1results about How to "Large ventilation area" patented technology

The application discloses a MEMS waterproof microphone, comprising: a substrate comprising a first area provided with a sound hole; a waterproof air-permeable film attached to the first area and covering the sound hole; a metal pad provided with a through hole and stacked above the waterproof air-permeable film; and a MEMS chip stacked above the metal pad; wherein the aperture of the sound hole is larger than the aperture of the through hole. The application uses the metal pad as a transfer intermediate, which can increase the size of the sound hole of the substrate and the air-permeable area of the waterproof air-permeable film without being affected by the size of the chip. The larger sound hole and air-permeable area can reduce the obstruction to the sound signal, provide a higher signal-to-noise ratio, and achieve good waterproof performance, thereby improving the comprehensive performance of the MEMS microphone.