Workpiece storage device
A technology for storing devices and workpieces, which is applied in the direction of furnace components, electrical components, conveyor objects, etc., and can solve the problems of workpiece sliding and damage to workpieces, etc.
Inactive Publication Date: 2010-05-12
HIRATA & CO LTD
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Problems solved by technology
For example, like the device described in (Japanese) Unexamined Patent Publication No. 2005-75643, if the workpiece is positioned in a floating state, when the edge of the workpiece is pushed by the positioning device, the workpiece tends to slide and contact with the surrounding area. Component conflicts, which may damage the workpiece
In addition, although there is no description in (Japanese) Unexamined Patent Publication No. 2005-75643, even in the case of adopting a structure in which the end of the workpiece in a floating state is held by the transfer device and discharged to the outside of the storage box, in Sliding of the workpiece may also occur when the end of the workpiece is held by the transfer device
Method used
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[0099] In the above-mentioned embodiment, the adsorption spacer 14 having the adsorption function is used, but the spacer having the adsorption function is not necessarily required to prevent the sliding of the glass substrate, as long as it resists the rapid movement (sliding) of the glass substrate W. For example, a pad having rubber or felt cloth on the top may be used. In particular, a spacer having an adsorption function like the adsorption spacer 14 is effective in preventing glass substrates from slipping, needless to say.
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A work receiving device that stably floats work by air. In the work receiving device, lifting and lowering operation by a lifting means causes an air jetting means to enter a receiving cassette and work to be unloaded to the outside from the receiving cassette is floated by the air jetting means. The work receiving device has a pad that projects from the upper surface of the air jetting means to come into contact with the lower surface of the work in a floating state.
Description
technical field [0001] The invention relates to a workpiece storage device for storing workpieces such as glass substrates in a storage box. Background technique [0002] Rectangular plate-shaped workpieces such as glass substrates used in the manufacture of thin displays are stored in multiple layers in the storage box. Furthermore, during workpiece processing, the workpieces are taken out one by one from the storage box by the transfer device and transported to the processing device or the like, and the processed workpieces are reloaded into the storage box by the transfer device. In such facilities, a device for transferring workpieces between the storage box and the transfer device is required. [0003] As such a device, there is, for example, the device disclosed in (Japanese) Unexamined Patent Publication No. 2005-75643, which arranges an air blowing device and a roller conveyor below the storage box, and sequentially transports the air from the lower side of the stor...
Claims
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IPC IPC(8): H01L21/677B65G49/06
CPCB65G2249/045B65G2201/0294B65G49/068H01L21/67784B65G49/064
Inventor 藤吉诚
Owner HIRATA & CO LTD
