranged to be spaced apart from the second surface (13) in the second direction.

[0072] Here, the plurality of needle parts (100) is described as including a first probe (101), a second probe (102), a third-first probe (103), and a third-second probe (104), but one of the plurality of needle parts (100) may be the first probe (101), another of the plurality of needle parts (100) may be the second probe (102), and another of the plurality of needle parts (100) may be the third probe (103, 104). This is only to facilitate a smoother understanding when describing the plurality of needle parts (100), and the needle parts (100) and the first probe (101), the second probe (102), the third-first probe (103), and the third-second probe (104) may not refer to different objects.

[0073] In addition, although the plurality of panel parts (200) is described as including a first board (201), a second board (202), and a third board (203), one of the plurality of panel parts (200) may be the first board (201), another of the plurality of panel parts (200) may be the second board (202), and another of the plurality of panel parts (200) may be the third board (203). This is only to facilitate a smoother understanding when describing the plurality of panel parts (200), and the panel parts (200), the first board (201), the second board (202), and the third board (203) may not refer to different objects.

[0074] Referring to FIG. 2 for a specific explanation of this, as shown in FIG. 2, the first probe (101), the second probe (102), the third-first probe (103), and the third-second probe (104) move in the inspection direction and come into contact with a plurality of circuits (11), and the first board (201), the second board (202), and the third board (203) are arranged to face the second surface (13), so that they can be arranged so as not to be visible when looking at the first surface (12).

[0075] Here, a drive area (16) in which a Drive IC is arranged as shown in FIGS. 1 and 2 can be formed on the second surface (13), and ends of some of the plurality of circuits (11) can be gathered and arranged in the drive area (16).

[0076] However, since voltage is applied through the needle portion (100) on the first side (12) and voltage is sensed through the panel portion (200) on the second side (13), the arrangement of the needle portion (100) and the arrangement of the panel portion (200) may be different from each other in the first direction, and it may be preferable that the needle portion (100) arranged to face the first side (12) be in contact with the circuit (11) end of the first side (12) that overlaps the panel portion (200) in the second direction with the circuit (11) end of the second side (13).

[0077] For example, an end portion on the second surface (13) of the plurality of circuits (11) in contact with the first probe (101) may overlap with the first board (201) or the third board (203) in the second direction, and an end portion on the second surface (13) of the plurality of circuits (11) in contact with the second probe (102) may overlap with the second board (202) or the third board (203) in the second direction.

[0078] That is, the arrangement of the plurality of needle portions (100) may be influenced by the arrangement of the plurality of panel portions (200), and more specifically, the positions of the plurality of needle portions (100) and the plurality of panel portions (200) may be changed depending on the positions of the ends on the first side (12) of the plurality of circuits (11) and the ends on the second side (13) of the plurality of circuits (11).

[0079] Meanwhile, referring to FIG. 3 to explain the plurality of panel parts (200), as shown in FIG. 3, the plurality of panel parts (200), specifically the first board (201), the second board (202), and the third board (203), are arranged spaced apart from each other in the first direction, and can be arranged to face different areas of the second surface (13).

[0080] At this time, the first board (201) is positioned so as to face an area adjacent to one side of the second surface (13), the second board (202) is positioned so as to face an area adjacent to the other side of the second surface (13), and the third board (203) can be positioned between the first board (201) and the second board (202) in the first direction.

[0081] Here, the first board (201) can sense the voltage transmitted from the first probe (101) with reference to FIG. 1, the second board (202) can sense the voltage transmitted from the second probe (102) and the third-second probe (104), and the third board (203) can sense the voltage transmitted from the first probe (101), the second probe (102), the third-first probe (103), and the third-second probe (104). That is, at least one of the plurality of panel portions (200) can receive all of the voltages transmitted from the plurality of needle portions (100) arranged toward the first surface (12), but this is merely an example according to an embodiment of the present invention and may not be limited to what has been mentioned.

[0082] In addition, as described above, the first board (201), the second board (202), and the third board (203) may have different corresponding targets based on the voltages they sense, and accordingly, the first board (201), the second board (202), and the third board (203) may have different lengths in the first direction.

[0083] For example, if the width in the first direction of the first board (201) is defined as the first width (W1), the width in the first direction of the second board (202) is defined as the second width (W2), and the width in the first direction of the third board (203) is defined as the third width (W3), at least one of the first width (W1), the second width (W2), and the third width (W3) may be different from each other.

[0084] This may be because, as described above, the plurality of needle parts (100) corresponding to each of the plurality of panel parts (200) are different from each other based on the voltage sensed by each of them, and this may enable smoother and more precise inspection.

[0085] Meanwhile, based on the above, the movement of the plurality of needle parts (100) according to the embodiment of the present invention will be described. As shown in FIGS. 4 and 5, the plurality of needle parts (100) can be moved toward the inspection direction to form a pair.

[0086] Specifically, referring to FIGS. 1 and 4, the first probe (101) and the third-second probe (104) are moved together toward the inspection direction, and accordingly, the voltage is sensed through the first board (201), the second board (202), and the third board (203), and the determination unit can determine whether there is an abnormality in the plurality of circuits (11) of the first side (12) and the second side (13). Referring to FIGS. 1 and 5, the second probe (102) and the third-second probe (104) are moved together toward the inspection direction, and accordingly, the determination unit can determine whether there is an abnormality in the plurality of circuits (11) of the first side (12) and the second side (13) through the second board (202) and the third board (203).

[0087] In particular, the first probe (101) and the third-second probe (104) are positioned in areas adjacent to opposite ends of the substrate (10) in the first direction, and the second probe (102) and the third-first probe (103) are positioned in areas adjacent to opposite ends of the substrate (10) in the first direction, so that it is possible to more clearly check whether there is an abnormality in the circuit (11).

[0088] For example, as illustrated in FIG. 4, when the first probe (101) and the third-second probe (104) come into contact with multiple circuits (11) and move in the inspection direction, the first probe (101) and the third-second probe (104) apply voltage to the circuits (11) that are in contact, the plurality of panel portions (200) facing the second surface (13) sense the voltage transmitted to the plurality of circuits (11) arranged on the second surface (13), and the judgment portion can determine whether the circuits (11) are abnormal based on the information transmitted from the plurality of panel portions (200).

[0089] As described above, after the first inspection is performed through the first probe (101) and the third-second probe (104), the second probe (102) and the third-first probe (103) are moved along the inspection direction and come into contact with a plurality of circuits (11), and the second probe (102) and the third-first probe (103) apply voltage to the circuits (11) that come into contact, and the plurality of panel portions (200) facing the second surface (13) sense the voltage transmitted to the plurality of circuits (11) arranged on the second surface (13), and the judgment portion can determine whether the circuit (11) is abnormal based on the information transmitted from the plurality of panel portions (200).

[0090] In this way, the plurality of needle parts (100) form at least one pair and move in the inspection direction, and the number of inspections can be performed corresponding to the pairs formed by the plurality of needle parts (100). For example, in the detailed description of the present invention, the inspection can be performed in a first process in which the first probe (101) and the 3-2nd probe (104) are moved, and a second process in which the second probe (102) and the 3-1st probe (103) are moved.

[0091] Here, a more detailed description will be given based on the first surface (12) and the second surface (13). A plurality of circuits (11) are arranged on the first surface (12), and the plurality of circuits (11) are electrically connected to the second surface (13) through via holes (14) formed in the substrate (10), and a coating layer (15) may be formed on some of the plurality of circuits (11). Here, the coating layer (15) may be formed in various positions depending on the properties of the substrate (10) or the product, and may not necessarily be limited to those shown. The coating layer (15) formed on the first surface (12) may also prevent damage that occurs when the plurality of circuits (11) are exposed to the outside.

[0092] As illustrated in FIG. 6, the first probe (101) and the second probe (102) may be positioned in areas adjacent to one end and the other end of the first surface (12), the 3-1 probe (103) may be positioned adjacent to the first probe (101), and the 3-2 probe (104) may be positioned adjacent to the second probe (102). However, the plurality of needle portions (100) may not be positioned in an area where the plurality of circuits (11) are disconnected in the first direction.

[0093] In this way, voltage is applied to the plurality of needle portions (100) that come into contact with the plurality of circuits (11) on the first surface (12), and the voltage can be transmitted to the circuit (11) of the second surface (13) through the via hole (14) of the circuit (11) to which the voltage is applied.

[0094] Accordingly, on the second surface (13), the voltage applied from the first surface (12) can be sensed from the plurality of panel portions (200), as illustrated in FIG. 7. Here, the first board (201) is disposed adjacent to one end of the second surface (13), the second board (202) is disposed adjacent to the other end of the second surface (13), and the third board (203) can be disposed between the first board (201) and the second board (202). In addition, the second surface (13) and the plurality of panel portions (200) are disposed to be spaced apart from each other by a predetermined distance (L), which prevents errors such as overvoltage sensing due to contact and voltage interference between adjacent circuits (11) through the plurality of panel portions (200) during the process of sensing voltage, thereby making it possible to more clearly determine whether the circuit (11) is abnormal.

[0095] For example, when a plurality of panel parts (200) come into contact with a plurality of circuits (11) of a second surface (13) to sense voltage, a voltage is transmitted from a needle part (200) that comes into contact with an adjacent circuit (11), and the sensed voltage value in the circuit (11) required for inspection is lowered. This may cause an error in determining whether there is an abnormality in the circuit (11) even though there is no abnormality in the circuit. In addition, when an overvoltage due to conduction is sensed as the panel part (200) comes into contact with the circuit (11), an error in determining that there is an abnormality in the circuit (11) even though it is a normal circuit may occur.

[0096] That is, in order to prevent the above-described problem while clearly determining whether a circuit (11) is abnormal, it may be preferable that the plurality of needle parts (100) according to the embodiment of the present invention are placed in contact with the plurality of circuits (11) of the first surface (12), while the plurality of panel parts (200) are arranged spaced apart from the plurality of circuits (11) of the second surface (13).

[0097] Meanwhile, since the plurality of needle parts (100) in contact with the plurality of circuits (11) move in the inspection direction and the end of the needle parts (100) wears out, there is a problem that it is difficult to clearly inspect whether the circuits (11) are disconnected by simultaneously contacting a pair of adjacent circuits (11) between the contacts, the needle parts (100) may include, as shown in FIG. 8, a contact part (110) in contact with the circuits (11) of the substrate (10), a driving part (120) that moves the contact part (110) in the inspection direction, and an elastic part (130) that is arranged between the contact part (110) and the driving part (120) to provide elasticity to the contact part (110).

[0098] Here, the contact portion (110) extends with a diameter that becomes narrower from the driving portion (120) toward the circuit (11), and the end diameter of the contact portion (110) that comes into contact with the circuit (11) may have a diameter of 16μ or less in order to prevent an error that occurs when the contact portion (110) and an adjacent circuit (11) come into contact at the same time, but may not necessarily be limited to what has been mentioned. In addition, the contact portion (110) may preferably be formed of a hard material that does not have ductility because if elasticity exists due to the elasticity provided by the elastic portion (130), the contact portion (110) may bounce during the process of moving from the contacted circuit (11) to another circuit (11) in the inspection direction, preventing proper inspection.

[0099] In addition, the driving unit (120) is connected to the contact unit (110) through the elastic unit (130), moves toward the inspection direction, and can also move in the direction from right to left based on FIG. 8.

[0100] Meanwhile, the elastic portion (130) provides elasticity to the contact portion (110) to prevent wear and tear from occurring as the contact portion (110) with rigidity moves in the inspection direction and comes into contact with the plurality of circuits (11), and the contact portion (110) comes into contact with the circuit (11) with rigidity, but can move in the inspection direction with elasticity by the elastic portion (130) and come into contact with the plurality of circuits (11). That is, the contact portion (110) can be prevented from rapid wear and tear of the end by the elastic portion (130).

[0101] Meanwhile, it has been described that the plurality of needle parts (100) are power supply parts and the plurality of panel parts (200) are power receiving parts, but the plurality of needle parts (100) may be power receiving parts and the plurality of panel parts (200) may be power supply parts.

[0102] Specifically, referring to FIG. 9, the view from the first direction will be described. As shown in FIG. 9, the first probe (101) is moved along the inspection direction based on the first probe (101) and the first board (201), the contact portion (110) is brought into contact with the circuit (11), and the first board (201) is arranged to be spaced apart from the substrate (10) in the second direction, so that voltage can be applied simultaneously to a plurality of circuits (11) in the inspection direction.

[0103] In this way, when voltage is applied simultaneously to multiple circuits (11) from the first board (201), and the first probe (101) comes into contact with the circuit (11) and receives the voltage according to the movement of the first probe (101), it is possible to prevent a case where the probe (101) that normally comes into contact with the circuit (11) comes into contact with a pair of circuits (11) or multiple circuits (11) at the same time, and a case where the circuit (11) is judged to be abnormal even though there is no abnormality can be prevented.

[0104] Specifically, when voltage is applied to the first probe (101) and the voltage is received from the first board (201), if the first probe (101) applying the voltage is excessively inclined or bounced by elasticity due to the movement of the driving unit (102), a problem may occur in which voltage is sensed repeatedly from the first board (201) to the multiple circuits (11) by applying voltage to the multiple circuits (11) simultaneously or by applying voltage with a very small time difference.

[0105] However, in the case where the first probe (101) of the circuit inspection device according to another embodiment of the present invention is a receiving part, the applied voltage is transferred only when in contact with the first probe (101), so that even if contact is made with a short time difference, the situation in which the voltage is received can be more clearly determined, and even when in contact with multiple circuits (11), since the voltage is received in the circuit (11) that is physically contacted first, it is possible to more clearly check whether the circuit (11) is abnormal.

[0106] In this way, the needle part (100) may be utilized as a power receiving part instead of a power supply part, and the panel part (200) may be utilized as a power supply part instead of a power receiving part, and the circuit inspection device according to the embodiment of the present invention may minimize errors in the circuit inspection process by having the panel part (200) spaced apart from the substrate (10), and minimize wear of the contact part (110) that comes into contact with the circuit (11) while moving in the inspection direction by arranging the elastic part (130), so that the needle part (100) and the panel part (200) may not be limited to power supply and power receiving and may not be interpreted.

[0107] Meanwhile, in the circuit inspection device according to the embodiment of the present invention, the elastic part (130) continuously applies pressure to the contact part (110) toward the substrate during the process in which the end (111) of the contact part (110) is moved in the inspection direction by the driving part (120), and the contact part (110) can effectively prevent the phenomenon of bouncing off during the process of being separated from the circuit (11) by relying only on the elasticity of the contact part (110) as in the prior art.

[0108] Specifically, as illustrated in FIG. 10, when the contact portion (110) is moved by the driving portion (120) in the inspection direction and comes into contact with the circuit (11) of the substrate (10), the elastic portion (130) provides pressure due to elasticity so that the contact portion (110) can more effectively come into contact with the circuit (11), and the end (111) of the contact portion (110) can effectively come into contact with the circuit (11).

[0109] In this way, when the driving unit (120) is continuously moved in the inspection direction, the contact unit (110) is inserted into the groove (11a) formed between the circuits (11) and may not come into contact with the circuit (11).

[0110] However, in the case where the elastic part (130) does not exist according to the prior art, there may be a problem in that, in the process of moving the contact part (110) from one circuit (11) to an adjacent circuit (11), the contact part (110) bounces due to the elasticity of the contact part (110), skipping the adjacent circuit (11) and coming into contact with another circuit (11).

[0111] At this time, as illustrated in FIG. 11, the circuit inspection device according to the embodiment of the present invention continuously applies pressure toward the substrate (10) in the process of being detached from the circuit (11) because the elastic portion (130) provides pressure due to elasticity to the contact portion (110), and the end (111) of the contact portion (110) is inserted into the groove (11a) and can clearly contact the adjacent circuit (11).

[0112] That is, in the inspection process of multiple circuits (11) that are not defective, there may be a misjudgment in the prior art of determining them as defective due to elasticity, but the circuit inspection device according to the embodiment of the present invention can have the effect of increasing the accuracy of the inspection by having the end (111) of the contact portion (110) clearly and sequentially contact the circuit (11) as described above.

[0113] Meanwhile, in order to specifically explain the inspection process of the circuit inspection device according to the embodiment of the present invention, referring to FIGS. 12 and 13, first, when the circuit (11) is in an open state as shown in FIG. 12, noise may be generated as shown in the graph.

[0114] That is, in order to clearly confirm the entanglement (Open) of such a circuit (11), it is necessary to prevent simultaneous contact with adjacent circuits (11), and in the process of the needle part (100) coming into contact with the circuit (11), it is necessary to come into contact with only one circuit (11) so that the entanglement (Open) state can be clearly distinguished. In the needle part (100) according to the embodiment of the present invention, the diameter of the end (111) of the contact part (110) is relatively small, and a force is applied toward the first surface (12) by the elastic part (130), so that when moving to the adjacent circuit (11) by the driving part (120) in a state of contact with the circuit (11), the phenomenon of the contact part (110) being bounced off due to the bending between the circuits (11) can be prevented.

[0115] As a result, power is supplied only to the part where the contact part (110) makes contact, so interference between adjacent circuits (11) is effectively prevented, and it is easy to visually determine noise in a specific part. In other words, as described above, there may be an advantage of improving accuracy by easily deriving the entanglement (Open) state.

[0116] Here, FIGS. 12(a) to 12(d) present models having different circuit (11) patterns, and although the voltage applied to each model is the same, since they have different circuit (11) patterns, the width of the noise is shown to be different, but by the contact portion (110), the plurality of panel portions (200) and the elastic portion (130) arranged spaced apart from the circuit (11) of the second surface (13), the location of the noise can be effectively determined, and whether it is defective can be more easily distinguished.

[0117] Meanwhile, in the case of a short circuit state of the circuit (11) as shown in Fig. 13, noise as shown in the graph can be confirmed.

[0118] In order to clearly confirm the short of such a circuit (11), it is necessary to prevent simultaneous contact with adjacent circuits (11), and in the process of the needle part (100) coming into contact with the circuit (11), it is necessary to contact only one circuit (11) so that the short state can be clearly distinguished. In the needle part (100) according to the embodiment of the present invention, the diameter of the end (111) of the contact part (110) is relatively small, and a force is applied toward the first surface (12) by the elastic part (130), so that when moving to the adjacent circuit (11) by the driving part (120) in a state of contact with the circuit (11), the phenomenon of the contact part (110) being bounced off due to the bending between the circuits (11) can be prevented.

[0119] As a result, power is supplied only to the part where the contact part (110) makes contact, so interference between adjacent circuits (11) is effectively prevented, and it is easy to visually determine noise in a specific part. In other words, as described above, there may be an advantage of improving accuracy by easily deriving a short state.

[0120] Here, FIGS. 13(a) to 13(d) present models having different circuit (11) patterns, and although the voltage applied to each model is the same, since they have different circuit (11) patterns, the width of the noise is shown to be different, but by the contact portion (110), the plurality of panel portions (200) spaced apart from the circuit (11) of the second surface (13), and the elastic portion (130), the location of the noise can be effectively determined, and whether it is defective can be more easily distinguished.

[0121] To summarize, a circuit inspection device according to an embodiment of the present invention has a plurality of needle parts (100) and a plurality of panel parts (200) arranged to face different surfaces with respect to a substrate (10), but arranged to face surfaces arranged in opposite directions, the needle parts (100) are in contact with a plurality of circuits (11) of a first surface (12), the panel parts (200) are arranged to be spaced apart from a plurality of circuits (11) of a second surface (13), and at least one of the plurality of needle parts (100) is arranged to face an area adjacent to an end of the first surface (12), and at least one of the plurality of panel parts (200) is arranged to face an area adjacent to an end of the second surface (13).

[0122] In addition, the needle portion (100) can clearly contact the circuit (11) of the first surface (12) through the contact portion (110), the driving portion (120) and the elastic portion (130), and it is possible to clearly determine whether the circuit (11) is abnormal through the plurality of needle portions (100), the plurality of panel portions (200) and the elastic portion (130) described above.

[0123] Meanwhile, the present invention has been described above based on the application to a substrate (10) in which a circuit (11) is formed on each of the first surface (12) and the second surface (13), for example, a 2 Metal COF (Chip On Film). However, referring to FIGS. 14 and 15, a circuit inspection device according to an embodiment of the present invention will be described based on the application to a substrate (10) in which a circuit (11) is formed only on the first surface (12), for example, a 1 Metal COF (Chip On Film).

[0124] First, as shown in FIG. 14, when applied to a 1 Metal COF (Chip On Film) in which a circuit (11) is arranged on the first surface (12) of a substrate (10), no circuit (11) is arranged on the second surface (13), and the circuit (11) and coating layer (15) are arranged only on the first surface (12), it has a configuration similar to that of a circuit inspection device according to an embodiment of the present invention, but may further include a fourth board (204) which is an auxiliary sensor that senses the voltage applied to the circuit (11).

[0125] Specifically, since the circuit (11) is formed only on the first side (12), even if the voltage is sensed indirectly through the first board (201), the second board (202), and the third board (203), the sensed voltage value is too low to determine whether it is normal, so a fourth board (204) may be further placed between the second board (202) and the third board (203). Here, the fourth board (204) may be operated when the voltage value transmitted to the second board (202) and the third board (203), i.e., the sensed voltage value, is too low to determine whether it is abnormal.

[0126] For example, in the case where multiple circuits (11) are formed only on the first surface (12), the first board (201), the second board (202), and the third board (203) are arranged to face the second surface (13) where multiple circuits (11) are not formed, and since the flow of current on the first surface (12) is indirectly sensed, a relatively low voltage value can be sensed.

[0127] In order to clarify whether the low voltage value is due to the arrangement between the plurality of needle portions (100) and the plurality of panel portions (200) facing the first side (12) and the second side (13), respectively, the fourth board (204) can be arranged between the second board (202) and the third board (203), and the fourth board (204) can sense the voltage with higher sensitivity than the first board (201), the second board (202) and the third board (203).

[0128] To explain this generally, in a 1 Metal COF (Chip On Film) in which multiple circuits (11) are formed only on the first surface (12), as described above, it is possible to clearly determine whether or not multiple circuits (11) are abnormal with high sensitivity by utilizing the fourth board (204).

[0129] Although this is described as being limited to a circuit inspection device according to a modified example of the present invention, in the case of a 2 Metal COF (Chip On Film) in which a plurality of circuits (11) are formed on both the first surface (12) and the second surface (13), and the circuits (11) of the first surface (12) and the circuits (11) of the second surface (13) are electrically connected to each other through via holes (14) of the substrate (10), the plurality of panel portions (200) directly view the ends of the plurality of circuits (11), thereby ensuring high sensitivity and making it easy to determine whether there is an abnormality. However, if a specific determination of whether there is an abnormality is required, the fourth board (204) may also be utilized in the 2 Metal COF, and it may not necessarily be limited to what has been mentioned.

[0130] Meanwhile, in a substrate (10) in which a circuit (11) is arranged on the first surface (12) and the second surface (13) as illustrated in FIG. 15, a drive area (16) is formed on the second surface (13), but in a case in which a circuit (11) is arranged only on the first surface (12), a drive area (16) can be formed on the first surface (12).

[0131] At this time, the first probe (101) and the second probe (102) may be respectively positioned at opposite ends of the first surface (12) to face different areas in the second direction, and the third-first probe (103) and the third-second probe (104) may be positioned to face an area relatively adjacent to the drive area (16). This may be to check for an abnormality in the circuit (11) positioned in the drive area (16).

[0132] To explain this in more detail, as illustrated in FIG. 15, the 3-1 probe (103) and the 3-2 probe (104) are arranged to face different areas in the first direction, but the areas they each face are arranged in an area adjacent to the drive area (16) in the first direction, which can be understood as an area relatively closer to the first probe (101) than the second probe (102) based on the 3-1 probe (103), and an area relatively closer to the second probe (102) than the first probe (101) based on the 3-2 probe (104). In addition, as described above, the 4th board (204) can be arranged between the 2nd board (203) and the 3rd board (202) in the first direction.

[0133] Meanwhile, when moving multiple needle sections (100) to check for abnormalities in the circuit (11), as described above, the first probe (101) may be moved in the inspection direction together with the 3-2 probe (104), and the second probe (102) may be moved in the inspection direction together with the 3-1 probe (103). This may be because some circuits (11) are arranged to be spaced apart in the first direction based on the drive area (16) by the drive area (16). Through this, it is possible to more clearly check for abnormalities in the circuit (11).

[0134] Meanwhile, referring to FIG. 16 to explain a circuit inspection device according to another embodiment of the present invention, as shown in FIG. 16, the circuit inspection device according to another embodiment of the present invention receives voltage from a needle portion (100) and applies voltage from a panel portion (200), the needle portion (110) includes the contact portion (1110), the driving portion (1120), and the elastic portion (1130) described above, and the diameter of the end portion (1111) of the needle portion (100) facing the substrate (10) may be 16 μm or less, and the panel portion (200) may be arranged to be spaced apart from the substrate (10) by a predetermined distance (L).

[0135] In addition, the substrate (10) may take the form in which grooves (11a) and circuits (11) are sequentially arranged alternately, and the end (1111) of the contact portion (1110) sequentially contacts the inside of the circuit (11) or the groove (11a) and is moved from the right to the left in the inspection direction, based on FIG. 16, by the driving portion (1120), and the panel portion (200) can apply voltage to multiple circuits (11) simultaneously.

[0136] Here, the needle portion (100) according to another embodiment of the present invention further includes a conductive film portion (1140), and the contact portion (1110) is made of a non-conductive material and can receive a voltage applied from the panel portion (200) by the film portion (1140).

[0137] In addition, it further includes a detection unit (1150) that detects the voltage received from the film unit (1140), and the detection unit (1150) can be provided at one end and the other end of the film unit (1140).

[0138] Here, the driving unit (1120) may further include a separate fixing unit for fixing the conductive film unit (1140).

[0139] At this time, a separate space may be provided on the inside of the sensing unit (1150) into which one end and the other end of the conductive film unit (1120) are inserted, but this is only one example and may not necessarily be limited thereto.

[0140] As a result, the circuit inspection device according to the embodiment of the present invention has the end (1111) directly in contact with the circuit (11) or the substrate (10), but the circuit inspection device according to another embodiment of the present invention can have the end (1111) and the circuit (11) or the substrate (10) in contact with each other with the film portion (1140) therebetween.

[0141] Here, the film portion (1140) is arranged to wrap the end portion (1111) so as to prevent the end portion (1111) from directly contacting the circuit (11) and the substrate (10), so that not only can inspection be performed effectively, but also the end portion (1111) of the contact portion (1110) can be effectively prevented from being worn.

[0142] In addition, as illustrated in FIG. 16, when the contact portion (1110) comes into contact with the circuit (11) while being moved along the inspection direction on the substrate (10) by the driving portion (1120), the film portion (1140) comes into contact with the circuit (11) by the end portion (1111) and the elastic portion (1130), and the voltage applied from the panel portion (200) can be received through the film portion (1140).

[0143] Meanwhile, when the film portion (1140) is inserted into the groove (11a) and comes into contact with the substrate (10), the film portion (1140) is made relatively soft, so there is a possibility that it will come into contact with the adjacent circuit (11) as it unfolds during the moving process, and in this case, when it comes into contact with the adjacent circuit (11) at the same time, there is a possibility that it may be mistaken for the above-described entanglement (Open), so that the contact portion (1110) is arranged on the inside of the film portion (1140) so that the end portion (1111) is pressed by the elastic portion (1130), and the film portion (1140) can be fixed tautly.

[0144] That is, the film portion (1140) is pressed toward the substrate (10) by the elasticity of the elastic portion (1130) acting on the contact portion (1110), and a part of the film portion (1110) is pressed toward the substrate (10), and the film portion (1140) is fixed by the sensing portion (1150), so that the problem of simultaneous contact with an adjacent circuit (11) is prevented, and an error of misjudging that it is in contact with the circuit (11) even though it is inserted into the groove (11a) can be prevented.

[0145] To summarize the above, in the circuit inspection device according to the embodiment of the present invention, the contact portion (110) is made of a rigid material, and the elastic portion (130) adds a moment of inertia, or in other words, an elastic function, so as to effectively prevent errors and wear of the end portion (111).

[0146] In addition, in a circuit inspection device according to another embodiment of the present invention, the conductive film portion (1140) is utilized to prevent the end (1140) from directly contacting the circuit (11) and the substrate (10), thereby preventing wear of the end (1111). In order to solve the problem of the circuit (11) being integrated due to advanced devices in which the end (111) according to the embodiment of the present invention described above and the end (1111) according to another embodiment of the present invention are excessively worn and various problems such as simultaneous contact or separation occur, the diameter of the end (111, 1111) of the contact portion (110, 1110) can be set to 16 μm or less.

[0147] Having described preferred embodiments of the invention, it will be apparent to those skilled in the art that the invention may be embodied in other specific forms without departing from the spirit or scope thereof, in addition to the embodiments described above.

[0148] Therefore, the above-described embodiments should be considered as illustrative rather than restrictive, and accordingly, the present invention is not limited to the above description but may be modified within the scope of the appended claims and their equivalents.

Claims

1. A plurality of needle portions arranged toward a first surface of a substrate including a plurality of circuits and in contact with the plurality of circuits; A plurality of panel portions spaced apart from the second surface of the substrate in the opposite direction to the first surface; and Either the needle portion or the panel portion includes a judgment portion that applies voltage to the circuit and determines whether the circuit is abnormal through the voltage applied to the circuit, The above plurality of needle parts are moved in the inspection direction in different areas of the first surface and come into contact with the circuit, The above plurality of panel sections are arranged to face different areas of the second surface, At least one of the plurality of needle portions is disposed in an area adjacent to an end of the first surface, A circuit inspection device wherein at least one of the plurality of panel sections is disposed in an area adjacent to an end of the second surface.

2. In paragraph 1, The above plurality of panel parts are formed long along the inspection direction, At least one of the plurality of panel portions has a different width in the first direction, A circuit inspection device wherein the first direction is perpendicular to the inspection direction and the second direction is from the first surface to the second surface or from the second surface to the first surface.

3. In paragraph 1, The above plurality of needle parts, A first probe disposed in an area adjacent to one end of the first surface; A second probe disposed in an area adjacent to the other end of the first surface; and A circuit inspection device comprising a third probe positioned between the first probe and the second probe in the first direction.

4. In paragraph 3, A circuit inspection device including a 3-1 probe positioned adjacent to the first probe in the first direction and a 3-2 probe positioned adjacent to the second probe in the first direction.

5. In paragraph 4, The first probe and the third-second probe are moved together in the inspection direction, A circuit inspection device in which the second probe and the third-first probe move together in the inspection direction.

6. In paragraph 2, The above plurality of panel parts, A first board disposed in an area adjacent to one end of the second surface; A second board disposed in an area adjacent to the other end of the second surface; and A circuit inspection device including a third board disposed between the first board and the second board in the first direction.

7. In paragraph 6, The above plurality of panel parts, A circuit inspection device further comprising a fourth board disposed between the first board and the third board or between the second board and the third board in the first direction.

8. In paragraph 6, A circuit inspection device in which at least one of the plurality of needle portions overlaps at least a portion of one of the plurality of panel portions in the second direction.

9. In paragraph 2, A circuit inspection device in which at least one of the plurality of panel sections does not overlap with the plurality of needle sections in the second direction.

10. In paragraph 1, The above needle part, A contact portion in contact with the above circuit; A driving unit that moves the contact portion in the inspection direction; and A circuit inspection device including an elastic member disposed between the contact member and the driving member.

11. In paragraph 10, A circuit pattern inspection device having a diameter of an end of the contact portion in a direction facing the substrate of the contact portion of 16 μm or less.

12. In paragraph 10, The elastic member provides elasticity to the contact member from the driving member toward the substrate, A circuit pattern inspection device in which the contact portion sequentially comes into contact with the circuit or the substrate during the process of being moved by the driving portion.

13. In any one of paragraphs 1 to 12, The above plurality of needle parts move in the inspection direction on the first surface and apply voltage to the circuit, A circuit inspection device that senses the voltage applied to the circuit on the second surface of the plurality of panel sections.

14. In any one of paragraphs 1 to 12, The plurality of panel portions apply voltage to the plurality of circuits arranged on the second surface in a direction from the second surface toward the first surface, A circuit inspection device in which the plurality of needle parts are moved in the inspection direction on the first surface and sense the voltage of the circuit that is in contact.

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