A Variable Resistance Thin Film Resistor Network
A technology of thin-film resistors and networks, which can be applied to other resistor networks and other directions, can solve the problems of layout size jumps, differences of tens or even hundreds of times, and large parasitic effects
Active Publication Date: 2017-04-12
TSINGHUA UNIV
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Problems solved by technology
In a traditional resistor network, the square resistance R of R1 and R2 is the same. When the required adjustment range is too large, the aspect ratio L / W of R1 and R2 will differ by dozens or even hundreds of times, thus Cause layout size jump problem
At the same time, as the area of the resistor pattern increases, the parasitic effects caused by it are also greater, deteriorating the functional parameters and performance of the resistor network
Method used
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[0029] The implementation of the present invention will be described in detail below in conjunction with the drawings and examples.
[0030] Referring to Figures 2, 3, 4, and 5, a variable-resistance thin-film resistor network includes a substrate 100 on which a buffer isolation layer 110 is arranged, and a central thin-film resistor 120 and a bypass thin-film resistor 120 are arranged on the buffer isolation layer 110. The resistor 130, the signal transmission line 140 and the ground line 150 together form a T-type / π-type resistor network. The signal transmission line 140 and the ground line 150 together form a coplanar waveguide transmission line. The central thin film resistor 120 and the bypass thin film resistors contain different concentrations of impurity elements.
[0031] Referring to FIG. 2 , the T-shaped resistor network includes two central film resistors 120 , two bypass film resistors 130 , three signal transmission lines 140 and two ground lines 150 . Three se...
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The invention discloses a variable sheet resistance film resistor network relating to the field of device and signal measurement. The variable sheet resistance film resistor network is prepared by a polycrystalline silicon film resistor technique and a surface micro processing technique, and comprises a complete signal channel which is formed by a central film resistor, a bypass film resistor, a signal transmission line as well as a ground wire together, such as a T-type / pi-type network. In order to obtain great decrement, the central resistor and the bypass resistor are great in difference value, and the size jump problem can be brought by adopting the same sheet resistance. According to the variable sheet resistance film resistor network, the central film resistor and the bypass film resistor have different impurity element concentrations by controlling the ion implantation technology condition, so that different sheet resistances are obtained; the length and the width of the resistor network are regulated effectively when the signal is regulated substantially; meanwhile, the resistor network of the same size has different regulation functions by adopting the principle; compared with the existing resistor network, the variable sheet resistance film resistor network provided by the invention has the advantages that the structural area can be saved and the induced parasitic effect is reduced.
Description
technical field [0001] The invention belongs to the technical field of device and signal measurement, in particular to a variable square resistance thin film resistance network. Background technique [0002] The resistance network can adjust the signal level and absorb the input power, which is the key structure in the front-end module of the test instrument. The dynamic amplitude variation range of the input signal can reach several orders of magnitude. The resistance network can not only expand the dynamic range of the test instrument, but also play an important role in preventing blocking failure, protecting equipment, and reducing signal coupling. [0003] Compared with other signal adjustment structures, the resistor network has the characteristics of small size, light weight, high reliability, stable performance, easy to use, etc., and can be flexibly designed according to application requirements. The most commonly used resistor network topologies are T-type and π-ty...
Claims
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IPC IPC(8): H01C1/16
Inventor刘泽文郭昕
OwnerTSINGHUA UNIV