79results about How to "Small size difference" patented technology

The present invention discloses a semiconductor structure and forming method of the semiconductor structure, the method comprises: providing a substrate; forming a first mask layer on a portion of thesubstrate; forming a first side wall on sidewall of the first mask layer; forming a second mask layer on the substrate, wherein the second mask layer covers the sidewall of the first side wall and exposes top surface of the first side wall; after forming the second mask layer, removing the first side wall; after removing the first side wall, using the first mask layer and the second mask layer asmasks, etching a portion of the substrate to form a groove in the substrate. The method subsequently form an interconnect structures within the groove, therefore provide better performance with the interconnect structure formed by the method.

Provided is a representative-value calculating device for calculating a representative value of process condition values by using values of process conditions measured in a process system. The representative-value calculating device according to an embodiment of the present invention calculates a median and a median absolute deviation (MAD) of process condition values at each sampling point by using the process condition values measured for each sample at each sampling point through a sensor; calculates a standardized value by using the process condition values, the median, and the MAD; and calculates a representative value of the process condition values for each sample on the basis of the calculated standardized values.

A polymer suitable as a base resin for a positive resist composition, in particular a chemically amplified positive resist composition, having a higher resolution, a larger exposure allowance, a smaller sparse-dense size difference, a better process applicability, a better pattern configuration after exposure, and in addition, a further excellent etching resistance, than a conventional positive resist. A positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain the polymer. A polymer has a hydrogen atom of at least a carboxyl group is substituted by an acid labile group represented by the following general formula (2), a positive resist composition using the same, a patterning process, and a novel polymerizable compound to obtain a polymer like this.

The invention discloses automatic brush electroplating equipment belonging to the technical field of engine reproduction equipment. The automatic brush electroplating equipment comprises a rack, wherein the rack is slidably provided with a first slide box driven by a first power device along the X direction; the first slide box is slidably provided with a second slide box driven by a second power device along the Y direction; the second slide box is slidably provided with a third slide box driven by a third power device along the Z direction; the third slide box is rotationally provided with a plating pen driven by a fourth power device and arranged along the Z direction; the side, located on the first slide box, on the rack is fixedly provided with a clamp for clamping a workpiece; and the rack is also provided with a plating solution supply and recovery system. By using the automatic brush electroplating equipment provided by the invention, automatic operation is realized, the motion control is precise, the uniformity of a plating layer is ensured, the labor efficiency is increased, and the repaired workpiece is small in size difference; and the automatic brush electroplating equipment is suitable for mass remanufacture.

The invention belongs to the technical field of aluminum alloy materials for electric power equipment and particularly relates to a method for manufacturing large-sized aluminum alloy bars with high strength and high electrical conductivity. The large-sized 6082 bars with high strength and high electrical conductivity, especially 6082T6 aluminum alloy bars with diameter from 150mm above to 300mm, are utilized for processing large-sized electrical elements with high strength and high electrical conductivity in the electric power equipment. An aluminum alloy ingot used in the method contains the following elements in percentage by mass: 1.0%-1.05% of Si, no more than 0.12% of Fe, no more than 0.10% of Cu, 0.55%-0.65% of Mn, 0.9%-0.95% of Mg, no more than 0.10% of Cr, no more than 0.10% of Zn, no more than 0.05% of Ti, no more than 0.05% of isolated impurity, no more than 0.15% of total impurities, and the balance being Al. According to the method, mass production and delivery can be achieved, the strength and the electrical conductivity of the large-sized aluminum alloy bars are enhanced, and processing and use are facilitated; the mechanical property and the electrical conductivity of the large-sized aluminum alloy bars obtained by the method are stable; in repeated operation, the bars can satisfy the Chinese standard of bars with diameter smaller than 150mm, the Chinese standard of bars with diameter from 150mm above to 300 mm can be supplemented or perfected and each performance index can be introduced into the Chinese standard.