Interference Force Compensation Control

Abstract

The present invention provides a disturbance force compensation control device capable of performing high-precision positioning using high-precision disturbance estimation by accurately calculating the disturbance force due to frictional force generated between movable parts. A disturbance force model is set based on an inter-movable-part frictional force generated between sliding surfaces of the movable parts between the connected first movable part (10) and second movable part (20). A first reference thrust command value is calculated based on a first target position command value for a first actuator (30) that drives a first movable part (10). Based on the second target position command value and the disturbance force model for the second actuator (40) driving the second movable part (20), calculate the influence due to the friction force between the movable parts due to the second movable part (20) A first disturbing force acting on the movement of the first movable part (10). Furthermore, a first compensation thrust command value is calculated by adding the first reference thrust command value and the first disturbance force, and the first actuator (30) is controlled based on the first compensation thrust command value.

Description

technical field [0001] The present invention relates to a disturbance force compensating control device. In a mechanical device having a plurality of movable parts and a plurality of actuators driving each movable part, the action of one movable part interferes with the action of another movable part. When there is a force, the disturbance force compensation control device compensates the disturbance force to control the mechanical device. Background technique [0002] For example, in an electronic component mounting machine or the like, each movable part receives a disturbance force from other movable parts, which adversely affects positioning accuracy. Therefore, Japanese Patent No. 4241240 (Patent Document 1) describes that the disturbance force is calculated using the transfer characteristics from the sum of the thrusts of the movable parts (the reaction force transmitted from the chassis) to the position of the chassis. [0003] Patent Document 1: Japanese Patent No. 4...

AI Technical Summary

Problems solved by technology

Furthermore, it is known that in order to make the positioning accuracy higher, the influence of the frictional force generated between the movable parts is large.

In addition, the disturbance force due to the influence of friction has nonlinear characteristics, and in the disturbance force based on the transfer characteristics described in Patent Document 1, it cannot be fully grasped.

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