A device and method for quickly judging whether the size of a quartz crucible meets specifications

Abstract

The present invention provides a device for quickly judging whether the size of a quartz crucible meets the specifications, including a curved portion and a straight wall portion, the curved portion and the straight wall portion can be used separately, or the curved portion and the straight wall portion can be detachably connected, wherein the curved portion includes a first curved portion and a second curved portion, the first curved portion is respectively arranged at the two ends of the second curved portion, and the curved portion is provided with a plurality of meshes; the straight wall portion includes an observation portion and a measuring portion, the observation portion is arranged at one end of the measuring portion, the other end of the measuring portion is open, and the measuring portion is provided with an observation hole. The beneficial effects of the present invention are simple structure, convenient use, having a curved portion and a straight wall portion, and the shape of the curved portion and the straight wall portion when used in combination is adapted to the quartz crucible, the curved portion and the straight wall portion are respectively assembled with the quartz crucible, judging whether the size of the quartz crucible is qualified, rapid measurement, saving measurement time, small measurement error, good consistency, convenient and easy to understand measurement, low cost of the measuring device, and easy to realize automated measurement.

Description

Technical Field

[0001] The invention belongs to the technical field of Czochralski single crystals, and in particular relates to a device for quickly judging whether the size of a quartz crucible meets specifications and a method for using the device. Background Art

[0002] As one of the important auxiliary materials of the CZ single crystal furnace, the quartz crucible plays an important role in the charging, crystallization and quality of the single crystal furnace. Therefore, the size of the quartz crucible will affect its reasonable assembly with other thermal field parts. If the size of the straight wall of the quartz crucible is unreasonable, it is easy to cause poor single crystal crystallization or even deformation and abnormal curling of the upper edge of the crucible. If the size of the arc part is unreasonable, it is easy to cause the tail of the single crystal to break, which will inevitably lead to an increase in the cost of single crystal pulling and a decrease in quality. Therefore, it is particularly important for single crystal silicon manufacturers to do a good job of inspection of quartz crucibles before entering the factory.

[0003] Currently, most quartz crucible measurement methods use vernier calipers, tape measures, special arc calipers and other tools for measurement. The workload is large and the measurement level is affected by large errors and poor consistency. At the same time, there are inaccurate data. Once the feedback is unreasonable, it will be very difficult to trace it, which is very unfavorable to the sustainable development of the enterprise. Summary of the invention

[0004] In view of the above problems, the problem to be solved by the present invention is to provide a device and a method for quickly judging whether the size of a quartz crucible meets the specifications, which is used to measure the size of the quartz crucible, has convenient measurement, small error, and can be applied to automated measurement.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: a device for quickly judging whether the size of a quartz crucible meets the specifications, comprising a curved portion and a straight wall portion, the curved portion and the straight wall portion can be used separately, or the curved portion and the straight wall portion can be detachably connected, wherein:

[0006] The arc portion includes a first arc portion and a second arc portion, the first arc portion is respectively arranged at both ends of the second arc portion, the arc portion is provided with a plurality of mesh holes, the arc portion is used to assemble with a quartz crucible, and measure the curvature of the bottom of the quartz crucible, and the first arc portion and the second arc portion respectively measure the first curvature and the second curvature of the bottom of the quartz crucible;

[0007] The straight wall portion includes an observation portion and a measuring portion. The observation portion is arranged at one end of the measuring portion and the other end of the measuring portion is open. The measuring portion is provided with an observation hole. The straight wall portion is used to assemble with the straight wall portion of the quartz crucible and to measure the straight wall portion of the quartz crucible.

[0008] Furthermore, the mesh size is 25-100 mm.

[0009] Furthermore, the measuring part includes an inner diameter layer and an outer diameter layer, the inner diameter layer and the outer diameter layer are coaxially arranged, one end of the inner diameter layer and the outer diameter layer are both connected to the observation part, and there is a measuring gap between the inner diameter layer and the outer diameter layer.

[0010] Furthermore, the measuring gap is adapted to the wall thickness of the quartz crucible.

[0011] Furthermore, the curved portion and the straight wall portion are both made of transparent materials.

[0012] Furthermore, the other ends of the inner diameter layer and the outer diameter layer are open.

[0013] A method for using a device for quickly judging whether a quartz crucible size meets specifications comprises the following steps:

[0014] S1: The arc part and the quartz crucible are assembled, and the mesh is used to determine whether the arc part and the quartz crucible are assembled reasonably;

[0015] S2: The straight wall portion and the quartz crucible are assembled, and the straight wall portion of the quartz crucible is inserted into the measuring gap between the inner diameter layer and the outer diameter layer. Whether the straight wall portion and the quartz crucible are assembled reasonably is judged through the observation hole.

[0016] Furthermore, in step S1, the basis for judging whether the arc portion and the quartz crucible are properly assembled is that the arc portion fits the quartz crucible, and the judgment is automatically made by infrared rays.

[0017] Furthermore, the arc portion and the quartz crucible are assembled through a slider and a connecting rod mechanism.

[0018] Furthermore, in step S2, the basis for judging whether the straight wall portion and the quartz crucible are properly assembled is that the straight wall portion of the quartz crucible can be inserted into the measuring gap, and the inner wall and outer wall of the straight wall portion of the quartz crucible are respectively in contact with the inner diameter layer and the outer diameter layer, and the judgment is automatically made by infrared rays.

[0019] The advantages and positive effects of the present invention are as follows: due to the adoption of the above technical scheme, the device for quickly judging whether the size of the quartz crucible meets the specification has a simple structure and is easy to use, and has a curved portion and a straight wall portion, and the shape of the curved portion and the straight wall portion when used in combination is adapted to the quartz crucible, and the curved portion and the straight wall portion are respectively assembled with the quartz crucible, and whether the size of the quartz crucible is qualified can be judged by judging whether the curved portion and the straight wall portion are reasonably assembled with the quartz crucible, and the measurement is fast, the measurement time is saved, the measurement error is small, the consistency is good, the measurement is convenient and easy to understand, the measurement device cost is low, and it is easy to realize automatic measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic structural diagram of an arc portion of an embodiment of the present invention;

[0021] Figure 2Schematic diagram of the structure of a straight wall portion according to an embodiment of the present invention.

[0022] In the figure:

[0023] 1. Observation part 2. Measurement gap 3. Inner diameter layer

[0024] 4. Outer diameter layer 5. Observation hole 6. Mesh

[0025] 7. Second arc part 8. First arc part DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] Figure 1 and 2 The structure of an embodiment of the present invention is shown. This embodiment relates to a device for quickly judging whether the size of a quartz crucible meets the specifications and a method of use. The device is used to measure the size of the quartz crucible, so that the size of the quartz crucible used for subsequent vertical single crystal pulling is qualified, and the normal vertical single crystal pulling is ensured. The device for quickly judging whether the size of a quartz crucible meets the specifications has a curved portion and a straight wall portion. The curved portion and the straight wall portion are used in combination to measure the size of the quartz crucible, which is convenient to measure and has a small error.

[0028] A device for quickly judging whether the size of a quartz crucible meets the specifications, such as Figure 1 and 2 As shown, it includes a curved portion and a straight wall portion, the curved portion and the straight wall portion can be used separately, or the curved portion and the straight wall portion can be detachably connected, the curved portion is used to measure the size of the curved portion at the bottom of the quartz crucible, and the straight wall portion is used to measure the size of the straight wall portion of the quartz crucible. The curved portion and the straight wall portion can be used separately to measure the size of the curved portion and the straight wall portion of the quartz crucible respectively; or the curved portion and the straight wall portion can be detachably connected, and the two are used together to measure the size of the quartz crucible. The curved portion and the straight wall portion can be connected by plugging, or sliding, or other detachable connection methods, which can be selected according to actual needs, and no specific requirements are made here.

[0029] Among them, the curved portion includes a first curved portion 8 and a second curved portion 7, the number of the first curved portions 8 is two, the two first curved portions 8 are respectively arranged at the two ends of the second curved portion 7, the two first curved portions 8 are respectively fixedly connected to the second curved portion 7, the first curved portion 8 can be fixedly connected to the second curved portion 7 by adhesive, or the first curved portion 8 and the second curved portion 7 are integrally formed, or other fixed connection methods are used. The selection is made according to actual needs, and no specific requirements are made here. Preferably, in this embodiment, the first curved portion 8 and the second curved portion 7 are integrally formed, the structure is stable, and it is not easy to deform. The arc size of the first arc portion 8 is smaller than that of the second arc portion 7, so that the arc portion formed by the two first arc portions 8 and the second arc portion 7 is adapted to the shape of the arc portion of the bottom of the quartz crucible, so that when the arc portion measures the size of the arc portion of the bottom of the quartz crucible, the quartz crucible is placed on the arc portion and assembled so that the arc portion fits the arc portion of the bottom of the quartz crucible, and the size of the bottom of the quartz crucible is measured. When the arc portion of the bottom of the quartz crucible fits the arc portion tightly without a gap, it means that the assembly is reasonable, indicating that the size of the arc portion of the bottom of the quartz crucible is qualified.

[0030] The arc portion is provided with a plurality of mesh holes 6. The arrangement of the mesh holes 6 facilitates observation when measuring the size of the arc portion of the bottom of the quartz crucible to observe whether the arc portion of the bottom of the quartz crucible fits with the arc portion. Preferably, the mesh holes 6 are arranged in the second arc portion 7 of the arc portion, and the number of the mesh holes 6 is multiple, which is selected according to actual needs. The size of the mesh holes 6 is 25-100 mm, and the shape of the mesh holes 6 can be round, square, or other shapes, which is selected according to actual needs.

[0031] The straight wall portion is used to measure the size of the straight wall portion of the quartz crucible, and the straight wall portion includes an observation portion 1 and a measuring portion. The observation portion 1 is arranged at one end of the measuring portion, and the other end of the measuring portion is open, and the measuring portion is provided with an observation hole 5; the arrangement of the observation portion 1 is convenient for observation when measuring the straight wall portion of the quartz crucible, and for judging whether the size of the straight wall portion of the quartz crucible is qualified; the arrangement of the measuring portion is convenient for measuring the straight wall portion of the quartz crucible; the observation portion 1 is installed at one end of the measuring portion, and the observation portion 1 and the measuring portion can be fixedly connected, detachably connected, or other connection methods, which can be selected according to actual needs, and the observation portion 1 and the measuring portion are arranged to intersect vertically.

[0032] The above-mentioned observation part 1 is a plate-like structure, and its shape is adapted to the cross-sectional shape of the measuring part, so that the observation part 1 is conveniently connected to the measuring part. The shape of the observation part 1 is preferably circular, and a plurality of observation holes 5 are provided on the observation part 1. The shape of the observation holes 5 can be circular, square, or other shapes, which are selected according to the actual shape, and no specific requirements are made here. The size is also not specifically required here, and is selected according to actual needs. The observation part 1 is installed at one end of the measuring part, and the other end of the measuring part is open, so that it is convenient to be mounted on the quartz crucible to measure the straight wall part of the quartz crucible.

[0033] The above-mentioned measuring part includes an inner diameter layer 3 and an outer diameter layer 4, the inner diameter layer 3 and the outer diameter layer 4 are coaxially arranged, and there is a measuring gap between the inner diameter layer 3 and the outer diameter layer 4, and the measuring gap 2 is adapted to the wall thickness of the quartz crucible. The shapes of the inner diameter layer 3 and the outer diameter layer 4 are adapted to the shape of the straight wall part of the quartz crucible, which is convenient for measuring the straight wall part of the quartz crucible. Preferably, the inner diameter layer 3 and the outer diameter layer 4 are both cylindrical structures, hollow inside and open at both ends, that is, the measuring part is an annular structure, the inner diameter layer 3 is located inside, and the outer diameter layer 4 is located outside. Located outside, the inner diameter layer 3 and the outer diameter layer 4 form an annular structure, the distance between the inner diameter layer 3 and the outer diameter layer 4 is adapted to the thickness of the straight wall portion of the quartz crucible, and is convenient for measuring the size of the straight wall portion of the quartz crucible. One end of the inner diameter layer 3 and the outer diameter layer 4 are both connected to the observation portion 1, that is, one end of the cylindrical annular structure formed by the inner diameter layer 3 and the outer diameter layer 4 is connected to the observation portion 1, the measuring gap 2 at this end is closed, and the other end is open, and the measuring gap 2 at this end is open, which is convenient for measuring the straight wall portion of the quartz crucible. The setting of the observation portion 1, when the straight wall portion is being measured, the measuring portion is mounted on the straight wall portion of the quartz crucible, and the end of the straight wall portion of the quartz crucible blocks the observation portion, so that the measuring portion is suspended at this position, ensuring that the position is fixed during the measurement process, avoiding the falling of the measuring portion, causing damage to the arc portion of the quartz crucible, and avoiding affecting the measurement.

[0034] In order to prevent the curved portion and the straight wall portion from affecting the quartz crucible, the curved portion and the straight wall portion are both made of transparent materials for easy measurement.

[0035] A method for using a device for quickly judging whether a quartz crucible size meets specifications comprises the following steps:

[0036] S1: Assembling the curved portion and the quartz crucible, placing the quartz crucible on the curved portion so that the outer wall of the curved portion of the quartz crucible contacts the curved portion, judging whether the curved portion and the quartz crucible are reasonably assembled through the mesh 6, the basis for judging whether the curved portion and the quartz crucible are reasonably assembled is that the curved portion and the quartz crucible fit together, if the outer wall of the curved portion of the quartz crucible contacts closely with the inner wall of the curved portion, it means that the size of the curved portion of the quartz crucible meets the specification, and the quartz crucible can be used for straight-pulling single crystals; if the outer wall of the curved portion of the quartz crucible contacts closely with the inner wall of the curved portion, and there is a gap, it means that the size of the curved portion of the quartz crucible is unqualified, and the quartz crucible cannot be used for straight-pulling single crystals. When assembling the curved part and the curved part of the quartz crucible, the assembly can be performed by a slider and a connecting rod mechanism, or by other methods to achieve automated assembly. At the same time, a laser detection instrument is used to detect whether the assembly is reasonable, that is, by detecting the distance difference between the outer wall of the quartz crucible and the outer wall of the curved part. If the distance difference is within the set value range, it means that the curved part and the quartz crucible are assembled reasonably. Otherwise, it means that the curved part and the quartz crucible are assembled unreasonable, which is convenient for automation.

[0037] S2: The straight wall portion is assembled with the quartz crucible. The straight wall portion of the quartz crucible is inserted into the measuring gap between the inner diameter layer 3 and the outer diameter layer 4. The straight wall portion of the quartz crucible is assembled with the straight wall portion from the lower measuring gap of the straight wall portion. The straight wall portion of the quartz crucible is inserted along the lower measuring gap of the straight wall portion. The straight wall portion is mounted on the straight wall portion of the quartz crucible. Whether the straight wall portion and the quartz crucible are assembled properly is judged through the observation hole. The basis for judging whether the straight wall portion and the quartz crucible are assembled properly is the straight wall portion of the quartz crucible. The wall part can be inserted into the measuring gap 2, and the inner wall and outer wall of the straight wall part of the quartz crucible are respectively fitted with the inner diameter layer 3 and the outer diameter layer 4, then the size of the quartz crucible is reasonable and can be used for vertical pulling of single crystals; if it cannot be assembled or the spacing after assembly is large, it means that the size is unreasonable and cannot be used for vertical pulling of single crystals; when the straight wall part and the straight wall part of the quartz crucible are assembled, the assembly can be completed in combination with an automatic line, or in combination with a CNC program. If the assembly is unreasonable, the assembly can be stopped to ensure that the crucible is not damaged. When judging whether the straight wall part and the quartz crucible are assembled reasonably, a laser detection instrument can be used, that is, by detecting the distance difference between the outer wall of the quartz crucible (through the opening of the outer diameter layer) and the outer wall of the straight wall part. If the distance difference is within the set value range, it means that the arc part and the quartz crucible are assembled reasonably. Otherwise, it means that the arc part and the quartz crucible are assembled unreasonable, which is convenient for automation.

[0038] The advantages and positive effects of the present invention are as follows: due to the adoption of the above technical scheme, the device for quickly judging whether the size of the quartz crucible meets the specification has a simple structure and is easy to use, and has a curved portion and a straight wall portion, and the shape of the curved portion and the straight wall portion when used in combination is adapted to the quartz crucible, and the curved portion and the straight wall portion are respectively assembled with the quartz crucible, and whether the size of the quartz crucible is qualified can be judged by judging whether the curved portion and the straight wall portion are reasonably assembled with the quartz crucible, and the measurement is fast, the measurement time is saved, the measurement error is small, the consistency is good, the measurement is convenient and easy to understand, the measurement device cost is low, and it is easy to realize automatic measurement.

[0039] The embodiments of the present invention are described in detail above, but the contents described are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A device for quickly judging whether the size of a quartz crucible meets specifications, characterized in that: It comprises a curved portion and a straight wall portion, wherein the curved portion and the straight wall portion can be used separately, or the curved portion and the straight wall portion can be detachably connected, wherein: The arc portion includes a first arc portion and a second arc portion, the first arc portion is respectively arranged at both ends of the second arc portion, the arc portion is provided with a plurality of meshes, the arc portion is used to assemble with a quartz crucible to measure the curvature of the bottom of the quartz crucible, the first arc portion and the second arc portion respectively measure the first curvature and the second curvature of the bottom of the quartz crucible; the arc size of the first arc portion is smaller than the size of the second arc portion; The straight wall portion includes an observation portion and a measuring portion, wherein the observation portion is provided at one end of the measuring portion, and the other end of the measuring portion is open. The measuring portion is provided with an observation hole, and the straight wall portion is used to be assembled with the straight wall portion of the quartz crucible, and is used to measure the straight wall portion of the quartz crucible; The measuring part includes an inner diameter layer and an outer diameter layer, the inner diameter layer and the outer diameter layer are coaxially arranged, one end of the inner diameter layer and the outer diameter layer are connected to the observation part, and there is a measuring gap between the inner diameter layer and the outer diameter layer, and the measuring gap is adapted to the wall thickness of the quartz crucible; the other ends of the inner diameter layer and the outer diameter layer are open.

2. The device for quickly judging whether the size of a quartz crucible meets the specification according to claim 1, characterized in that: The mesh size is 25-100 mm.

3. The device for quickly judging whether the size of a quartz crucible meets the specification according to claim 1, characterized in that: The arc portion and the straight wall portion are both made of transparent materials.

4. A method for using a device for quickly judging whether the size of a quartz crucible meets specifications, characterized in that: The device for quickly judging whether the size of a quartz crucible meets the specification as claimed in any one of claims 1 to 3 is used to measure the size of the quartz crucible, comprising the following steps: S1: The arc portion and the quartz crucible are assembled, and whether the arc portion and the quartz crucible are assembled reasonably is determined through the mesh; S2: The straight wall portion is assembled with the quartz crucible, the straight wall portion of the quartz crucible is inserted into the measuring gap between the inner diameter layer and the outer diameter layer, and whether the straight wall portion and the quartz crucible are assembled reasonably is determined through an observation hole.

5. The method for using the device for quickly judging whether the size of a quartz crucible meets the specification according to claim 4, characterized in that: The basis for judging whether the arc portion and the quartz crucible are reasonably assembled in the step S1 is that the arc portion and the quartz crucible are fitted together, and whether the assembly is reasonable is detected by a laser detection instrument. The laser detection instrument detects the distance difference between the outer wall of the quartz crucible and the outer wall of the arc portion. If the distance difference is within the set value range, it means that the arc portion and the quartz crucible are reasonably assembled. Otherwise, it means that the arc portion and the quartz crucible are not reasonably assembled.

6. The method for using the device for quickly judging whether the size of a quartz crucible meets the specification according to claim 5, characterized in that: The arc portion and the quartz crucible are assembled through a slider and a connecting rod mechanism.

7. A method for using the device for quickly judging whether the size of a quartz crucible meets specifications according to any one of claims 4 to 6, characterized in that: The basis for judging whether the straight wall portion and the quartz crucible are reasonably assembled in the step S2 is that the straight wall portion of the quartz crucible can be inserted into the measuring gap, and the inner wall and the outer wall of the straight wall portion of the quartz crucible are respectively fitted with the inner diameter layer and the outer diameter layer, and whether the assembly is reasonable is detected by a laser detection instrument. The laser detection instrument detects the distance difference between the outer wall of the quartz crucible and the outer wall of the straight wall portion. If the distance difference is within the set value range, it means that the curved portion and the quartz crucible are reasonably assembled. Otherwise, it means that the curved portion and the quartz crucible are not reasonably assembled.

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