Microchannel plate deformation detection device and detection method

Abstract

The present invention relates to a microchannel plate deformation detection device and detection method. The detection device includes a fixture, which is a structure with a hollow center or a recessed structure, and a slot is arranged on the inner edge of the fixture; a dial is arranged below the fixture; an angle scale is arranged on the dial; a rotating bracket is arranged below the dial to rotate the fixture in a horizontal plane; an inspection light source is arranged above the fixture and projects on the microchannel plate; the detection method includes: selecting the inspection light source and determining the qualified judgment standard according to the processing technology of the microchannel plate; projecting the inspection light source on the surface of the microchannel plate; rotating the microchannel plate, monitoring the projected image in real time, and comparing the changes in the projected image with the qualified judgment standard. The technical problem to be solved is to provide a detection means for the micro-deformation of the microchannel plate caused by the acid etching process, the reduction process, the evaporation process, etc., so as to be more suitable for practical use.

Description

Technical Field

[0001] The present invention relates to the technical field of microchannel plate applications, and in particular to a microchannel plate deformation detection device and a detection method. Background Art

[0002] The microchannel plate is a special optical fiber device and an advanced electron multiplier with the function of transmitting and enhancing electronic images. It has the advantages of small size, light weight, good resolution, high gain, low noise, and low operating voltage. It uses its secondary electron emission characteristics to multiply the electrons that collide with the inner wall (channel) at high speed, so that the electron current can be increased by more than ten thousand times. Using this characteristic, microchannel plates are now widely used in photomultiplier tubes, image intensifiers, low-light televisions, X-ray image intensifiers, high-speed oscilloscopes, as well as detection of photon counting, X-rays, ultraviolet photons, electrons, ions, charged particles, subatomic particles, etc.

[0003] In recent years, with the continuous improvement of the performance of microchannel plates, the surface of microchannel plates has been continuously expanded, the thickness of the plates has been continuously reduced, and the aperture has been continuously reduced. The deformation problem of microchannel plates has become increasingly prominent, so it is very important to detect the deformation of microchannel plates.

[0004] However, during the preparation process, the microchannel plate may undergo heat treatment and mechanical processing, and the plate body itself will generate thermal stress and mechanical stress. Due to its many interfaces and complex forces, it can be in stress balance before physical and chemical treatment, but after the acid etching process, the original balance is broken, the solid position becomes hollow, and the force changes. At this time, the microchannel plate will be deformed, but this deformation is small. When the microchannel plate is reduced in a high temperature environment, the oxide in the glass structure reacts with hydrogen and is reduced, and the structure of the plate body changes, causing stress release and deformation of the plate surface. This deformation is sometimes small. Microchannel plates that have been reduced by hydrogen sometimes need to evaporate electrodes on the surface of the microchannel plate. During the coating process, the internal structure of the microchannel plate changes, and it has to go through the thermal process again. The plate surface will generate thermal stress again, resulting in slight deformation. The above-mentioned slight deformations cannot be detected at present. Summary of the invention

[0005] The main purpose of the present invention is to provide a microchannel plate deformation detection device and detection method. The technical problem to be solved is to provide a detection means for the micro-deformation of the microchannel plate caused by acid etching process, reduction process, evaporation process, etc., so as to be more suitable for practical use.

[0006] The purpose of the present invention and the technical problem to be solved are achieved by adopting the following technical solutions. A microchannel plate deformation detection device proposed in the present invention comprises:

[0007] The fixture is a structure with a hollow or recessed center, and a slot for mounting the microchannel plate is provided on its inner edge;

[0008] A dial is arranged below the fixture; the dial is provided with angle scales;

[0009] A rotating bracket, disposed below the scale plate, capable of rotating the fixture in a horizontal plane;

[0010] The inspection light source is arranged above the fixture and can project onto the microchannel plate.

[0011] The purpose of the present invention and the solution to its technical problems can be further achieved by adopting the following technical measures.

[0012] Preferably, the aforementioned microchannel plate deformation detection device further comprises:

[0013] A camera unit, disposed above the fixture, for capturing a projection image of the inspection light source on the microchannel plate in real time;

[0014] A control unit is electrically connected to the inspection light source, the rotating bracket and the camera unit; the inspection light source projects on the microchannel plate according to the command of the control unit; the rotating bracket rotates the microchannel plate along with the fixture according to the command of the control unit; the camera unit transmits the acquired projection image to the control unit; the control unit determines the deformation result of the microchannel plate according to the projection image.

[0015] Preferably, in the aforementioned microchannel plate deformation detection device, the inspection light source includes a fluorescent light source and a cross-line light source.

[0016] Preferably, in the aforementioned microchannel plate deformation detection device, the inspection light source is arranged on the upper side of the fixture.

[0017] Preferably, in the aforementioned microchannel plate deformation detection device, the width of the slot is ≤1.5 mm; and the inner surface of the slot is a polished surface.

[0018] The purpose of the present invention and the technical problem solved by the present invention are also achieved by adopting the following technical solutions. According to a microchannel plate deformation detection method proposed by the present invention, the method comprises the following steps:

[0019] 1) Select the inspection light source and determine the qualification criteria according to the processing technology of the microchannel plate;

[0020] 2) Test the projection of light source on the surface of the microchannel plate;

[0021] 3) Rotating the microchannel plate, monitoring the projection image in real time, and comparing the change of the projection image with the qualification judgment standard.

[0022] The purpose of the present invention and the solution to its technical problems can be further achieved by adopting the following technical measures.

[0023] Preferably, in the aforementioned microchannel plate deformation detection method, the microchannel plate is an acid-etched microchannel plate, a reduced microchannel plate or a vapor-deposited microchannel plate; the acid-etched microchannel plate uses a fluorescent light source; the reduced microchannel plate and the vapor-deposited microchannel plate use a cross-line light source.

[0024] Preferably, in the aforementioned microchannel plate deformation detection method, the bottom surface of the microchannel plate includes an effective area and an ineffective area; the ineffective area is surrounded by the periphery of the effective area; the channel wire of the effective area does not contact any object; the channel wire of the ineffective area is overlapped on the fixture; the width of the ineffective area is ≤1.5mm.

[0025] Preferably, in the aforementioned method for detecting deformation of a microchannel plate, the inspection light source is a fluorescent light source; in step 3), the inspection light source is projected on the surface of the microchannel plate and is located on the diameter of the microchannel plate; the microchannel plate is rotated, and the result is determined when the rotation angle of the microchannel plate is 30° to 60°:

[0026] If the projection of the fluorescent lamp light source does not bend, the deformation of the microchannel plate is judged to be qualified;

[0027] If the projection of the fluorescent lamp light source is bent, the microchannel plate is judged to be deformed and unqualified.

[0028] Preferably, in the aforementioned method for detecting deformation of a microchannel plate, the inspection light source is a cross-line light source; in step 3), the intersection of the projection of the inspection light source on the surface of the microchannel plate is located at the center of the microchannel plate; the microchannel plate is rotated, and the result is determined when the rotation angle of the microchannel plate is 30° to 60°:

[0029] If the line projected by the cross-line light source is bent, the microchannel plate is judged to be deformed and unqualified;

[0030] If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is ≤80° or ≥120°, the microchannel plate is judged to be unqualified for deformation;

[0031] If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the microchannel plate is judged to be deformed to be qualified.

[0032] Preferably, in the aforementioned method for detecting deformation of a microchannel plate, when the lines projected by the cross-line light source are not bent, but the angle formed by the two lines is greater than 80° and less than 120°, it further comprises the following steps:

[0033] Move the microchannel plate in a horizontal plane, the moving range is ≤3mm or the crosshairs are completely projected on the surface of the microchannel plate, rotate the microchannel plate, and determine the result when the rotation angle of the microchannel plate is 30° to 60°:

[0034] If the line projected by the cross-line light source is bent, the microchannel plate is judged to be deformed and unqualified;

[0035] If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is ≤80° or ≥120°, the microchannel plate is judged to be unqualified for deformation;

[0036] If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the microchannel plate is judged to be deformed to be qualified.

[0037] Preferably, in the aforementioned method for detecting deformation of a microchannel plate, the detection time is ≤ 1 min.

[0038] By means of the above technical solution, the microchannel plate deformation detection device and detection method proposed by the present invention have at least the following advantages:

[0039] The microchannel plate deformation detection device and detection method of the present invention can detect the deformation of microchannel plates with slight deformation, such as acid-etched microchannel plates, reduced microchannel plates or evaporated microchannel plates, and the results are accurate and reliable; further, the overlap amount between the microchannel plate and the fixture is small, and the surface polishing treatment at the overlap will hardly damage the surface of the microchannel plate; further, the detection device and detection method of the present invention are easy to operate, the detection time is ≤1min, and the online rapid detection of microchannel plate heating can be realized; for the acid-etched microchannel plate, although its opening area ratio is more than 50%, the surface adsorption capacity is also high, and impurities are easily adsorbed and difficult to remove, but when the detection device and detection method of the present invention are used for detection, it can still be ensured that the surface of the microchannel plate will not be contaminated.

[0040] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 is a schematic structural diagram of a microchannel plate deformation detection device of the present invention;

[0042] Figure 2 It is a structural schematic diagram - top view of the microchannel plate deformation detection device of the present invention. DETAILED DESCRIPTION

[0043] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the following is a detailed description of the specific implementation, structure, features and effects of a microchannel plate deformation detection device and detection method proposed by the present invention in combination with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures or characteristics in one or more embodiments may be combined in any suitable form.

[0044] In a specific embodiment of the present invention, a microchannel plate deformation detection device is provided, as shown in the attached Figure 1 and attached Figure 2 As shown, it includes a fixture 1; the fixture is a structure with a hollow center or a recessed structure, and a slot 6 for mounting a microchannel plate 5 is arranged on its inner edge; the center of the fixture is arranged as a hollow structure or a recessed structure, so as to prevent the effective area of ​​the bottom surface of the microchannel plate from contacting the fixture and being contaminated or damaged; the slot on its inner edge is a groove structure, which is used to mount the microchannel plate to be tested; the microchannel plate deformation detection device also includes a dial 2, which is arranged below the fixture 1; the dial 2 is provided with an angle scale; the angle mark on the surface of the dial is so that when a cross-line light source is used for detection, it is convenient to judge the change of the cross-line angle during the inspection process; the microchannel plate deformation detection device also includes an engraved rotating bracket 3, which is arranged on the scale Below the disk 2, the microchannel plate can be rotated 360° in the horizontal plane along with the fixture through a rotating bracket; when the fixture rotates along with the rotating bracket, the dial always remains stationary; the rotating bracket can realize the uniform rotation of the microchannel plate to keep the rotation process of the microchannel plate surface smooth and will not cause the problem of the microchannel plate surface flying out of the fixture during rotation; generally, there are two rotation modes, one is 1° / second continuous uniform rotation, and the other is an adjustable rotation angle; during routine inspection, a continuous uniform rotation mode is generally used to distinguish whether there is a deformation problem of the microchannel plate; the microchannel plate deformation detection device also includes an inspection light source 4, which is arranged above the fixture 1 and can be projected on the microchannel plate 5.

[0045] In a specific embodiment of the present invention, the microchannel plate deformation detection device also includes a camera unit, which is arranged above the fixture and is used to capture the projection image of the inspection light source on the microchannel plate in real time; when the camera unit is used to capture and record pictures, the rotating bracket generally rotates an angle every 5 seconds to connect the camera unit to record the projection picture; the microchannel plate deformation detection device also includes a control unit, which is electrically connected to the reflection measurement unit, the inspection light source, the rotating bracket and the camera unit; the control unit selects the inspection light source and determines the qualified judgment standard according to the measurement result of the reflection measurement unit; the inspection light source is projected on the microchannel plate according to the instruction of the control unit; the rotating bracket rotates the microchannel plate according to the instruction of the control unit; the camera unit transmits the acquired projection image to the control unit; the control unit automatically compares the projection image with the preset judgment standard to determine the deformation result of the microchannel plate.

[0046] In a specific embodiment of the present invention, the inspection light source includes a fluorescent light source and a cross-line light source. The cross-line light source is an incandescent lamp, and the lamp panel is provided with a cross-line, which is a line laser-etched on the surface of the lamp panel, the angle formed by the two lines is 90°, and the intersection of the two lines is located at the midpoint of each line.

[0047] In a specific embodiment of the present invention, the line width of the cross-line light source is within 0.5 mm. The selection of this line width is due to the fact that the microchannel plate has a porous structure and the surface refraction phenomenon is more obvious. If the cross-line exceeds a certain width, when the cross-line is projected onto the surface of the microchannel plate, a halo will be generated around the cross-line due to the effect of refraction, affecting the detection result.

[0048] In a specific embodiment of the present invention, the inspection light source is arranged on the upper side of the fixture; the reason for this design is that when a cross-line light source is used, the lines of the inspection light source arranged on the side are clearer than when arranged on the front, which makes it easier to observe the deformation of the cross-line and the detection result is more accurate.

[0049] In a specific embodiment of the present invention, the width of the slot is ≤1.5mm. The bottom surface of the microchannel plate to be tested in the present invention includes an effective area and an ineffective area; the ineffective area is surrounded by the periphery of the effective area. Since the effective area of ​​the microchannel plate is a dodecagon that is approximately circular, the actual effective area and the ineffective area are intersected. In order to avoid the channel wire in the effective area from overlapping on the slot of the fixture of the detection device to cause contamination of the microchannel plate surface, the edge width of the fixture groove is required to be less than 1.5mm. The channel wire in the effective area does not contact any object to avoid damage to the microchannel plate surface during the inspection process; the channel wire in the ineffective area overlaps on the slot. The inner surface of the slot is a polished surface. The reason for such design is to avoid damage to the surface quality of the microchannel plate when the microchannel plate overlaps with the slot. Since the fixture of the detection device only plays the role of overlapping and supporting the microchannel plate to be detected, microchannel plates of various specifications and shapes can be inspected using the microchannel plate detection device of the present invention. Commonly used microchannel plates are generally circular microchannel plates such as Φ16mm, Φ20mm, Φ25mm, Φ33mm, Φ50mm, Φ56mm, etc. In addition, rectangular or square microchannel plates can also be deformed using the test device.

[0050] In a specific embodiment of the present invention, the width of the card slot is ≤0.5 mm; the reason for such design is to further reduce the overlap between the bottom surface of the microchannel plate and the fixture of the detection device, and to protect the quality of the microchannel plate surface as much as possible.

[0051] The present invention also provides a method for detecting deformation of a microchannel plate, which comprises the following steps:

[0052] 1) Select the inspection light source and determine the qualification criteria according to the processing technology of the microchannel plate;

[0053] 2) Test the projection of light source on the surface of the microchannel plate;

[0054] 3) Rotating the microchannel plate, monitoring the projection image in real time, and comparing the change of the projection image with the qualification judgment standard.

[0055] The microchannel plate deformation detection method described in the present invention is particularly suitable for deformation detection of microchannel plates with tiny deformation. Generally, the microchannel plate is an acid-etched microchannel plate, a reduced microchannel plate or a vapor-deposited microchannel plate; the acid-etched microchannel plate uses a fluorescent light source; the reduced microchannel plate and the vapor-deposited microchannel plate use a cross-line light source. The present invention is designed to use a fluorescent light source to inspect the acid-etched microchannel plate. The reason is that the light reflection ability of the surface of the microchannel plate after acid etching is poor, while the light intensity of the fluorescent light source is higher. The fluorescent light source can form a projection on the surface of the microchannel plate after acid etching, so as to observe the deformation; further, the deformation of the microchannel plate surface after acid etching is smaller, and the projection line of the fluorescent light source is thicker, the change of the projection line is more obvious, and it is easier to observe whether the projection line is bent. The present invention is designed to use a cross-line light source to inspect the reduced microchannel plate and the evaporated microchannel plate. The reason is that the surface reflection ability of the reduced or evaporated microchannel plate is strong, especially the surface of the evaporated microchannel plate still has light scattering effect. Therefore, the use of a cross-line light source and the way of making the light source incident from the side can reduce the influence of light scattering on the inspection result.

[0056] The bottom surface of the microchannel plate includes an effective area and an ineffective area; the ineffective area surrounds the periphery of the effective area; the channel wires of the effective area do not contact any objects; the channel wires of the ineffective area are overlapped on the fixture; preferably, the width of the ineffective area is ≤1.5mm.

[0057] The inspection light source is a fluorescent light source; in step 3), the projection of the inspection light source is presented on the surface of the microchannel plate; preferably, in step 3), the projection of the inspection light source on the surface of the microchannel plate is located on the diameter of the microchannel plate; the microchannel plate is rotated, and the result is judged when the rotation angle of the microchannel plate is 30° to 60°: if the projection of the fluorescent light source does not bend, the deformation of the microchannel plate is judged to be qualified; if the projection of the fluorescent light source is bent, the deformation of the microchannel plate is judged to be unqualified.

[0058] The inspection light source is a cross-line light source; step 3) the projection of the inspection light source is presented on the surface of the microchannel plate; preferably step 3) the intersection of the projection of the inspection light source on the surface of the microchannel plate is located at the center of the microchannel plate; the microchannel plate is rotated, and the result is judged when the rotation angle of the microchannel plate is 30° to 60°: if the lines projected by the cross-line light source are bent, the deformation of the microchannel plate is judged to be unqualified; if the lines projected by the cross-line light source are not bent, but the angle formed by the two lines is ≤80° or ≥120°, the deformation of the microchannel plate is judged to be unqualified; if the lines projected by the cross-line light source are not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the deformation of the microchannel plate is judged to be qualified.

[0059] After the microchannel plate is tested for qualified deformation according to the above technical solution, in order to further confirm the reliability of the microchannel plate deformation result, the present invention may further include the following steps: moving the microchannel plate in a horizontal plane, the moving range is ≤3mm or the cross line is completely projected on the surface of the microchannel plate, rotating the microchannel plate, and performing result judgment when the rotation angle of the microchannel plate is 30° to 60°: if the line projected by the cross-line light source is bent, the microchannel plate deformation is judged to be unqualified; if the line projected by the cross-line light source is not bent, but the angle formed by the two lines is ≤80° or ≥120°, the microchannel plate deformation is judged to be unqualified; if the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the microchannel plate deformation is judged to be qualified.

[0060] Preferably, the deformation detection time of each microchannel plate is ≤1 min. The reason for such design is to prevent dust from falling on the plate surface and affecting the quality of the plate surface.

[0061] The present invention will be further described below in conjunction with specific embodiments, but this should not be construed as limiting the scope of protection of the present invention. Some non-essential improvements and adjustments made to the present invention by technicians in this field based on the above-mentioned contents of the present invention still fall within the scope of protection of the present invention.

[0062] Unless otherwise specified, the materials, reagents, etc. involved below are all commercially available products well known to those skilled in the art; unless otherwise specified, the methods described are all methods well known in the art. Unless otherwise defined, the technical terms or scientific terms used should have the common meanings understood by ordinary technicians in the field to which the present invention belongs.

[0063] Example 1

[0064] Deformation inspection of microchannel plate after pickling process:

[0065] (1) After cleaning and drying the fixture that matches the microchannel plate to be inspected, place it on the inspection platform and turn on the fluorescent light source.

[0066] (2) Remove the microchannel plate to be tested from the acid etching fixture, place it on the fixture of the detection device, adjust the position of the fluorescent light source in the horizontal plane so that the fluorescent light source is projected onto the surface of the microchannel plate; further adjust the position of the fluorescent light source in the horizontal plane so that the fluorescent light source is projected onto the diameter of the microchannel plate.

[0067] (3) Rotate the fixture of the detection device and visually observe the change in the projection of the fluorescent light source within the angle range of 30° to 60°. The criteria for judging whether the deformation of the microchannel plate is qualified or not are as follows: if the projection of the fluorescent light source does not bend, it is qualified; if the projection of the fluorescent light source bends, it is unqualified.

[0068] The detection method of this embodiment is used to detect 20 microchannel plates processed by pickling process, and then the flatness of the microchannel plates is determined by generating interference fringes on the surface of the microchannel plates using a laser interferometer. The results show that the method described in this embodiment is completely consistent with the results of the laser interferometer test, indicating that the detection results of the detection method described in this embodiment are accurate and reliable; and the detection method described in this embodiment is easy to operate and can achieve online rapid inspection.

[0069] Example 2

[0070] Deformation inspection of microchannel plate after coating process:

[0071] (1) After cleaning and drying the fixture that matches the microchannel plate to be inspected, place it on the inspection platform and turn on the cross-line light source.

[0072] (2) Remove the microchannel plate to be tested from the coating fixture and place it on the fixture of the detection device, adjust the position of the cross-line light source in the horizontal plane so that the cross-line light source is projected onto the surface of the microchannel plate; further adjust the position of the cross-line light source in the horizontal plane so that the intersection of the cross-line light source is projected onto the center position of the microchannel plate.

[0073] (3) Rotate the fixture of the detection device. When the fixture rotates within the angle range of 30° to 60°, visually observe the projection change of the cross-line light source. The criteria for judging whether the deformation of the microchannel plate is qualified or not are shown in Table 1.

[0074] The detection method of this embodiment is used to detect 20 microchannel plates processed by the coating process, and then the laser interferometer is used to generate interference fringes on the surface of the microchannel plates to determine the flatness of the microchannel plates. The results show that the method described in this embodiment is basically consistent with the results of the laser interferometer test, and only the detection result of one microchannel plate is slightly different, which shows that the detection result of the detection method described in this embodiment is basically accurate and reliable; and the detection method described in this embodiment is easy to operate and can realize online rapid inspection.

[0075] Example 3

[0076] On the basis of Example 2, when the microchannel plate deformation test is qualified, the fixture of the detection device is continued to be moved in the horizontal plane, and the moving range should be less than 3 mm or the cross-line projection can be completely presented on the surface of the microchannel plate according to the plate surface specifications. The result of the microchannel plate deformation is determined according to the standards shown in Table 1.

[0077] The detection method of this embodiment is used to detect 20 microchannel plates processed by the coating process, and then the laser interferometer is used to generate interference fringes on the surface of the microchannel plate to determine the flatness of the microchannel plate. The results show that the method described in this embodiment is completely consistent with the results of the laser interferometer test, indicating that the detection method described in this embodiment has accurate and reliable detection results; and the detection method described in this embodiment is easy to operate and can achieve online rapid inspection.

[0078] Table 1 Projection changes of cross-line light sources and test results

[0079]

[0080] The technical features in the claims and / or the specification of the present invention may be combined, and the combination is not limited to the combination obtained by reference in the claims. The technical solution obtained by combining the technical features in the claims and / or the specification is also within the protection scope of the present invention.

[0081] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification, equivalent change and modification made to the above embodiment according to the technical essence of the present invention still falls within the scope of the technical solution of the present invention.

Claims

1. A microchannel plate deformation detection device, characterized in that: It includes: The fixture is a structure with a hollow or recessed center, and a slot for mounting the microchannel plate is provided on its inner edge; A dial is arranged below the fixture; the dial is provided with angle scales; A rotating bracket, disposed below the scale plate, capable of rotating the fixture in a horizontal plane; An inspection light source is arranged above the side of the fixture and can project onto the microchannel plate; the position of the inspection light source in the horizontal plane can be adjusted; A camera unit, disposed above the fixture, for capturing a projection image of the inspection light source on the microchannel plate in real time; A control unit electrically connected to the inspection light source and the camera unit; the inspection light source projects on the microchannel plate according to the instruction of the control unit; the camera unit transmits the acquired projection image to the control unit; the control unit determines the deformation result of the microchannel plate according to the projection image; The microchannel plate is an acid-etched microchannel plate, a reduced microchannel plate or a vapor-deposited microchannel plate; the acid-etched microchannel plate uses a fluorescent lamp light source; the reduced microchannel plate and the vapor-deposited microchannel plate use a cross-line light source.

2. The microchannel plate deformation detection device according to claim 1, characterized in that: The control unit is electrically connected to the rotating bracket; the rotating bracket makes the microchannel plate rotate along with the fixture according to the instruction of the control unit.

3. The microchannel plate deformation detection device according to claim 1 or 2, characterized in that: The width of the card slot is ≤1.5mm; the inner surface of the card slot is a polished surface.

4. A method for detecting deformation of a microchannel plate, characterized in that: The detection method uses the microchannel plate deformation detection device according to any one of claims 1 to 3, and comprises the following steps: 1) Select the inspection light source and determine the qualification criteria according to the processing technology of the microchannel plate; 2) Test the projection of light source on the surface of the microchannel plate; 3) Rotating the microchannel plate, monitoring the projection image in real time, and comparing the change of the projection image with the qualification judgment standard.

5. The method for detecting deformation of a microchannel plate according to claim 4, characterized in that: The bottom surface of the microchannel plate includes an effective area and an ineffective area; the ineffective area surrounds the periphery of the effective area; the channel wires of the effective area do not contact any objects; the channel wires of the ineffective area are overlapped on the fixture; the width of the ineffective area is ≤1.5mm.

6. The method for detecting deformation of a microchannel plate according to claim 4, characterized in that: The inspection light source is a fluorescent light source; the inspection light source is projected on the surface of the microchannel plate and is located on the diameter of the microchannel plate; the microchannel plate is rotated, and the result is determined when the rotation angle of the microchannel plate is 30° to 60°: If the projection of the fluorescent lamp light source does not bend, the deformation of the microchannel plate is judged to be qualified; If the projection of the fluorescent lamp light source is bent, the microchannel plate is judged to be deformed and unqualified.

7. The method for detecting deformation of a microchannel plate according to claim 4, characterized in that: The inspection light source is a cross-line light source; the intersection of the inspection light source projected on the surface of the microchannel plate is located at the center of the microchannel plate; the microchannel plate is rotated, and the result is determined when the rotation angle of the microchannel plate is 30° to 60°: If the line projected by the cross-line light source is bent, the microchannel plate is judged to be deformed and unqualified; If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is ≤80° or ≥120°, the microchannel plate is judged to be unqualified for deformation; If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the microchannel plate is judged to be deformed to be qualified.

8. The method for detecting deformation of a microchannel plate according to claim 7, characterized in that: When the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the method further includes the following steps: Move the microchannel plate in a horizontal plane, the moving range is ≤3mm or the crosshairs are completely projected on the surface of the microchannel plate, rotate the microchannel plate, and determine the result when the rotation angle of the microchannel plate is 30° to 60°: If the line projected by the cross-line light source is bent, the microchannel plate is judged to be deformed and unqualified; If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is ≤80° or ≥120°, the microchannel plate is judged to be unqualified for deformation; If the line projected by the cross-line light source is not bent, but the angle formed by the two lines is greater than 80° and less than 120°, the microchannel plate is judged to be deformed to be qualified.

9. The method for detecting deformation of a microchannel plate according to any one of claims 4 to 8, characterized in that: Detection time ≤1min.

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