Method for operating a pneumatic system and pneumatic system for industrial automation

Abstract

The invention relates to a method for operating a pneumatic system (11) for industrial automation, the pneumatic system comprising at least one pneumatic actuator (14; 14a, 14b) and a regulating device (13) for regulating a movement of an actuator member (27; 27a, 27b) of the at least one pneumatic actuator (14; 14a, 14b) from a first end position (30) to a second end position (31) and / or from the second end position (31) to the first end position (30), the actuator member (27; 27a, 27b) being coupled in terms of movement to an end member (33) which can be driven with a stroke movement comprising a vertical movement stroke (hz) and a horizontal movement stroke (hx), comprising the following steps: - determining a position of the end member (33) by means of a position measuring device (40), the position of the end member (33) during the vertical movement stroke (hz) being determined by a first position measuring unit (41a) and the position of the end member (33) during the horizontal movement stroke (hx) being determined by a second position measuring unit (41b), - providing the determined position in the form of an actual-position signal to the regulating device (13), - regulating the position on the basis of the actual-position signal recorded by the position measuring device (40).

Description

[0001] April 16, 2025 Festo SE & Co. KG, Ruiter Straße 82, 73734 Esslingen Method for operating a pneumatic system and pneumatic system for industrial automation The invention relates to a method for operating a pneumatic system for industrial automation and a pneumatic system for industrial automation. Methods for operating a pneumatic system for industrial automation as well as pneumatic systems for industrial automation are used in many areas. One example is the wafer manufacturing sector, where a large number of pneumatic actuators are typically used to move different types of actuators, such as so-called slide valves, which serve to open or close a passage (gate) to a processing chamber for wafer processing.Overall, wafer manufacturing places high demands on the operation of pneumatic systems, including, for example, the minimization of vibrations during the operation of the slide valves. Furthermore, the sensors for operating the pneumatic system should be simple and reliable. However, such pneumatic systems are not only suitable for wafer production but also for industrial automation in general. Depending on the application, different requirements arise for the pneumatic system (P 35468 / PCT … April 16, 2025). The object of the invention is to provide a method for operating a pneumatic system and a pneumatic system that is improved compared to conventional methods or systems, in order to meet the requirements of semiconductor, and especially wafer, production.The foregoing problem is solved by a method for operating a pneumatic system for industrial automation with the features of independent claim 1 and by a pneumatic system for industrial automation with the features of independent claim 9. Further developments of the invention are described in the dependent claims.In the method for operating a pneumatic system for industrial automation, at least one pneumatic actuator and a control device for controlling a movement of an actuator element of the at least one pneumatic actuator from a first end position to a second end position and / or from the second end position to the first end position are provided, wherein the actuator element is motion-coupled with an end element that can be driven by a stroke movement comprising a vertical stroke and a horizontal stroke, wherein the method comprises the following steps: - Determining a position of the end element by means of a position measuring device, wherein the position of the end element during the vertical stroke is determined by means of a first position measuring unit and the position of the end element during the horizontal stroke is determined by means of a second position measuring unit.

[0002] P 35468 / PCT … April 16, 2025 - Providing the determined position as an actual position signal to the control device, - Performing position control based on the actual position signal acquired by the position measuring device nals.The pneumatic system according to the invention, in particular for carrying out the method with the features of claim 1, comprises at least one pneumatic actuator, with an actuator element, a control device for controlling a movement of the actuator element from a first end position to a second end position and / or from the second end position to the first end position, wherein the actuator element is coupled to an end element which can be driven by a stroke movement comprising a vertical stroke and a horizontal stroke, and with a position measuring device for determining the position of the end element, wherein the position measuring device has a first position measuring unit for determining the position of the end element during the vertical stroke and a second position measuring unit for determining the position of the end element during the horizontal stroke, and wherein the control device is configured such thatthat actual positions can be transmitted to the position measuring device and position control can be carried out based on the actual position signal acquired by the position measuring device. A key aspect of the invention is that the position measurement or displacement measurement is divided into a vertical and a horizontal displacement measurement. This enables position control for both the vertical and the horizontal part of the stroke movement.

[0003] P 35468 / PCT … April 16, 2025 In a particularly preferred manner, the end element first performs a vertical stroke and then a horizontal stroke. The horizontal stroke is particularly preferably triggered when the end element has reached a vertical end position during the vertical stroke. Alternatively, it is of course conceivable that the end element first performs a horizontal stroke and then a vertical stroke. In a particularly preferred manner, the position of a first actuator element of a first pneumatic actuator is measured by means of the first position measuring unit to determine the position of the end element during the vertical stroke.Advantageously, the end element is motion-coupled with the actuator element of the first pneumatic actuator, so that the position of the end element can be determined by measuring the actual position of the actuator element, since the distance between the actuator element and the end element is known. Advantageously, the position of the first actuator element is continuously measured over its travel path. In a further development of the invention, the position of the end element during the horizontal stroke is determined by measuring the position of a second actuator element of a second pneumatic actuator responsible for the horizontal stroke, which is motion-coupled with the end element. Here, too, the position of the end element can be determined by measuring the actual position of the second actuator element of the second pneumatic actuator.

[0004] P 35468 / PCT … April 16, 2025 Alternatively, it is conceivable that, to determine the position of the end element during the horizontal stroke, the position of a cam follower or a guide cam of a cam guide responsible for the horizontal stroke, which is motion-coupled with the end element and arranged in the first pneumatic actuator, is measured using the second position measuring unit. Advantageously, the cam follower is located on the pneumatic actuator and the guide cam on a peripheral component. Advantageously, continuous position measurement is carried out over the travel path of the cam follower or the guide cam. In a further development of the invention, the actual pressure in a pressure chamber of the first pneumatic actuator and / or in a pressure chamber of the second pneumatic actuator is measured and provided to the control device as an actual pressure signal.In a further development of the invention, the pneumatic system comprises a slide valve, wherein the slide valve has an end element in the form of a valve element that is motion-coupled with the first actuator element of the pneumatic actuator and is moved along with the movement of the actuator element, and wherein the slide valve has an opening for the passage of a wafer, which can be opened or closed by the valve element. In the case of the configuration of the end element as a valve element, it is therefore possible for the valve element to first be moved towards the opening with a vertical stroke and then subsequently moved into the closed position with a horizontal stroke, in which the valve element is fluid-tight against the opening. Advantageously, two pneumatic actuators are provided, one of which is equipped with a replaceable...

[0005] P 35468 / PCT … April 16, 2025 A first pneumatic actuator equipped with a second actuator element is responsible for the vertical stroke of the end element, and a second pneumatic actuator equipped with a second actuator element is responsible for the horizontal stroke of the end element, which is coupled to both the first and second actuator elements. It is possible that the second actuator is located on the first actuator element and moves with it during the vertical stroke, with the end element being connected to the second actuator element of the second actuator and movable relative to the first actuator element during the horizontal stroke. Alternatively, it is possible that the second actuator is assigned to the first actuator and remains stationary during the vertical stroke, with the second actuator element of the second actuator initiating a positioning movement of the first actuator that can be converted into the horizontal stroke of the end element.Advantageously, the positioning movement is a pivoting movement of the first actuator about a pivot axis. The pivot axis can thus divide the first actuator into a first lever arm and a second lever arm, wherein the first lever arm advantageously extends from the interface of the second actuator to the pivot axis and the second lever arm from the pivot axis to the end member. In a further development of the invention, a single pneumatic actuator is provided, namely the first pneumatic actuator, to which a cam guide is assigned, which has a cam follower and a guide cam associated with the cam follower, which are movable relative to each other and thereby produce the horizontal stroke. Advantageously.

[0006] P 35468 / PCT … April 16, 2025 Typically, the cam follower is located on the pneumatic actuator. Preferred embodiments of the invention are shown in the accompanying drawing and are explained in more detail below.The drawings show: Figure 1 a schematic representation of a first embodiment of the pneumatic system according to the invention with which the method according to the invention can be carried out, Figure 2 a block diagram of the method according to the invention for operating a pneumatic system for industrial automation, Figure 3 a schematic representation of a wafer processing plant which has several pneumatic systems according to Figure 1, Figure 4 a schematic representation of part of the pneumatic system of Figure 1, wherein a second embodiment of the pneumatic system is shown, with an embodiment of a slide valve which is in a deactivated position (left), in a partially activated position (center) and in an activated position (right), Figure 5 a schematic representation of part of the pneumatic system of Figure 1, wherein a third embodiment of the pneumatic system according to the invention is shown.

[0007] P 35468 / PCT … April 16, 2025 The pneumatic system is shown in Figure 1, with a slide valve that is in a deactivated position (left), a partially activated position (center), and an activated position (right). Figure 6 shows a schematic representation of part of the pneumatic system of Figure 1, with a fourth embodiment of the pneumatic system being shown, with a slide valve that is in a deactivated position (left), a partially deactivated position (center), and an activated position (right). Figures 1 and 5 show a first embodiment of the pneumatic system 11 according to the invention, which is shown and described here as an example for use in a wafer processing system 12. Of course, it is also possible to use the pneumatic system 11 in other areas of industrial automation. The use in a wafer processing plant 12 is therefore purely exemplary.As shown particularly in Figure 1, the pneumatic system has a control unit 13 to which at least one pneumatic actuator 14 is assigned. The structure of such a wafer processing system 12 is shown in Figure 3 purely schematically and by way of example. The wafer processing system 12 has a distribution room 15 and several processing rooms 16 grouped around the distribution room 15, in each of which different processing operations take place on the wafers to be processed there.

[0008] P 35468 / PCT … April 16, 2025 In the distribution room, shown in plan view in Figure 3 and having a horizontal plane formed by the x-axis direction 17 and the y-axis direction 18 of a Cartesian coordinate system spanned by three coordinates x, y, z, there is usually a handling unit, for example in the form of a robot, which places wafers to be processed into the adjacent associated processing rooms 16 and processes them, then removes the processed wafers from the processing rooms 16. Between the distribution room and the adjacent processing rooms are passageways, each of which is equipped with slide valves 20, as shown, for example, in Figures 1, 4 to 6.As shown particularly in Figure 1, the processing chamber 16 has an exemplary rectangular shape and extends in a vertical direction, which can also be designated as the z-axis direction 19, in a transverse direction perpendicular to the vertical direction, which can also be designated as the x-axis direction 17, and in a horizontal direction, which can also be designated as the y-axis direction 18. The processing chamber 16 has a processing chamber opening 21, which can be closed by means of the slide valve 20 in order to seal the processing chamber from the environment. The pressure in the processing chamber 16 is generally below atmospheric pressure. As further shown in Figure 1, the slide valve 20 has a valve housing 22 in which at least one opening 23 is formed for the passage of the wafer. If necessary, the valve housing 22 can also be combined with the housing of the machining chamber.

[0009] P 35468 / PCT … April 16, 2025 16 be integrally connected, so that the machining chamber opening 21 corresponds to the opening 23. In the example shown, however, the valve housing 22 is an add-on part, and the opening 23 of the valve housing 22 of the slide valve is aligned with the machining chamber opening 21. Optionally, the valve housing 22 may have a further opening 24, in particular associated with the distributor chamber 15, which is aligned with the first opening 23. An essential element of the slide valve 20 is at least one pneumatic actuator 14, which could therefore also be referred to as a valve drive. The at least one pneumatic actuator 14 is shown in all the embodiments described below by way of example in the form of a double-acting pneumatic cylinder.As shown in particular by way of example in the first embodiment of figures 1 and 5, two pneumatic actuators 14a, 14b are provided, of which the first pneumatic actuator 14a is for a vertical stroke h. z (Fig. 1) and the second pneumatic actuator 14b is responsible for the horizontal stroke hx (Fig. 2). Since the vertical stroke h is usually z is significantly larger than the horizontal stroke h zThe dimensions of the two actuators 14a, 14b also differ. In the example shown, the first actuator 14a is therefore significantly larger and thus more powerful than the second actuator 14b. However, the basic structure of the two actuators 14a, 14b is essentially identical. P 35468 / PCT … April 16, 2025 The two actuators 14a, 14b each have a cylindrical housing 26a, 26b in which an actuator element 27a, 27b in the form of a piston is movably guided. The respective actuator element 27a, 27b divides the interior 28 of the cylindrical housing 26a, 26b into two pressure chambers 29a, 29b, which can alternatively also be referred to as working chambers. Pressure fluid in the form of compressed air can be selectively supplied to or discharged from the pressure chambers 29a, 29b in order to move the actuator element 27a, 27b from a first end position 30 to a second end position 31 and vice versa from the second end position 31 to the first end position 30.The actuator elements 27a, 27b, which are designed as pistons according to the illustrated embodiment, are each connected to a piston rod 32a, 32b extending from the cylinder housing 26a, 26b. An end element 33 in the form of a valve element is attached to the free end of the first piston rod 32a, which is connected to the first actuator element 27a of the first actuator 14a. In the example shown, the valve element is designed in the form of a slide element. The end element 33, i.e., the valve element in the form of the slide element, is assigned in the example shown to the first opening 23, which can be selectively opened or closed by the end element 33, whereby the opening and closing movement of the end element 33 is effected by the interaction of the two actuators 14a, 14b as a result of pressurizing one or the other pressure chamber 28a, 29b.To ensure the tightest possible closure of the first opening 23, the valve element has a circumferential, in particular rubber-elastic, sealing element 34 on its side facing the opening 23.P 35468 / PCT … April 16, 2025 As already mentioned, according to the first embodiment, which is shown in Figures 1 and 5, two pneumatic actuators 14a, 14b are provided. The end member 33 is attached to the free end of the first piston rod 32a, which is connected to the first actuator member 27a of the first pneumatic actuator 14a, while the second piston rod 32b of the second pneumatic actuator 14b has no end member. As also already mentioned, the first actuator 14a is for the vertical stroke h. zThe first actuator element 27a of the first actuator 14a is movable between the first end position 30, which in the example shown represents a lower end position, and the second end position 31 in the cylinder housing 26a. This allows the coupled piston rod 32a, and thus also the end element 33, to be driven to a vertical stroke hz during the movement between the two end positions 30 and 31. The end element 33, in the form of the valve element, is moved between a ready position 35 with the piston rod retracted and an intermediate position 36 with the piston rod extended. In the intermediate position 36, the valve element is already positioned in the area of ​​the opening 23 by the vertical stroke hz, but is not yet in contact with the opening 23, so the opening 23 is not yet closed. The end member 33, i.e., the valve member designed as a sliding element, is moved by means of the horizontal stroke h generated by the second actuator 14b. xfrom the intermediate position 36 to a closed position 37. As shown by way of example in Figure 1 and also in Figure 5, the second actuator 14b is arranged next to the first actuator 14, and is fixed in position. The stroke movement of the second actuator element 27b of the second actuator 14 takes place in the x-axis direction 17, whereby the coupled piston rod 32b also extends out of the cylinder housing 26b along the x-axis direction 17. The second piston rod 32b faces the first cylinder housing 26a of the first pneumatic actuator 14a. As further shown in Figure 1 and also in Figure 5, the first actuator 14a is pivotably mounted about a pivot axis 38. In the example shown, the first cylinder housing 26a of the first pneumatic actuator 14a is pivotably mounted about the pivot axis 38.The second actuator element 27a of the second actuator is also movable between a first end position (not shown) and a second end position (not shown) in the associated cylinder housing 26b along the x-axis direction 17. In the example shown, the movement occurs from right to left, meaning the first end position is on the right and the second end position is on the left. As already mentioned, the second piston rod 32b is extended and comes into contact with the outer surface of the first cylinder housing 26a, causing it to pivot about the pivot axis 38, in the example shown in a clockwise direction. This pivot movement causes the end element 33, or valve element, to move from the intermediate position 36 to the closed position 37. The pivot axis 38 divides the first actuator 14a into a first lever arm 39a and a second lever arm 39b.The first lever arm 39a extends from the contact point between the second piston rod 32b and the first cylinder housing 26a to the pivot axis 38, and the second lever arm extends from the pivot axis 38 to the extended piston rod and the end member 33 attached there. Due to the lever ratio, a relatively small second pneumatic actuator 14b, which operates with low pressure fluid consumption, can be used here. P 35468 / PCT … April 16, 2025. The pneumatic system 11 also has a position measuring device 40 for measuring the position of the actuator member 27 during its movement, i.e., for example, the position of the piston in the cylinder housing 26. The position measuring device 40 has a first position measuring unit 41a for determining the position of the end member 33 during the vertical stroke h. z and a second position measuring unit 41b for determining the position of the end member 33 during the horizontal stroke h xAs shown particularly in Figure 1, the control device 13 is designed such that actual positions can be transmitted from the position measuring device 40, i.e., from the position measuring units 41a, 41b, and position control based on the actual position signal acquired by the position measuring device 40 can be carried out. As further shown in Figure 1 and also in Figure 5, the position of the end member 33 is determined during the vertical stroke h. z The position of the first actuator element 27a of the first pneumatic actuator 14 was measured using the first position measuring unit 41a, and the position of the end element was determined during the horizontal stroke h. xThe position of the second actuator element 27b of the second pneumatic actuator 14b, which is motion-coupled to the end element 33, is measured by means of the second position measuring unit 41b. The motion coupling of the second actuator element 27b with the end element 33, i.e., the valve element in the form of the slide element, is achieved via the previously described contact between the first cylinder housing 26a and the second actuator element 27b. Advantageously, the position measuring units are designed as continuous position measuring units 41a, 41b. In the specific example case, the position of the first actuator element during the vertical stroke h is determined. zContinuous position determination is possible between the two end positions 30 and 31. The same applies to the second actuator 14b. Here, position determination is possible over the entire travel distance of the horizontal stroke hx between the two end positions of the second actuator element 27b. Alternatively, it would be conceivable, for example, instead of determining the position of the first actuator element over the entire travel distance, to only provide position determinations in the area of ​​the two end positions, with no position determination taking place between the two end positions. Since the travel distance of the second actuator element is very small anyway, this alternative is not an option for the second pneumatic actuator.The pneumatic system 11 further comprises a pressure measuring device 42 for measuring the actual pressure in at least one pressure chamber 29a, 29b of the at least one pneumatic actuator 14a, 14b and transmitting the actual pressure in the form of an actual pressure signal to the control device 13. In the example shown, the first actuator 14a is assigned a pressure measuring device 42 with two pressure measuring units 43a, 43b, which are preferably designed as pressure sensors. A pressure measuring device can also be assigned to the second actuator 14b, although this is not shown in the drawings. ist.It is possible that the pressure sensors are each assigned to pressure chambers 29a and 29b, for example, installed in the respective pressure chambers 29a and 29b. However, it is preferred that the pressure measuring device 42 is on board a control valve assembly (not shown), which in turn comprises several control valves for the fluidic actuation of the associated pneumatic actuator 14a and 14b. Advantageously, the control valves are each designed as proportional valves that exhibit the required control accuracy. Piezoelectric valves, in particular, are especially suitable as proportional valves. As a rule, at least one piezoelectric element is used as the valve element.The control valve assembly is particularly preferably designed as a valve manifold or valve battery, with a one-piece or multi-piece base plate that acts as a fluid distributor and has a plurality of mounting positions on its upper side for control valves, particularly disc-shaped ones, or other functional units, for example, safety modules, silencers, or the like. The control valve assembly, particularly in the form of the valve manifold or valve battery, can include a part of the control device 13 in the form of a pressure regulator 13b. The pressure regulator 13b can, for example, have several pressure sensors arranged in associated channels, for example, on a printed circuit board. One of the main tasks of the control device 13, whose control scheme is shown by way of example in Figure 12, is to prevent a hard stop when the valve element moves into the closed position 38.This prevents vibrations from occurring when moving into the closed position, as well as when moving into the intermediate position 36, which could adversely affect wafer production, for example by stirring up particles and getting onto the wafer surface. The control device 13 can comprise a position control device 13a and a pressure control device 13b. P 35468 / PCT … April 16, 2025. The control valve assembly, in particular a valve manifold or valve bank, can have a common controller for the position control device and the pressure control device. However, the controller can also be implemented separately from the control valve assembly and be connected to the control valve assembly via a signal interface.The communication system underlying the signal connection can preferably be a communication system from the group OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, or IO Link, whereby a power supply can also be provided via the signal connection. The method for operating the pneumatic system according to the first embodiment could proceed as follows: First, the first actuator 14a, i.e., the double-acting pneumatic cylinder, is in its deactivated state. The end element or valve element is in the ready position 35, that is, the opening 23 into the processing chamber 16 is open. The first actuator element 27a, i.e., the piston, is in its first end position 30, which in the example shown is the lower end position 30.After loading the processing chamber 16, it is necessary to seal the opening 23 fluid-tight with the valve element. Advantageously, a trajectory or path curve is specified for the control device 13, or the control device 13 is configured based on position reference values ​​P 35468 / PCT … April 16, 2025 (X. Ref(Figure 2) calculates a trajectory that specifies how the first actuator element 27a should move between the first end position 30 and the second end position 31. The specified target positions of the actuator element 27a are converted into pressure signals, and the two pressure chambers 29a and 29b are pressurized accordingly. Naturally, for the movement from the first end position 30 to the second end position 31, a higher pressure must prevail in the first pressure chamber 29a than in the second pressure chamber 29b. After the first actuator element starts moving, its position is continuously measured over the entire travel path, which is the vertical stroke for the end element or valve element, by the first position measuring unit 41a. Actual position values ​​are determined and transmitted to the control unit 13 in the form of actual position signals.Simultaneously, a subordinate pressure control takes place; that is, the actual pressures in pressure chambers 29a and 29b are measured and transmitted to the control unit 13 in the form of actual pressure signals. If the actual position deviates from the target position, adjustments are made to minimize the positional deviations. This means that the pressure in pressure chambers 29a and 29b is changed. At the same time, the subordinate pressure control also determines the deviation of the actual pressure from the target pressure and compensates accordingly. In the example shown, the comparison of the actual position with the target position takes place continuously during the vertical stroke h. z , where continuous measurements are taken here (P 35468 / PCT … April 16, 2025) and the actual-target comparison is performed at very short intervals. Position control during the vertical movement stroke h zThis ensures that the first actuator element 27a moves out of the first end position 30 and moves towards the second end position 31 based on the predefined trajectory. It is advantageous to move the actuator element 27a relatively quickly towards the second end position 31, but must decelerate in good time before reaching the second end position to prevent a hard stop. In the example shown, the movement of the first actuator element into the second end position 31 corresponds to the positioning of the end element 33 into the intermediate position 37. Once the second end position 31 is reached, i.e., the intermediate position 36 of the end element is approached, the horizontal stroke is then initiated on the end element 33 in the form of the valve element, which ensures that the end element 33 is moved from the intermediate position 36 to the closed position 37.For this purpose, the second actuator 14b is activated, so that the second actuator element moves from its first end position 30 to the left into its second end position 31. In doing so, the second piston rod 32b is extended and comes into contact with the first cylinder housing 26a, which is thereby caused to pivot about the pivot axis 38 in a clockwise direction. Here, too, position control can be achieved via the travel distance or the horizontal stroke h. xThis is achieved by measuring the actual positions of the second actuator element over the entire travel path and transmitting them to the control unit 13, where an actual-target comparison takes place analogously to the vertical stroke hz. Here, too, it is important to slow down the retraction of the second actuator element 27b into its second end position 31, so that P 35468 / PCT … April 16, 2025 prevents the end element 33, in the form of the valve element, from coming into contact with the wall section surrounding the opening 23. Figure 4 shows a second embodiment of the pneumatic system 11. Here, too, as in the first embodiment described above, two pneumatic actuators 14a, 14b are provided, with the first pneumatic actuator 14a being responsible for the vertical stroke hz. z and the second pneumatic actuator 14b for the horizontal stroke h xIn contrast to the first embodiment described above, the second actuator 14b is not arranged next to the first actuator 14a, but is attached to the first piston rod 32a of the first actuator 14a. The second actuator 14b is therefore moved along with the first piston rod 32b. Another difference is that the end member 33, i.e., the valve member in the form of the slide element, is not attached to the first piston rod 32a, but to the second piston rod 32b of the second actuator 14b. Here, too, the vertical stroke is executed first to move the end member 33 from the ready position 35 to the intermediate position 36. The control is analogous to the control in the first embodiment described above. Once the intermediate position 36 is reached, the horizontal stroke h xtriggered, so that the second actuator element 27b, i.e., the piston in the second double-acting pneumatic cylinder, moves from its first end position 30 to its second end position 31, and the second piston rod with the coupled valve element is moved from the intermediate position 36 to the closed position 37. P 35468 / PCT … April 16, 2025. Figure 6 shows a third embodiment of the pneumatic system 11 according to the invention. The third embodiment differs significantly from the first two embodiments described above, since only a single pneumatic actuator 14 is used here. The vertical stroke h z subsequent horizontal stroke h xThis is generated by a forced control of the first pneumatic actuator with respect to its position relative to the opening 23 to be closed. A cam guide 44 is assigned to the pneumatic actuator 14, which has a cam follower 45 and a guide cam 46 assigned to the cam follower 45, which are movable relative to each other and thereby provide the horizontal stroke h. xto cause. Advantageously, the cam follower 45 is arranged in the form of a pin or stud on the cylinder housing 26 and projects outwards from it. The guide cam 46 is located on a peripheral component. The guide cam 46 has a guide track 47 on which the cam follower 45 can slide. The guide track 47 is inclined to both the x-axis direction 17 and the z-axis direction 19. The angle of inclination between the horizontal, i.e., the x-axis direction 17, and the guide track 47 is in the range of 45° to 80°. It should also be mentioned that the cylinder housing 26 is supported against the ground by means of a spring element 48, the spring force of which is a compression spring ensuring that the cylinder housing 26 and thus the first actuator 14 is pushed upwards away from the ground, so that the cam follower 45 arranged on the cylinder housing 26 rests in the upper area of ​​the guide track 47.P 35468 / PCT … April 16, 2025 As shown particularly in Figure 6, a pivot axis element 49, for example in the form of a disc or ball, is arranged on the piston rod 32, which is coupled to the actuator member 27 in the form of the piston. This pivot axis element 49 moves along with the piston during the vertical stroke hz. At one end of the piston rod 32, the end member 33, in the form of the valve member, is arranged. A characteristic feature of this embodiment is that, when the piston rod 32 extends, the pivot axis element 49 encounters a pivot bearing 50 arranged on the valve housing 22. This, in combination with the cam guide 44, triggers a pivoting movement of the actuator 14 about a pivot axis 51, which is located in the region of the pivot axis element 49 abutting the pivot bearing 15. The functionality and regulation of the third implementation example can be summarized as follows: First, the actuator element 27 is in its lower first end position 30.The spring element 48 pushes the cylinder housing 26 upwards. The cam follower 45 is located at the upper end of the guide track 47. By pressurizing the lower pressure chamber 29a according to the predetermined trajectory, the piston moves upwards from its first end position 30 towards the second end position 31. Position control takes place analogously to the first and second embodiments described above. The vertical stroke hz causes the piston rod 32 to extend and the pivot bearing element 49 on the piston rod to move upwards towards the pivot bearing 50. The pivot bearing element 49 on the piston rod 32 then engages the pivot bearing 50 during the vertical stroke h. zon the pivot bearing 50 without the piston or actuator element 27 having already reached its second, upper end position 31. The contact of the pivot bearing element with the pivot bearing causes the cylinder housing 26 of the actuator 14 to pivot clockwise, by the cam follower 45 sliding downwards on the inclined guide track 47, thereby tensioning the spring element and extending the piston rod further out of the cylinder housing. Care must be taken to ensure that the insertion of the pivot bearing element 49 into the pivot bearing 50 does not result in a hard stop, which is achieved by braking the actuator element 27 in a timely manner. After the completion of the vertical stroke h z horizontal movement initiated by striking the pivot bearing element 49 against the pivot bearing 15, or the horizontal stroke h xis monitored by means of a position measuring unit 41b arranged on the guide cam 46, that is, as with the previously described position control for the vertical movement stroke, a position control for the horizontal movement stroke h can be implemented there. x to be carried out. P 35468 / PCT … April 16, 2025

Claims

Claims 1. A method for operating a pneumatic system (11) for industrial automation, comprising at least one pneumatic actuator (14; 14a, 14b) and a control device (13) for controlling a movement of an actuator element (27; 27a, 27b) or at least one pneumatic actuator (14; 14a, 14b) from a first end position (30) to a second end position (31) and / or from the second end position (31) to the first end position (30), wherein the actuator element (27; 27a, 27b) is motionally coupled to an end element (33) which can be driven by a stroke movement having a vertical stroke (hz) and a horizontal stroke (h x ) comprises the steps: - Determining a position of the end member (33) by means of a position measuring device (40), wherein the position of the end member (33) during the vertical stroke (h) is determined by means of a first position measuring unit (41a). z) and by means of a second position measuring unit (41b) the position of the end member (33) during the horizontal stroke (h x ) is determined, - providing the determined position as an actual position signal to the control unit (13), - performing position control based on the actual position signal acquired by the position measuring unit (40). P 35468 / PCT … April 16, 2025 2. Method according to claim 1, characterized in that the end member (33) first performs a vertical stroke (h z ) and then a horizontal stroke (h x ) carries out, preferably the horizontal stroke (h x ) is triggered when the end member (33) during the vertical movement stroke (h z ) has reached a vertical end position.

3. Method according to claim 1 or 2, characterized in that, to determine the position of the end member (33) during the vertical stroke (h) z) by means of the first position measuring unit (41a) the position of a first actuator element (27a) of a first pneumatic actuator (14a) is measured, preferably a continuous position measurement over the travel path of the first actuator element (14a).

4. Method according to one of the preceding claims, characterized in that to determine the position of the end element (33) during the horizontal stroke (h x ) by means of the second position measuring unit (41b) the position of a second actuator element (27b) of a second pneumatic actuator (14b) responsible for the horizontal stroke, which is coupled to the end element (33), is measured, preferably with continuous position measurement over the travel path of the second actuator element (27b).

5. Method according to one of claims 1 or 2, characterized in that to determine the position of the end element (33) during the horizontal stroke (h x) by means of the second position measuring unit (41b) the position of a cam follower (45) or a guide cam (46) arranged on the first pneumatic actuator (14a) which is coupled to the end member (33) in motion x ) responsible scenery management (44) is measured, with P 35468 / PCT … April 16, 2025 preferably a continuous position measurement is carried out over the travel path of the cam follower (45) or the guide cam (46).

6. Method according to one of the preceding claims, characterized in that the actual pressure in a pressure chamber (29a, 29b) of the first pneumatic actuator (14a) and / or pressure chamber of the second pneumatic actuator (14b) is measured and the actual pressure is provided as an actual pressure signal to the control device (13). 7.A method according to one of the preceding claims, characterized in that the pneumatic system (11) comprises a slide valve (20), wherein the slide valve (20) has an end element (33) in the form of a valve element which is motionally coupled to the actuator element (27; 27a, 27b) of the first pneumatic actuator (14; 14a, 14b) and is moved along with the movement of the actuator element (27; 27a, 27b), and wherein the slide valve (20) has an opening for the passage of a wafer which can be opened or closed by the valve element.

8. A method wherein the first actuator (14a) and / or second actuator (14b) is a single- or double-acting pneumatic cylinder. 9.Pneumatic system for industrial automation, comprising at least one pneumatic actuator (14; 14a, 14b) with an actuator element (27; 27a, 27b), a control device (13) for controlling a movement of the actuator element (27; 27a, 27b) from a first end position to a second end position and / or from the second end position to the first end position, wherein the actuator element (27; 27a, 27b) is coupled to an end element (33) which can be driven by a lifting movement, P 35468 / PCT … 16 April 2025. which comprises a vertical stroke and a horizontal stroke and is equipped with a position measuring device (40) for determining the position of the end member (33), wherein the position measuring device (40) has a first position measuring unit (41a) for determining the position of the end member (33) during the vertical stroke and a second position measuring unit (41b) for determining the position of the end member (33) during the horizontal stroke, and wherein the control device (13) is configured such that actual positions can be transmitted from the position measuring device (40) and position control can be carried out based on the actual position signal acquired by the position measuring device (40).10.Pneumatic system according to claim 9, characterized in that at least two pneumatic actuators are provided, of which a first pneumatic actuator (14a) equipped with a first actuator element (27a) is responsible for the vertical stroke and a second pneumatic actuator (14b) equipped with a second actuator element (27b) is responsible for the horizontal stroke of the end element (33), which is coupled to both the first actuator element (27a) and the second actuator element (27b).

11. Pneumatic system according to claim 10, characterized in that the second actuator (14b) is arranged on the first actuator element (27a) and is moved along with it during the vertical stroke, wherein the end element (33) is connected to the second actuator element (27b) of the second actuator (14b) and is movable relative to the first actuator element (27a) during the horizontal stroke.12.Pneumatic system according to claim 10 of claim 11, characterized in that the second actuator (14b) is connected to the first actuator P 35468 / PCT … April 16, 2025. (14a) is assigned and is stationary during the vertical stroke, wherein the second actuator element (27b) of the second actuator (14b) can initiate a positioning movement of the first actuator (14a), which can be converted into the horizontal stroke of the end element (33).

13. Pneumatic system according to one of claims 10 to 12, characterized in that the positioning movement is a pivoting movement of the first actuator (14a) about a pivot axis. 14.Pneumatic system according to one of claims 10 to 13, characterized in that a single pneumatic actuator (14), namely the first pneumatic actuator, is provided, to which a cam guide (44) is assigned, which has a cam follower (45) and a guide cam (46) assigned to the cam follower (45), which are movable relative to each other and thereby cause the horizontal stroke, wherein preferably the cam follower (45) is arranged on the pneumatic actuator (14).

15. Pneumatic system according to one of claims 9 to 14, characterized in that it further comprises a slide valve (20), wherein the slide valve (20) has an end member (33) in the form of a valve member coupled to the first actuator member (27a) of the first pneumatic actuator (14a) in motion and has an opening that can be closed by the valve member.16.Pneumatic system according to any one of claims 10 to 15, characterized in that the first actuator (14a) and / or the second actuator (14b) is designed as a single- or double-acting pneumatic cylinder. P 35468 / PCT … April 16, 2025.

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