Disturbing force compensating control device

Abstract

The invention provides a disturbing force compensating control device, which can calculate disturbing force caused by friction force generated between movable parts in high precision, and perform high precision positioning via high precision disturbing estimation. A disturbing force model is set based on movable part friction force between sliding faces of the movable parts generated between a first movable part (10) and a second movable part (20) in a connection. Based on a first target position instruction value of a first actuator (30) driving the first movable part (10), a first referential thrust instruction value is calculated. Based on a second target position instruction value of a second actuator (40) driving the second movable part (20) and the disturbing force model, a first disturbing force generated by the action of the second movable part (20) acting upon the action of the first movable part (10) due to influence of friction force between the movable parts is calculated. Furthermore, through add of the first referential thrust instruction value and the first disturbing force, a first compensating thrust instruction value is calculated, and the first actuator (30) is controlled based on the first compensating thrust instruction value.

Description

technical field [0001] The present invention relates to a disturbance force compensating control device. In a mechanical device having a plurality of movable parts and a plurality of actuators driving each movable part, the action of one movable part interferes with the action of another movable part. When there is a force, the disturbance force compensation control device compensates the disturbance force to control the mechanical device. Background technique [0002] For example, in an electronic component mounting machine or the like, each movable part receives a disturbance force from other movable parts, which adversely affects positioning accuracy. Therefore, Japanese Patent No. 4241240 (Patent Document 1) describes that the disturbance force is calculated using the transfer characteristics from the sum of the thrusts of the movable parts (the reaction force transmitted from the chassis) to the position of the chassis. [0003] Patent Document 1: Japanese Patent No. 4...

AI Technical Summary

Problems solved by technology

Furthermore, it is known that in order to make the positioning accuracy higher, the influence of the frictional force generated between the movable parts is large.

In addition, the disturbance force due to the influence of friction has nonlinear characteristics, and in the disturbance force based on the transfer characteristics described in Patent Document 1, it cannot be fully grasped.

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