Logic product yield monitoring structure and design method thereof

A product and logic technology, applied in the field of logic product yield monitoring structure, can solve the problems of effective detection of process health, low product yield, and inability to effectively detect process health, etc. amount of effect

CN107977537AInactive Publication Date: 2018-05-01SHANGHAI HUALI MICROELECTRONICS CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2018-05-01
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a logic product yield monitoring structure and a design method thereof. The logic product yield monitoring structure comprises a monitoring storage unit and a peripheral circuit, wherein the monitoring storage unit is formed by combining every two inverters designed through a logic operation standard unit; and the monitoring storage unit is matched with the peripheral circuit through a circuit-level simulation program, so that logic product yield monitoring is realized. Through the logic product yield monitoring structure, the defect of a traditional SRAM test structurecan be overcome; and the structure is introduced at a development stage, so that a product-level yield problem is solved before a product yield is imported, the product mass production cycle is effectively shortened, and the purpose of quickly improving output is achieved.
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Description

technical field

[0001] The invention relates to the technical field of integrated circuits, in particular to a logic product yield monitoring structure and a design method thereof. Background technique

[0002] With the development of high-level processes, the technical difficulty increases exponentially. What is most needed in process development is the "eye" to monitor the process, that is, various test structures (Test key / Test vehicle) are needed to confirm the abnormal points of the process in the first time, so as to improve and shorten the process development cycle in time.

[0003] At present, due to the limited technical accumulation of domestic preparation manufacturers and the serious shortage of human resources invested in process development, there is an extremely lack of development and application of a complete set of high-level process development and testing structures to achieve high-level process technology development. Continue to develop, avoid using do...

Examples

Embodiment Construction

[0030] In order to illustrate the technical content, structural features, achieved goals and effects of the present invention in detail, the following will be described in detail in conjunction with the embodiments and accompanying drawings.

[0031] With the development of high-level processes, the technical difficulty increases exponentially. What is most needed in process development is the "eye" to monitor the process, that is, various test structures (Test key / Test vehicle) are needed to confirm the abnormal points of the process in the first time, so as to improve and shorten the process development cycle in time.

[0032] At present, due to the limited technical accumulation of domestic preparation manufacturers and the serious shortage of human resources invested in process development, there is an extremely lack of development and application of a complete set of high-level process development and testing structures to achieve high-level process technology development....